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Extract from the Register of European Patents

EP About this file: EP3479406

EP3479406 - SYSTEMS AND METHODS FOR TRANSFER OF MICRO-DEVICES [Right-click to bookmark this link]
StatusRequest for examination was made
Status updated on  05.04.2019
Database last updated on 14.09.2024
FormerThe international publication has been made
Status updated on  06.01.2018
Most recent event   Tooltip19.06.2024New entry: Renewal fee paid 
Applicant(s)For all designated states
Applied Materials, Inc.
3050 Bowers Avenue
Santa Clara, CA 95054 / US
[2019/19]
Inventor(s)01 / ZHU, Mingwei
3185 Hostetter Rd.
San Jose California 95132 / US
02 / GANAPATHIAPPAN, Sivapackia
161 E. Portola Ave.
Los Altos California 94022 / US
03 / FU, Boyi
1164 McKay Dr.
San Jose California 95131 / US
04 / NG, Hou T.
4068 Keith Dr.
Campbell California 95008 / US
05 / PATIBANDLA, Nag B.
3951 Vierra St.
Pleasanton California 94566 / US
 [2019/19]
Representative(s)Zimmermann & Partner Patentanwälte mbB
Postfach 330 920
80069 München / DE
[2019/19]
Application number, filing date17820906.015.06.2017
[2019/19]
WO2017US37742
Priority number, dateUS201662356431P29.06.2016         Original published format: US 201662356431 P
US20161527076320.09.2016         Original published format: US201615270763
[2019/19]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2018005118
Date:04.01.2018
Language:EN
[2018/01]
Type: A1 Application with search report 
No.:EP3479406
Date:08.05.2019
Language:EN
The application published by WIPO in one of the EPO official languages on 04.01.2018 takes the place of the publication of the European patent application.
[2019/19]
Search report(s)International search report - published on:KR04.01.2018
(Supplementary) European search report - dispatched on:EP25.06.2020
ClassificationIPC:H01L25/075, H01L21/677, H01L21/683, H01L21/67, H01L21/60, H01L33/00, // H01L21/66
[2020/10]
CPC:
H01L21/6835 (EP,KR,US); H01L21/67721 (KR); H01L25/075 (CN);
H01L27/156 (US); H01L21/67144 (KR); H01L21/677 (CN);
H01L22/22 (KR,US); H01L24/741 (US); H01L24/83 (KR,US);
H01L24/97 (EP,US); H01L24/98 (KR); H01L33/0095 (EP,US);
H01L33/48 (US); H01L22/20 (EP,US); H01L2221/68322 (EP);
H01L2221/68354 (EP); H01L2221/68368 (EP,US); H01L2221/68381 (EP);
H01L2224/7598 (EP,US); H01L2224/95136 (EP,US); H01L24/75 (EP,US);
H01L25/0753 (EP,US) (-)
Former IPC [2019/19]H01L25/075, H01L21/677
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2019/19]
TitleGerman:SYSTEME UND VERFAHREN ZUM TRANSFER VON MIKROVORRICHTUNGEN[2019/19]
English:SYSTEMS AND METHODS FOR TRANSFER OF MICRO-DEVICES[2019/19]
French:SYSTÈMES ET PROCÉDÉS POUR LE TRANSFERT DE MICRO-DISPOSITIFS[2019/19]
Entry into regional phase11.12.2018National basic fee paid 
11.12.2018Search fee paid 
11.12.2018Designation fee(s) paid 
11.12.2018Examination fee paid 
Examination proceduredeletedDate on which the examining division has become responsible
11.12.2018Examination requested  [2019/19]
15.01.2021Amendment by applicant (claims and/or description)
Fees paidRenewal fee
21.06.2019Renewal fee patent year 03
22.06.2020Renewal fee patent year 04
23.06.2021Renewal fee patent year 05
21.06.2022Renewal fee patent year 06
20.06.2023Renewal fee patent year 07
19.06.2024Renewal fee patent year 08
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Documents cited:Search[Y]US2002064032  (OOHATA TOYOHARU [JP]) [Y] 6,15 * figures 8A-8C, 9, 10 ** paragraphs [0072] , [0 73] , [0 74] *;
 [XYI]US2014191236  (NUZZO RALPH G [US], et al) [X] 11,12 * figures 2, 3A-3C * * paragraphs [0153] , [ 154] * [Y] 6,15 [I] 1-3,8-10
International search[A]US2006035164  (SCHAPER CHARLES D [US]) [A] 1-15* See claims 48-52 and figures 5-8. *;
 [A]US2013130440  (HU HSIN-HUA [US], et al) [A] 1-15 * See paragraph [0014], claim 1 and figure 29. *;
 [A]US2013273695  (MENARD ETIENNE [FR], et al) [A] 1-15 * See claims 4,8 and figure 1. *;
 [A]US2014267683  (BIBL ANDREAS [US], et al) [A] 1-15 * See paragraphs [0010]-[0021] and claim 1. *;
 [A]US2016144608  (CHANG PEI-YU [TW]) [A] 1-15 * See paragraphs [0040]-[0041] and figures 9A-9B. *
by applicantUS2014191236
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.