EP3391408 - OXIDATION RESISTANT BARRIER METAL FOR SEMICONDUCTOR DEVICES AND CORRESPONDING PROCESS [Right-click to bookmark this link] | |||
Former [2018/43] | OXIDATION RESISTANT BARRIER METAL PROCESS FOR SEMICONDUCTOR DEVICES | ||
[2019/50] | Status | No opposition filed within time limit Status updated on 09.04.2021 Database last updated on 24.08.2024 | |
Former | The patent has been granted Status updated on 01.05.2020 | ||
Former | Grant of patent is intended Status updated on 28.04.2020 | ||
Former | Request for examination was made Status updated on 24.04.2020 | ||
Former | Grant of patent is intended Status updated on 22.04.2020 | ||
Former | Request for examination was made Status updated on 05.04.2020 | ||
Former | Grant of patent is intended Status updated on 20.11.2019 | ||
Former | Request for examination was made Status updated on 21.09.2018 | ||
Former | The international publication has been made Status updated on 23.06.2017 | Most recent event Tooltip | 15.07.2022 | Lapse of the patent in a contracting state New state(s): BE | published on 17.08.2022 [2022/33] | Applicant(s) | For all designated states Texas Instruments Incorporated P.O. Box 655474 Mail Station 3999 Dallas, TX 75265-5474 / US | [2018/43] | Inventor(s) | 01 /
WEST, Jeffrey, A. 8130 Forest Hills Blvd. Dallas TX 75218 / US | 02 /
UDAYAKUMAR, Kezhakkedath, R. 5200 Meadowcreek Dr. 1076 Dallas TX 75248 / US | 03 /
WARNINGHOFF, Eric, H. 1809 Round Rock Dr. Allen TX 75002 / US | 04 /
MERRIAM, Alan, G. 4516 Oakshores Dr. Plano TX 75024 / US | 05 /
FAUST, Rick, A. 1628 Sylvan Avenue Dallas TX 75208 / US | [2018/43] | Representative(s) | Zeller, Andreas Texas Instruments Deutschland GmbH EMEA Patent Department Haggertystraße 1 85356 Freising / DE | [2018/43] | Application number, filing date | 16876903.2 | 19.12.2016 | [2018/43] | WO2016US67495 | Priority number, date | US201514974012 | 18.12.2015 Original published format: US201514974012 | [2018/43] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2017106828 | Date: | 22.06.2017 | Language: | EN | [2017/25] | Type: | A1 Application with search report | No.: | EP3391408 | Date: | 24.10.2018 | Language: | EN | The application published by WIPO in one of the EPO official languages on 22.06.2017 takes the place of the publication of the European patent application. | [2018/43] | Type: | B1 Patent specification | No.: | EP3391408 | Date: | 03.06.2020 | Language: | EN | [2020/23] | Search report(s) | International search report - published on: | RU | 22.06.2017 | (Supplementary) European search report - dispatched on: | EP | 19.11.2018 | Classification | IPC: | H01L21/768, H01L23/532 | [2018/51] | CPC: |
H01L21/76843 (EP,US);
H01L23/53238 (US);
H01L21/31111 (US);
