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Extract from the Register of European Patents

EP About this file: EP3423614

EP3423614 - METHOD FOR FABRICATING A GROUP 13 NITRIDE SEMICONDUCTOR SUBSTRATE AND GROUP 13 NITRIDE SEMICONDUCTOR SUBSTRATE [Right-click to bookmark this link]
Former [2019/02]METHOD FOR FABRICATING A SEMICONDUCTOR SUBSTRATE
[2020/01]
StatusNo opposition filed within time limit
Status updated on  15.10.2021
Database last updated on 16.09.2024
FormerThe patent has been granted
Status updated on  06.11.2020
FormerGrant of patent is intended
Status updated on  04.08.2020
FormerExamination is in progress
Status updated on  20.06.2020
FormerGrant of patent is intended
Status updated on  17.06.2020
FormerExamination is in progress
Status updated on  08.06.2020
FormerGrant of patent is intended
Status updated on  03.06.2020
FormerExamination is in progress
Status updated on  06.05.2020
FormerGrant of patent is intended
Status updated on  22.01.2020
FormerExamination is in progress
Status updated on  02.07.2019
FormerRequest for examination was made
Status updated on  07.12.2018
FormerThe international publication has been made
Status updated on  08.09.2017
Formerunknown
Status updated on  07.03.2017
Most recent event   Tooltip13.09.2024Lapse of the patent in a contracting state
New state(s): MT		published on 16.10.2024 [2024/42]
Applicant(s)For all designated states
Saint-Gobain Lumilog
18 Avenue d'Alsace
Les Miroirs
92400 Courbevoie / FR
[2019/02]
Inventor(s)01 / BEAUMONT, Bernard
46 domaine de l'Istre
Avenue de l'Hôtel de Ville
06530 Le Tignet / FR
02 / FAURIE, Jean-Pierre
200 Impasse des Chênes
06560 Valbonne / FR
 [2019/02]
Representative(s)Regimbeau
20, rue de Chazelles
75847 Paris Cedex 17 / FR
[2019/02]
Application number, filing date17707352.502.03.2017
[2019/02]
WO2017EP54918
Priority number, dateFR2016005185304.03.2016         Original published format: FR 1651853
[2019/02]
Filing languageFR
Procedural languageFR
PublicationType: A1 Application with search report
No.:WO2017149079
Date:08.09.2017
Language:FR
[2017/36]
Type: A1 Application with search report 
No.:EP3423614
Date:09.01.2019
Language:FR
The application published by WIPO in one of the EPO official languages on 08.09.2017 takes the place of the publication of the European patent application.
[2019/02]
Type: B1 Patent specification 
No.:EP3423614
Date:09.12.2020
Language:FR
[2020/50]
Search report(s)International search report - published on:EP08.09.2017
ClassificationIPC:C30B29/40, H01L21/20
[2019/02]
CPC:
H01L21/02458 (EP,US); C30B25/183 (EP,US); C30B29/406 (EP,US);
H01L21/02513 (EP,US); H01L21/0254 (EP,US); H01L21/02595 (US);
H01L21/02598 (US); H01L21/02639 (EP,US); H01L21/02647 (EP);
H01L21/02658 (EP,US); H01L21/02664 (EP,US) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2019/02]
Extension statesBANot yet paid
MENot yet paid
Validation statesMANot yet paid
MDNot yet paid
TitleGerman:VERFAHREN ZUR HERSTELLUNG EINES III-NITRID HALBLEITERSUBSTRATS UND III-NITRID HALBLEITERSUBSTRAT[2020/01]
English:METHOD FOR FABRICATING A GROUP 13 NITRIDE SEMICONDUCTOR SUBSTRATE AND GROUP 13 NITRIDE SEMICONDUCTOR SUBSTRATE[2020/01]
