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Extract from the Register of European Patents

EP About this file: EP3428957

EP3428957 - METHOD FOR PRODUCING SEMICONDUCTOR DEVICE [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  14.10.2022
Database last updated on 25.09.2024
FormerThe patent has been granted
Status updated on  05.11.2021
FormerGrant of patent is intended
Status updated on  17.06.2021
FormerRequest for examination was made
Status updated on  19.07.2019
FormerThe application has been published
Status updated on  14.12.2018
Most recent event   Tooltip13.09.2024Lapse of the patent in a contracting state
New state(s): MT		published on 16.10.2024 [2024/42]
Applicant(s)For all designated states
Huawei Technologies Co., Ltd.
Huawei Administration Building
Bantian
Longgang District
Shenzhen, Guangdong 518129 / CN
[2019/03]
Inventor(s)01 / HUANGFU, Yourui
Huawei Technologies Co., Ltd.
Intellectual Property Department
G1-2F, Bantian
Longgang District shenzhen Guangdong / CN
 [2019/03]
Representative(s)Kreuz, Georg Maria
Huawei Technologies Duesseldorf GmbH
Riesstraße 25
80992 München / DE
[2019/03]
Application number, filing date18160118.820.12.2013
[2019/03]
Filing languageZH
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP3428957
Date:16.01.2019
Language:EN
[2019/03]
Type: B1 Patent specification 
No.:EP3428957
Date:08.12.2021
Language:EN
[2021/49]
Search report(s)(Supplementary) European search report - dispatched on:EP13.12.2018
ClassificationIPC:H01L21/20, H01S5/026, H01S5/323, H01S5/02
[2019/03]
CPC:
H01L21/02381 (EP,KR,US); H01L21/02488 (EP,KR,US); G02B6/122 (US);
G02B6/13 (US); H01L21/02494 (EP,KR,US); H01L21/02538 (EP,KR,US);
H01L21/02636 (US); H01L21/02639 (EP,US); H01L21/0273 (US);
H01L21/308 (US); H01L21/31144 (US); H01L21/7624 (US);
H01L29/20 (US); H01L29/78 (US); H01L31/02325 (US);
H01L31/1035 (US); H01L33/00 (EP,KR,US); H01S5/00 (EP,KR,US);
H01S5/021 (EP,US); H01S5/0218 (EP,US); H01S5/02257 (US);
H01S5/026 (EP,US); H01S5/3013 (US); H01S5/323 (EP,US);
G02B2006/12123 (US) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2019/34]
Former [2019/03]AL,  AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MK,  MT,  NL,  NO,  PL,  PT,  RO,  RS,  SE,  SI,  SK,  SM,  TR 
TitleGerman:VERFAHREN ZUR HERSTELLUNG EINES HALBLEITERBAUELEMENTS[2019/03]
English:METHOD FOR PRODUCING SEMICONDUCTOR DEVICE[2019/03]
French:PROCÉDÉ DE FABRICATION D'UN DISPOSITIF SEMI-CONDUCTEUR[2019/03]
Examination procedure12.06.2019Amendment by applicant (claims and/or description)
16.07.2019Examination requested  [2019/34]
16.07.2019Date on which the examining division has become responsible
