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Extract from the Register of European Patents

EP About this file: EP3542220

EP3542220 - HOLDER FOR HOLDING AND FOR PROTECTING A SIDE OF A PHOTOMASK OR A PHOTOMASK HAVING PELLICLE FROM A CLEANING MEDIUM, METHOD FOR CLEANING A PHOTOMASK OR A PHOTOMASK WITH PELLICLE AND DEVICE FOR OPENING AND CLOSING A HOLDER [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  20.08.2021
Database last updated on 24.08.2024
FormerThe patent has been granted
Status updated on  11.09.2020
FormerGrant of patent is intended
Status updated on  02.07.2020
FormerRequest for examination was made
Status updated on  23.08.2019
FormerThe international publication has been made
Status updated on  25.05.2018
Formerunknown
Status updated on  25.11.2017
Most recent event   Tooltip22.07.2022Lapse of the patent in a contracting state
New state(s): BE, MK		published on 24.08.2022  [2022/34]
Applicant(s)For all designated states
Süss Microtec Photomask Equipment GmbH & Co. KG
Ferdinand-von-Steinbeis-Ring 10
75447 Sternenfels / DE
[2019/39]
Inventor(s)01 / KRÜMBERG, Jens
c/o Süss Microtec Photomask Equipment GmbH & Co. KG
Ferdinand-von-Steinbeis-Ring 10
75447 Sternenfels / DE
02 / BESER, Adem
Hauptstrasse 152
75223 Niefern-Öschelbronn / DE
03 / DIETZE, Uwe
c/o Süss Microtec Photomask Equipment GmbH & Co. KG
Ferdinand-von-Steinbeis-Ring 10
75447 Sternenfels / DE
 [2019/42]
Former [2019/39]01 / KRÜMBERG, Jens
Klosterstrasse 2
76726 Germersheim / DE
02 / BESER, Adem
Hauptstrasse 152
75223 Niefern-Öschelbronn / DE
03 / DIETZE, Uwe
105 Rupen Drive
Austin, Texas 78734 / US
Representative(s)Carstens, Dirk Wilhelm
Wagner & Geyer Partnerschaft mbB
Patent- und Rechtsanwälte
Gewürzmühlstraße 5
80538 München / DE
[2019/39]
Application number, filing date17798234.516.11.2017
[2019/39]
WO2017EP79497
Priority number, dateNL2016201780616.11.2016         Original published format: NL 2017806
[2019/39]
Filing languageDE
Procedural languageDE
PublicationType: A1 Application with search report
No.:WO2018091601
Date:24.05.2018
Language:DE
[2018/21]
Type: A1 Application with search report 
No.:EP3542220
Date:25.09.2019
Language:DE
The application published by WIPO in one of the EPO official languages on 24.05.2018 takes the place of the publication of the European patent application.
[2019/39]
Type: B1 Patent specification 
No.:EP3542220
Date:14.10.2020
Language:DE
[2020/42]
Search report(s)International search report - published on:EP24.05.2018
ClassificationIPC:G03F1/82, G03F7/20, G03F1/66
[2020/29]
CPC:
G03F7/70983 (EP,KR,US); G03F1/66 (EP,KR,US); G03F1/82 (EP,KR,US);
G03F7/20 (RU); G03F7/70925 (EP,KR,US)
Former IPC [2019/39]G03F7/20, G03F1/66
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2019/39]
Extension statesBANot yet paid
MENot yet paid
Validation statesMANot yet paid
MDNot yet paid
TitleGerman:HALTER ZUR AUFNAHME UND ZUM SCHUTZ EINER SEITE EINER PHOTOMASKE ODER EINER PHOTOMASKE MIT PELLICLE GEGENÜBER EINEM REINIGUNGSMEDIUM, VERFAHREN ZUM REINIGEN EINER PHOTOMASKE ODER EINER PHOTOMASKE MIT PELLICLE UND VORRICHTUNG ZUM ÖFFNEN UND SCHLIESSEN EINES HALTERS[2020/29]
English:HOLDER FOR HOLDING AND FOR PROTECTING A SIDE OF A PHOTOMASK OR A PHOTOMASK HAVING PELLICLE FROM A CLEANING MEDIUM, METHOD FOR CLEANING A PHOTOMASK OR A PHOTOMASK WITH PELLICLE AND DEVICE FOR OPENING AND CLOSING A HOLDER[2019/39]
