Deutsch English Français

Contact

EP3531438

European procedure

Quick help

Maintenance news

Scheduled maintenance

Regular maintenance outages:
between 05.00 and 05.15 hrs CET (Monday to Sunday).

Other outages
Availability

2022.02.11

More...

News flashes

News Flashes

New version of the European Patent Register – SPC proceedings information in the Unitary Patent Register.

2024-07-24

More...

Extract from the Register of European Patents

EP About this file: EP3531438

EP3531438 - A METHOD AND APPARATUS FOR ATOMIC PROBE TOMOGRAPHY [Right-click to bookmark this link]
Status	No opposition filed within time limit Status updated on 27.08.2021 Database last updated on 16.09.2024
Former	The patent has been granted Status updated on 18.09.2020
Former	Grant of patent is intended Status updated on 07.07.2020
Former	Request for examination was made Status updated on 01.11.2019
Former	The application has been published Status updated on 26.07.2019
Most recent event Tooltip	13.09.2024	Lapse of the patent in a contracting state New state(s): MT	published on 16.10.2024 [2024/42]
Applicant(s)	For all designated states IMEC vzw Kapeldreef 75 3001 Leuven / BE
	[2019/35]
Inventor(s)	01 / Van der Heide, Paul IMEC vzw, Patent Department Kapeldreef 75 3001 Leuven / BE
	[2020/43]
Former [2019/35]	01 / Van der Heide, Paul Imec VZW, Patent Department Kapeldreef 75 3001 Leuven / BE
Representative(s)	Patent Department IMEC IMEC vzw Patent Department Kapeldreef 75 3001 Leuven / BE
	[2019/35]
Application number, filing date	18157918.6	21.02.2018
	[2019/35]
Filing language	EN
Procedural language	EN
Publication	Type:	A1 Application with search report
	No.:	EP3531438
	Date:	28.08.2019
	Language:	EN
	[2019/35]
	Type:	B1 Patent specification
	No.:	EP3531438
	Date:	21.10.2020
	Language:	EN
	[2020/43]
Search report(s)	(Supplementary) European search report - dispatched on:	EP	19.09.2018
Classification	IPC:	H01J37/285, H01J37/22	[2019/35]
	CPC:	H01J37/285 (EP,US); H01J37/226 (EP,US); H01J2237/226 (EP,US); H01J2237/2852 (EP,US); H01J2237/2855 (EP,US)
Designated contracting states	AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2019/49]
Former [2019/35]	AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Title	German:	VERFAHREN UND VORRICHTUNG ZUR ATOMSONDENTOMOGRAPHIE	[2019/35]
	English:	A METHOD AND APPARATUS FOR ATOMIC PROBE TOMOGRAPHY	[2019/35]
	French:	PROCÉDÉ ET APPAREIL DE TOMOGRAPHIE PAR SONDE ATOMIQUE	[2019/35]
Examination procedure	24.10.2019	Examination requested [2019/49]
	24.10.2019	Date on which the examining division has become responsible
	08.07.2020	Communication of intention to grant the patent
	10.09.2020	Fee for grant paid
	10.09.2020	Fee for publishing/printing paid
	10.09.2020	Receipt of the translation of the claim(s)
Opposition(s)	22.07.2021	No opposition filed within time limit [2021/39]
Fees paid	Renewal fee
	20.02.2020	Renewal fee patent year 03
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition Tooltip	HU	21.02.2018
	AL	21.10.2020
	AT	21.10.2020
	CY	21.10.2020
	CZ	21.10.2020
	DK	21.10.2020
	EE	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	IT	21.10.2020
	LT	21.10.2020
	LV	21.10.2020
	MC	21.10.2020
	MK	21.10.2020
	MT	21.10.2020
	NL	21.10.2020
	PL	21.10.2020
	RO	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	SI	21.10.2020
	SK	21.10.2020
	SM	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IE	21.02.2021
	IS	21.02.2021
	LU	21.02.2021
	PT	22.02.2021
	BE	28.02.2021
	CH	28.02.2021
	LI	28.02.2021
	[2024/42]
Former [2024/23]	HU	21.02.2018
	AL	21.10.2020
	AT	21.10.2020
	CY	21.10.2020
	CZ	21.10.2020
	DK	21.10.2020
	EE	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	IT	21.10.2020
	LT	21.10.2020
	LV	21.10.2020
	MC	21.10.2020
	MK	21.10.2020
	NL	21.10.2020
	PL	21.10.2020
	RO	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	SI	21.10.2020
	SK	21.10.2020
	SM	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IE	21.02.2021
	IS	21.02.2021
	LU	21.02.2021
	PT	22.02.2021
	BE	28.02.2021
	CH	28.02.2021
	LI	28.02.2021
Former [2023/33]	HU	21.02.2018
	AL	21.10.2020
	AT	21.10.2020
	CY	21.10.2020
	CZ	21.10.2020
	DK	21.10.2020
	EE	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	IT	21.10.2020
	LT	21.10.2020