H01L21/76814 (US);
H01L21/7685 (EP,US);
H01L21/76852 (US);
H01L21/76861 (US);
H01L21/76892 (US);
H01L23/5226 (US);
H01L23/528 (US);
H01L23/53223 (EP,US);
H01L24/00 (US);
H01L24/03 (EP);
H01L24/05 (EP);
H01L21/76855 (EP,US);
H01L2224/02166 (EP);
H01L2224/05147 (EP);
H01L2224/05186 (EP);
| C-Set: |
H01L2224/05147, H01L2924/00014 (EP);
H01L2224/05186, H01L2924/04941, H01L2924/00014 (EP);
H01L2224/05186, H01L2924/04953, H01L2924/00014 (EP);
H01L2224/05624, H01L2924/013, H01L2924/01029, H01L2924/00014 (EP);
H01L2224/05647, H01L2924/013, H01L2924/01013, H01L2924/00014 (EP);
H01L2924/14, H01L2924/00012 (EP,US) (-) |
Former IPC [2018/43] | H01L21/4763 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2018/43] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | MA | Not yet paid | MD | Not yet paid | Title | German: | OXIDATIONSBESTÄNDIGES BARRIEREMETALL FÜR HALBLEITERBAUELEMENTE UND ZUGEHÖRIGES VERFAHREN | [2019/50] | English: | OXIDATION RESISTANT BARRIER METAL FOR SEMICONDUCTOR DEVICES AND CORRESPONDING PROCESS | [2019/50] | French: | MÉTAL BARRIÈRE RÉSISTANT À L'OXYDATION POUR DISPOSITIFS À SEMI-CONDUCTEURS ET PROCÉDÉ CORRESPONDANT | [2019/50] |
Former [2018/43] | VERFAHREN FÜR OXIDATIONSBESTÄNDIGES BARRIEREMETALL FÜR HALBLEITERBAUELEMENTE | ||
Former [2018/43] | OXIDATION RESISTANT BARRIER METAL PROCESS FOR SEMICONDUCTOR DEVICES | ||
Former [2018/43] | PROCESSUS À MÉTAL BARRIÈRE RÉSISTANT À L'OXYDATION POUR DISPOSITIFS À SEMI-CONDUCTEURS | Entry into regional phase | 18.07.2018 | National basic fee paid | 18.07.2018 | Search fee paid | 18.07.2018 | Designation fee(s) paid | 18.07.2018 | Examination fee paid | Examination procedure | 29.06.2018 | Date on which the examining division has become responsible | 18.07.2018 | Examination requested [2018/43] | 31.07.2019 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the Extended European Search Report/Written Opinion of the International Searching Authority/International Preliminary Examination Report/Supplementary international search report not received in time | 10.10.2019 | Amendment by applicant (claims and/or description) | 21.11.2019 | Communication of intention to grant the patent | 31.03.2020 | Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO | 01.04.2020 | Fee for grant paid | 01.04.2020 | Fee for publishing/printing paid | 28.04.2020 | Information about intention to grant a patent | 28.04.2020 | Receipt of the translation of the claim(s) | Opposition(s) | 04.03.2021 | No opposition filed within time limit [2021/19] | Request for further processing for: | The application is deemed to be withdrawn due to failure to reply to the Extended European Search Report/Written Opinion of the International Searching Authority/International