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Extract from the Register of European Patents

EP About this file: EP3391408

EP3391408 - OXIDATION RESISTANT BARRIER METAL FOR SEMICONDUCTOR DEVICES AND CORRESPONDING PROCESS [Right-click to bookmark this link]
Former [2018/43]OXIDATION RESISTANT BARRIER METAL PROCESS FOR SEMICONDUCTOR DEVICES
[2019/50]
StatusNo opposition filed within time limit
Status updated on  09.04.2021
Database last updated on 24.08.2024
FormerThe patent has been granted
Status updated on  01.05.2020
FormerGrant of patent is intended
Status updated on  28.04.2020
FormerRequest for examination was made
Status updated on  24.04.2020
FormerGrant of patent is intended
Status updated on  22.04.2020
FormerRequest for examination was made
Status updated on  05.04.2020
FormerGrant of patent is intended
Status updated on  20.11.2019
FormerRequest for examination was made
Status updated on  21.09.2018
FormerThe international publication has been made
Status updated on  23.06.2017
Most recent event   Tooltip15.07.2022Lapse of the patent in a contracting state
New state(s): BE		published on 17.08.2022  [2022/33]
Applicant(s)For all designated states
Texas Instruments Incorporated
P.O. Box 655474
Mail Station 3999
Dallas, TX 75265-5474 / US
[2018/43]
Inventor(s)01 / WEST, Jeffrey, A.
8130 Forest Hills Blvd.
Dallas TX 75218 / US
02 / UDAYAKUMAR, Kezhakkedath, R.
5200 Meadowcreek Dr. 1076
Dallas TX 75248 / US
03 / WARNINGHOFF, Eric, H.
1809 Round Rock Dr.
Allen TX 75002 / US
04 / MERRIAM, Alan, G.
4516 Oakshores Dr.
Plano TX 75024 / US
05 / FAUST, Rick, A.
1628 Sylvan Avenue
Dallas TX 75208 / US
 [2018/43]
Representative(s)Zeller, Andreas
Texas Instruments Deutschland GmbH
EMEA Patent Department
Haggertystraße 1
85356 Freising / DE
[2018/43]
Application number, filing date16876903.219.12.2016
[2018/43]
WO2016US67495
Priority number, dateUS20151497401218.12.2015         Original published format: US201514974012
[2018/43]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2017106828
Date:22.06.2017
Language:EN
[2017/25]
Type: A1 Application with search report 
No.:EP3391408
Date:24.10.2018
Language:EN
The application published by WIPO in one of the EPO official languages on 22.06.2017 takes the place of the publication of the European patent application.
[2018/43]
Type: B1 Patent specification 
No.:EP3391408
Date:03.06.2020
Language:EN
[2020/23]
Search report(s)International search report - published on:RU22.06.2017
(Supplementary) European search report - dispatched on:EP19.11.2018
ClassificationIPC:H01L21/768, H01L23/532
[2018/51]
CPC:
H01L21/76843 (EP,US); H01L23/53238 (US); H01L21/31111 (US);
H01L21/76814 (US); H01L21/7685 (EP,US); H01L21/76852 (US);
H01L21/76861 (US); H01L21/76892 (US); H01L23/5226 (US);