French:SUPPORT POUR RECEVOIR ET PROTÉGER UN CÔTÉ D'UN PHOTOMASQUE OU UN PHOTOMASQUE POURVU D'UNE PELLICULE CONTRE UN MILIEU DE NETTOYAGE, PROCÉDÉ DE NETTOYAGE D'UN PHOTOMASQUE OU D'UN PHOTOMASQUE POURVU D'UNE PELLICULE ET DISPOSITIF D'OUVERTURE ET DE FERMETURE D'UN SUPPORT[2019/39]
Former [2019/39]HALTER ZUR AUFNAHME UND ZUM SCHUTZ EINER SEITE EINER PHOTOMASKE ODER EINER PHOTOMASKE MIT PELLICLE GEGENÜBER EINEM REINIGUNGSMEDIUM, VERFAHREN ZUM REINIGEN EINER PHOTOMASKE ODER EINER PHOTOMASKE MIT PELLICLE UND VORRICHTUNG ZUM ÖFFNEN UND SCHLIEßEN EINES HALTERS
Entry into regional phase15.05.2019National basic fee paid 
15.05.2019Designation fee(s) paid 
15.05.2019Examination fee paid 
Examination procedure15.05.2019Examination requested  [2019/39]
15.05.2019Date on which the examining division has become responsible
19.12.2019Amendment by applicant (claims and/or description)
03.07.2020Communication of intention to grant the patent
08.09.2020Fee for grant paid
08.09.2020Fee for publishing/printing paid
08.09.2020Receipt of the translation of the claim(s)
Opposition(s)15.07.2021No opposition filed within time limit [2021/38]
Fees paidRenewal fee
28.10.2019Renewal fee patent year 03
Opt-out from the exclusive  Tooltip
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU16.11.2017
AL14.10.2020
CY14.10.2020
CZ14.10.2020
DK14.10.2020
EE14.10.2020
ES14.10.2020
FI14.10.2020
HR14.10.2020
IT14.10.2020
LT14.10.2020
LV14.10.2020
MC14.10.2020
MK14.10.2020
MT14.10.2020
PL14.10.2020
RO14.10.2020
RS14.10.2020
SE14.10.2020
SI14.10.2020
SK14.10.2020
SM14.10.2020
TR14.10.2020
IE16.11.2020
LU16.11.2020
BE30.11.2020
CH30.11.2020
LI30.11.2020
BG14.01.2021
NO14.01.2021
GR15.01.2021
IS14.02.2021
PT15.02.2021
[2022/33]
Former [2022/27]HU16.11.2017
AL14.10.2020
CY14.10.2020
CZ14.10.2020
DK14.10.2020
EE14.10.2020
ES14.10.2020
FI14.10.2020
HR14.10.2020
IT14.10.2020
LT14.10.2020
LV14.10.2020
MC14.10.2020
MT14.10.2020
PL14.10.2020
RO14.10.2020
RS14.10.2020
SE14.10.2020
SI14.10.2020
SK14.10.2020
SM14.10.2020
TR14.10.2020
IE16.11.2020
LU16.11.2020
CH30.11.2020
LI30.11.2020
BG14.01.2021
NO14.01.2021
GR15.01.2021
IS14.02.2021
PT15.02.2021
Former [2022/23]AL14.10.2020
CZ14.10.2020
DK14.10.2020
EE14.10.2020
ES14.10.2020
FI14.10.2020
HR14.10.2020
IT14.10.2020
LT14.10.2020
LV14.10.2020
MC14.10.2020
PL14.10.2020
RO14.10.2020
RS14.10.2020
SE14.10.2020
SI14.10.2020
SK14.10.2020
SM14.10.2020
IE16.11.2020
LU16.11.2020
CH30.11.2020
LI30.11.2020
BG14.01.2021
NO14.01.2021
GR15.01.2021
IS14.02.2021
PT15.02.2021
Former [2022/10]AL14.10.2020
CZ14.10.2020
DK14.10.2020
EE14.10.2020
ES14.10.2020
FI14.10.2020
HR14.10.2020
IT14.10.2020
LT14.10.2020
LV14.10.2020
MC14.10.2020
PL14.10.2020
RO14.10.2020
RS14.10.2020
SE14.10.2020
SI14.10.2020
SK14.10.2020
SM14.10.2020
IE16.11.2020
LU16.11.2020
CH30.11.2020
LI30.11.2020
BG14.01.2021
NO14.01.2021
GR15.01.2021
PT15.02.2021
Former [2021/50]AL14.10.2020
CZ14.10.2020
DK14.10.2020
EE14.10.2020
ES14.10.2020
FI14.10.2020
HR14.10.2020
IT14.10.2020
LT14.10.2020
LV14.10.2020
MC14.10.2020
PL14.10.2020
RO14.10.2020
RS14.10.2020
SE14.10.2020
SI14.10.2020
SK14.10.2020
SM14.10.2020
IE16.11.2020
LU16.11.2020
CH30.11.2020
LI30.11.2020
BG14.01.2021
NO14.01.2021
GR15.01.2021
IS14.02.2021
PT15.02.2021
Former [2021/48]AL14.10.2020
CZ14.10.2020
DK14.10.2020
EE14.10.2020
ES14.10.2020
FI14.10.2020
HR14.10.2020
