EP3291284 - ALPHA-GA2O3 SEMICONDUCTOR FILM, SEMICONDUCTOR DEVICE COMPRISING THE SEMICONDUCTOR FILM, AND SEMICONDUCTOR SYSTEM COMPRISING THE SEMICONDUCTOR DEVICE [Right-click to bookmark this link] | |||
Former [2018/10] | CRYSTALLINE OXIDE SEMICONDUCTOR FILM, CRYSTALLINE OXIDE SEMICONDUCTOR DEVICE, AND CRYSTALLINE OXIDE SEMICONDUCTOR SYSTEM | ||
[2020/43] | Status | No opposition filed within time limit Status updated on 14.01.2022 Database last updated on 02.09.2024 | |
Former | The patent has been granted Status updated on 05.02.2021 | ||
Former | Grant of patent is intended Status updated on 06.10.2020 | ||
Former | Examination is in progress Status updated on 30.03.2019 | ||
Former | Request for examination was made Status updated on 14.09.2018 | ||
Former | The application has been published Status updated on 02.02.2018 | Most recent event Tooltip | 27.04.2024 | Lapse of the patent in a contracting state New state(s): MK | published on 29.05.2024 [2024/22] | Applicant(s) | For all designated states Flosfia Inc. 1-29, Goryoohara Nishikyo-ku Kyoto-shi Kyoto 615-8245 / JP | [2019/31] |
Former [2018/10] | For all designated states Flosfia Inc. Kyodai Katsura Venture Plaza North Building 1-36, Goryo ohara Nishikyo-ku Kyoto 615-8245 / JP | Inventor(s) | 01 /
Tokuda, Rie c/o Flosfia Inc. 1-36 Goryoohara, Nishikyo-ku, Kyoto-shi Kyoto, 615-8245 / JP | 02 /
Oda, Masaya c/o Flosfia Inc. 1-36 Goryoohara, Nishikyo-ku, Kyoto-shi Kyoto, 615-8245 / JP | 03 /
Hitora, Toshimi c/o Flosfia Inc. 1-36 Goryoohara, Nishikyo-ku, Kyoto-shi Kyoto, 615-8245 / JP | [2018/10] | Representative(s) | Gulde & Partner Patent- und Rechtsanwaltskanzlei mbB Wallstraße 58/59 10179 Berlin / DE | [2018/10] | Application number, filing date | 17188724.3 | 31.08.2017 | [2018/10] | Priority number, date | JP20160170409 | 31.08.2016 Original published format: JP 2016170409 | JP20160217660 | 07.11.2016 Original published format: JP 2016217660 | JP20170137446 | 13.07.2017 Original published format: JP 2017137446 | [2018/10] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP3291284 | Date: | 07.03.2018 | Language: | EN | [2018/10] | Type: | B1 Patent specification | No.: | EP3291284 | Date: | 10.03.2021 | Language: | EN | [2021/10] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 26.01.2018 | Classification | IPC: | H01L21/36, H01L29/24, H01L29/04, H01L29/739, H01L29/778, H01L29/808, H01L29/872, H01L33/02 | [2018/10] | CPC: |
H01L29/24 (EP,US);
H01L29/12 (CN);
C23C16/40 (CN);
H01L21/02414 (EP,US);
H01L21/0242 (EP,US);
H01L21/02433 (EP,US);
H01L21/02483 (EP,US);
H01L21/02565 (EP,US);
H01L21/02576 (EP,US);
H01L21/02609 (EP,US);
H01L21/02628 (EP,US);
H01L21/02631 (EP,US);
H01L21/205 (CN);
H01L29/045 (EP,US);
H01L29/66969 (EP,US);
H01L29/7395 (EP,US);
H01L29/7787 (EP,US);
H01L29/7813 (US);
H01L29/7828 (EP,US);
H01L29/8083 (EP,US);
H01L29/872 (EP,US);
