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EP3374540
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EP About this file: EP3374540
| EP3374540 - MATERIAL DEPOSITION ARRANGEMENT, VACUUM DEPOSITION SYSTEM AND METHOD THEREFOR [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 14.02.2020 Database last updated on 22.08.2024 | |
| Former | Request for examination was made Status updated on 17.08.2018 | ||
| Former | The international publication has been made Status updated on 11.08.2018 | ||
| Former | unknown Status updated on 10.02.2017 | Most recent event Tooltip | 14.02.2020 | Application deemed to be withdrawn | published on 18.03.2020 [2020/12] | Applicant(s) | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, CA 95024 / US | [2018/38] | Inventor(s) | 01 /
SALUGU, Srinivas H No 9-52/12, Bandi Sattaih colony Peerzadiguda Hyderabad, Pin 500039 / IN | 02 /
BANGERT, Stefan Seidenrötherstr. 6 36396 Steinau / DE | 03 /
KELLER, Stefan Gabelsbergerstr. 26 63814 Mainaschaff / DE | [2018/38] | Representative(s) | Zimmermann & Partner Patentanwälte mbB Josephspitalstr. 15 80331 München / DE | [2018/38] | Application number, filing date | 17702372.8 | 31.01.2017 | [2018/38] | WO2017EP52048 | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2018141365 | Date: | 09.08.2018 | Language: | EN | [2018/32] | Type: | A1 Application with search report | No.: | EP3374540 | Date: | 19.09.2018 | Language: | EN | The application published by WIPO in one of the EPO official languages on 09.08.2018 takes the place of the publication of the European patent application. | [2018/38] | Search report(s) | International search report - published on: | EP | 09.08.2018 | Classification | IPC: | C23C14/24, C23C14/54, H01L51/00 | [2018/38] | CPC: |
C23C14/243 (EP,KR,US);
C23C14/543 (EP,KR,US);
H10K71/164 (EP,KR,US)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2018/38] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | MA | Not yet paid | MD | Not yet paid | Title | German: | MATERIALABSCHEIDUNGSANORDNUNG, VAKUUMABSCHEIDUNGSSYSTEM UND VERFAHREN DAFÜR | [2018/38] | English: | MATERIAL DEPOSITION ARRANGEMENT, VACUUM DEPOSITION SYSTEM AND METHOD THEREFOR | [2018/38] | French: | AGENCEMENT POUR DÉPÔT DE MATÉRIAU, SYSTÈME DE DÉPÔT SOUS VIDE ET PROCÉDÉ ASSOCIÉ | [2018/38] | Entry into regional phase | 03.07.2017 | National basic fee paid | 03.07.2017 | Designation fee(s) paid | 03.07.2017 | Examination fee paid | Examination procedure | 03.07.2017 | Examination requested [2018/38] | 03.07.2017 | Date on which the examining division has become responsible | 28.11.2017 | Amendment by applicant (claims and/or description) | 01.08.2019 | Application deemed to be withdrawn, date of legal effect [2020/12] | 08.11.2019 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2020/12] | Fees paid | Penalty fee | Additional fee for renewal fee | 31.01.2019 | 03 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [XY]US2010248416 (PRIDDY SCOTT WAYNE [US], et al); | [Y]EP2747122 (APPLIED MATERIALS INC [US]); | [Y]US2017005297 (BANGERT STEFAN [DE], et al) |