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Extract from the Register of European Patents

EP About this file: EP3704547

EP3704547 - USE OF COMPOSITIONS COMPRISING A SILOXANE-TYPE ADDITIVE FOR AVOIDING PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIALS WITH LINE-SPACE DIMENSIONS OF 50 NM OR BELOW [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  19.05.2023
Database last updated on 12.07.2024
FormerThe patent has been granted
Status updated on  10.06.2022
FormerGrant of patent is intended
Status updated on  02.02.2022
FormerRequest for examination was made
Status updated on  08.12.2021
FormerGrant of patent is intended
Status updated on  18.08.2021
FormerRequest for examination was made
Status updated on  07.08.2020
FormerThe international publication has been made
Status updated on  11.05.2019
Formerunknown
Status updated on  23.11.2018
Most recent event   Tooltip14.06.2024Lapse of the patent in a contracting state
New state(s): TR		published on 17.07.2024 [2024/29]
Applicant(s)For all designated states
BASF SE
Carl-Bosch-Strasse 38
67056 Ludwigshafen am Rhein / DE
[2020/37]
Inventor(s)01 / LOEFFLER, Daniel
Carl-Bosch-Strasse 38
67056 Ludwigshafen / DE
02 / SHEN, Mei Chin
No. 33
Chin Chien 1st Road
Taoyuan 32853 / TW
03 / WEI, Sheng Hsuan
20811 NW Cornell Rd., Suite 300
Hillsboro, OR 97124 / US
04 / PIRRUNG, Frank
Carl-Bosch-Strasse 38
67056 Ludwigshafen / DE
05 / ENGELBRECHT, Lothar
Rheinsteinstr.18
10318 Berlin / DE
06 / BURK, Yeni
Carl-Bosch-Strasse 38
67056 Ludwigshafen / DE
07 / KLIPP, Andreas
Carl-Bosch-Strasse 38
67056 Ludwigshafen / DE
08 / BRILL, Marcel
Carl-Bosch-Strasse 38
67056 Ludwigshafen / DE
09 / CSIHONY, Szilard
Carl-Bosch-Strasse 38
67056 Ludwigshafen / DE
 [2020/37]
Representative(s)BASF IP Association
BASF SE
GBI-C006
67056 Ludwigshafen / DE
[2020/37]
Application number, filing date18800532.629.10.2018
[2020/37]
WO2018EP79555
Priority number, dateEP2017019980703.11.2017         Original published format: EP 17199807
[2020/37]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2019086374
Date:09.05.2019
Language:EN
[2019/19]
Type: A1 Application with search report 
No.:EP3704547
Date:09.09.2020
Language:EN
The application published by WIPO in one of the EPO official languages on 09.05.2019 takes the place of the publication of the European patent application.
[2020/37]
Type: B1 Patent specification 
No.:EP3704547
Date:13.07.2022
Language:EN
[2022/28]
Search report(s)International search report - published on:EP09.05.2019
ClassificationIPC:G03F7/40, C11D1/66, C11D11/00, H01L21/02, H01L21/027, C11D7/50, C11D3/37
[2021/31]
CPC:
G03F7/40 (EP,IL,US); C11D3/373 (EP,IL,KR); C11D3/3734 (EP,IL,KR,US);
C11D3/3738 (EP,IL,KR,US); C11D7/5004 (EP,IL,KR); C11D7/5022 (EP,IL,KR,US);
G03F7/405 (EP,IL,KR); H01L21/02057 (EP,IL,KR,US); C11D2111/22 (EP,IL,KR) (-)
Former IPC [2020/37]G03F7/40, C11D1/66, C11D11/00, H01L21/02, H01L21/027
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2020/37]
Extension statesBANot yet paid
MENot yet paid
Validation statesKHNot yet paid
MANot yet paid
MDNot yet paid
TNNot yet paid