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2018/42] |
Former [2018/10] | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR | Title | German: | ALPHA-GA2O3 HALBLEITERSCHICHT, HALBLEITERBAUELEMENT MIT DER ALPHA-GA2O3 HALBLEITERSCHICHT, UND HALBLEITERSYSTEM MIT DEM HALBLEITERBAUELEMENT | [2020/43] | English: | ALPHA-GA2O3 SEMICONDUCTOR FILM, SEMICONDUCTOR DEVICE COMPRISING THE SEMICONDUCTOR FILM, AND SEMICONDUCTOR SYSTEM COMPRISING THE SEMICONDUCTOR DEVICE | [2020/43] | French: | FILM SEMI-CONDUCTEUR À ALPHA-GA2O3, DISPOSITIF SEMI-CONDUCTEUR COMPRENANT CE FILM ET SYSTÈME SEMI-CONDUCTEUR COMPRENANT CE DISPOSITIF | [2020/43] |
Former [2018/10] | KRISTALLINE OXIDHALBLEITERSCHICHT, KRISTALLINES OXIDHALBLEITERBAUELEMENT UND KRISTALLINES OXIDHALBLEITERSYSTEM | ||
Former [2018/10] | CRYSTALLINE OXIDE SEMICONDUCTOR FILM, CRYSTALLINE OXIDE SEMICONDUCTOR DEVICE, AND CRYSTALLINE OXIDE SEMICONDUCTOR SYSTEM | ||
Former [2018/10] | FILM SEMI-CONDUCTEUR À OXYDE CRISTALLIN, DISPOSITIF SEMI-CONDUCTEUR À OXYDE CRISTALLIN ET SYSTÈME SEMI-CONDUCTEUR À OXYDE CRISTALLIN | Examination procedure | 31.08.2017 | Date on which the examining division has become responsible | 07.09.2018 | Amendment by applicant (claims and/or description) | 07.09.2018 | Examination requested [2018/42] | 03.04.2019 | Despatch of a communication from the examining division (Time limit: M06) | 10.10.2019 | Reply to a communication from the examining division | 07.09.2020 | Cancellation of oral proceeding that was planned for 08.09.2020 | 08.09.2020 | Date of oral proceedings (cancelled) | 07.10.2020 | Communication of intention to grant the patent | 28.01.2021 | Fee for grant paid | 28.01.2021 | Fee for publishing/printing paid | 28.01.2021 | Receipt of the translation of the claim(s) | Opposition(s) | 13.12.2021 | No opposition filed within time limit [2022/07] | Fees paid | Renewal fee | 28.08.2019 | Renewal fee patent year 03 | 31.07.2020 | Renewal fee patent year 04 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 31.08.2017 | AL | 10.03.2021 | AT | 10.03.2021 | CY | 10.03.2021 | CZ | 10.03.2021 | DK | 10.03.2021 | EE | 10.03.2021 | ES | 10.03.2021 | FI | 10.03.2021 | HR | 10.03.2021 | LT | 10.03.2021 | LV | 10.03.2021 | MC | 10.03.2021 | MK | 10.03.2021 | NL | 10.03.2021 | PL | 10.03.2021 | RO | 10.03.2021 | RS | 10.03.2021 | SI | 10.03.2021 | SK | 10.03.2021 | SM | 10.03.2021 | BG | 10.06.2021 | NO | 10.06.2021 | GR | 11.06.2021 | IS | 10.07.2021 | PT | 12.07.2021 | BE | 31.08.2021 | CH | 31.08.2021 | IE | 31.08.2021 | LI | 31.08.2021 | LU | 31.08.2021 | [2024/22] |
Former [2023/30] | HU | 31.08.2017 | |
AL | 10.03.2021 | ||
AT | 10.03.2021 | ||
CY | 10.03.2021 | ||
CZ | 10.03.2021 | ||
DK | 10.03.2021 | ||
EE | 10.03.2021 | ||
ES | 10.03.2021 | ||
FI | 10.03.2021 | ||
HR | 10.03.2021 | ||
LT | 10.03.2021 | ||
LV | 10.03.2021 | ||
MC | 10.03.2021 | ||
NL | 10.03.2021 | ||
PL | 10.03.2021 | ||
