EP3542220 - HOLDER FOR HOLDING AND FOR PROTECTING A SIDE OF A PHOTOMASK OR A PHOTOMASK HAVING PELLICLE FROM A CLEANING MEDIUM, METHOD FOR CLEANING A PHOTOMASK OR A PHOTOMASK WITH PELLICLE AND DEVICE FOR OPENING AND CLOSING A HOLDER [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 20.08.2021 Database last updated on 24.08.2024 | |
Former | The patent has been granted Status updated on 11.09.2020 | ||
Former | Grant of patent is intended Status updated on 02.07.2020 | ||
Former | Request for examination was made Status updated on 23.08.2019 | ||
Former | The international publication has been made Status updated on 25.05.2018 | ||
Former | unknown Status updated on 25.11.2017 | Most recent event Tooltip | 22.07.2022 | Lapse of the patent in a contracting state New state(s): BE, MK | published on 24.08.2022 [2022/34] | Applicant(s) | For all designated states Süss Microtec Photomask Equipment GmbH & Co. KG Ferdinand-von-Steinbeis-Ring 10 75447 Sternenfels / DE | [2019/39] | Inventor(s) | 01 /
KRÜMBERG, Jens c/o Süss Microtec Photomask Equipment GmbH & Co. KG Ferdinand-von-Steinbeis-Ring 10 75447 Sternenfels / DE | 02 /
BESER, Adem Hauptstrasse 152 75223 Niefern-Öschelbronn / DE | 03 /
DIETZE, Uwe c/o Süss Microtec Photomask Equipment GmbH & Co. KG Ferdinand-von-Steinbeis-Ring 10 75447 Sternenfels / DE | [2019/42] |
Former [2019/39] | 01 /
KRÜMBERG, Jens Klosterstrasse 2 76726 Germersheim / DE | ||
02 /
BESER, Adem Hauptstrasse 152 75223 Niefern-Öschelbronn / DE | |||
03 /
DIETZE, Uwe 105 Rupen Drive Austin, Texas 78734 / US | Representative(s) | Carstens, Dirk Wilhelm Wagner & Geyer Partnerschaft mbB Patent- und Rechtsanwälte Gewürzmühlstraße 5 80538 München / DE | [2019/39] | Application number, filing date | 17798234.5 | 16.11.2017 | [2019/39] | WO2017EP79497 | Priority number, date | NL20162017806 | 16.11.2016 Original published format: NL 2017806 | [2019/39] | Filing language | DE | Procedural language | DE | Publication | Type: | A1 Application with search report | No.: | WO2018091601 | Date: | 24.05.2018 | Language: | DE | [2018/21] | Type: | A1 Application with search report | No.: | EP3542220 | Date: | 25.09.2019 | Language: | DE | The application published by WIPO in one of the EPO official languages on 24.05.2018 takes the place of the publication of the European patent application. | [2019/39] | Type: | B1 Patent specification | No.: | EP3542220 | Date: | 14.10.2020 | Language: | DE | [2020/42] | Search report(s) | International search report - published on: | EP | 24.05.2018 | Classification | IPC: | G03F1/82, G03F7/20, G03F1/66 | [2020/29] | CPC: |
G03F7/70983 (EP,KR,US);
G03F1/66 (EP,KR,US);
G03F1/82 (EP,KR,US);
G03F7/20 (RU);
G03F7/70925 (EP,KR,US)
|