French:PROCEDE DE FABRICATION D'UN SUBSTRAT SEMI-CONDUCTEUR DE NITRURE D'ÉLÉMENT DE GROUPE 13 ET SUBSTRAT SEMI-CONDUCTEUR DE NITRURE D'ÉLÉMENT DE GROUPE 13[2020/25]
Former [2019/02]VERFAHREN ZUR HERSTELLUNG EINES HALBLEITERSUBSTRATS
Former [2019/02]METHOD FOR FABRICATING A SEMICONDUCTOR SUBSTRATE
Former [2019/02]PROCEDE DE FABRICATION D'UN SUBSTRAT SEMI-CONDUCTEUR
Entry into regional phase04.10.2018National basic fee paid 
04.10.2018Designation fee(s) paid 
04.10.2018Examination fee paid 
Examination procedure04.10.2018Examination requested  [2019/02]
04.10.2018Date on which the examining division has become responsible
01.04.2019Amendment by applicant (claims and/or description)
05.07.2019Despatch of a communication from the examining division (Time limit: M01)
16.07.2019Reply to a communication from the examining division
26.07.2019Despatch of a communication from the examining division (Time limit: M04)
15.11.2019Reply to a communication from the examining division
23.01.2020Communication of intention to grant the patent
04.05.2020Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO
05.08.2020Communication of intention to grant the patent
03.11.2020Fee for grant paid
03.11.2020Fee for publishing/printing paid
03.11.2020Receipt of the translation of the claim(s)
Opposition(s)10.09.2021No opposition filed within time limit [2021/46]
Fees paidRenewal fee
04.10.2018Renewal fee patent year 03
26.03.2020Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU02.03.2017
AL09.12.2020
AT09.12.2020
CY09.12.2020
CZ09.12.2020
DK09.12.2020
EE09.12.2020
ES09.12.2020
FI09.12.2020
HR09.12.2020
IT09.12.2020
LT09.12.2020
LV09.12.2020
MC09.12.2020
MK09.12.2020
MT09.12.2020
NL09.12.2020
PL09.12.2020
RO09.12.2020
RS09.12.2020
SE09.12.2020
SI09.12.2020
SK09.12.2020
SM09.12.2020
TR09.12.2020
IE02.03.2021
LU02.03.2021
BG09.03.2021
GB09.03.2021
NO09.03.2021
GR10.03.2021
BE31.03.2021
CH31.03.2021
FR31.03.2021
LI31.03.2021
IS09.04.2021
PT09.04.2021
[2024/42]
Former [2024/29]HU02.03.2017
AL09.12.2020
AT09.12.2020
CY09.12.2020
CZ09.12.2020
DK09.12.2020
EE09.12.2020
ES09.12.2020
FI09.12.2020
HR09.12.2020
IT09.12.2020
LT09.12.2020
LV09.12.2020
MC09.12.2020
MK09.12.2020
NL09.12.2020
PL09.12.2020
RO09.12.2020
RS09.12.2020
SE09.12.2020
SI09.12.2020
SK09.12.2020
SM09.12.2020
TR09.12.2020
IE02.03.2021
LU02.03.2021
BG09.03.2021
GB09.03.2021
NO09.03.2021
GR10.03.2021
BE31.03.2021
CH31.03.2021
FR31.03.2021
LI31.03.2021
IS09.04.2021
PT09.04.2021
Former [2024/22]HU02.03.2017
AL09.12.2020
AT09.12.2020
CY09.12.2020
CZ09.12.2020
DK09.12.2020
EE09.12.2020
ES09.12.2020
FI09.12.2020
HR09.12.2020
IT09.12.2020
LT09.12.2020
LV09.12.2020
MC09.12.2020
MK09.12.2020
NL09.12.2020
PL09.12.2020
RO09.12.2020
RS09.12.2020
SE09.12.2020
SI09.12.2020
SK09.12.2020
SM09.12.2020
IE02.03.2021
LU02.03.2021
BG09.03.2021
GB09.03.2021
NO09.03.2021
GR10.03.2021
BE31.03.2021
CH31.03.2021
FR31.03.2021
LI31.03.2021
IS09.04.2021
PT09.04.2021
Former [2023/33]HU02.03.2017
AL09.12.2020
AT09.12.2020
CY09.12.2020
CZ09.12.2020
DK09.12.2020
EE09.12.2020
ES09.12.2020
FI09.12.2020
HR09.12.2020
IT09.12.2020
LT09.12.2020
LV09.12.2020
MC09.12.2020
NL09.12.2020
PL09.12.2020
RO09.12.2020
RS09.12.2020
SE09.12.2020
