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Extract from the Register of European Patents

EP About this file: EP3673514

EP3673514 - VERTICALLY STACKED FINFETS&SHARED GATE PATTERNING [Right-click to bookmark this link]
StatusRequest for examination was made
Status updated on  29.05.2020
Database last updated on 03.09.2024
FormerThe international publication has been made
Status updated on  02.03.2019
Most recent event   Tooltip29.07.2024New entry: Renewal fee paid 
Applicant(s)For all designated states
INTEL Corporation
2200 Mission College Blvd.
Santa Clara, CA 95054 / US
[2020/27]
Inventor(s)01 / LILAK, Aaron
8126 SW Newbury Court
Beaverton, OR 97007 / US
02 / MA, Sean
3304 SW Scholls Ferry Road
Portland, OR 97221 / US
03 / WEBER, Justin R.
2501 NW 229th Avenue
Ronler Acres: RA3-2-62-13
Hillsboro, OR 97124 / US
04 / MEHANDRU, Rishabh
4606 SW 42nd Place
Portland, OR 97221 / US
05 / CEA, Stephen M.
3742 NW 313th Avenue
Hillsboro, OR 97124 / US
06 / MORROW, Patrick
6158 NW Landing Drive
Portland, OR 97229 / US
07 / KEYS, Patrick H.
4190 NW 192nd Avenue
Portland, OR 97229 / US
 [2020/27]
Representative(s)HGF
HGF Limited
1 City Walk
Leeds LS11 9DX / GB
[N/P]
Former [2020/27]HGF Limited
Fountain Precinct
Balm Green
Sheffield S1 2JA / GB
Application number, filing date17922624.624.08.2017
[2020/27]
WO2017US48475
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2019040071
Date:28.02.2019
Language:EN
[2019/09]
Type: A1 Application with search report 
No.:EP3673514
Date:01.07.2020
Language:EN
The application published by WIPO in one of the EPO official languages on 28.02.2019 takes the place of the publication of the European patent application.
[2020/27]
Search report(s)International search report - published on:KR28.02.2019
(Supplementary) European search report - dispatched on:EP11.05.2021
ClassificationIPC:H01L29/78, H01L29/66, H01L21/8238, H01L29/417, H01L21/822, H01L27/06, H01L27/092
[2021/10]
CPC:
H01L21/823821 (EP,US); H01L21/8221 (EP,US); H01L21/30604 (US);
H01L21/31111 (US); H01L21/823814 (US); H01L21/823828 (US);
H01L21/823842 (EP); H01L21/823878 (EP,US); H01L21/8258 (US);
H01L27/0688 (EP); H01L27/0924 (EP,US); H01L29/41791 (US);
H01L29/66545 (EP,US); H01L29/66803 (EP); H01L29/785 (EP);
Y02E10/50 (EP) (-)
Former IPC [2020/27]H01L29/78, H01L29/66, H01L21/8238, H01L29/417
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2020/27]
TitleGerman:VERTIKAL GESTAPELTE FINFETS UND STRUKTURIERUNG EINES GEMEINSAM GENUTZTEN GATES[2020/27]
English:VERTICALLY STACKED FINFETS&SHARED GATE PATTERNING[2020/27]
French:FORMATION DE MOTIFS DE GRILLE PARTAGÉE ET DE TRANSISTORS FINFET À EMPILEMENT VERTICAL[2020/27]
Entry into regional phase09.01.2020National basic fee paid 
09.01.2020Search fee paid 
09.01.2020Designation fee(s) paid 
09.01.2020Examination fee paid 
Examination procedure09.01.2020Examination requested  [2020/27]
09.12.2021Amendment by applicant (claims and/or description)
Fees paidRenewal fee
09.01.2020Renewal fee patent year 03
13.08.2020Renewal fee patent year 04
13.08.2021Renewal fee patent year 05
26.07.2022Renewal fee patent year 06
27.07.2023Renewal fee patent year 07
29.07.2024Renewal fee patent year 08
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[A]US2007111448  (LI HONG-JYH [US], et al) [A] 1 * paragraphs [0010] , [0 67] - [0070]; figures 13-17 *;
 [A]US2010148225  (MOULI CHANDRA [US]) [A] 7,8* paragraphs [0052] , [0 53]; figure 12 *;
 [XI]US2016336235  (CHENG KANGGUO [US], et al) [X] 1 * paragraphs [0002] , [0 57] , [0 59] , [0 87] , [0 88]; figure 14 * [I] 11,12;
 [YA]US2016343623  (FOGEL KEITH E [US], et al) [Y] 9 * paragraphs [0048] , [0 50]; figures 10, 11 * [A] 10;
 [XAYI]WO2017095409  (INTEL CORP [US], et al) [X] 1-6,11 * paragraphs [0037] , [0 48] - [0052] - [ 124] - [0126] - [ 169]; figures 1B, 2, 26 * [A] 7,8 [Y] 9 [I] 10;
 [A]WO2017105515  (INTEL CORP [US]) [A] 1 * figures 1-7, 14, 15 * * page 19, line 30 - page 20, line 1 * * page 20, line 18 - line 22 *
International search[A]US2014264438  (HOLLAND MARTIN CHRISTOPHER [BE], et al) [A] 1-25 * See paragraphs [0046]-[0071] and figures 17-19. *;
 [A]US2015228654  (KHAKIFIROOZ ALI [US], et al) [A] 1-25 * See paragraphs [0024], [0027]-[0028], [0034] and figures 6, 10. *;
 [A]US2015255461  (CHINTARLAPALLI REDDY HARIKRISHNA [IN], et al) [A] 1-25 * See paragraphs [0018]-[0020] and figure 2. *;
 [A]KR20150126310  (SAMSUNG ELECTRONICS CO LTD [KR]) [A] 1-25* See paragraphs [0059]-[0110] and figures 1-13. *;
 [A]WO2017111866  (INTEL CORP [US]) [A] 1-25 * See claims 1-20 and figures 1-23. *
by applicantUS2016336235
 WO2017095409
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.