	LV	21.10.2020
	MC	21.10.2020
	NL	21.10.2020
	PL	21.10.2020
	RO	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	SI	21.10.2020
	SK	21.10.2020
	SM	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IE	21.02.2021
	IS	21.02.2021
	LU	21.02.2021
	PT	22.02.2021
	BE	28.02.2021
	CH	28.02.2021
	LI	28.02.2021
Former [2023/30]	AL	21.10.2020
	AT	21.10.2020
	CY	21.10.2020
	CZ	21.10.2020
	DK	21.10.2020
	EE	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	IT	21.10.2020
	LT	21.10.2020
	LV	21.10.2020
	MC	21.10.2020
	NL	21.10.2020
	PL	21.10.2020
	RO	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	SI	21.10.2020
	SK	21.10.2020
	SM	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IE	21.02.2021
	IS	21.02.2021
	LU	21.02.2021
	PT	22.02.2021
	BE	28.02.2021
	CH	28.02.2021
	LI	28.02.2021
Former [2022/34]	AL	21.10.2020
	AT	21.10.2020
	CZ	21.10.2020
	DK	21.10.2020
	EE	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	IT	21.10.2020
	LT	21.10.2020
	LV	21.10.2020
	MC	21.10.2020
	NL	21.10.2020
	PL	21.10.2020
	RO	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	SI	21.10.2020
	SK	21.10.2020
	SM	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IE	21.02.2021
	IS	21.02.2021
	LU	21.02.2021
	PT	22.02.2021
	BE	28.02.2021
	CH	28.02.2021
	LI	28.02.2021
Former [2022/23]	AL	21.10.2020
	AT	21.10.2020
	CZ	21.10.2020
	DK	21.10.2020
	EE	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	IT	21.10.2020
	LT	21.10.2020
	LV	21.10.2020
	MC	21.10.2020
	NL	21.10.2020
	PL	21.10.2020
	RO	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	SI	21.10.2020
	SK	21.10.2020
	SM	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IE	21.02.2021
	IS	21.02.2021
	LU	21.02.2021
	PT	22.02.2021
	CH	28.02.2021
	LI	28.02.2021
Former [2022/10]	AL	21.10.2020
	AT	21.10.2020
	CZ	21.10.2020
	DK	21.10.2020
	EE	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	IT	21.10.2020
	LT	21.10.2020
	LV	21.10.2020
	MC	21.10.2020
	NL	21.10.2020
	PL	21.10.2020
	RO	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	SI	21.10.2020
	SK	21.10.2020
	SM	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IE	21.02.2021
	LU	21.02.2021
	PT	22.02.2021
	CH	28.02.2021
	LI	28.02.2021
Former [2022/07]	AL	21.10.2020
	AT	21.10.2020
	CZ	21.10.2020
	DK	21.10.2020
	EE	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	IT	21.10.2020
	LT	21.10.2020
	LV	21.10.2020
	MC	21.10.2020
	NL	21.10.2020
	PL	21.10.2020
	RO	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	SI	21.10.2020
	SK	21.10.2020
	SM	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IE	21.02.2021
	IS	21.02.2021
	LU	21.02.2021
	PT	22.02.2021
	CH	28.02.2021
	LI	28.02.2021
Former [2021/50]	AL	21.10.2020
	AT	21.10.2020
	CZ	21.10.2020
	DK	21.10.2020
	EE	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	IT	21.10.2020
	LT	21.10.2020
	LV	21.10.2020
	MC	21.10.2020
	NL	21.10.2020
	PL	21.10.2020
	RO	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	SI	21.10.2020
	SK	21.10.2020
	SM	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IS	21.02.2021
	LU	21.02.2021
	PT	22.02.2021
	CH	28.02.2021
	LI	28.02.2021
Former [2021/48]	AL	21.10.2020
	AT	21.10.2020
	CZ	21.10.2020
	DK	21.10.2020
	EE	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	IT	21.10.2020
	LT	21.10.2020
	LV	21.10.2020
	MC	21.10.2020
	NL	21.10.2020
	PL	21.10.2020
	RO	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	SK	21.10.2020
	SM	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IS	21.02.2021
	LU	21.02.2021
	PT	22.02.2021
	CH	28.02.2021
	LI	28.02.2021
Former [2021/47]	AL	21.10.2020
	AT	21.10.2020
	CZ	21.10.2020
	DK	21.10.2020
	EE	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	LT	21.10.2020
	LV	21.10.2020
	MC	21.10.2020
	NL	21.10.2020
	PL	21.10.2020
	RO	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	SK	21.10.2020
	SM	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IS	21.02.2021
	LU	21.02.2021
	PT	22.02.2021
	CH	28.02.2021
	LI	28.02.2021
Former [2021/45]	AL	21.10.2020
	AT	21.10.2020
	CZ	21.10.2020
	DK	21.10.2020
	EE	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	LT	21.10.2020
	LV	21.10.2020
	MC	21.10.2020
	NL	21.10.2020
	PL	21.10.2020
	RO	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	SK	21.10.2020