H01L23/528 (US); H01L23/53223 (EP,US); H01L24/00 (US);
H01L24/03 (EP); H01L24/05 (EP); H01L21/76855 (EP,US);
H01L2224/02166 (EP); H01L2224/05147 (EP); H01L2224/05186 (EP);
H01L2224/05624 (EP,US); H01L2224/05647 (EP); H01L2924/14 (EP,US) (-)
C-Set:
H01L2224/05147, H01L2924/00014 (EP);
H01L2224/05186, H01L2924/04941, H01L2924/00014 (EP);
H01L2224/05186, H01L2924/04953, H01L2924/00014 (EP);
H01L2224/05624, H01L2924/013, H01L2924/01029, H01L2924/00014 (EP);
H01L2224/05647, H01L2924/013, H01L2924/01013, H01L2924/00014 (EP);
H01L2924/14, H01L2924/00012 (EP,US)
(-)
Former IPC [2018/43]H01L21/4763
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2018/43]
Extension statesBANot yet paid
MENot yet paid
Validation statesMANot yet paid
MDNot yet paid
TitleGerman:OXIDATIONSBESTÄNDIGES BARRIEREMETALL FÜR HALBLEITERBAUELEMENTE UND ZUGEHÖRIGES VERFAHREN[2019/50]
English:OXIDATION RESISTANT BARRIER METAL FOR SEMICONDUCTOR DEVICES AND CORRESPONDING PROCESS[2019/50]
French:MÉTAL BARRIÈRE RÉSISTANT À L'OXYDATION POUR DISPOSITIFS À SEMI-CONDUCTEURS ET PROCÉDÉ CORRESPONDANT[2019/50]
Former [2018/43]VERFAHREN FÜR OXIDATIONSBESTÄNDIGES BARRIEREMETALL FÜR HALBLEITERBAUELEMENTE
Former [2018/43]OXIDATION RESISTANT BARRIER METAL PROCESS FOR SEMICONDUCTOR DEVICES
Former [2018/43]PROCESSUS À MÉTAL BARRIÈRE RÉSISTANT À L'OXYDATION POUR DISPOSITIFS À SEMI-CONDUCTEURS
Entry into regional phase18.07.2018National basic fee paid 
18.07.2018Search fee paid 
18.07.2018Designation fee(s) paid 
18.07.2018Examination fee paid 
Examination procedure29.06.2018Date on which the examining division has become responsible
18.07.2018Examination requested  [2018/43]
31.07.2019Despatch of communication that the application is deemed to be withdrawn, reason: reply to the Extended European Search Report/Written Opinion of the International Searching Authority/International Preliminary Examination Report/Supplementary international search report not received in time
10.10.2019Amendment by applicant (claims and/or description)
21.11.2019Communication of intention to grant the patent
31.03.2020Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO
01.04.2020Fee for grant paid
01.04.2020Fee for publishing/printing paid
28.04.2020Information about intention to grant a patent
28.04.2020Receipt of the translation of the claim(s)
Opposition(s)04.03.2021No opposition filed within time limit [2021/19]
Request for further processing for:The application is deemed to be withdrawn due to failure to reply to the Extended European Search Report/Written Opinion of the International Searching Authority/International Preliminary Examination Report/Supplementary international search report/Supplementary European search report
10.10.2019Request for further processing filed
10.10.2019Full payment received (date of receipt of payment)