RO | 10.03.2021 | ||
RS | 10.03.2021 | ||
SI | 10.03.2021 | ||
SK | 10.03.2021 | ||
SM | 10.03.2021 | ||
BG | 10.06.2021 | ||
NO | 10.06.2021 | ||
GR | 11.06.2021 | ||
IS | 10.07.2021 | ||
PT | 12.07.2021 | ||
BE | 31.08.2021 | ||
CH | 31.08.2021 | ||
IE | 31.08.2021 | ||
LI | 31.08.2021 | ||
LU | 31.08.2021 | ||
Former [2023/29] | HU | 31.08.2017 | |
AL | 10.03.2021 | ||
AT | 10.03.2021 | ||
CZ | 10.03.2021 | ||
DK | 10.03.2021 | ||
EE | 10.03.2021 | ||
ES | 10.03.2021 | ||
FI | 10.03.2021 | ||
HR | 10.03.2021 | ||
LT | 10.03.2021 | ||
LV | 10.03.2021 | ||
MC | 10.03.2021 | ||
NL | 10.03.2021 | ||
PL | 10.03.2021 | ||
RO | 10.03.2021 | ||
RS | 10.03.2021 | ||
SI | 10.03.2021 | ||
SK | 10.03.2021 | ||
SM | 10.03.2021 | ||
BG | 10.06.2021 | ||
NO | 10.06.2021 | ||
GR | 11.06.2021 | ||
IS | 10.07.2021 | ||
PT | 12.07.2021 | ||
BE | 31.08.2021 | ||
CH | 31.08.2021 | ||
IE | 31.08.2021 | ||
LI | 31.08.2021 | ||
LU | 31.08.2021 | ||
Former [2022/35] | AL | 10.03.2021 | |
AT | 10.03.2021 | ||
CZ | 10.03.2021 | ||
DK | 10.03.2021 | ||
EE | 10.03.2021 | ||
ES | 10.03.2021 | ||
FI | 10.03.2021 | ||
HR | 10.03.2021 | ||
LT | 10.03.2021 | ||
LV | 10.03.2021 | ||
MC | 10.03.2021 | ||
NL | 10.03.2021 | ||
PL | 10.03.2021 | ||
RO | 10.03.2021 | ||
RS | 10.03.2021 | ||
SI | 10.03.2021 | ||
SK | 10.03.2021 | ||
SM | 10.03.2021 | ||
BG | 10.06.2021 | ||
NO | 10.06.2021 | ||
GR | 11.06.2021 | ||
IS | 10.07.2021 | ||
PT | 12.07.2021 | ||
BE | 31.08.2021 | ||
CH | 31.08.2021 | ||
IE | 31.08.2021 | ||
LI | 31.08.2021 | ||
LU | 31.08.2021 | ||
Former [2022/34] | AL | 10.03.2021 | |
AT | 10.03.2021 | ||
CZ | 10.03.2021 | ||
DK | 10.03.2021 | ||
EE | 10.03.2021 | ||
ES | 10.03.2021 | ||
FI | 10.03.2021 | ||
HR | 10.03.2021 | ||
LT | 10.03.2021 | ||
LV | 10.03.2021 | ||
MC | 10.03.2021 | ||
NL | 10.03.2021 | ||
PL | 10.03.2021 | ||
RO | 10.03.2021 | ||
RS | 10.03.2021 | ||
SI | 10.03.2021 | ||
SK | 10.03.2021 | ||
SM | 10.03.2021 | ||
BG | 10.06.2021 | ||
NO | 10.06.2021 | ||
GR | 11.06.2021 | ||
IS | 10.07.2021 | ||
PT | 12.07.2021 | ||
BE | 31.08.2021 | ||
CH | 31.08.2021 | ||
LI | 31.08.2021 | ||
LU | 31.08.2021 | ||
Former [2022/23] | AL | 10.03.2021 | |
AT | 10.03.2021 | ||
CZ | 10.03.2021 | ||
DK | 10.03.2021 | ||
EE | 10.03.2021 | ||
ES | 10.03.2021 | ||
FI | 10.03.2021 | ||
HR | 10.03.2021 | ||
LT | 10.03.2021 | ||
LV | 10.03.2021 | ||
MC | 10.03.2021 | ||
NL | 10.03.2021 | ||
PL | 10.03.2021 | ||
RO | 10.03.2021 | ||
RS | 10.03.2021 | ||
SI | 10.03.2021 | ||
SK | 10.03.2021 | ||
SM | 10.03.2021 | ||
BG | 10.06.2021 | ||
NO | 10.06.2021 | ||
GR | 11.06.2021 | ||
IS | 10.07.2021 | ||
PT | 12.07.2021 | ||
CH | 31.08.2021 | ||
LI | 31.08.2021 | ||
LU | 31.08.2021 | ||
Former [2022/21] | AL | 10.03.2021 | |
AT | 10.03.2021 | ||
CZ | 10.03.2021 | ||
DK | 10.03.2021 | ||
EE | 10.03.2021 | ||
ES | 10.03.2021 | ||
FI | 10.03.2021 | ||
HR | 10.03.2021 | ||
LT | 10.03.2021 | ||
