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EP3410209

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Extract from the Register of European Patents

EP About this file: EP3410209

EP3410209 - METHOD OF FORMING RESIST PATTERN [Right-click to bookmark this link]
Former [2018/49]	RESIST PATTERN FORMING METHOD
	[2020/45]
Status	No opposition filed within time limit Status updated on 14.01.2022 Database last updated on 05.10.2024
Former	The patent has been granted Status updated on 05.02.2021
Former	Grant of patent is intended Status updated on 27.10.2020
Former	Request for examination was made Status updated on 26.08.2020
Former	Grant of patent is intended Status updated on 15.06.2020
Former	Request for examination was made Status updated on 02.11.2018
Former	The international publication has been made Status updated on 04.08.2017
Most recent event Tooltip	13.09.2024	Lapse of the patent in a contracting state New state(s): MT	published on 16.10.2024 [2024/42]
Applicant(s)	For all designated states Zeon Corporation 6-2, Marunouchi 1-chome Chiyoda-ku Tokyo 100-8246 / JP
	[2018/49]
Inventor(s)	01 / HOSHINO Manabu c/o ZEON CORPORATION 6-2 Marunouchi 1-chome Chiyoda-ku Tokyo 100-8246 / JP
	[2018/49]
Representative(s)	Maiwald GmbH Elisenhof Elisenstraße 3 80335 München / DE
	[N/P]
Former [2018/49]	Maiwald Patent- und Rechtsanwaltsgesellschaft mbH Elisenhof Elisenstraße 3 80335 München / DE
Application number, filing date	17744102.9	20.01.2017
	[2018/49]
	WO2017JP02029
Priority number, date	JP20160016596	29.01.2016 Original published format: JP 2016016596
	[2018/49]
Filing language	JA
Procedural language	EN
Publication	Type:	A1 Application with search report
	No.:	WO2017130872
	Date:	03.08.2017
	Language:	JA
	[2017/31]
	Type:	A1 Application with search report
	No.:	EP3410209
	Date:	05.12.2018
	Language:	EN
	[2018/49]
	Type:	B1 Patent specification
	No.:	EP3410209
	Date:	10.03.2021
	Language:	EN
	[2021/10]
Search report(s)	International search report - published on:	JP	03.08.2017
	(Supplementary) European search report - dispatched on:	EP	13.09.2019
Classification	IPC:	G03F7/039, G03F7/004, G03F7/32, H01L21/027	[2019/42]
	CPC:	G03F7/039 (EP,KR,US); G03F7/0392 (US); G03F7/0046 (EP,US); G03F7/20 (KR,US); G03F7/32 (KR,US); G03F7/325 (EP,US); (+) H01L21/027 (EP,US); H01L21/0274 (KR) (-)
	Former IPC [2018/49]	G03F7/039, G03F7/20, G03F7/32, H01L21/027
Designated contracting states	AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2018/49]
Extension states	BA	Not yet paid
	ME	Not yet paid
Validation states	MA	Not yet paid
	MD	Not yet paid
Title	German:	VERFAHREN ZUR BILDUNG EINER RESISTSTRUKTUR	[2018/49]
	English:	METHOD OF FORMING RESIST PATTERN	[2020/48]
	French:	PROCÉDÉ DE FORMATION DE MOTIF RÉSISTANT	[2018/49]
	Former [2018/49]	RESIST PATTERN FORMING METHOD
Entry into regional phase	11.06.2018	Translation filed
	11.06.2018	National basic fee paid
	11.06.2018	Search fee paid
	11.06.2018	Designation fee(s) paid
	11.06.2018	Examination fee paid
Examination procedure	deleted	Date on which the examining division has become responsible
	11.06.2018	Examination requested [2018/49]
	16.06.2020	Communication of intention to grant the patent
	25.08.2020	Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO
	28.10.2020	Communication of intention to grant the patent
	27.01.2021	Fee for grant paid
	27.01.2021	Fee for publishing/printing paid
	27.01.2021	Receipt of the translation of the claim(s)
Opposition(s)	13.12.2021	No opposition filed within time limit [2022/07]
Fees paid	Renewal fee