Request granted
29.10.2019Decision despatched
Fees paidRenewal fee
02.01.2019Renewal fee patent year 03
02.01.2020Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU19.12.2016
AL03.06.2020
AT03.06.2020
CY03.06.2020
CZ03.06.2020
DK03.06.2020
EE03.06.2020
ES03.06.2020
FI03.06.2020
HR03.06.2020
IT03.06.2020
LT03.06.2020
LV03.06.2020
MC03.06.2020
MK03.06.2020
MT03.06.2020
NL03.06.2020
PL03.06.2020
RO03.06.2020
RS03.06.2020
SE03.06.2020
SI03.06.2020
SK03.06.2020
SM03.06.2020
TR03.06.2020
BG03.09.2020
NO03.09.2020
GR04.09.2020
IS03.10.2020
PT06.10.2020
IE19.12.2020
LU19.12.2020
BE31.12.2020
CH31.12.2020
LI31.12.2020
[2022/33]
Former [2022/32]HU19.12.2016
AL03.06.2020
AT03.06.2020
CY03.06.2020
CZ03.06.2020
DK03.06.2020
EE03.06.2020
ES03.06.2020
FI03.06.2020
HR03.06.2020
IT03.06.2020
LT03.06.2020
LV03.06.2020
MC03.06.2020
MK03.06.2020
MT03.06.2020
NL03.06.2020
PL03.06.2020
RO03.06.2020
RS03.06.2020
SE03.06.2020
SI03.06.2020
SK03.06.2020
SM03.06.2020
TR03.06.2020
BG03.09.2020
NO03.09.2020
GR04.09.2020
IS03.10.2020
PT06.10.2020
IE19.12.2020
LU19.12.2020
CH31.12.2020
LI31.12.2020
Former [2022/27]HU19.12.2016
AL03.06.2020
AT03.06.2020
CY03.06.2020
CZ03.06.2020
DK03.06.2020
EE03.06.2020
ES03.06.2020
FI03.06.2020
HR03.06.2020
IT03.06.2020
LT03.06.2020
LV03.06.2020
MC03.06.2020
MT03.06.2020
NL03.06.2020
PL03.06.2020
RO03.06.2020
RS03.06.2020
SE03.06.2020
SI03.06.2020
SK03.06.2020
SM03.06.2020
TR03.06.2020
BG03.09.2020
NO03.09.2020
GR04.09.2020
IS03.10.2020
PT06.10.2020
IE19.12.2020
LU19.12.2020
CH31.12.2020
LI31.12.2020
Former [2021/52]AL03.06.2020
AT03.06.2020
CZ03.06.2020
DK03.06.2020
EE03.06.2020
ES03.06.2020
FI03.06.2020
HR03.06.2020
IT03.06.2020
LT03.06.2020
LV03.06.2020
MC03.06.2020
NL03.06.2020
PL03.06.2020
RO03.06.2020
RS03.06.2020
SE03.06.2020
SI03.06.2020
SK03.06.2020
SM03.06.2020
BG03.09.2020
NO03.09.2020
GR04.09.2020
IS03.10.2020
PT06.10.2020
IE19.12.2020
LU19.12.2020
CH31.12.2020
LI31.12.2020
Former [2021/46]AL03.06.2020
AT03.06.2020
CZ03.06.2020
DK03.06.2020
EE03.06.2020
ES03.06.2020
FI03.06.2020
HR03.06.2020
IT03.06.2020
LT03.06.2020
LV03.06.2020
MC03.06.2020
NL03.06.2020
PL03.06.2020
RO03.06.2020
RS03.06.2020
SE03.06.2020
SI03.06.2020
SK03.06.2020
SM03.06.2020
BG03.09.2020
NO03.09.2020
GR04.09.2020
IS03.10.2020
PT06.10.2020
IE19.12.2020
LU19.12.2020
Former [2021/40]AL03.06.2020
AT03.06.2020
CZ03.06.2020
DK03.06.2020
EE03.06.2020
ES03.06.2020
FI03.06.2020
HR03.06.2020
IT03.06.2020
LT03.06.2020
LV03.06.2020
MC03.06.2020
NL03.06.2020
PL03.06.2020
RO03.06.2020
RS03.06.2020
SE03.06.2020
SI03.06.2020
SK03.06.2020
SM03.06.2020
BG03.09.2020
NO03.09.2020
GR04.09.2020
IS03.10.2020
PT06.10.2020
Former [2021/24]AL03.06.2020
AT03.06.2020
CZ03.06.2020
DK03.06.2020
EE03.06.2020
ES03.06.2020
FI03.06.2020
HR03.06.2020
IT03.06.2020
LT03.06.2020
