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EP3399371
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Extract from the Register of European Patents
EP About this file: EP3399371
| EP3399371 - METHOD OF MEASURING A PARAMETER OF INTEREST, DEVICE MANUFACTURING METHOD, METROLOGY APPARATUS, AND LITHOGRAPHIC SYSTEM [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 06.09.2019 Database last updated on 18.03.2026 | |
| Former | The application has been published Status updated on 05.10.2018 | Most recent event Tooltip | 06.09.2019 | Application deemed to be withdrawn | published on 09.10.2019 [2019/41] | Applicant(s) | For all designated states ASML Netherlands B.V. P.O. Box 324 5500 AH Veldhoven / NL | [2018/45] | Inventor(s) | 01 /
LIAN, Jin P.O. Box 324 5500 AH Veldhoven / NL | 02 /
PANDEY, Nitesh P.O. Box 324 5500 AH Veldhoven / NL | [2018/45] | Representative(s) | Broeken, Petrus Henricus Johannes ASML Netherlands B.V. Corporate Intellectual Property De Run 6501 P.O.Box 324 5500 AH Veldhoven / NL | [N/P] |
| Former [2018/45] | Broeken, Petrus Henricus Johannes ASML Netherlands B.V. Corporate Intellectual Property P.O.Box 324 5500 AH Veldhoven / NL | Application number, filing date | 17169624.8 | 05.05.2017 | [2018/45] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP3399371 | Date: | 07.11.2018 | Language: | EN | [2018/45] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 24.11.2017 | Classification | IPC: | G03F7/20, G03F9/00, H01L21/66 | [2018/45] | CPC: |
G03F7/70633 (EP,US);
G03F7/70066 (US);
G03F7/70133 (US);
G03F7/70158 (US);
G03F7/70625 (US);
G03F7/70341 (US)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2018/45] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | MA | Not yet paid | MD | Not yet paid | Title | German: | VERFAHREN ZUR MESSUNG EINES BESTIMMTEN PARAMETERS, VORRICHTUNGSHERSTELLUNGSVERFAHREN, METROLOGIEEINRICHTUNG UND LITHOGRAFIESYSTEM | [2018/45] | English: | METHOD OF MEASURING A PARAMETER OF INTEREST, DEVICE MANUFACTURING METHOD, METROLOGY APPARATUS, AND LITHOGRAPHIC SYSTEM | [2018/45] | French: | PROCÉDÉ DE MESURE D'UN PARAMÈTRE D'INTÉRÊT, PROCÉDÉ DE FABRICATION D'UN DISPOSITIF, APPAREIL DE MÉTROLOGIE ET SYSTÈME LITHOGRAPHIQUE | [2018/45] | Examination procedure | 08.05.2019 | Application deemed to be withdrawn, date of legal effect [2019/41] | 21.05.2019 | Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time [2019/41] | Fees paid | Penalty fee | Additional fee for renewal fee | 31.05.2019 | 03 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XAI] US2006033921 (DEN BOEF ARIE J et al.) | [XAI] US2008144036 (SCHAAR MAURITS VAN DER et al.) | [XAI] US2016300767 (KO KANG-WOONG et al.) [X] 1-5,12-15 * paragraph [0009] * * paragraph [0037] * * paragraphs [0045] - [0076]; figures 4a,4b * * paragraph [0099] *[A] 6-10 [I] 11 | [XAI] US2017023867 (STAALS FRANK et al.) [X] 1-5,12-15 * paragraph [0004] * * paragraphs [0056] - [0077]; figures 2,3 *[A] 6-10 [I] 11 | by applicant | WO2009078708 | WO2009106279 |