	SM	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IS	21.02.2021
	PT	22.02.2021
Former [2021/41]	AT	21.10.2020
	CZ	21.10.2020
	DK	21.10.2020
	EE	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	LT	21.10.2020
	LV	21.10.2020
	MC	21.10.2020
	NL	21.10.2020
	PL	21.10.2020
	RO	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	SK	21.10.2020
	SM	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IS	21.02.2021
	PT	22.02.2021
Former [2021/37]	AT	21.10.2020
	CZ	21.10.2020
	DK	21.10.2020
	EE	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	LT	21.10.2020
	LV	21.10.2020
	NL	21.10.2020
	PL	21.10.2020
	RO	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	SK	21.10.2020
	SM	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IS	21.02.2021
	PT	22.02.2021
Former [2021/36]	AT	21.10.2020
	CZ	21.10.2020
	EE	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	LT	21.10.2020
	LV	21.10.2020
	NL	21.10.2020
	PL	21.10.2020
	RO	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	SK	21.10.2020
	SM	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IS	21.02.2021
	PT	22.02.2021
Former [2021/35]	AT	21.10.2020
	CZ	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	LT	21.10.2020
	LV	21.10.2020
	NL	21.10.2020
	PL	21.10.2020
	RO	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	SK	21.10.2020
	SM	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IS	21.02.2021
	PT	22.02.2021
Former [2021/33]	AT	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	LT	21.10.2020
	LV	21.10.2020
	NL	21.10.2020
	PL	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	SM	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IS	21.02.2021
	PT	22.02.2021
Former [2021/32]	AT	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	LV	21.10.2020
	NL	21.10.2020
	PL	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	SM	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IS	21.02.2021
	PT	22.02.2021
Former [2021/30]	AT	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	LV	21.10.2020
	NL	21.10.2020
	PL	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IS	21.02.2021
	PT	22.02.2021
Former [2021/28]	AT	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	HR	21.10.2020
	LV	21.10.2020
	PL	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IS	21.02.2021
	PT	22.02.2021
Former [2021/25]	AT	21.10.2020
	ES	21.10.2020
	FI	21.10.2020
	LV	21.10.2020
	PL	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	IS	21.02.2021
	PT	22.02.2021
Former [2021/23]	AT	21.10.2020
	FI	21.10.2020
	LV	21.10.2020
	RS	21.10.2020
	SE	21.10.2020
	BG	21.01.2021
	NO	21.01.2021
	GR	22.01.2021
	PT	22.02.2021
Former [2021/22]	FI	21.10.2020
	RS	21.10.2020
	NO	21.01.2021
	PT	22.02.2021
Former [2021/21]	FI	21.10.2020
	PT	22.02.2021
Former [2021/20]	FI	21.10.2020
Documents cited:	Search	[A]US2017301526 (SANFORD NORMAN A [US], et al) [A] 1-15 * paragraphs [0026] - [0033]; figures 1-5 *;
		[A] - THOMAS F KELLY ET AL, "Atomic-Scale Tomography: A 2020 Vision", MICROSCOPY AND MICROANALYSIS,, vol. 19, no. 3, doi: HTTP://DX.DOI.ORG/10.1017/S1431927613000494, ISSN 1431-9276, (20130601), pages 652 - 664, (20130513), XP001582230 [A] 1-15 * section "Ptychography-ATP Instrument"; page 659, column r - page 660, column l * DOI: http://dx.doi.org/DOI: http://dx.doi.org/10.1017/S1431927613000494
		[A] - ZHANG BOSHENG ET AL, "Quantitative tabletop coherent diffraction imaging microscope for EUV lithography mask inspection", VISUAL COMMUNICATIONS AND IMAGE PROCESSING; 20-1-2004 - 20-1-2004; SAN JOSE,, (20140402), vol. 9050, doi:10.1117/12.2046526, ISBN 978-1-62841-730-2, pages 90501D - 90501D, XP060030973 [A] 1-15 * abstract * * beginning of last full paragraph on p. 1 * * page 5 - page 7 * DOI: http://dx.doi.org/10.1117/12.2046526
	by applicant	- RAINES et al., "Three-dimensional structure determination from a single view", Nature, (20100100), vol. 463, doi:doi:10.1038/nature08705, pages 214 - 217, XP055210306 DOI: http://dx.doi.org/10.1038/nature08705
		- CHIEN-CHUN CHEN et al., "Three-dimensional imaging of a phase object from a single sample orientation using an optical laser", Physical Review, B, (20110000), vol. 84, page 224104

The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.

Legal notice
Terms of use
24.2.25; 34p