18.06.2021Communication of intention to grant the patent
28.10.2021Fee for grant paid
28.10.2021Fee for publishing/printing paid
28.10.2021Receipt of the translation of the claim(s)
Parent application(s)   TooltipEP13899857.0  / EP3070751
Opposition(s)09.09.2022No opposition filed within time limit [2022/46]
Fees paidRenewal fee
06.07.2018Renewal fee patent year 03
06.07.2018Renewal fee patent year 04
06.07.2018Renewal fee patent year 05
02.01.2019Renewal fee patent year 06
02.01.2020Renewal fee patent year 07
11.01.2021Renewal fee patent year 08
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU20.12.2013
AL08.12.2021
AT08.12.2021
CY08.12.2021
CZ08.12.2021
DK08.12.2021
EE08.12.2021
ES08.12.2021
FI08.12.2021
HR08.12.2021
IT08.12.2021
LT08.12.2021
LV08.12.2021
MC08.12.2021
MK08.12.2021
MT08.12.2021
NL08.12.2021
PL08.12.2021
RO08.12.2021
RS08.12.2021
SE08.12.2021
SI08.12.2021
SK08.12.2021
SM08.12.2021
TR08.12.2021
IE20.12.2021
LU20.12.2021
BE31.12.2021
CH31.12.2021
LI31.12.2021
BG08.03.2022
NO08.03.2022
GR09.03.2022
IS08.04.2022
PT08.04.2022
[2024/42]
Former [2024/29]HU20.12.2013
AL08.12.2021
AT08.12.2021
CY08.12.2021
CZ08.12.2021
DK08.12.2021
EE08.12.2021
ES08.12.2021
FI08.12.2021
HR08.12.2021
IT08.12.2021
LT08.12.2021
LV08.12.2021
MC08.12.2021
MK08.12.2021
NL08.12.2021
PL08.12.2021
RO08.12.2021
RS08.12.2021
SE08.12.2021
SI08.12.2021
SK08.12.2021
SM08.12.2021
TR08.12.2021
IE20.12.2021
LU20.12.2021
BE31.12.2021
CH31.12.2021
LI31.12.2021
BG08.03.2022
NO08.03.2022
GR09.03.2022
IS08.04.2022
PT08.04.2022
Former [2024/23]HU20.12.2013
AL08.12.2021
AT08.12.2021
CY08.12.2021
CZ08.12.2021
DK08.12.2021
EE08.12.2021
ES08.12.2021
FI08.12.2021
HR08.12.2021
IT08.12.2021
LT08.12.2021
LV08.12.2021
MC08.12.2021
MK08.12.2021
NL08.12.2021
PL08.12.2021
RO08.12.2021
RS08.12.2021
SE08.12.2021
SI08.12.2021
SK08.12.2021
SM08.12.2021
IE20.12.2021
LU20.12.2021
BE31.12.2021
CH31.12.2021
LI31.12.2021
BG08.03.2022
NO08.03.2022
GR09.03.2022
IS08.04.2022
PT08.04.2022
Former [2023/33]HU20.12.2013
AL08.12.2021
AT08.12.2021
CY08.12.2021
CZ08.12.2021
DK08.12.2021
EE08.12.2021
ES08.12.2021
FI08.12.2021
HR08.12.2021
IT08.12.2021
LT08.12.2021
LV08.12.2021
MC08.12.2021
NL08.12.2021
PL08.12.2021
RO08.12.2021
RS08.12.2021
SE08.12.2021
SI08.12.2021
SK08.12.2021
SM08.12.2021
IE20.12.2021
LU20.12.2021
BE31.12.2021
CH31.12.2021
LI31.12.2021
BG08.03.2022
NO08.03.2022
GR09.03.2022
IS08.04.2022
PT08.04.2022
Former [2023/30]AL08.12.2021
AT08.12.2021
CY08.12.2021
CZ08.12.2021
DK08.12.2021
EE08.12.2021
ES08.12.2021
FI08.12.2021
HR08.12.2021
IT08.12.2021
LT08.12.2021
LV08.12.2021
MC08.12.2021
NL08.12.2021
PL08.12.2021
