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EP3355117
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EP About this file: EP3355117
| EP3355117 - OPTICAL PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 07.02.2020 Database last updated on 22.08.2024 | |
| Former | Grant of patent is intended Status updated on 23.04.2019 | ||
| Former | Request for examination was made Status updated on 07.12.2018 | ||
| Former | The application has been published Status updated on 29.06.2018 | Most recent event Tooltip | 07.02.2020 | Application deemed to be withdrawn | published on 11.03.2020 [2020/11] | Applicant(s) | For all designated states Tokyo Electron Limited 3-1 Akasaka 5-chome Minato-ku Tokyo-to / JP | [2018/31] | Inventor(s) | 01 /
Moriya, Teruhiko c/o Tokyo Electron Kyushu Limited 1-1, Fukuhara Koshi-shi Kumamoto-ken / JP | 02 /
Tomono, Masaru c/o Tokyo Electron Kyushu Limited 1-1, Fukuhara Koshi-shi Kumamoto-ken / JP | 03 /
Shimada, Ryo c/o Tokyo Electron Kyushu Limited 1-1, Fukuhara Koshi-shi Kumamoto-ken / JP | 04 /
Hayakawa, Makoto c/o Tokyo Electron Kyushu Limited 1-1, Fukuhara Koshi-shi Kumamoto-ken / JP | 05 /
Nagahara, Seiji c/o Tokyo Electron Kyushu Limited Akasaka Biz Tower 3-1, Akasaka 5-chome Minato-ku Tokyo-to / JP | [2018/31] | Representative(s) | Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastraße 30 81925 München / DE | [2018/31] | Application number, filing date | 17205648.3 | 06.12.2017 | [2018/31] | Priority number, date | JP20160240855 | 13.12.2016 Original published format: JP 2016240855 | JP20170158220 | 18.08.2017 Original published format: JP 2017158220 | [2018/31] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP3355117 | Date: | 01.08.2018 | Language: | EN | [2018/31] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 02.07.2018 | Classification | IPC: | G03F7/20, H01L21/67, H01L21/677 | [2019/14] | CPC: |
G03F7/201 (EP);
G03F7/2002 (KR);
G03F7/7015 (CN);
G03F7/70533 (US);
G03F7/7005 (EP);
G03F7/70133 (EP);
G03F7/70391 (KR);
G03F7/7055 (CN,US);
G03F7/70558 (EP);
G03F7/70725 (US);
G03F7/70733 (CN);
G03F7/70775 (US);
G03F7/70808 (US);
G03F7/70825 (KR);
H01L21/67115 (EP);
H01L21/6776 (EP)
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| Former IPC [2018/31] | G03F7/20, H01L21/67 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2019/02] |
| Former [2018/31] | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | MA | Not yet paid | MD | Not yet paid | TN | Not yet paid | Title | German: | OPTISCHE VERARBEITUNGSVORRICHTUNG UND SUBSTRATVERARBEITUNGSVORRICHTUNG | [2018/31] | English: | OPTICAL PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS | [2018/31] | French: | APPAREIL DE TRAITEMENT OPTIQUE ET APPAREIL DE TRAITEMENT DE SUBSTRATS | [2018/31] | Examination procedure | 24.10.2018 | Amendment by applicant (claims and/or description) | 29.11.2018 | Examination requested [2019/02] | 29.11.2018 | Date on which the examining division has become responsible | 24.04.2019 | Communication of intention to grant the patent | 05.09.2019 | Application deemed to be withdrawn, date of legal effect [2020/11] | 11.10.2019 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [2020/11] | Fees paid | Penalty fee | Additional fee for renewal fee | 31.12.2019 | 03 M06 Not yet paid |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]US7573054 (IWASHITA YASUHARU [JP], et al) [A] 1-12 * paragraphs [0052] - [0055]; figures 8A-C, 9A-B *; | [A]JP2011095718 (NSK LTD) [A] 1-12 * abstract ** paragraphs [0020] - [0023]; figure 3 *; | [AD]JP2015156472 (TOKYO ELECTRON LTD) [AD] 1-12 * figures 3-5,7 *; | [A]US2016085154 (FUKUOKA TETSUO [JP], et al) [A] 1-12 * paragraph [0052]; figure 4 * * paragraphs [0070] - [0071]; figures 15-17 *; | [AD]US2016327869 (NAGAHARA SEIJI [JP], et al) [AD] 1-12 * paragraphs [0038] - [0048]; figures 3-5,7 * | by applicant | JP2015156472 |