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Extract from the Register of European Patents

EP About this file: EP3584836

EP3584836 - LAYOUT DESIGN FOR FANOUT PATTERNS IN SELF-ALIGNED DOUBLE PATTERNING PROCESS [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  02.09.2022
Database last updated on 11.01.2025
FormerThe patent has been granted
Status updated on  24.09.2021
FormerGrant of patent is intended
Status updated on  18.08.2021
FormerRequest for examination was made
Status updated on  22.11.2019
Most recent event   Tooltip27.09.2024Lapse of the patent in a contracting state
New state(s): MT		published on 30.10.2024  [2024/44]
Applicant(s)For all designated states
MACRONIX INTERNATIONAL CO., LTD.
16 Li-Hsin Road, Science-Based Industrial Park
Hsinchu 300 / TW
[2019/52]
Inventor(s)01 / YANG, Chin-Cheng
c/o MACRONIX INTERNATIONAL
CO., LTD.
No. 16, Li-Hsin Road
Science-Based Industrial Park
300 Hsinchu / TW
02 / HUANG, Chi-Hao
c/o MACRONIX INTERNATIONAL CO., LTD.
No. 16, Li-Hsin Road
Science-Based Industrial Park
300 Hsinchu / TW
03 / WANG, Wei-Hung
c/o MACRONIX INTERNATIONAL CO., LTD.
No. 16, Li-Hsin Road
Science-Based Industrial Park
300 Hsinchu / TW
 [2019/52]
Representative(s)Gunzelmann, Rainer
Wuesthoff & Wuesthoff
Patentanwälte und Rechtsanwalt PartG mbB
Schweigerstraße 2
81541 München / DE
[N/P]
Former [2019/52]Gunzelmann, Rainer
Wuesthoff & Wuesthoff
Patentanwälte PartG mbB
Schweigerstraße 2
81541 München / DE
Application number, filing date18180832.029.06.2018
[2019/52]
Priority number, dateUS20181601260819.06.2018         Original published format: US201816012608
[2019/52]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP3584836
Date:25.12.2019
Language:EN
[2019/52]
Type: B1 Patent specification 
No.:EP3584836
Date:27.10.2021
Language:EN
[2021/43]
Search report(s)(Supplementary) European search report - dispatched on:EP12.02.2019
ClassificationIPC:H01L27/105, H01L21/033, H01L23/528, G03F1/00, G03F7/20
[2019/52]
CPC:
H01L23/528 (EP,US); H10D84/00 (KR); H10B99/22 (EP,CN,KR,US);
H01L21/0338 (US); G03F1/00 (EP); G03F7/70283 (EP);
G03F7/70466 (EP); G11C5/063 (KR); H01L21/0274 (KR);
H01L21/0335 (US); H01L21/0337 (KR,US); H01L21/28132 (KR);
H01L21/76816 (US); H01L21/76877 (US); H01L23/5226 (US);
G11C5/025 (EP); G11C8/10 (EP); G11C8/14 (EP) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2019/52]
TitleGerman:LAYOUT-ENTWURF FÜR AUSFÄCHERUNGSMUSTER IN EINEM SELBSTAUSRICHTENDEN DOPPELSTRUKTURIERUNGSPROZESS[2019/52]
English:LAYOUT DESIGN FOR FANOUT PATTERNS IN SELF-ALIGNED DOUBLE PATTERNING PROCESS[2019/52]
French:CONCEPTION D'AGENCEMENT DE MOTIFS DE DÉPLOIEMENT PYRAMIDAL DANS UN PROCESSUS DE FORMATION DE MOTIFS DOUBLES AUTO-ALIGNÉS[2019/52]
Examination procedure04.04.2019Amendment by applicant (claims and/or description)
04.04.2019Examination requested  [2019/52]
04.04.2019Date on which the examining division has become responsible
19.08.2021Communication of intention to grant the patent
21.09.2021Fee for grant paid
21.09.2021Fee for publishing/printing paid
21.09.2021Receipt of the translation of the claim(s)