RO08.12.2021
RS08.12.2021
SE08.12.2021
SI08.12.2021
SK08.12.2021
SM08.12.2021
IE20.12.2021
LU20.12.2021
BE31.12.2021
CH31.12.2021
LI31.12.2021
BG08.03.2022
NO08.03.2022
GR09.03.2022
IS08.04.2022
PT08.04.2022
Former [2023/27]AL08.12.2021
AT08.12.2021
CZ08.12.2021
DK08.12.2021
EE08.12.2021
ES08.12.2021
FI08.12.2021
HR08.12.2021
IT08.12.2021
LT08.12.2021
LV08.12.2021
MC08.12.2021
NL08.12.2021
PL08.12.2021
RO08.12.2021
RS08.12.2021
SE08.12.2021
SI08.12.2021
SK08.12.2021
SM08.12.2021
IE20.12.2021
LU20.12.2021
BE31.12.2021
CH31.12.2021
LI31.12.2021
BG08.03.2022
NO08.03.2022
GR09.03.2022
IS08.04.2022
PT08.04.2022
Former [2023/03]AL08.12.2021
AT08.12.2021
CZ08.12.2021
DK08.12.2021
EE08.12.2021
ES08.12.2021
FI08.12.2021
HR08.12.2021
LT08.12.2021
LV08.12.2021
MC08.12.2021
NL08.12.2021
PL08.12.2021
RO08.12.2021
RS08.12.2021
SE08.12.2021
SI08.12.2021
SK08.12.2021
SM08.12.2021
IE20.12.2021
LU20.12.2021
BE31.12.2021
CH31.12.2021
LI31.12.2021
BG08.03.2022
NO08.03.2022
GR09.03.2022
IS08.04.2022
PT08.04.2022
Former [2023/01]AL08.12.2021
AT08.12.2021
CZ08.12.2021
DK08.12.2021
EE08.12.2021
ES08.12.2021
FI08.12.2021
HR08.12.2021
LT08.12.2021
LV08.12.2021
MC08.12.2021
NL08.12.2021
PL08.12.2021
RO08.12.2021
RS08.12.2021
SE08.12.2021
SI08.12.2021
SK08.12.2021
SM08.12.2021
IE20.12.2021
LU20.12.2021
BE31.12.2021
BG08.03.2022
NO08.03.2022
GR09.03.2022
IS08.04.2022
PT08.04.2022
Former [2022/49]AL08.12.2021
AT08.12.2021
CZ08.12.2021
DK08.12.2021
EE08.12.2021
ES08.12.2021
FI08.12.2021
HR08.12.2021
LT08.12.2021
LV08.12.2021
MC08.12.2021
NL08.12.2021
PL08.12.2021
RO08.12.2021
RS08.12.2021
SE08.12.2021
SK08.12.2021
SM08.12.2021
IE20.12.2021
LU20.12.2021
BG08.03.2022
NO08.03.2022
GR09.03.2022
IS08.04.2022
PT08.04.2022
Former [2022/48]AT08.12.2021
CZ08.12.2021
DK08.12.2021
EE08.12.2021
ES08.12.2021
FI08.12.2021
HR08.12.2021
LT08.12.2021
LV08.12.2021
MC08.12.2021
NL08.12.2021
PL08.12.2021
RO08.12.2021
RS08.12.2021
SE08.12.2021
SK08.12.2021
SM08.12.2021
IE20.12.2021
LU20.12.2021
BG08.03.2022
NO08.03.2022
GR09.03.2022
IS08.04.2022
PT08.04.2022
Former [2022/46]AT08.12.2021
CZ08.12.2021
DK08.12.2021
EE08.12.2021
ES08.12.2021
FI08.12.2021
HR08.12.2021
LT08.12.2021
LV08.12.2021
MC08.12.2021
NL08.12.2021
PL08.12.2021
RO08.12.2021
RS08.12.2021
SE08.12.2021
SK08.12.2021
SM08.12.2021
LU20.12.2021
BG08.03.2022
NO08.03.2022
GR09.03.2022
IS08.04.2022
PT08.04.2022
Former [2022/44]AT08.12.2021
CZ08.12.2021
EE08.12.2021
ES08.12.2021
FI08.12.2021
HR08.12.2021
LT08.12.2021
LV08.12.2021
MC08.12.2021
NL08.12.2021
PL08.12.2021
RO08.12.2021
RS08.12.2021
SE08.12.2021
SK08.12.2021
SM08.12.2021
BG08.03.2022
NO08.03.2022
GR09.03.2022
