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Extract from the Register of European Patents

EP About this file: EP3678867

EP3678867 - A METHOD FOR THE MANUFACTURE OF A MEMS DEVICE [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  21.10.2022
Database last updated on 22.08.2024
FormerThe patent has been granted
Status updated on  12.11.2021
FormerGrant of patent is intended
Status updated on  06.07.2021
FormerRequest for examination was made
Status updated on  12.06.2020
FormerThe international publication has been made
Status updated on  16.03.2019
Formerunknown
Status updated on  26.09.2018
Most recent event   Tooltip31.05.2024Lapse of the patent in a contracting state
New state(s): MK		published on 03.07.2024  [2024/27]
Applicant(s)For all designated states
Xaar Technology Limited
c/o Intellectual Property Team
1 Hurricane Close
Ermine Business Park
Huntingdon, Cambridgeshire PE29 6XX / GB
[2022/01]
Former [2021/50]For all designated states
Xaar Technology Limited
Intellectual Property Team
1 Hurricane Close
Ermine Business Park
Huntingdon, Cambridgeshire PE29 6XX / GB
Former [2021/35]For all designated states
Xaar Technology Limited
Intellectual Property Team
1 Hurrican Close
Ermine Business Park
Huntingdon, Cambridgeshire PE29 6XX / GB
Former [2020/29]For all designated states
Xaar Technology Limited
Unit 316
Science Park
Cambridge CB4 0XR / GB
Inventor(s)01 / SCOTT, Bruce
c/o Xaar Technology Limited
316 Science Park
Cambridge CB4 0XR / GB
 [2020/29]
Representative(s)Pitchford, James Edward, et al
Mathys & Squire The Shard
32 London Bridge Street
London SE1 9SG / GB
[2021/50]
Former [2020/29]Pitchford, James Edward, et al
Mathys & Squire LLP The Shard
32 London Bridge Street
London SE1 9SG / GB
Application number, filing date18769463.310.09.2018
[2020/29]
WO2018GB52566
Priority number, dateGB2017001450708.09.2017         Original published format: GB 201714507
[2020/29]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2019048888
Date:14.03.2019
Language:EN
[2019/11]
Type: A1 Application with search report 
No.:EP3678867
Date:15.07.2020
Language:EN
The application published by WIPO in one of the EPO official languages on 14.03.2019 takes the place of the publication of the European patent application.
[2020/29]
Type: B1 Patent specification 
No.:EP3678867
Date:15.12.2021
Language:EN
[2021/50]
Search report(s)International search report - published on:EP14.03.2019
ClassificationIPC:B41J2/14, B41J2/16
[2020/29]
CPC:
B41J2/14233 (EP,US); B41J2/1623 (EP,GB,US); B41J2/161 (EP,GB,US);
B41J2/1626 (GB); B41J2/1628 (EP,US); B41J2/1631 (EP,US);
B41J2/1645 (EP); B41J2002/14241 (EP,US) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2020/29]
Extension statesBANot yet paid
MENot yet paid
Validation statesKHNot yet paid
MANot yet paid
MDNot yet paid
TNNot yet paid
TitleGerman:VERFAHREN ZUR HERSTELLUNG EINER MEMS-VORRICHTUNG[2020/29]
English:A METHOD FOR THE MANUFACTURE OF A MEMS DEVICE[2020/29]
French:PROCÉDÉ DE FABRICATION D'UN DISPOSITIF MEMS[2020/29]
Entry into regional phase03.03.2020National basic fee paid 
03.03.2020Designation fee(s) paid 