LV03.06.2020
NL03.06.2020
PL03.06.2020
RO03.06.2020
RS03.06.2020
SE03.06.2020
SI03.06.2020
SK03.06.2020
SM03.06.2020
BG03.09.2020
NO03.09.2020
GR04.09.2020
IS03.10.2020
PT06.10.2020
Former [2021/21]AL03.06.2020
AT03.06.2020
CZ03.06.2020
DK03.06.2020
EE03.06.2020
ES03.06.2020
FI03.06.2020
HR03.06.2020
IT03.06.2020
LT03.06.2020
LV03.06.2020
NL03.06.2020
PL03.06.2020
RO03.06.2020
RS03.06.2020
SE03.06.2020
SK03.06.2020
SM03.06.2020
BG03.09.2020
NO03.09.2020
GR04.09.2020
IS03.10.2020
PT06.10.2020
Former [2021/10]AL03.06.2020
AT03.06.2020
CZ03.06.2020
EE03.06.2020
ES03.06.2020
FI03.06.2020
HR03.06.2020
IT03.06.2020
LT03.06.2020
LV03.06.2020
NL03.06.2020
PL03.06.2020
RO03.06.2020
RS03.06.2020
SE03.06.2020
SK03.06.2020
SM03.06.2020
BG03.09.2020
NO03.09.2020
GR04.09.2020
IS03.10.2020
PT06.10.2020
Former [2021/09]AL03.06.2020
AT03.06.2020
CZ03.06.2020
EE03.06.2020
ES03.06.2020
FI03.06.2020
HR03.06.2020
IT03.06.2020
LT03.06.2020
LV03.06.2020
NL03.06.2020
RO03.06.2020
RS03.06.2020
SE03.06.2020
SM03.06.2020
BG03.09.2020
NO03.09.2020
GR04.09.2020
PT06.10.2020
Former [2021/04]AL03.06.2020
FI03.06.2020
HR03.06.2020
LT03.06.2020
LV03.06.2020
NL03.06.2020
RS03.06.2020
SE03.06.2020
BG03.09.2020
NO03.09.2020
GR04.09.2020
Former [2021/01]FI03.06.2020
HR03.06.2020
LT03.06.2020
LV03.06.2020
RS03.06.2020
SE03.06.2020
BG03.09.2020
NO03.09.2020
GR04.09.2020
Former [2020/51]FI03.06.2020
HR03.06.2020
LT03.06.2020
LV03.06.2020
RS03.06.2020
SE03.06.2020
NO03.09.2020
GR04.09.2020
Former [2020/50]FI03.06.2020
HR03.06.2020
LT03.06.2020
LV03.06.2020
SE03.06.2020
NO03.09.2020
GR04.09.2020
Former [2020/48]FI03.06.2020
LT03.06.2020
SE03.06.2020
NO03.09.2020
Former [2020/47]LT03.06.2020
NO03.09.2020
Documents cited:Search[YA]US6137176  (MOROZUMI YUKIO [JP], et al) [Y] 1,3-5,8,9,12,13 * column 9, line 34 - column 13, line 17; figures 2A, 2B, 4A, 4B * * column 14, line 57 - column 16, line 49 * [A] 2,10,11,16-20;
 [YA]GB2384114  (AGERE SYSTEMS INC [US]) [Y] 1,3-5,8,9,12,13 * page 4, line 15 - page 8, line 18; figures 1-3, 7 * [A] 2,10,11,16-20;
 [XAI]US2004183202  (USAMI TATSUYA [JP]) [X] 1,3,6 * paragraphs [0049] , [0 50] , [0 73] , [0 74]; figure 3; claims 23, 24; table 2 * [A] 2,4,5,8-20 [I] 7;
 [A]US2006170103  (SUH BONG-SEOK [KR], et al) [A] 1-20* paragraphs [0044] , [0 71] - [0078]; figure 2 *;
 [XA]US2008023838  (SAKATA ATSUKO [JP], et al) [X] 1,3 * paragraphs [0043] - [0045] - [0 54] - [0064] - [0 70] , [0 81]; figures 7-12, 16 * [A] 2,4-20
International search[A]US6339029  (YU CHEN-HUA [TW], et al) [A] 1-20;
 [A]US2002192940  (LEE SHYH-DAR [TW], et al) [A] 1-20;
 [A]US6953742  (CHEN LING [US], et al) [A] 1-20;
 [A]US7265038  (WU PING-KUN [TW], et al)[A] 1-20;
 [A]US7585765  (YANG CHIH-CHAO [US], et al) [A] 1-20
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.