Opposition(s)28.07.2022No opposition filed within time limit [2022/40]
Fees paidRenewal fee
31.03.2020Renewal fee patent year 03
28.04.2021Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU29.06.2018
AL27.10.2021
AT27.10.2021
CY27.10.2021
CZ27.10.2021
DK27.10.2021
EE27.10.2021
ES27.10.2021
FI27.10.2021
HR27.10.2021
IT27.10.2021
LT27.10.2021
LV27.10.2021
MC27.10.2021
MK27.10.2021
MT27.10.2021
PL27.10.2021
RO27.10.2021
RS27.10.2021
SE27.10.2021
SI27.10.2021
SK27.10.2021
SM27.10.2021
TR27.10.2021
BG27.01.2022
NO27.01.2022
GR28.01.2022
IS27.02.2022
PT28.02.2022
IE29.06.2022
LU29.06.2022
BE30.06.2022
CH30.06.2022
LI30.06.2022
[2024/44]
Former [2024/29]HU29.06.2018
AL27.10.2021
AT27.10.2021
CY27.10.2021
CZ27.10.2021
DK27.10.2021
EE27.10.2021
ES27.10.2021
FI27.10.2021
HR27.10.2021
IT27.10.2021
LT27.10.2021
LV27.10.2021
MC27.10.2021
MK27.10.2021
PL27.10.2021
RO27.10.2021
RS27.10.2021
SE27.10.2021
SI27.10.2021
SK27.10.2021
SM27.10.2021
TR27.10.2021
BG27.01.2022
NO27.01.2022
GR28.01.2022
IS27.02.2022
PT28.02.2022
IE29.06.2022
LU29.06.2022
BE30.06.2022
CH30.06.2022
LI30.06.2022
Former [2024/24]HU29.06.2018
AL27.10.2021
AT27.10.2021
CY27.10.2021
CZ27.10.2021
DK27.10.2021
EE27.10.2021
ES27.10.2021
FI27.10.2021
HR27.10.2021
IT27.10.2021
LT27.10.2021
LV27.10.2021
MC27.10.2021
MK27.10.2021
PL27.10.2021
RO27.10.2021
RS27.10.2021
SE27.10.2021
SI27.10.2021
SK27.10.2021
SM27.10.2021
BG27.01.2022
NO27.01.2022
GR28.01.2022
IS27.02.2022
PT28.02.2022
IE29.06.2022
LU29.06.2022
BE30.06.2022
CH30.06.2022
LI30.06.2022
Former [2024/23]AL27.10.2021
AT27.10.2021
CY27.10.2021
CZ27.10.2021
DK27.10.2021
EE27.10.2021
ES27.10.2021
FI27.10.2021
HR27.10.2021
IT27.10.2021
LT27.10.2021
LV27.10.2021
MC27.10.2021
MK27.10.2021
PL27.10.2021
RO27.10.2021
RS27.10.2021
SE27.10.2021
SI27.10.2021
SK27.10.2021
SM27.10.2021
BG27.01.2022
NO27.01.2022
GR28.01.2022
IS27.02.2022
PT28.02.2022
IE29.06.2022
LU29.06.2022
BE30.06.2022
CH30.06.2022
LI30.06.2022
Former [2024/20]AL27.10.2021
AT27.10.2021
CY27.10.2021
CZ27.10.2021
DK27.10.2021
EE27.10.2021
ES27.10.2021
FI27.10.2021
HR27.10.2021
IT27.10.2021
LT27.10.2021
LV27.10.2021
MC27.10.2021
PL27.10.2021
RO27.10.2021
RS27.10.2021
SE27.10.2021
SI27.10.2021
SK27.10.2021
SM27.10.2021
BG27.01.2022
NO27.01.2022
GR28.01.2022
IS27.02.2022
PT28.02.2022
IE29.06.2022
LU29.06.2022
BE30.06.2022
CH30.06.2022
LI30.06.2022
Former [2023/25]AL27.10.2021
AT27.10.2021
CZ27.10.2021
DK27.10.2021
EE27.10.2021
ES27.10.2021
FI27.10.2021
HR27.10.2021
IT27.10.2021
LT27.10.2021
LV27.10.2021
MC27.10.2021
PL27.10.2021
RO27.10.2021
RS27.10.2021
SE27.10.2021
SI27.10.2021
SK27.10.2021
SM27.10.2021
BG27.01.2022
NO27.01.2022
GR28.01.2022
IS27.02.2022
PT28.02.2022
IE29.06.2022
LU29.06.2022
BE30.06.2022
CH30.06.2022
LI30.06.2022
Former [2023/21]AL27.10.2021
AT27.10.2021
CZ27.10.2021
DK27.10.2021
EE27.10.2021
ES27.10.2021
FI27.10.2021
HR27.10.2021
LT27.10.2021
LV27.10.2021
MC27.10.2021
PL27.10.2021
RO27.10.2021
RS27.10.2021
SE27.10.2021
SI27.10.2021
SK27.10.2021
SM27.10.2021
BG27.01.2022
NO27.01.2022
GR28.01.2022
IS27.02.2022
PT28.02.2022
IE29.06.2022
LU29.06.2022