IS08.04.2022
PT08.04.2022
Former [2022/42]AT08.12.2021
CZ08.12.2021
EE08.12.2021
ES08.12.2021
FI08.12.2021
HR08.12.2021
LT08.12.2021
LV08.12.2021
NL08.12.2021
PL08.12.2021
RO08.12.2021
RS08.12.2021
SE08.12.2021
SK08.12.2021
SM08.12.2021
BG08.03.2022
NO08.03.2022
GR09.03.2022
IS08.04.2022
PT08.04.2022
Former [2022/36]AT08.12.2021
CZ08.12.2021
EE08.12.2021
ES08.12.2021
FI08.12.2021
HR08.12.2021
LT08.12.2021
LV08.12.2021
NL08.12.2021
PL08.12.2021
RO08.12.2021
RS08.12.2021
SE08.12.2021
SK08.12.2021
SM08.12.2021
BG08.03.2022
NO08.03.2022
GR09.03.2022
PT08.04.2022
Former [2022/35]CZ08.12.2021
EE08.12.2021
ES08.12.2021
FI08.12.2021
HR08.12.2021
LT08.12.2021
LV08.12.2021
NL08.12.2021
RO08.12.2021
RS08.12.2021
SE08.12.2021
SK08.12.2021
SM08.12.2021
BG08.03.2022
NO08.03.2022
GR09.03.2022
PT08.04.2022
Former [2022/34]EE08.12.2021
ES08.12.2021
FI08.12.2021
HR08.12.2021
LT08.12.2021
LV08.12.2021
NL08.12.2021
RO08.12.2021
RS08.12.2021
SE08.12.2021
SM08.12.2021
BG08.03.2022
NO08.03.2022
GR09.03.2022
PT08.04.2022
Former [2022/33]ES08.12.2021
FI08.12.2021
HR08.12.2021
LT08.12.2021
LV08.12.2021
NL08.12.2021
RS08.12.2021
SE08.12.2021
SM08.12.2021
BG08.03.2022
NO08.03.2022
GR09.03.2022
Former [2022/30]ES08.12.2021
FI08.12.2021
HR08.12.2021
LT08.12.2021
LV08.12.2021
NL08.12.2021
RS08.12.2021
SE08.12.2021
BG08.03.2022
NO08.03.2022
GR09.03.2022
Former [2022/25]ES08.12.2021
FI08.12.2021
HR08.12.2021
LT08.12.2021
LV08.12.2021
RS08.12.2021
SE08.12.2021
BG08.03.2022
NO08.03.2022
GR09.03.2022
Former [2022/24]ES08.12.2021
FI08.12.2021
HR08.12.2021
LT08.12.2021
LV08.12.2021
RS08.12.2021
SE08.12.2021
BG08.03.2022
GR09.03.2022
Former [2022/22]FI08.12.2021
LT08.12.2021
RS08.12.2021
BG08.03.2022
Former [2022/21]RS08.12.2021
BG08.03.2022
Former [2022/19]BG08.03.2022
Documents cited:Search[A]EP1522612  (SUMITOMO ELECTRIC INDUSTRIES [JP]) [A] 1-5* figure 1 *;
 [A]US2008153267  (CLAVELIER LAURENT [FR], et al) [A] 1-5 * figure 1 *;
 [A]US2008187018  (LI JIZHONG [US]) [A] 1-5 * paragraphs [0023] - [0027]; figures 1-2 *;
 [A]US2012028444  (VELLIANITIS GEORGIOS [BE]) [A] 1-5 * paragraphs [0013] - [0017] *;
 [I]US2012270378  (KITTLER GABRIEL [DE], et al) [I] 1-5 * paragraphs [0029] - [0040]; figures 4-5 *;
 [A]  - KATSUHIRO TOMIOKA ET AL, "III V Nanowires on Si Substrate: Selective-Area Growth and Device Applications", IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, (20110805), vol. 17, no. 4, doi:10.1109/JSTQE.2010.2068280, ISSN 1077-260X, pages 1112 - 1129, XP011386487 [A] 1-5 * sections II.A, II.B and III.C *

DOI:   http://dx.doi.org/10.1109/JSTQE.2010.2068280
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.