	29.01.2019	Renewal fee patent year 03
	14.01.2020	Renewal fee patent year 04
	13.01.2021	Renewal fee patent year 05
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition Tooltip	HU	20.01.2017
	AL	10.03.2021
	AT	10.03.2021
	CY	10.03.2021
	CZ	10.03.2021
	DK	10.03.2021
	EE	10.03.2021
	ES	10.03.2021
	FI	10.03.2021
	HR	10.03.2021
	IT	10.03.2021
	LT	10.03.2021
	LV	10.03.2021
	MC	10.03.2021
	MK	10.03.2021
	MT	10.03.2021
	NL	10.03.2021
	PL	10.03.2021
	RO	10.03.2021
	RS	10.03.2021
	SE	10.03.2021
	SI	10.03.2021
	SK	10.03.2021
	SM	10.03.2021
	TR	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
	IS	10.07.2021
	PT	12.07.2021
	[2024/42]
Former [2024/29]	HU	20.01.2017
	AL	10.03.2021
	AT	10.03.2021
	CY	10.03.2021
	CZ	10.03.2021
	DK	10.03.2021
	EE	10.03.2021
	ES	10.03.2021
	FI	10.03.2021
	HR	10.03.2021
	IT	10.03.2021
	LT	10.03.2021
	LV	10.03.2021
	MC	10.03.2021
	MK	10.03.2021
	NL	10.03.2021
	PL	10.03.2021
	RO	10.03.2021
	RS	10.03.2021
	SE	10.03.2021
	SI	10.03.2021
	SK	10.03.2021
	SM	10.03.2021
	TR	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
	IS	10.07.2021
	PT	12.07.2021
Former [2024/22]	HU	20.01.2017
	AL	10.03.2021
	AT	10.03.2021
	CY	10.03.2021
	CZ	10.03.2021
	DK	10.03.2021
	EE	10.03.2021
	ES	10.03.2021
	FI	10.03.2021
	HR	10.03.2021
	IT	10.03.2021
	LT	10.03.2021
	LV	10.03.2021
	MC	10.03.2021
	MK	10.03.2021
	NL	10.03.2021
	PL	10.03.2021
	RO	10.03.2021
	RS	10.03.2021
	SE	10.03.2021
	SI	10.03.2021
	SK	10.03.2021
	SM	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
	IS	10.07.2021
	PT	12.07.2021
Former [2024/20]	HU	20.01.2017
	AL	10.03.2021
	AT	10.03.2021
	CY	10.03.2021
	CZ	10.03.2021
	DK	10.03.2021
	EE	10.03.2021
	ES	10.03.2021
	FI	10.03.2021
	HR	10.03.2021
	IT	10.03.2021
	LT	10.03.2021
	LV	10.03.2021
	MC	10.03.2021
	NL	10.03.2021
	PL	10.03.2021
	RO	10.03.2021
	RS	10.03.2021
	SE	10.03.2021
	SI	10.03.2021
	SK	10.03.2021
	SM	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
	IS	10.07.2021
	PT	12.07.2021
Former [2024/18]	HU	20.01.2017
	AL	10.03.2021
	AT	10.03.2021
	CZ	10.03.2021
	DK	10.03.2021
	EE	10.03.2021
	ES	10.03.2021
	FI	10.03.2021
	HR	10.03.2021
	IT	10.03.2021
	LT	10.03.2021
	LV	10.03.2021
	MC	10.03.2021
	NL	10.03.2021
	PL	10.03.2021
	RO	10.03.2021
	RS	10.03.2021
	SE	10.03.2021
	SI	10.03.2021
	SK	10.03.2021
	SM	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
	IS	10.07.2021
	PT	12.07.2021
Former [2022/39]	AL	10.03.2021
	AT	10.03.2021
	CZ	10.03.2021
	DK	10.03.2021
	EE	10.03.2021
	ES	10.03.2021
	FI	10.03.2021
	HR	10.03.2021
	IT	10.03.2021
	LT	10.03.2021
	LV	10.03.2021
	MC	10.03.2021
	NL	10.03.2021
	PL	10.03.2021
	RO	10.03.2021
	RS	10.03.2021
	SE	10.03.2021
	SI	10.03.2021
	SK	10.03.2021
	SM	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
	IS	10.07.2021
	PT	12.07.2021
Former [2022/23]	AL	10.03.2021
	AT	10.03.2021
	CZ	10.03.2021
	DK	10.03.2021
	EE	10.03.2021
	ES	10.03.2021
	FI	10.03.2021
	HR	10.03.2021
	IT	10.03.2021
	LT	10.03.2021
	LV	10.03.2021
	NL	10.03.2021
	PL	10.03.2021
	RO	10.03.2021
	RS	10.03.2021
	SE	10.03.2021
	SI	10.03.2021
	SK	10.03.2021
	SM	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
	IS	10.07.2021
	PT	12.07.2021
Former [2022/13]	AL	10.03.2021
	AT	10.03.2021
	CZ	10.03.2021
	DK	10.03.2021
	EE	10.03.2021
	ES	10.03.2021
	FI	10.03.2021
	HR	10.03.2021
	LT	10.03.2021
	LV	10.03.2021
	NL	10.03.2021
	PL	10.03.2021
	RO	10.03.2021
	RS	10.03.2021
	SE	10.03.2021
	SI	10.03.2021
	SK	10.03.2021
	SM	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
	PT	12.07.2021
Former [2022/10]	AL	10.03.2021
	AT	10.03.2021
	CZ	10.03.2021
	DK	10.03.2021