SI09.12.2020
SK09.12.2020
SM09.12.2020
IE02.03.2021
LU02.03.2021
BG09.03.2021
GB09.03.2021
NO09.03.2021
GR10.03.2021
BE31.03.2021
CH31.03.2021
FR31.03.2021
LI31.03.2021
IS09.04.2021
PT09.04.2021
Former [2023/30]AL09.12.2020
AT09.12.2020
CY09.12.2020
CZ09.12.2020
DK09.12.2020
EE09.12.2020
ES09.12.2020
FI09.12.2020
HR09.12.2020
IT09.12.2020
LT09.12.2020
LV09.12.2020
MC09.12.2020
NL09.12.2020
PL09.12.2020
RO09.12.2020
RS09.12.2020
SE09.12.2020
SI09.12.2020
SK09.12.2020
SM09.12.2020
IE02.03.2021
LU02.03.2021
BG09.03.2021
GB09.03.2021
NO09.03.2021
GR10.03.2021
BE31.03.2021
CH31.03.2021
FR31.03.2021
LI31.03.2021
IS09.04.2021
PT09.04.2021
Former [2022/34]AL09.12.2020
AT09.12.2020
CZ09.12.2020
DK09.12.2020
EE09.12.2020
ES09.12.2020
FI09.12.2020
HR09.12.2020
IT09.12.2020
LT09.12.2020
LV09.12.2020
MC09.12.2020
NL09.12.2020
PL09.12.2020
RO09.12.2020
RS09.12.2020
SE09.12.2020
SI09.12.2020
SK09.12.2020
SM09.12.2020
IE02.03.2021
LU02.03.2021
BG09.03.2021
GB09.03.2021
NO09.03.2021
GR10.03.2021
BE31.03.2021
CH31.03.2021
FR31.03.2021
LI31.03.2021
IS09.04.2021
PT09.04.2021
Former [2022/23]AL09.12.2020
AT09.12.2020
CZ09.12.2020
DK09.12.2020
EE09.12.2020
ES09.12.2020
FI09.12.2020
HR09.12.2020
IT09.12.2020
LT09.12.2020
LV09.12.2020
MC09.12.2020
NL09.12.2020
PL09.12.2020
RO09.12.2020
RS09.12.2020
SE09.12.2020
SI09.12.2020
SK09.12.2020
SM09.12.2020
IE02.03.2021
LU02.03.2021
BG09.03.2021
GB09.03.2021
NO09.03.2021
GR10.03.2021
CH31.03.2021
FR31.03.2021
LI31.03.2021
IS09.04.2021
PT09.04.2021
Former [2022/10]AL09.12.2020
AT09.12.2020
CZ09.12.2020
DK09.12.2020
EE09.12.2020
ES09.12.2020
FI09.12.2020
HR09.12.2020
IT09.12.2020
LT09.12.2020
LV09.12.2020
MC09.12.2020
NL09.12.2020
PL09.12.2020
RO09.12.2020
RS09.12.2020
SE09.12.2020
SI09.12.2020
SK09.12.2020
SM09.12.2020
IE02.03.2021
LU02.03.2021
BG09.03.2021
GB09.03.2021
NO09.03.2021
GR10.03.2021
CH31.03.2021
FR31.03.2021
LI31.03.2021
PT09.04.2021
Former [2022/08]AL09.12.2020
AT09.12.2020
CZ09.12.2020
DK09.12.2020
EE09.12.2020
ES09.12.2020
FI09.12.2020
HR09.12.2020
IT09.12.2020
LT09.12.2020
LV09.12.2020
MC09.12.2020
NL09.12.2020
PL09.12.2020
RO09.12.2020
RS09.12.2020
SE09.12.2020
SI09.12.2020
SK09.12.2020
SM09.12.2020
IE02.03.2021
LU02.03.2021
BG09.03.2021
GB09.03.2021
NO09.03.2021
GR10.03.2021
FR31.03.2021
IS09.04.2021
PT09.04.2021
Former [2022/07]AL09.12.2020
AT09.12.2020
CZ09.12.2020
DK09.12.2020
EE09.12.2020
FI09.12.2020
HR09.12.2020
IT09.12.2020
LT09.12.2020
LV09.12.2020
MC09.12.2020
NL09.12.2020
PL09.12.2020
RO09.12.2020
RS09.12.2020
SE09.12.2020
SI09.12.2020
SK09.12.2020
SM09.12.2020
IE02.03.2021
BG09.03.2021
NO09.03.2021
GR10.03.2021
IS09.04.2021
PT09.04.2021
Former [2021/49]AL09.12.2020
AT09.12.2020
CZ09.12.2020
DK09.12.2020
EE09.12.2020
FI09.12.2020
HR09.12.2020
IT09.12.2020
LT09.12.2020
LV09.12.2020
MC09.12.2020
NL09.12.2020
PL09.12.2020
RO09.12.2020
RS09.12.2020
SE09.12.2020
SI09.12.2020
SK09.12.2020
SM09.12.2020
BG09.03.2021
NO09.03.2021
GR10.03.2021
IS09.04.2021
PT09.04.2021
Former [2021/48]AL09.12.2020
AT09.12.2020
CZ09.12.2020
EE09.12.2020
FI09.12.2020
HR09.12.2020
IT09.12.2020
LT09.12.2020
LV09.12.2020
MC09.12.2020
NL09.12.2020
PL09.12.2020
RO09.12.2020
RS09.12.2020
SE09.12.2020