03.03.2020Examination fee paid 
Examination procedure03.03.2020Examination requested  [2020/29]
03.03.2020Date on which the examining division has become responsible
26.10.2020Amendment by applicant (claims and/or description)
07.07.2021Communication of intention to grant the patent
04.11.2021Fee for grant paid
04.11.2021Fee for publishing/printing paid
04.11.2021Receipt of the translation of the claim(s)
Opposition(s)16.09.2022No opposition filed within time limit [2022/47]
Fees paidRenewal fee
25.09.2020Renewal fee patent year 03
28.09.2021Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU10.09.2018
AL15.12.2021
AT15.12.2021
CY15.12.2021
CZ15.12.2021
DK15.12.2021
EE15.12.2021
ES15.12.2021
FI15.12.2021
HR15.12.2021
IT15.12.2021
LT15.12.2021
LV15.12.2021
MC15.12.2021
MK15.12.2021
NL15.12.2021
PL15.12.2021
RO15.12.2021
RS15.12.2021
SE15.12.2021
SI15.12.2021
SK15.12.2021
SM15.12.2021
BG15.03.2022
NO15.03.2022
GR16.03.2022
IS15.04.2022
PT18.04.2022
IE10.09.2022
LU10.09.2022
[2024/27]
Former [2024/24]HU10.09.2018
AL15.12.2021
AT15.12.2021
CY15.12.2021
CZ15.12.2021
DK15.12.2021
EE15.12.2021
ES15.12.2021
FI15.12.2021
HR15.12.2021
IT15.12.2021
LT15.12.2021
LV15.12.2021
MC15.12.2021
NL15.12.2021
PL15.12.2021
RO15.12.2021
RS15.12.2021
SE15.12.2021
SI15.12.2021
SK15.12.2021
SM15.12.2021
BG15.03.2022
NO15.03.2022
GR16.03.2022
IS15.04.2022
PT18.04.2022
IE10.09.2022
LU10.09.2022
Former [2024/21]AL15.12.2021
AT15.12.2021
CY15.12.2021
CZ15.12.2021
DK15.12.2021
EE15.12.2021
ES15.12.2021
FI15.12.2021
HR15.12.2021
IT15.12.2021
LT15.12.2021
LV15.12.2021
MC15.12.2021
NL15.12.2021
PL15.12.2021
RO15.12.2021
RS15.12.2021
SE15.12.2021
SI15.12.2021
SK15.12.2021
SM15.12.2021
BG15.03.2022
NO15.03.2022
GR16.03.2022
IS15.04.2022
PT18.04.2022
IE10.09.2022
LU10.09.2022
Former [2023/33]AL15.12.2021
AT15.12.2021
CZ15.12.2021
DK15.12.2021
EE15.12.2021
ES15.12.2021
FI15.12.2021
HR15.12.2021
IT15.12.2021
LT15.12.2021
LV15.12.2021
MC15.12.2021
NL15.12.2021
PL15.12.2021
RO15.12.2021
RS15.12.2021
SE15.12.2021
SI15.12.2021
SK15.12.2021
SM15.12.2021
BG15.03.2022
NO15.03.2022
GR16.03.2022
IS15.04.2022
PT18.04.2022
IE10.09.2022
LU10.09.2022
Former [2023/30]AL15.12.2021
AT15.12.2021
CZ15.12.2021
DK15.12.2021
EE15.12.2021
ES15.12.2021
FI15.12.2021
HR15.12.2021
IT15.12.2021
LT15.12.2021
LV15.12.2021
MC15.12.2021
NL15.12.2021
PL15.12.2021
RO15.12.2021
RS15.12.2021
SE15.12.2021
SI15.12.2021
SK15.12.2021
SM15.12.2021
BG15.03.2022
NO15.03.2022
GR16.03.2022
IS15.04.2022
PT18.04.2022
LU10.09.2022
Former [2023/27]AL15.12.2021
AT15.12.2021
CZ15.12.2021
DK15.12.2021
EE15.12.2021
ES15.12.2021
FI15.12.2021
HR15.12.2021
IT15.12.2021
LT15.12.2021
LV15.12.2021
MC15.12.2021
NL15.12.2021
PL15.12.2021
RO15.12.2021
RS15.12.2021
SE15.12.2021
SI15.12.2021
SK15.12.2021
SM15.12.2021
BG15.03.2022
NO15.03.2022
GR16.03.2022
IS15.04.2022
PT18.04.2022
Former [2023/22]AL15.12.2021
AT15.12.2021
CZ15.12.2021
DK15.12.2021
EE15.12.2021
ES15.12.2021
FI15.12.2021
HR15.12.2021
LT15.12.2021
LV15.12.2021
MC15.12.2021
NL15.12.2021
PL15.12.2021
RO15.12.2021
RS15.12.2021
SE15.12.2021
SI15.12.2021
SK15.12.2021
SM15.12.2021
BG15.03.2022
NO15.03.2022