Preliminary Examination Report/Supplementary international search report/Supplementary European search report | 10.10.2019 | Request for further processing filed | 10.10.2019 | Full payment received (date of receipt of payment) Request granted | 29.10.2019 | Decision despatched | Fees paid | Renewal fee | 02.01.2019 | Renewal fee patent year 03 | 02.01.2020 | Renewal fee patent year 04 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 19.12.2016 | AL | 03.06.2020 | AT | 03.06.2020 | CY | 03.06.2020 | CZ | 03.06.2020 | DK | 03.06.2020 | EE | 03.06.2020 | ES | 03.06.2020 | FI | 03.06.2020 | HR | 03.06.2020 | IT | 03.06.2020 | LT | 03.06.2020 | LV | 03.06.2020 | MC | 03.06.2020 | MK | 03.06.2020 | MT | 03.06.2020 | NL | 03.06.2020 | PL | 03.06.2020 | RO | 03.06.2020 | RS | 03.06.2020 | SE | 03.06.2020 | SI | 03.06.2020 | SK | 03.06.2020 | SM | 03.06.2020 | TR | 03.06.2020 | BG | 03.09.2020 | NO | 03.09.2020 | GR | 04.09.2020 | IS | 03.10.2020 | PT | 06.10.2020 | IE | 19.12.2020 | LU | 19.12.2020 | BE | 31.12.2020 | CH | 31.12.2020 | LI | 31.12.2020 | [2022/33] |
Former [2022/32] | HU | 19.12.2016 | |
AL | 03.06.2020 | ||
AT | 03.06.2020 | ||
CY | 03.06.2020 | ||
CZ | 03.06.2020 | ||
DK | 03.06.2020 | ||
EE | 03.06.2020 | ||
ES | 03.06.2020 | ||
FI | 03.06.2020 | ||
HR | 03.06.2020 | ||
IT | 03.06.2020 | ||
LT | 03.06.2020 | ||
LV | 03.06.2020 | ||
MC | 03.06.2020 | ||
MK | 03.06.2020 | ||
MT | 03.06.2020 | ||
NL | 03.06.2020 | ||
PL | 03.06.2020 | ||
RO | 03.06.2020 | ||
RS | 03.06.2020 | ||
SE | 03.06.2020 | ||
SI | 03.06.2020 | ||
SK | 03.06.2020 | ||
SM | 03.06.2020 | ||
TR | 03.06.2020 | ||
BG | 03.09.2020 | ||
NO | 03.09.2020 | ||
GR | 04.09.2020 | ||
IS | 03.10.2020 | ||
PT | 06.10.2020 | ||
IE | 19.12.2020 | ||
LU | 19.12.2020 | ||
CH | 31.12.2020 | ||
LI | 31.12.2020 | ||
Former [2022/27] | HU | 19.12.2016 | |
AL | 03.06.2020 | ||
AT | 03.06.2020 | ||
CY | 03.06.2020 | ||
CZ | 03.06.2020 | ||
DK | 03.06.2020 | ||
EE | 03.06.2020 | ||
ES | 03.06.2020 | ||
FI | 03.06.2020 | ||
HR | 03.06.2020 | ||
IT | 03.06.2020 | ||
LT | 03.06.2020 | ||
LV | 03.06.2020 | ||
MC | 03.06.2020 | ||
MT | 03.06.2020 | ||
NL | 03.06.2020 | ||
PL | 03.06.2020 | ||
RO | 03.06.2020 | ||
RS | 03.06.2020 | ||
SE | 03.06.2020 | ||
SI | 03.06.2020 | ||
SK | 03.06.2020 | ||
SM | 03.06.2020 | ||
TR | 03.06.2020 | ||
BG | 03.09.2020 | ||
NO | 03.09.2020 | ||
GR | 04.09.2020 | ||
IS | 03.10.2020 | ||
PT | 06.10.2020 | ||
IE | 19.12.2020 | ||
LU | 19.12.2020 | ||
CH | 31.12.2020 | ||
LI | 31.12.2020 | ||
Former [2021/52] | AL | 03.06.2020 | |
AT | 03.06.2020 | ||
CZ | 03.06.2020 | ||
DK | 03.06.2020 | ||
EE | 03.06.2020 | ||
ES | 03.06.2020 | ||
FI | 03.06.2020 | ||
HR | 03.06.2020 | ||
IT | 03.06.2020 | ||