SK09.12.2020
SM09.12.2020
BG09.03.2021
NO09.03.2021
GR10.03.2021
IS09.04.2021
PT09.04.2021
Former [2021/45]AL09.12.2020
AT09.12.2020
CZ09.12.2020
EE09.12.2020
FI09.12.2020
HR09.12.2020
LT09.12.2020
LV09.12.2020
MC09.12.2020
NL09.12.2020
PL09.12.2020
RO09.12.2020
RS09.12.2020
SE09.12.2020
SK09.12.2020
SM09.12.2020
BG09.03.2021
NO09.03.2021
GR10.03.2021
IS09.04.2021
PT09.04.2021
Former [2021/42]AT09.12.2020
CZ09.12.2020
EE09.12.2020
FI09.12.2020
HR09.12.2020
LT09.12.2020
LV09.12.2020
NL09.12.2020
PL09.12.2020
RO09.12.2020
RS09.12.2020
SE09.12.2020
SK09.12.2020
SM09.12.2020
BG09.03.2021
NO09.03.2021
GR10.03.2021
IS09.04.2021
PT09.04.2021
Former [2021/39]AT09.12.2020
CZ09.12.2020
EE09.12.2020
FI09.12.2020
HR09.12.2020
LT09.12.2020
LV09.12.2020
NL09.12.2020
PL09.12.2020
RO09.12.2020
RS09.12.2020
SE09.12.2020
SK09.12.2020
SM09.12.2020
BG09.03.2021
NO09.03.2021
GR10.03.2021
PT09.04.2021
Former [2021/37]AT09.12.2020
CZ09.12.2020
EE09.12.2020
FI09.12.2020
HR09.12.2020
LT09.12.2020
LV09.12.2020
NL09.12.2020
RO09.12.2020
RS09.12.2020
SE09.12.2020
SK09.12.2020
SM09.12.2020
BG09.03.2021
NO09.03.2021
GR10.03.2021
PT09.04.2021
Former [2021/36]CZ09.12.2020
EE09.12.2020
FI09.12.2020
HR09.12.2020
LT09.12.2020
LV09.12.2020
NL09.12.2020
RO09.12.2020
RS09.12.2020
SE09.12.2020
SK09.12.2020
SM09.12.2020
BG09.03.2021
NO09.03.2021
GR10.03.2021
PT09.04.2021
Former [2021/35]CZ09.12.2020
FI09.12.2020
HR09.12.2020
LT09.12.2020
LV09.12.2020
NL09.12.2020
RO09.12.2020
RS09.12.2020
SE09.12.2020
SK09.12.2020
SM09.12.2020
BG09.03.2021
NO09.03.2021
GR10.03.2021
PT09.04.2021
Former [2021/33]FI09.12.2020
HR09.12.2020
LT09.12.2020
LV09.12.2020
NL09.12.2020
RS09.12.2020
SE09.12.2020
SM09.12.2020
BG09.03.2021
NO09.03.2021
GR10.03.2021
PT09.04.2021
Former [2021/32]FI09.12.2020
HR09.12.2020
LV09.12.2020
NL09.12.2020
RS09.12.2020
SE09.12.2020
SM09.12.2020
BG09.03.2021
NO09.03.2021
GR10.03.2021
Former [2021/30]FI09.12.2020
HR09.12.2020
LV09.12.2020
NL09.12.2020
RS09.12.2020
SE09.12.2020
BG09.03.2021
NO09.03.2021
GR10.03.2021
Former [2021/28]FI09.12.2020
HR09.12.2020
LV09.12.2020
RS09.12.2020
SE09.12.2020
BG09.03.2021
NO09.03.2021
GR10.03.2021
Former [2021/23]FI09.12.2020
LV09.12.2020
RS09.12.2020
SE09.12.2020
BG09.03.2021
NO09.03.2021
GR10.03.2021
Former [2021/22]FI09.12.2020
RS09.12.2020
NO09.03.2021
Former [2021/20]FI09.12.2020
Cited inInternational search[IA]US2007259504  (BOUR DAVID [US], et al) [I] 1-11,13-17 * paragraph [0007] - paragraph [0099]; figures 2-7 * [A] 12;
 [IA]WO2010112540  (SOITEC SILICON ON INSULATOR [FR], et al) [I] 1-11,13-16 * paragraph [0006] - paragraph [0097]; figures 1, 2 * [A] 12;
 [IA]FR2944137  (SOITEC SILICON ON INSULATOR [FR], et al) [I] 1-11,13-16 * paragraph [0006] - paragraph [0097]; figures 1-2 * [A] 12;
 [IA]WO2012052513  (KEWAR HOLDINGS S A [LU], et al) [I] 1-11,13-16 * page 3, line 24 - page 6, line 11; figures 1-4 *[A] 12;
 [IA]US2014054595  (HASHIMOTO TADAO [US]) [I] 1-11,13-16 * paragraph [0018] - paragraph [0037]; figures 1-2 * [A] 12
ExaminationJP2011213512
by applicantWO9920816
 EP1338683
 EP1699951
 EP1977028
 US2010124814
 US2012015143
 US8349711
 WO2013144709
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.