IT14.10.2020
LT14.10.2020
LV14.10.2020
MC14.10.2020
PL14.10.2020
RO14.10.2020
RS14.10.2020
SE14.10.2020
SK14.10.2020
SM14.10.2020
IE16.11.2020
LU16.11.2020
CH30.11.2020
LI30.11.2020
BG14.01.2021
NO14.01.2021
GR15.01.2021
IS14.02.2021
PT15.02.2021
Former [2021/46]AL14.10.2020
CZ14.10.2020
DK14.10.2020
EE14.10.2020
ES14.10.2020
FI14.10.2020
HR14.10.2020
LT14.10.2020
LV14.10.2020
MC14.10.2020
PL14.10.2020
RO14.10.2020
RS14.10.2020
SE14.10.2020
SK14.10.2020
SM14.10.2020
IE16.11.2020
LU16.11.2020
CH30.11.2020
LI30.11.2020
BG14.01.2021
NO14.01.2021
GR15.01.2021
IS14.02.2021
PT15.02.2021
Former [2021/45]AL14.10.2020
CZ14.10.2020
DK14.10.2020
EE14.10.2020
ES14.10.2020
FI14.10.2020
HR14.10.2020
LT14.10.2020
LV14.10.2020
MC14.10.2020
PL14.10.2020
RO14.10.2020
RS14.10.2020
SE14.10.2020
SK14.10.2020
SM14.10.2020
LU16.11.2020
CH30.11.2020
LI30.11.2020
BG14.01.2021
NO14.01.2021
GR15.01.2021
IS14.02.2021
PT15.02.2021
Former [2021/37]CZ14.10.2020
DK14.10.2020
EE14.10.2020
ES14.10.2020
FI14.10.2020
HR14.10.2020
LT14.10.2020
LV14.10.2020
MC14.10.2020
PL14.10.2020
RO14.10.2020
RS14.10.2020
SE14.10.2020
SK14.10.2020
SM14.10.2020
LU16.11.2020
CH30.11.2020
LI30.11.2020
BG14.01.2021
NO14.01.2021
GR15.01.2021
IS14.02.2021
PT15.02.2021
Former [2021/36]CZ14.10.2020
EE14.10.2020
ES14.10.2020
FI14.10.2020
HR14.10.2020
LT14.10.2020
LV14.10.2020
MC14.10.2020
PL14.10.2020
RO14.10.2020
RS14.10.2020
SE14.10.2020
SK14.10.2020
SM14.10.2020
LU16.11.2020
BG14.01.2021
NO14.01.2021
GR15.01.2021
IS14.02.2021
PT15.02.2021
Former [2021/35]CZ14.10.2020
ES14.10.2020
FI14.10.2020
HR14.10.2020
LT14.10.2020
LV14.10.2020
MC14.10.2020
PL14.10.2020
RO14.10.2020
RS14.10.2020
SE14.10.2020
SK14.10.2020
SM14.10.2020
LU16.11.2020
BG14.01.2021
NO14.01.2021
GR15.01.2021
IS14.02.2021
PT15.02.2021
Former [2021/34]CZ14.10.2020
ES14.10.2020
FI14.10.2020
HR14.10.2020
LT14.10.2020
LV14.10.2020
MC14.10.2020
PL14.10.2020
RS14.10.2020
SE14.10.2020
SM14.10.2020
LU16.11.2020
BG14.01.2021
NO14.01.2021
GR15.01.2021
IS14.02.2021
PT15.02.2021
Former [2021/33]ES14.10.2020
FI14.10.2020
HR14.10.2020
LT14.10.2020
LV14.10.2020
PL14.10.2020
RS14.10.2020
SE14.10.2020
SM14.10.2020
LU16.11.2020
BG14.01.2021
NO14.01.2021
GR15.01.2021
IS14.02.2021
PT15.02.2021
Former [2021/32]ES14.10.2020
FI14.10.2020
HR14.10.2020
LV14.10.2020
PL14.10.2020
RS14.10.2020
SE14.10.2020
SM14.10.2020
BG14.01.2021
NO14.01.2021
GR15.01.2021
IS14.02.2021
PT15.02.2021
Former [2021/28]ES14.10.2020
FI14.10.2020
HR14.10.2020
LV14.10.2020
PL14.10.2020
RS14.10.2020
SE14.10.2020
BG14.01.2021
NO14.01.2021
GR15.01.2021
IS14.02.2021
PT15.02.2021
Former [2021/25]ES14.10.2020
FI14.10.2020
LV14.10.2020
PL14.10.2020
RS14.10.2020
SE14.10.2020
BG14.01.2021
NO14.01.2021
GR15.01.2021
IS14.02.2021
PT15.02.2021
Former [2021/23]FI14.10.2020
LV14.10.2020
RS14.10.2020
SE14.10.2020
BG14.01.2021
NO14.01.2021
GR15.01.2021
PT15.02.2021
Former [2021/22]FI14.10.2020
RS14.10.2020
NO14.01.2021
PT15.02.2021
Former [2021/21]FI14.10.2020
PT15.02.2021
Former [2021/20]FI14.10.2020
Cited inInternational search[A]US4648106  (NOVAK W THOMAS [US]) [A] 1-33 * column 6, line 56 - column 7, line 20; figures 1,3 *;
 [A]JP2004259756  (NIKON CORP) [A] 20-33 * abstract *;
 [A]JP2004354656  (NIKON CORP) [A] 20-33 * abstract *;
 [A]CN1980841  (NIHON VALQUA KOGYO KK [JP]) [A] 1-33* figures 16-18 *
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