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EP3526366
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EP About this file: EP3526366
| EP3526366 - CARBON BRIDGED AMINOSILANE COMPOUNDS FOR HIGH GROWTH RATE SILICON-CONTAINING FILMS [Right-click to bookmark this link] | Status | Request for examination was made Status updated on 19.07.2019 Database last updated on 13.07.2024 | |
| Former | The international publication has been made Status updated on 20.04.2018 | Most recent event Tooltip | 13.09.2023 | New entry: Renewal fee paid | Applicant(s) | For all designated states Versum Materials US, LLC 8555 S. River Parkway Tempe, AZ 85284 / US | [2019/34] | Inventor(s) | 01 /
WANG, Meiliand 363 Avenida La Cuesta San Marcos, CA 92078 / US | 02 /
LEI, Xinjian 1928 Cherrywood Street Vista, CA 92081 / US | 03 /
XIAO, Manchao 5534 Caballos Place San Diego, CA 92130 / US | 04 /
RAJARAMAN, Suresh, Kalpatu 1640 Windemere Drive San Marcos, CA 92078 / US | [2019/34] | Representative(s) | Beck Greener LLP Fulwood House 12 Fulwood Place London WC1V 6HR / GB | [2019/34] | Application number, filing date | 17861133.1 | 13.10.2017 | [2019/34] | WO2017US56615 | Priority number, date | US201662408310P | 14.10.2016 Original published format: US 201662408310 P | US201715725122 | 04.10.2017 Original published format: US201715725122 | [2019/34] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2018071832 | Date: | 19.04.2018 | Language: | EN | [2018/16] | Type: | A1 Application with search report | No.: | EP3526366 | Date: | 21.08.2019 | Language: | EN | The application published by WIPO in one of the EPO official languages on 19.04.2018 takes the place of the publication of the European patent application. | [2019/34] | Search report(s) | International search report - published on: | KR | 19.04.2018 | (Supplementary) European search report - dispatched on: | EP | 28.04.2020 | Classification | IPC: | C23C16/455, C23C16/40, C23C16/50, H01L21/02 | [2020/22] | CPC: |
C23C16/401 (EP,KR,US);
C07F7/10 (KR,US);
C23C16/4408 (US);
C23C16/45536 (US);
C23C16/45542 (EP,US);
C23C16/45553 (EP,KR,US);
C23C16/50 (EP,US);
H01L21/02126 (EP,US);
H01L21/02164 (EP,US);
H01L21/02211 (EP,US);
H01L21/02219 (EP,US);
H01L21/02274 (EP,US);
H01L21/0228 (EP,US)
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| Former IPC [2019/34] | C23C16/40, C23C16/455, C07F7/10 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2019/34] | Title | German: | KOHLENSTOFFVERBRÜCKTE AMINOSILANVERBINDUNGEN FÜR SILICIUMHALTIGE FILME MIT HOHER WACHSTUMSRATE | [2019/34] | English: | CARBON BRIDGED AMINOSILANE COMPOUNDS FOR HIGH GROWTH RATE SILICON-CONTAINING FILMS | [2019/34] | French: | COMPOSÉS AMINOSILANE PONTÉS PAR DU CARBONE POUR FILMS CONTENANT DU SILICIUM À TAUX DE CROISSANCE ÉLEVÉ | [2019/34] | Entry into regional phase | 30.04.2019 | National basic fee paid | 30.04.2019 | Search fee paid | 30.04.2019 | Designation fee(s) paid | 30.04.2019 | Examination fee paid | Examination procedure | 30.04.2019 | Examination requested [2019/34] | 17.12.2020 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the Extended European Search Report/Written Opinion of the International Searching Authority/International Preliminary Examination Report/Supplementary international search report not received in time | 26.02.2021 | Amendment by applicant (claims and/or description) | Request for further processing for: | The application is deemed to be withdrawn due to failure to reply to the Extended European Search Report/Written Opinion of the International Searching Authority/International Preliminary Examination Report/Supplementary international search report/Supplementary European search report | 26.02.2021 | Request for further processing filed | 26.02.2021 | Full payment received (date of receipt of payment) Request granted | 10.03.2021 | Decision despatched | Fees paid | Renewal fee | 15.10.2019 | Renewal fee patent year 03 | 14.10.2020 | Renewal fee patent year 04 | 29.09.2021 | Renewal fee patent year 05 | 15.09.2022 | Renewal fee patent year 06 | 13.09.2023 | Renewal fee patent year 07 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [ ] - No further relevant documents disclosed | International search | [X]US2015087139 (O'NEILL MARK LEONARD [US], et al) [X] 1-22 * See claims 28, 34, 35; paragraphs [0011], [0048], [0051], [0052], [0067], [0071], [0095]-[0101], [01501-[01561; and table 3. *; | [A]US2016122869 (LEI XINJIAN [US], et al) [A] 1-22 * See claim 16; paragraph [0074]; table 1; and compounds 4, 7, 16, 21, 24. *; | [A]US2015246937 (XIAO MANCHAO [US], et al) [A] 1-22 * See claim 1; paragraph [0052]; and table 6. *; | [A]US2013078392 (XIAO MANCHAO [US], et al) [A] 1-22 * See the whole document. *; | [A]JP2004308007 (ROHM & HAAS ELECT MAT) [A] 1-22 * See the whole document. * |