LV | 10.03.2021 | ||
MC | 10.03.2021 | ||
NL | 10.03.2021 | ||
PL | 10.03.2021 | ||
RO | 10.03.2021 | ||
RS | 10.03.2021 | ||
SI | 10.03.2021 | ||
SK | 10.03.2021 | ||
SM | 10.03.2021 | ||
BG | 10.06.2021 | ||
NO | 10.06.2021 | ||
GR | 11.06.2021 | ||
PT | 12.07.2021 | ||
CH | 31.08.2021 | ||
LI | 31.08.2021 | ||
Former [2022/18] | AL | 10.03.2021 | |
AT | 10.03.2021 | ||
CZ | 10.03.2021 | ||
DK | 10.03.2021 | ||
EE | 10.03.2021 | ||
ES | 10.03.2021 | ||
FI | 10.03.2021 | ||
HR | 10.03.2021 | ||
LT | 10.03.2021 | ||
LV | 10.03.2021 | ||
MC | 10.03.2021 | ||
NL | 10.03.2021 | ||
PL | 10.03.2021 | ||
RO | 10.03.2021 | ||
RS | 10.03.2021 | ||
SI | 10.03.2021 | ||
SK | 10.03.2021 | ||
SM | 10.03.2021 | ||
BG | 10.06.2021 | ||
NO | 10.06.2021 | ||
GR | 11.06.2021 | ||
PT | 12.07.2021 | ||
Former [2022/13] | AL | 10.03.2021 | |
AT | 10.03.2021 | ||
CZ | 10.03.2021 | ||
DK | 10.03.2021 | ||
EE | 10.03.2021 | ||
ES | 10.03.2021 | ||
FI | 10.03.2021 | ||
HR | 10.03.2021 | ||
LT | 10.03.2021 | ||
LV | 10.03.2021 | ||
NL | 10.03.2021 | ||
PL | 10.03.2021 | ||
RO | 10.03.2021 | ||
RS | 10.03.2021 | ||
SI | 10.03.2021 | ||
SK | 10.03.2021 | ||
SM | 10.03.2021 | ||
BG | 10.06.2021 | ||
NO | 10.06.2021 | ||
GR | 11.06.2021 | ||
PT | 12.07.2021 | ||
Former [2022/10] | AL | 10.03.2021 | |
AT | 10.03.2021 | ||
CZ | 10.03.2021 | ||
DK | 10.03.2021 | ||
EE | 10.03.2021 | ||
ES | 10.03.2021 | ||
FI | 10.03.2021 | ||
HR | 10.03.2021 | ||
LT | 10.03.2021 | ||
LV | 10.03.2021 | ||
NL | 10.03.2021 | ||
PL | 10.03.2021 | ||
RO | 10.03.2021 | ||
RS | 10.03.2021 | ||
SK | 10.03.2021 | ||
SM | 10.03.2021 | ||
BG | 10.06.2021 | ||
NO | 10.06.2021 | ||
GR | 11.06.2021 | ||
PT | 12.07.2021 | ||
Former [2022/08] | AL | 10.03.2021 | |
AT | 10.03.2021 | ||
CZ | 10.03.2021 | ||
DK | 10.03.2021 | ||
EE | 10.03.2021 | ||
ES | 10.03.2021 | ||
FI | 10.03.2021 | ||
HR | 10.03.2021 | ||
LT | 10.03.2021 | ||
LV | 10.03.2021 | ||
NL | 10.03.2021 | ||
PL | 10.03.2021 | ||
RO | 10.03.2021 | ||
RS | 10.03.2021 | ||
SK | 10.03.2021 | ||
SM | 10.03.2021 | ||
BG | 10.06.2021 | ||
NO | 10.06.2021 | ||
GR | 11.06.2021 | ||
IS | 10.07.2021 | ||
PT | 12.07.2021 | ||
Former [2022/07] | AL | 10.03.2021 | |
AT | 10.03.2021 | ||
CZ | 10.03.2021 | ||
EE | 10.03.2021 | ||
FI | 10.03.2021 | ||
HR | 10.03.2021 | ||
LT | 10.03.2021 | ||
LV | 10.03.2021 | ||
NL | 10.03.2021 | ||
PL | 10.03.2021 | ||
RO | 10.03.2021 | ||
RS | 10.03.2021 | ||
SK | 10.03.2021 | ||
SM | 10.03.2021 | ||
BG | 10.06.2021 | ||
NO | 10.06.2021 | ||
GR | 11.06.2021 | ||
IS | 10.07.2021 | ||
PT | 12.07.2021 | ||
Former [2021/52] | AT | 10.03.2021 | |
CZ | 10.03.2021 | ||
EE | 10.03.2021 | ||
FI | 10.03.2021 | ||
HR | 10.03.2021 | ||
LT | 10.03.2021 | ||
LV | 10.03.2021 | ||
NL | 10.03.2021 | ||
PL | 10.03.2021 | ||
RO | 10.03.2021 | ||
RS | 10.03.2021 | ||
SK | 10.03.2021 | ||
SM | 10.03.2021 | ||
BG | 10.06.2021 | ||