GR16.03.2022
IS15.04.2022
PT18.04.2022
Former [2023/01]AL15.12.2021
AT15.12.2021
CZ15.12.2021
DK15.12.2021
EE15.12.2021
ES15.12.2021
FI15.12.2021
HR15.12.2021
LT15.12.2021
LV15.12.2021
NL15.12.2021
PL15.12.2021
RO15.12.2021
RS15.12.2021
SE15.12.2021
SI15.12.2021
SK15.12.2021
SM15.12.2021
BG15.03.2022
NO15.03.2022
GR16.03.2022
IS15.04.2022
PT18.04.2022
Former [2022/49]AL15.12.2021
AT15.12.2021
CZ15.12.2021
DK15.12.2021
EE15.12.2021
ES15.12.2021
FI15.12.2021
HR15.12.2021
LT15.12.2021
LV15.12.2021
NL15.12.2021
PL15.12.2021
RO15.12.2021
RS15.12.2021
SE15.12.2021
SK15.12.2021
SM15.12.2021
BG15.03.2022
NO15.03.2022
GR16.03.2022
IS15.04.2022
PT18.04.2022
Former [2022/46]AT15.12.2021
CZ15.12.2021
DK15.12.2021
EE15.12.2021
ES15.12.2021
FI15.12.2021
HR15.12.2021
LT15.12.2021
LV15.12.2021
NL15.12.2021
PL15.12.2021
RO15.12.2021
RS15.12.2021
SE15.12.2021
SK15.12.2021
SM15.12.2021
BG15.03.2022
NO15.03.2022
GR16.03.2022
IS15.04.2022
PT18.04.2022
Former [2022/42]AT15.12.2021
CZ15.12.2021
EE15.12.2021
ES15.12.2021
FI15.12.2021
HR15.12.2021
LT15.12.2021
LV15.12.2021
NL15.12.2021
PL15.12.2021
RO15.12.2021
RS15.12.2021
SE15.12.2021
SK15.12.2021
SM15.12.2021
BG15.03.2022
NO15.03.2022
GR16.03.2022
IS15.04.2022
PT18.04.2022
Former [2022/36]AT15.12.2021
CZ15.12.2021
EE15.12.2021
ES15.12.2021
FI15.12.2021
HR15.12.2021
LT15.12.2021
LV15.12.2021
NL15.12.2021
PL15.12.2021
RO15.12.2021
RS15.12.2021
SE15.12.2021
SK15.12.2021
SM15.12.2021
BG15.03.2022
NO15.03.2022
GR16.03.2022
PT18.04.2022
Former [2022/35]CZ15.12.2021
EE15.12.2021
ES15.12.2021
FI15.12.2021
HR15.12.2021
LT15.12.2021
LV15.12.2021
NL15.12.2021
RO15.12.2021
RS15.12.2021
SE15.12.2021
SK15.12.2021
SM15.12.2021
BG15.03.2022
NO15.03.2022
GR16.03.2022
PT18.04.2022
Former [2022/34]EE15.12.2021
ES15.12.2021
FI15.12.2021
HR15.12.2021
LT15.12.2021
LV15.12.2021
NL15.12.2021
RO15.12.2021
RS15.12.2021
SE15.12.2021
SM15.12.2021
BG15.03.2022
NO15.03.2022
GR16.03.2022
PT18.04.2022
Former [2022/33]FI15.12.2021
HR15.12.2021
LT15.12.2021
LV15.12.2021
NL15.12.2021
RS15.12.2021
SE15.12.2021
SM15.12.2021
BG15.03.2022
NO15.03.2022
GR16.03.2022
Former [2022/30]FI15.12.2021
HR15.12.2021
LT15.12.2021
LV15.12.2021
NL15.12.2021
RS15.12.2021
SE15.12.2021
BG15.03.2022
NO15.03.2022
GR16.03.2022
Former [2022/25]FI15.12.2021
HR15.12.2021
LT15.12.2021
LV15.12.2021
RS15.12.2021
SE15.12.2021
BG15.03.2022
NO15.03.2022
GR16.03.2022
Former [2022/24]FI15.12.2021
HR15.12.2021
LT15.12.2021
LV15.12.2021
RS15.12.2021
SE15.12.2021
BG15.03.2022
GR16.03.2022
Former [2022/22]FI15.12.2021
LT15.12.2021
RS15.12.2021
BG15.03.2022
Former [2022/21]RS15.12.2021
BG15.03.2022
Former [2022/19]BG15.03.2022
Cited inInternational search[A]WO2005122217  (UNIV CALIFORNIA [US], et al) [A] 1* the whole document *;
 [YA]WO2009142929  (FUJIFILM CORP [JP], et al) [Y] 1,2,4-6,15 * paragraph [0026] - paragraph [0037] * * figures 1,3,4 * [A] 3,7-14;
 [A]US2017072691  (HAYS ANDREW W [US], et al) [A] 1 * paragraphs [0027] - [0031] * * figure - *;
 [Y]WO2017082354  (KYOCERA CORP [JP]) [Y] 1,2,4-6,15 * paragraphs [0107] - [0111] * * figure - *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.