	EE	10.03.2021
	ES	10.03.2021
	FI	10.03.2021
	HR	10.03.2021
	LT	10.03.2021
	LV	10.03.2021
	NL	10.03.2021
	PL	10.03.2021
	RO	10.03.2021
	RS	10.03.2021
	SE	10.03.2021
	SK	10.03.2021
	SM	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
	PT	12.07.2021
Former [2022/08]	AL	10.03.2021
	AT	10.03.2021
	CZ	10.03.2021
	DK	10.03.2021
	EE	10.03.2021
	ES	10.03.2021
	FI	10.03.2021
	HR	10.03.2021
	LT	10.03.2021
	LV	10.03.2021
	NL	10.03.2021
	PL	10.03.2021
	RO	10.03.2021
	RS	10.03.2021
	SE	10.03.2021
	SK	10.03.2021
	SM	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
	IS	10.07.2021
	PT	12.07.2021
Former [2022/07]	AL	10.03.2021
	AT	10.03.2021
	CZ	10.03.2021
	EE	10.03.2021
	FI	10.03.2021
	HR	10.03.2021
	LT	10.03.2021
	LV	10.03.2021
	NL	10.03.2021
	PL	10.03.2021
	RO	10.03.2021
	RS	10.03.2021
	SE	10.03.2021
	SK	10.03.2021
	SM	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
	IS	10.07.2021
	PT	12.07.2021
Former [2021/52]	AT	10.03.2021
	CZ	10.03.2021
	EE	10.03.2021
	FI	10.03.2021
	HR	10.03.2021
	LT	10.03.2021
	LV	10.03.2021
	NL	10.03.2021
	PL	10.03.2021
	RO	10.03.2021
	RS	10.03.2021
	SE	10.03.2021
	SK	10.03.2021
	SM	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
	IS	10.07.2021
	PT	12.07.2021
Former [2021/51]	AT	10.03.2021
	CZ	10.03.2021
	EE	10.03.2021
	FI	10.03.2021
	HR	10.03.2021
	LT	10.03.2021
	LV	10.03.2021
	NL	10.03.2021
	RO	10.03.2021
	RS	10.03.2021
	SE	10.03.2021
	SK	10.03.2021
	SM	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
	IS	10.07.2021
	PT	12.07.2021
Former [2021/50]	AT	10.03.2021
	CZ	10.03.2021
	EE	10.03.2021
	FI	10.03.2021
	HR	10.03.2021
	LT	10.03.2021
	LV	10.03.2021
	NL	10.03.2021
	RO	10.03.2021
	RS	10.03.2021
	SE	10.03.2021
	SK	10.03.2021
	SM	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
	PT	12.07.2021
Former [2021/48]	AT	10.03.2021
	CZ	10.03.2021
	EE	10.03.2021
	FI	10.03.2021
	HR	10.03.2021
	LT	10.03.2021
	LV	10.03.2021
	NL	10.03.2021
	RS	10.03.2021
	SE	10.03.2021
	SM	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
Former [2021/46]	AT	10.03.2021
	FI	10.03.2021
	HR	10.03.2021
	LT	10.03.2021
	LV	10.03.2021
	NL	10.03.2021
	RS	10.03.2021
	SE	10.03.2021
	SM	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
Former [2021/43]	FI	10.03.2021
	HR	10.03.2021
	LT	10.03.2021
	LV	10.03.2021
	NL	10.03.2021
	RS	10.03.2021
	SE	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
Former [2021/38]	FI	10.03.2021
	HR	10.03.2021
	LT	10.03.2021
	LV	10.03.2021
	RS	10.03.2021
	SE	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
Former [2021/37]	FI	10.03.2021
	HR	10.03.2021
	LT	10.03.2021
	LV	10.03.2021
	RS	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
Former [2021/36]	FI	10.03.2021
	HR	10.03.2021
	LT	10.03.2021
	BG	10.06.2021
	NO	10.06.2021
	GR	11.06.2021
Former [2021/35]	FI	10.03.2021
	HR	10.03.2021
	LT	10.03.2021
	NO	10.06.2021
Former [2021/33]	FI	10.03.2021
	LT	10.03.2021
	NO	10.06.2021
Documents cited:	Search	[A]JPH10228117 (NIPPON TELEGRAPH & TELEPHONE);
		[A]US2010203450 (FUJIWARA MASAKI [US], et al);
		[A]US2012107749 (TONO SEIJI [JP], et al);
		[A]JP2012150446 (HOYA CORP);
		[A]WO2013018569 (HOYA CORP [JP], et al)
	International search	[A]JPS53100774 (NIPPON TELEGRAPH & TELEPHONE);
		[Y]JPS57118243 (TOKYO SHIBAURA ELECTRIC CO);
		[A]JPS5949536 (TOKYO SHIBAURA ELECTRIC CO);
		[A]JPH02115852 (FUJITSU LTD);
		[A]JPH08203929 (SHARP KK);
		[Y]JP2011215243 (HOYA CORP);
		[A]JP2013064970 (FUJIFILM CORP)
	by applicant	JPH083636B
		WO2013145695

The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.

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