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Extract from the Register of European Patents

EP About this file: EP3688394

EP3688394 - REAL-TIME MONITORING OF A MULTI-ZONE VERTICAL FURNACE WITH EARLY DETECTION OF A FAILURE OF A HEATING ZONE ELEMENT [Right-click to bookmark this link]
StatusExamination is in progress
Status updated on  11.02.2022
Database last updated on 03.10.2024
FormerRequest for examination was made
Status updated on  03.07.2020
FormerThe international publication has been made
Status updated on  30.03.2019
Formerunknown
Status updated on  19.11.2018
Most recent event   Tooltip22.09.2023New entry: Renewal fee paid 
Applicant(s)For all designated states
X-FAB Semiconductor Foundries GmbH
Haarbergstrasse 67
99097 Erfurt / DE
[2020/32]
Inventor(s)01 / GRUBER, Sven
Lessingstr. 18
01689 Weinboehla / DE
 [2020/32]
Representative(s)Leonhard, Frank Reimund
Leonhard @ Friends Patentanwälte
Maximilianstrasse 2
Palais an der Oper
80539 München / DE
[N/P]
Former [2020/32]Leonhard, Frank Reimund
Leonhard & Partner
Patentanwälte
Tal 30
80331 München / DE
Application number, filing date18799591.525.09.2018
[2020/32]
WO2018IB57414
Priority number, dateDE20171012220525.09.2017         Original published format: DE102017122205
DE20181010101018.01.2018         Original published format: DE102018101010
[2020/32]
Filing languageDE
Procedural languageDE
PublicationType: A1 Application with search report
No.:WO2019058358
Date:28.03.2019
Language:DE
[2019/13]
Type: A1 Application with search report 
No.:EP3688394
Date:05.08.2020
Language:DE
The application published by WIPO in one of the EPO official languages on 28.03.2019 takes the place of the publication of the European patent application.
[2020/32]
Search report(s)International search report - published on:EP28.03.2019
ClassificationIPC:F27B17/00, G01R31/28, F27D21/00, H01L21/67, H04M3/08, H05B3/14, G01R31/02, F27D19/00
[2020/32]
CPC:
H01L21/67248 (EP,KR,US); F27D21/0014 (EP,KR); F27B17/0025 (EP,KR,US);
F27D19/00 (EP,KR); G01R27/14 (US); G01R31/52 (EP,KR,US);
H01L21/67098 (EP,KR); H01L21/67109 (EP,KR,US); H01L21/67288 (EP,KR);
H05B1/0233 (EP,KR); F27D2019/0025 (EP,KR,US); G01R27/08 (EP) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2020/32]
TitleGerman:ECHTZEIT MONITORING EINES MEHRZONEN-VERTIKALOFENS MIT FRUEHZEITIGER ERKENNUNG EINES AUSFALLS EINES HEIZZONEN-ELEMENTS[2020/32]
English:REAL-TIME MONITORING OF A MULTI-ZONE VERTICAL FURNACE WITH EARLY DETECTION OF A FAILURE OF A HEATING ZONE ELEMENT[2020/32]
French:SURVEILLANCE EN TEMPS RÉEL D'UN FOUR VERTICAL À PLUSIEURS ZONES, DOTÉE D'UNE DÉTECTION PRÉCOCE DE L'ARRÊT D'UN ÉLÉMENT DE ZONE CHAUFFANTE[2020/32]
Entry into regional phase31.03.2020National basic fee paid 
31.03.2020Designation fee(s) paid 
31.03.2020Examination fee paid 
Examination procedure31.03.2020Examination requested  [2020/32]
31.03.2020Date on which the examining division has become responsible
15.11.2020Amendment by applicant (claims and/or description)
11.02.2022Despatch of a communication from the examining division (Time limit: M06)
21.08.2022Reply to a communication from the examining division
Fees paidRenewal fee
30.09.2020Renewal fee patent year 03
30.09.2021Renewal fee patent year 04
19.09.2022Renewal fee patent year 05
22.09.2023Renewal fee patent year 06
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Cited inInternational search[A]JP2002352938  (TOKYO ELECTRON LTD) [A] 1-23 * abstract * * paragraph [0004] *;
 [A]US2005056635  (SUZUKI MASAYUKI [JP], et al) [A] 1-23 * abstract *;
 [X]JP2006085907  (KOKUSAI ELECTRIC SEMICONDUCTOR) [X] 1-23 * abstract * * paragraphs [0004] , [0 17] *;
 [X]JP2006165200  (KOKUSAI ELECTRIC SEMICONDUCTOR) [X] 1-23 * abstract *;
 [A]US2008262791  (TERASAWA NOBUTOSHI [JP], et al) [A] 1-23 * abstract *;
 [A]JP2009281837  (TOKYO ELECTRON LTD) [A] 1-23 * abstract *;
 [A]JP2011108596  (KOKUSAI ELECTRIC SEMICONDUCTOR SERVICE INC) [A] 1-23 * abstract *;
 [X]US2012097661  (SINGH HARMEET [US]) [X] 1-23 * abstract *;
 [A]JP2017073498  (NUFLARE TECHNOLOGY INC) [A] 1-23* abstract *
by applicantDE3910676
 US2009237102
 US2010014749
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.