-
EP3411899
European procedure
- EP About this file
- EP Legal status
- EP Federated register
- EP Event history
- EP Citations
- EP Patent family
- EP All documents
Extract from the Register of European Patents
EP About this file: EP3411899
| EP3411899 - HYBRID MASK FOR DEEP ETCHING [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 27.11.2020 Database last updated on 31.08.2024 | |
| Former | Request for examination was made Status updated on 09.11.2018 | ||
| Former | The international publication has been made Status updated on 11.08.2017 | ||
| Former | unknown Status updated on 17.02.2017 | Most recent event Tooltip | 27.11.2020 | Application deemed to be withdrawn | published on 30.12.2020 [2020/53] | Applicant(s) | For all designated states King Abdullah University of Science and Technology 4700 King Abdullah University of Science and Technology Thuwal 23955-6900 / SA | [2018/50] | Inventor(s) | 01 /
GHONEIM, Mohamed Tarek 278B Sudan Street Apt.2 2nd Floor Mohandessin Giza / EG | [2018/50] | Representative(s) | Ipsilon Le Centralis 63, avenue du Général Leclerc 92340 Bourg-la-Reine / FR | [N/P] |
| Former [2018/50] | Peguet, Wilfried Ipsilon Le Centralis 63, avenue du Général Leclerc 92340 Bourg-la-Reine / FR | Application number, filing date | 17703800.7 | 26.01.2017 | [2018/50] | WO2017IB50417 | Priority number, date | US201662289895P | 01.02.2016 Original published format: US 201662289895 P | [2018/50] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2017134545 | Date: | 10.08.2017 | Language: | EN | [2017/32] | Type: | A1 Application with search report | No.: | EP3411899 | Date: | 12.12.2018 | Language: | EN | The application published by WIPO in one of the EPO official languages on 10.08.2017 takes the place of the publication of the European patent application. | [2018/50] | Search report(s) | International search report - published on: | EP | 10.08.2017 | Classification | IPC: | H01L21/308, H01L21/768 | [2018/50] | CPC: |
H01L21/3081 (EP,US);
H01L21/0272 (EP,US);
H01L21/0331 (EP,US);
H01L21/76898 (EP,US);
H01L21/56 (US);
H01L24/03 (US)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2018/50] | Title | German: | HYBRIDE MASKE FÜR TIEFÄTZEN | [2018/50] | English: | HYBRID MASK FOR DEEP ETCHING | [2018/50] | French: | MASQUE HYBRIDE POUR GRAVURE PROFONDE | [2018/50] | Entry into regional phase | 08.08.2018 | National basic fee paid | 08.08.2018 | Designation fee(s) paid | 08.08.2018 | Examination fee paid | Examination procedure | 08.08.2018 | Amendment by applicant (claims and/or description) | 08.08.2018 | Examination requested [2018/50] | 08.08.2018 | Date on which the examining division has become responsible | 01.08.2020 | Application deemed to be withdrawn, date of legal effect [2020/53] | 26.08.2020 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2020/53] | Fees paid | Renewal fee | 08.08.2018 | Renewal fee patent year 03 | Penalty fee | Additional fee for renewal fee | 31.01.2020 | 04 M06 Not yet paid |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [X]EP0232894 (SELENIA IND ELETTRONICHE [IT]) [X] 1-3 * page 3, paragraph last - page 5, paragraph 3; figure 2 *; | [Y]WO0179933 (OBDUCAT AB [SE], et al) [Y] 4 * page 10, line 30 - page 11, line 23; figure 4 *; | [Y]US2012115331 (KOH CHA-WON [KR], et al) [Y] 7-10* figure 3 *; | [X]US2014225233 (HIRSCHLER JOACHIM [AT], et al) [X] 1,5,6 * paragraph [0003]; figure 3 *; | [XY]US2015380251 (GLODDE MARTIN [US], et al) [X] 1,3 * paragraphs [0015] - [0021] - [0 47]; figures 4-6 * [Y] 4,7-10 |