LT | 03.06.2020 | ||
LV | 03.06.2020 | ||
MC | 03.06.2020 | ||
NL | 03.06.2020 | ||
PL | 03.06.2020 | ||
RO | 03.06.2020 | ||
RS | 03.06.2020 | ||
SE | 03.06.2020 | ||
SI | 03.06.2020 | ||
SK | 03.06.2020 | ||
SM | 03.06.2020 | ||
BG | 03.09.2020 | ||
NO | 03.09.2020 | ||
GR | 04.09.2020 | ||
IS | 03.10.2020 | ||
PT | 06.10.2020 | ||
IE | 19.12.2020 | ||
LU | 19.12.2020 | ||
CH | 31.12.2020 | ||
LI | 31.12.2020 | ||
Former [2021/46] | AL | 03.06.2020 | |
AT | 03.06.2020 | ||
CZ | 03.06.2020 | ||
DK | 03.06.2020 | ||
EE | 03.06.2020 | ||
ES | 03.06.2020 | ||
FI | 03.06.2020 | ||
HR | 03.06.2020 | ||
IT | 03.06.2020 | ||
LT | 03.06.2020 | ||
LV | 03.06.2020 | ||
MC | 03.06.2020 | ||
NL | 03.06.2020 | ||
PL | 03.06.2020 | ||
RO | 03.06.2020 | ||
RS | 03.06.2020 | ||
SE | 03.06.2020 | ||
SI | 03.06.2020 | ||
SK | 03.06.2020 | ||
SM | 03.06.2020 | ||
BG | 03.09.2020 | ||
NO | 03.09.2020 | ||
GR | 04.09.2020 | ||
IS | 03.10.2020 | ||
PT | 06.10.2020 | ||
IE | 19.12.2020 | ||
LU | 19.12.2020 | ||
Former [2021/40] | AL | 03.06.2020 | |
AT | 03.06.2020 | ||
CZ | 03.06.2020 | ||
DK | 03.06.2020 | ||
EE | 03.06.2020 | ||
ES | 03.06.2020 | ||
FI | 03.06.2020 | ||
HR | 03.06.2020 | ||
IT | 03.06.2020 | ||
LT | 03.06.2020 | ||
LV | 03.06.2020 | ||
MC | 03.06.2020 | ||
NL | 03.06.2020 | ||
PL | 03.06.2020 | ||
RO | 03.06.2020 | ||
RS | 03.06.2020 | ||
SE | 03.06.2020 | ||
SI | 03.06.2020 | ||
SK | 03.06.2020 | ||
SM | 03.06.2020 | ||
BG | 03.09.2020 | ||
NO | 03.09.2020 | ||
GR | 04.09.2020 | ||
IS | 03.10.2020 | ||
PT | 06.10.2020 | ||
Former [2021/24] | AL | 03.06.2020 | |
AT | 03.06.2020 | ||
CZ | 03.06.2020 | ||
DK | 03.06.2020 | ||
EE | 03.06.2020 | ||
ES | 03.06.2020 | ||
FI | 03.06.2020 | ||
HR | 03.06.2020 | ||
IT | 03.06.2020 | ||
LT | 03.06.2020 | ||
LV | 03.06.2020 | ||
NL | 03.06.2020 | ||
PL | 03.06.2020 | ||
RO | 03.06.2020 | ||
RS | 03.06.2020 | ||
SE | 03.06.2020 | ||
SI | 03.06.2020 | ||
SK | 03.06.2020 | ||
SM | 03.06.2020 | ||
BG | 03.09.2020 | ||
NO | 03.09.2020 | ||
GR | 04.09.2020 | ||
IS | 03.10.2020 | ||
PT | 06.10.2020 | ||
Former [2021/21] | AL | 03.06.2020 | |
AT | 03.06.2020 | ||
CZ | 03.06.2020 | ||
DK | 03.06.2020 | ||
EE | 03.06.2020 | ||
ES | 03.06.2020 | ||
FI | 03.06.2020 | ||
HR | 03.06.2020 | ||
IT | 03.06.2020 | ||
LT | 03.06.2020 | ||
LV | 03.06.2020 | ||
NL | 03.06.2020 | ||
PL | 03.06.2020 | ||
RO | 03.06.2020 | ||
RS | 03.06.2020 | ||
SE | 03.06.2020 | ||
SK | 03.06.2020 | ||
SM | 03.06.2020 | ||
BG | 03.09.2020 | ||
NO | 03.09.2020 | ||
GR | 04.09.2020 | ||
IS | 03.10.2020 | ||
PT | 06.10.2020 | ||
Former [2021/10] | AL | 03.06.2020 | |
AT | 03.06.2020 | ||
CZ | 03.06.2020 | ||
EE | 03.06.2020 | ||
ES | 03.06.2020 | ||
FI | 03.06.2020 | ||
HR | 03.06.2020 | ||
