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EP3361315
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EP About this file: EP3361315
| EP3361315 - INSPECTION APPARATUS AND METHOD OF INSPECTING STRUCTURES [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 21.06.2019 Database last updated on 13.11.2024 | |
| Former | The application has been published Status updated on 13.07.2018 | Most recent event Tooltip | 21.06.2019 | Application deemed to be withdrawn | published on 24.07.2019 [2019/30] | Applicant(s) | For all designated states ASML Netherlands B.V. P.O. Box 324 5500 AH Veldhoven / NL | [2018/33] | Inventor(s) | 01 /
MATHIJSSEN, Simon, Gijsbert, Josephus P.O. Box 324 5500 AH Veldhoven / NL | 02 /
ROOBOL, Sander, Bas P.O. Box 324 5500 AH Veldhoven / NL | [2018/33] | Representative(s) | Broeken, Petrus Henricus Johannes ASML Netherlands B.V. Corporate Intellectual Property De Run 6501 P.O.Box 324 5500 AH Veldhoven / NL | [N/P] |
| Former [2018/33] | Broeken, Petrus Henricus Johannes ASML Netherlands B.V. Corporate Intellectual Property P.O.Box 324 5500 AH Veldhoven / NL | Application number, filing date | 17155453.8 | 09.02.2017 | [2018/33] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP3361315 | Date: | 15.08.2018 | Language: | EN | [2018/33] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 21.12.2017 | Classification | IPC: | G03F7/20, G03F9/00, G01N21/47, G01N21/956 | [2018/33] | CPC: |
G03F7/70633 (EP,KR,US);
G03F7/7085 (KR,US);
G01B11/272 (KR,US);
G01N21/4788 (EP,KR,US);
G01N21/956 (EP,KR,US);
G03F7/70525 (KR,US);
G03F7/70625 (KR,US);
G03F7/706847 (KR);
G03F9/7069 (EP,KR,US);
G03F9/7088 (EP,KR,US)
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| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2018/33] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | MA | Not yet paid | MD | Not yet paid | Title | German: | GERÄT UND VERFAHREN ZUR INSPEKTION VON STRUKTUREN | [2018/33] | English: | INSPECTION APPARATUS AND METHOD OF INSPECTING STRUCTURES | [2018/33] | French: | APPAREIL ET PROCÉDÉ PERMETTANT L'INSPECTION DE STRUCTURES | [2018/33] | Examination procedure | 07.06.2017 | Loss of particular rights, legal effect: Claims | 12.07.2017 | Despatch of communication of loss of particular rights: Claims {1} | 16.02.2019 | Application deemed to be withdrawn, date of legal effect [2019/30] | 05.03.2019 | Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time [2019/30] | Fees paid | Penalty fee | Additional fee for renewal fee | 28.02.2019 | 03 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]EP0818814 (KLA INSTR CORP [US]); | [A]US6982793 (YANG WEIDONG [US], et al); | [A]US7072442 (JANIK GARY R [US]); | by applicant | US2006033921 | US2006066855 | US2008239318 | US2010201963 | US2011069292 | US2011292365 | US2012242970 | US2014192338 | WO2015172963 | US2016282282 | WO2016EP68317 | WO2016EP68479 | EP20160198346 | WO2016EP80103 | WO2016EP80058 |