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Extract from the Register of European Patents

EP About this file: EP3352010

EP3352010 - RUN-OFF PATH TO COLLECT LIQUID FOR AN IMMERSION LITHOGRAPHY APPARATUS [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  05.12.2019
Database last updated on 21.08.2024
FormerExamination is in progress
Status updated on  16.03.2019
FormerRequest for examination was made
Status updated on  01.02.2019
FormerThe application has been published
Status updated on  22.06.2018
Most recent event   Tooltip05.12.2019Application deemed to be withdrawnpublished on 01.01.2020  [2020/01]
Applicant(s)For all designated states
Nikon Corporation
15-3, Konan 2-chome
Minato-ku
Tokyo 108-6290 / JP
[2018/30]
Inventor(s)01 / Novak, Thomas W.
1205 Lakeview Drive
Hillsborough, CA 94010 / US
 [2018/30]
Representative(s)Hoffmann Eitle
Patent- und Rechtsanwälte PartmbB
Arabellastraße 30
81925 München / DE
[2018/30]
Application number, filing date17202526.401.04.2004
[2018/30]
Priority number, dateUS20030462114P10.04.2003         Original published format: US 462114 P
[2018/30]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP3352010
Date:25.07.2018
Language:EN
[2018/30]
Search report(s)(Supplementary) European search report - dispatched on:EP22.06.2018
ClassificationIPC:G03B27/42, G03F7/20
[2018/30]
CPC:
G03F7/70341 (EP,US); G03F7/20 (KR); G03F7/70716 (EP,US);
G03F7/7095 (EP,US)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IT,   LI,   LU,   MC,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2019/10]
Former [2018/30]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IT,  LI,  LU,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:ABLAUFWEG ZUM SAMMELN VON FLÜSSIGKEITEN FÜR EINE IMMERSIONSLITHOGRAPHIEVORRICHTUNG[2018/30]
English:RUN-OFF PATH TO COLLECT LIQUID FOR AN IMMERSION LITHOGRAPHY APPARATUS[2018/30]
French:TRAJET D'ÉCOULEMENT PERMETTANT DE RECUEILLIR UN LIQUIDE POUR UN APPAREIL DE LITHOGRAPHIE PAR IMMERSION[2018/30]
Examination procedure18.01.2019Amendment by applicant (claims and/or description)
21.01.2019Examination requested  [2019/10]
21.01.2019Date on which the examining division has become responsible
20.03.2019Despatch of a communication from the examining division (Time limit: M04)
31.07.2019Application deemed to be withdrawn, date of legal effect  [2020/01]
23.08.2019Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time  [2020/01]
Parent application(s)   TooltipEP04759084.9  / EP1611482
EP15163158.7  / EP2921905
Fees paidRenewal fee
20.11.2017Renewal fee patent year 03
20.11.2017Renewal fee patent year 04
20.11.2017Renewal fee patent year 05
20.11.2017Renewal fee patent year 06
20.11.2017Renewal fee patent year 07
20.11.2017Renewal fee patent year 08
20.11.2017Renewal fee patent year 09
20.11.2017Renewal fee patent year 10
20.11.2017Renewal fee patent year 11
20.11.2017Renewal fee patent year 12
20.11.2017Renewal fee patent year 13
20.11.2017Renewal fee patent year 14
11.04.2018Renewal fee patent year 15
15.04.2019Renewal fee patent year 16
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[A]EP0605103  (CANON KK [JP]) [A] 1-6 * column 5, line 41 - column 12, line 7; figures 1-3,6-8 *;
 [A]JPH10340846  (NIKON CORP) [A] 1-6 * abstract *;
 [A]WO9949504  (NIKON CORP [JP], et al) [A] 1-6 * abstract *;
 [E]EP1628329  (NIKON CORP [JP]) [E] 1-4,6 * paragraphs [0032] - [0040]; figures 1-4 *;
 [E]EP1641028  (NIKON CORP [JP]) [E] 1-4,6 * paragraph [0048]; figures 1,2 * * paragraph [0061]; figure 4 *;
 [E]EP1699073  (NIKON CORP [JP]) [E] 1-4,6 * paragraph [0035]; figures 1,2 ** paragraph [0044]; figure 4 *;
 [E]EP1703548  (NIKON CORP [JP]) [E] 1-5 * paragraph [0053]; figure 1 * * paragraph [0092]; figures 4,5 *
by applicantJPH08136475
 US5528118
 US5528100
 JPH08330224
 US5623853
 US5874820
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.