IT | 03.06.2020 | ||
LT | 03.06.2020 | ||
LV | 03.06.2020 | ||
NL | 03.06.2020 | ||
PL | 03.06.2020 | ||
RO | 03.06.2020 | ||
RS | 03.06.2020 | ||
SE | 03.06.2020 | ||
SK | 03.06.2020 | ||
SM | 03.06.2020 | ||
BG | 03.09.2020 | ||
NO | 03.09.2020 | ||
GR | 04.09.2020 | ||
IS | 03.10.2020 | ||
PT | 06.10.2020 | ||
Former [2021/09] | AL | 03.06.2020 | |
AT | 03.06.2020 | ||
CZ | 03.06.2020 | ||
EE | 03.06.2020 | ||
ES | 03.06.2020 | ||
FI | 03.06.2020 | ||
HR | 03.06.2020 | ||
IT | 03.06.2020 | ||
LT | 03.06.2020 | ||
LV | 03.06.2020 | ||
NL | 03.06.2020 | ||
RO | 03.06.2020 | ||
RS | 03.06.2020 | ||
SE | 03.06.2020 | ||
SM | 03.06.2020 | ||
BG | 03.09.2020 | ||
NO | 03.09.2020 | ||
GR | 04.09.2020 | ||
PT | 06.10.2020 | ||
Former [2021/04] | AL | 03.06.2020 | |
FI | 03.06.2020 | ||
HR | 03.06.2020 | ||
LT | 03.06.2020 | ||
LV | 03.06.2020 | ||
NL | 03.06.2020 | ||
RS | 03.06.2020 | ||
SE | 03.06.2020 | ||
BG | 03.09.2020 | ||
NO | 03.09.2020 | ||
GR | 04.09.2020 | ||
Former [2021/01] | FI | 03.06.2020 | |
HR | 03.06.2020 | ||
LT | 03.06.2020 | ||
LV | 03.06.2020 | ||
RS | 03.06.2020 | ||
SE | 03.06.2020 | ||
BG | 03.09.2020 | ||
NO | 03.09.2020 | ||
GR | 04.09.2020 | ||
Former [2020/51] | FI | 03.06.2020 | |
HR | 03.06.2020 | ||
LT | 03.06.2020 | ||
LV | 03.06.2020 | ||
RS | 03.06.2020 | ||
SE | 03.06.2020 | ||
NO | 03.09.2020 | ||
GR | 04.09.2020 | ||
Former [2020/50] | FI | 03.06.2020 | |
HR | 03.06.2020 | ||
LT | 03.06.2020 | ||
LV | 03.06.2020 | ||
SE | 03.06.2020 | ||
NO | 03.09.2020 | ||
GR | 04.09.2020 | ||
Former [2020/48] | FI | 03.06.2020 | |
LT | 03.06.2020 | ||
SE | 03.06.2020 | ||
NO | 03.09.2020 | ||
Former [2020/47] | LT | 03.06.2020 | |
NO | 03.09.2020 | Documents cited: | Search | [YA]US6137176 (MOROZUMI YUKIO [JP], et al) [Y] 1,3-5,8,9,12,13 * column 9, line 34 - column 13, line 17; figures 2A, 2B, 4A, 4B * * column 14, line 57 - column 16, line 49 * [A] 2,10,11,16-20; | [YA]GB2384114 (AGERE SYSTEMS INC [US]) [Y] 1,3-5,8,9,12,13 * page 4, line 15 - page 8, line 18; figures 1-3, 7 * [A] 2,10,11,16-20; | [XAI]US2004183202 (USAMI TATSUYA [JP]) [X] 1,3,6 * paragraphs [0049] , [0 50] , [0 73] , [0 74]; figure 3; claims 23, 24; table 2 * [A] 2,4,5,8-20 [I] 7; | [A]US2006170103 (SUH BONG-SEOK [KR], et al) [A] 1-20* paragraphs [0044] , [0 71] - [0078]; figure 2 *; | [XA]US2008023838 (SAKATA ATSUKO [JP], et al) [X] 1,3 * paragraphs [0043] - [0045] - [0 54] - [0064] - [0 70] , [0 81]; figures 7-12, 16 * [A] 2,4-20 | International search | [A]US6339029 (YU CHEN-HUA [TW], et al) [A] 1-20; | [A]US2002192940 (LEE SHYH-DAR [TW], et al) [A] 1-20; | [A]US6953742 (CHEN LING [US], et al) [A] 1-20; | [A]US7265038 (WU PING-KUN [TW], et al)[A] 1-20; | [A]US7585765 (YANG CHIH-CHAO [US], et al) [A] 1-20 |