Former IPC [2019/39] | G03F7/20, G03F1/66 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2019/39] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | MA | Not yet paid | MD | Not yet paid | Title | German: | HALTER ZUR AUFNAHME UND ZUM SCHUTZ EINER SEITE EINER PHOTOMASKE ODER EINER PHOTOMASKE MIT PELLICLE GEGENÜBER EINEM REINIGUNGSMEDIUM, VERFAHREN ZUM REINIGEN EINER PHOTOMASKE ODER EINER PHOTOMASKE MIT PELLICLE UND VORRICHTUNG ZUM ÖFFNEN UND SCHLIESSEN EINES HALTERS | [2020/29] | English: | HOLDER FOR HOLDING AND FOR PROTECTING A SIDE OF A PHOTOMASK OR A PHOTOMASK HAVING PELLICLE FROM A CLEANING MEDIUM, METHOD FOR CLEANING A PHOTOMASK OR A PHOTOMASK WITH PELLICLE AND DEVICE FOR OPENING AND CLOSING A HOLDER | [2019/39] | French: | SUPPORT POUR RECEVOIR ET PROTÉGER UN CÔTÉ D'UN PHOTOMASQUE OU UN PHOTOMASQUE POURVU D'UNE PELLICULE CONTRE UN MILIEU DE NETTOYAGE, PROCÉDÉ DE NETTOYAGE D'UN PHOTOMASQUE OU D'UN PHOTOMASQUE POURVU D'UNE PELLICULE ET DISPOSITIF D'OUVERTURE ET DE FERMETURE D'UN SUPPORT | [2019/39] |
Former [2019/39] | HALTER ZUR AUFNAHME UND ZUM SCHUTZ EINER SEITE EINER PHOTOMASKE ODER EINER PHOTOMASKE MIT PELLICLE GEGENÜBER EINEM REINIGUNGSMEDIUM, VERFAHREN ZUM REINIGEN EINER PHOTOMASKE ODER EINER PHOTOMASKE MIT PELLICLE UND VORRICHTUNG ZUM ÖFFNEN UND SCHLIEßEN EINES HALTERS | Entry into regional phase | 15.05.2019 | National basic fee paid | 15.05.2019 | Designation fee(s) paid | 15.05.2019 | Examination fee paid | Examination procedure | 15.05.2019 | Examination requested [2019/39] | 15.05.2019 | Date on which the examining division has become responsible | 19.12.2019 | Amendment by applicant (claims and/or description) | 03.07.2020 | Communication of intention to grant the patent | 08.09.2020 | Fee for grant paid | 08.09.2020 | Fee for publishing/printing paid | 08.09.2020 | Receipt of the translation of the claim(s) | Opposition(s) | 15.07.2021 | No opposition filed within time limit [2021/38] | Fees paid | Renewal fee | 28.10.2019 | Renewal fee patent year 03 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 16.11.2017 | AL | 14.10.2020 | CY | 14.10.2020 | CZ | 14.10.2020 | DK | 14.10.2020 | EE | 14.10.2020 | ES | 14.10.2020 | FI | 14.10.2020 | HR | 14.10.2020 | IT | 14.10.2020 | LT | 14.10.2020 | LV | 14.10.2020 | MC | 14.10.2020 | MK | 14.10.2020 | MT | 14.10.2020 | PL | 14.10.2020 | RO | 14.10.2020 | RS | 14.10.2020 | SE | 14.10.2020 | SI | 14.10.2020 | SK | 14.10.2020 | SM | 14.10.2020 | TR | 14.10.2020 | IE | 16.11.2020 | LU | 16.11.2020 | BE | 30.11.2020 | CH | 30.11.2020 | LI | 30.11.2020 | BG | 14.01.2021 | NO | 14.01.2021 | GR | 15.01.2021 | IS | 14.02.2021 | PT | 15.02.2021 | [2022/33] |
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Former [2021/20] | FI | 14.10.2020 | Cited in | International search | [A]US4648106 (NOVAK W THOMAS [US]) [A] 1-33 * column 6, line 56 - column 7, line 20; figures 1,3 *; | [A]JP2004259756 (NIKON CORP) [A] 20-33 * abstract *; | [A]JP2004354656 (NIKON CORP) [A] 20-33 * abstract *; | [A]CN1980841 (NIHON VALQUA KOGYO KK [JP]) [A] 1-33* figures 16-18 * |