NO | 10.06.2021 | ||
GR | 11.06.2021 | ||
IS | 10.07.2021 | ||
PT | 12.07.2021 | ||
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CZ | 10.03.2021 | ||
EE | 10.03.2021 | ||
FI | 10.03.2021 | ||
HR | 10.03.2021 | ||
LT | 10.03.2021 | ||
LV | 10.03.2021 | ||
NL | 10.03.2021 | ||
RO | 10.03.2021 | ||
RS | 10.03.2021 | ||
SK | 10.03.2021 | ||
SM | 10.03.2021 | ||
BG | 10.06.2021 | ||
NO | 10.06.2021 | ||
GR | 11.06.2021 | ||
IS | 10.07.2021 | ||
PT | 12.07.2021 | ||
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SK | 10.03.2021 | ||
SM | 10.03.2021 | ||
BG | 10.06.2021 | ||
NO | 10.06.2021 | ||
GR | 11.06.2021 | ||
PT | 12.07.2021 | ||
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NL | 10.03.2021 | ||
RS | 10.03.2021 | ||
SM | 10.03.2021 | ||
BG | 10.06.2021 | ||
NO | 10.06.2021 | ||
GR | 11.06.2021 | ||
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LV | 10.03.2021 | ||
NL | 10.03.2021 | ||
RS | 10.03.2021 | ||
SM | 10.03.2021 | ||
BG | 10.06.2021 | ||
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NL | 10.03.2021 | ||
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BG | 10.06.2021 | ||
NO | 10.06.2021 | ||
GR | 11.06.2021 | ||
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NO | 10.06.2021 | Documents cited: | Search | [I]WO2016035696 (FLOSFIA INC [JP]) [I] 1-15 * the whole document *; | [IP]EP3190608 (FLOSFIA INC [JP]) [IP] 1-15 * paragraphs [0019] - [0025] - [0077]; figure 10 *; | [A] - Shizuo Fujita ET AL, Jpn. J. Appl. Phys, (20120101), page 100207, URL: http://iopscience.iop.org/article/10.1143/JJAP.51.100207/pdf, XP055380787 [A] 1-15 * the whole document * | [A] - Kazuaki Akaiwa ET AL, "Electrical Conductive Corundum-Structured [alpha]-Ga 2 O 3 Thin Films on Sapphire with Tin-Doping Grown by Spray-Assisted Mist Chemical Vapor Deposition Electrical Conductive Corundum-Structured -Ga 2 O 3 Thin Films on Sapphire with Tin-Doping Grown by Spray-Assisted Mist Chemical Vapor Deposition", Japanese Journal of Applied Physics, (20120614), URL: http://iopscience.iop.org/1347-4065/51/7R/070203/pdf/1347-4065_51_7R_070203.pdf, (20150722), XP055204013 [A] 1-15 * the whole document * DOI: http://dx.doi.org/10.1143/jjap.51.070203 | Examination | - Masaya Oda ET AL, "Schottky barrier diodes of corundum-structured gallium oxide showing on-resistance of 0.1 m[Omega].cm 2 grown by MIST EPITAXY ", Applied Physics Express, JP, (20160122), vol. 9, no. 2, doi:10.7567/APEX.9.021101, ISSN 1882-0778, page 021101, XP055727827 DOI: http://dx.doi.org/10.7567/APEX.9.021101 | - Kentaro Kaneko ET AL, "Growth and metal-oxide-semiconductor field-effect transistors of corundum-structured alpha indium oxide semiconductors", Applied Physics Express, JP, (20150901), vol. 8, no. 9, doi:10.7567/APEX.8.095503, ISSN 1882-0778, page 095503, XP055727822 DOI: http://dx.doi.org/10.7567/APEX.8.095503 | by applicant | JP2013028480 | JP2015228495 |