CH30.06.2022
LI30.06.2022
Former [2023/20]AL27.10.2021
AT27.10.2021
CZ27.10.2021
DK27.10.2021
EE27.10.2021
ES27.10.2021
FI27.10.2021
HR27.10.2021
LT27.10.2021
LV27.10.2021
MC27.10.2021
PL27.10.2021
RO27.10.2021
RS27.10.2021
SE27.10.2021
SI27.10.2021
SK27.10.2021
SM27.10.2021
BG27.01.2022
NO27.01.2022
GR28.01.2022
IS27.02.2022
PT28.02.2022
IE29.06.2022
Former [2023/08]AL27.10.2021
AT27.10.2021
CZ27.10.2021
DK27.10.2021
EE27.10.2021
ES27.10.2021
FI27.10.2021
HR27.10.2021
LT27.10.2021
LV27.10.2021
MC27.10.2021
PL27.10.2021
RO27.10.2021
RS27.10.2021
SE27.10.2021
SI27.10.2021
SK27.10.2021
SM27.10.2021
BG27.01.2022
NO27.01.2022
GR28.01.2022
IS27.02.2022
PT28.02.2022
Former [2023/01]AL27.10.2021
AT27.10.2021
CZ27.10.2021
DK27.10.2021
EE27.10.2021
ES27.10.2021
FI27.10.2021
HR27.10.2021
LT27.10.2021
LV27.10.2021
PL27.10.2021
RO27.10.2021
RS27.10.2021
SE27.10.2021
SI27.10.2021
SK27.10.2021
SM27.10.2021
BG27.01.2022
NO27.01.2022
GR28.01.2022
IS27.02.2022
PT28.02.2022
Former [2022/49]AL27.10.2021
AT27.10.2021
CZ27.10.2021
DK27.10.2021
EE27.10.2021
ES27.10.2021
FI27.10.2021
HR27.10.2021
LT27.10.2021
LV27.10.2021
PL27.10.2021
RO27.10.2021
RS27.10.2021
SE27.10.2021
SK27.10.2021
SM27.10.2021
BG27.01.2022
NO27.01.2022
GR28.01.2022
IS27.02.2022
PT28.02.2022
Former [2022/35]AT27.10.2021
CZ27.10.2021
DK27.10.2021
EE27.10.2021
ES27.10.2021
FI27.10.2021
HR27.10.2021
LT27.10.2021
LV27.10.2021
PL27.10.2021
RO27.10.2021
RS27.10.2021
SE27.10.2021
SK27.10.2021
SM27.10.2021
BG27.01.2022
NO27.01.2022
GR28.01.2022
IS27.02.2022
PT28.02.2022
Former [2022/34]AT27.10.2021
EE27.10.2021
ES27.10.2021
FI27.10.2021
HR27.10.2021
LT27.10.2021
LV27.10.2021
PL27.10.2021
RO27.10.2021
RS27.10.2021
SE27.10.2021
SM27.10.2021
BG27.01.2022
NO27.01.2022
GR28.01.2022
IS27.02.2022
PT28.02.2022
Former [2022/33]AT27.10.2021
ES27.10.2021
FI27.10.2021
HR27.10.2021
LT27.10.2021
LV27.10.2021
PL27.10.2021
RS27.10.2021
SE27.10.2021
SM27.10.2021
BG27.01.2022
NO27.01.2022
GR28.01.2022
IS27.02.2022
PT28.02.2022
Former [2022/25]AT27.10.2021
ES27.10.2021
FI27.10.2021
HR27.10.2021
LT27.10.2021
LV27.10.2021
PL27.10.2021
RS27.10.2021
SE27.10.2021
BG27.01.2022
NO27.01.2022
GR28.01.2022
IS27.02.2022
PT28.02.2022
Former [2022/24]AT27.10.2021
ES27.10.2021
FI27.10.2021
HR27.10.2021
LT27.10.2021
LV27.10.2021
PL27.10.2021
RS27.10.2021
SE27.10.2021
BG27.01.2022
GR28.01.2022
IS27.02.2022
PT28.02.2022
Former [2022/23]AT27.10.2021
ES27.10.2021
FI27.10.2021
HR27.10.2021
LT27.10.2021
LV27.10.2021
PL27.10.2021
RS27.10.2021
BG27.01.2022
PT28.02.2022
Former [2022/22]AT27.10.2021
FI27.10.2021
LT27.10.2021
RS27.10.2021
BG27.01.2022
Former [2022/21]AT27.10.2021
RS27.10.2021
BG27.01.2022
Former [2022/19]BG27.01.2022
Documents cited:Search[A]US2009154240  (PARK JANG-HO [KR], et al);
 [A]CN101673003  (AU OPTRONICS CORP);
 [A]US2012168955  (CHEN SHIH-HUNG [TW], et al);
 [XAI]US9153535  (WU CHIH-YUAN [TW], et al);
 [XA]US2016099217  (PENG CHI-SHENG [TW]);
 [IA]US9673051  (LEE GUAN-RU [TW]);
 [A]US2017294442  (HUNG YU-MIN [TW], et al)
by applicantUS9330764
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.