TitleGerman:VERWENDUNG VON ZUSAMMENSETZUNGEN MIT EINEM SILOXANARTIGEN ADDITIV ZUR VERMEIDUNG VON MUSTERKOLLAPS BEI DER BEHANDLUNG VON GEMUSTERTEN MATERIALIEN MIT LINIENRAUMABMESSUNGEN VON 50 NM ODER DARUNTER[2020/37]
English:USE OF COMPOSITIONS COMPRISING A SILOXANE-TYPE ADDITIVE FOR AVOIDING PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIALS WITH LINE-SPACE DIMENSIONS OF 50 NM OR BELOW[2020/37]
French:UTILISATION DE COMPOSITIONS COMPRENANT UN ADDITIF DE TYPE SILOXANE PERMETTANT D'ÉVITER UN AFFAISSEMENT DE MOTIFS LORS DU TRAITEMENT DE MATÉRIAUX À MOTIFS PRÉSENTANT DES DIMENSIONS D'INTERLIGNE DE 50 NM OU MOINS[2021/31]
Former [2020/37]UTILISATION DE COMPOSITIONS COMPRENANT UN ADDITIF DE TYPE SILOXANE POUR ÉVITER UN AFFAISSEMENT DE MOTIF LORS DU TRAITEMENT DE MATÉRIAUX À MOTIFS AYANT DES DIMENSIONS DE L'ESPACE DE LIGNE DE 50 NM OU MOINS
Entry into regional phase03.06.2020National basic fee paid 
03.06.2020Designation fee(s) paid 
03.06.2020Examination fee paid 
Examination procedure03.06.2020Examination requested  [2020/37]
03.06.2020Date on which the examining division has become responsible
19.08.2021Communication of intention to grant the patent
06.12.2021Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO
03.02.2022Communication of intention to grant the patent
02.06.2022Fee for grant paid
02.06.2022Fee for publishing/printing paid
02.06.2022Receipt of the translation of the claim(s)
Opposition(s)14.04.2023No opposition filed within time limit [2023/25]
Fees paidRenewal fee
02.11.2020Renewal fee patent year 03
02.11.2021Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU29.10.2018
AL13.07.2022
CY13.07.2022
CZ13.07.2022
DK13.07.2022
EE13.07.2022
ES13.07.2022
FI13.07.2022
HR13.07.2022
LT13.07.2022
LV13.07.2022
MC13.07.2022
MK13.07.2022
NL13.07.2022
PL13.07.2022
RO13.07.2022
RS13.07.2022
SE13.07.2022
SI13.07.2022
SK13.07.2022
SM13.07.2022
TR13.07.2022
NO13.10.2022
GR14.10.2022
LU29.10.2022
BE31.10.2022
CH31.10.2022
LI31.10.2022
IS13.11.2022
PT14.11.2022
[2024/29]
Former [2024/27]HU29.10.2018
AL13.07.2022
CY13.07.2022
CZ13.07.2022
DK13.07.2022
EE13.07.2022
ES13.07.2022
FI13.07.2022
HR13.07.2022
LT13.07.2022
LV13.07.2022
MC13.07.2022
MK13.07.2022
NL13.07.2022
PL13.07.2022
RO13.07.2022
RS13.07.2022
SE13.07.2022
SI13.07.2022
SK13.07.2022
SM13.07.2022
NO13.10.2022
GR14.10.2022
LU29.10.2022
BE31.10.2022
CH31.10.2022
LI31.10.2022
IS13.11.2022
PT14.11.2022
Former [2024/24]HU29.10.2018
AL13.07.2022
CY13.07.2022
CZ13.07.2022
DK13.07.2022
EE13.07.2022
ES13.07.2022
FI13.07.2022
HR13.07.2022
LT13.07.2022
LV13.07.2022
MC13.07.2022
NL13.07.2022
PL13.07.2022
RO13.07.2022
RS13.07.2022
SE13.07.2022
SI13.07.2022
SK13.07.2022
SM13.07.2022
NO13.10.2022
GR14.10.2022
LU29.10.2022
BE31.10.2022
CH31.10.2022
LI31.10.2022
IS13.11.2022
PT14.11.2022
Former [2024/21]AL13.07.2022
CY13.07.2022
CZ13.07.2022
DK13.07.2022
EE13.07.2022
ES13.07.2022
FI13.07.2022
HR13.07.2022
LT13.07.2022
LV13.07.2022
MC13.07.2022
NL13.07.2022
PL13.07.2022
RO13.07.2022
RS13.07.2022
SE13.07.2022
SI13.07.2022
SK13.07.2022
SM13.07.2022
NO13.10.2022
GR14.10.2022
LU29.10.2022
BE31.10.2022
CH31.10.2022
LI31.10.2022
IS13.11.2022
PT14.11.2022
Former [2023/42]AL13.07.2022
CZ13.07.2022
DK13.07.2022
EE13.07.2022
ES13.07.2022
FI13.07.2022
HR13.07.2022
LT13.07.2022
LV13.07.2022
MC13.07.2022
NL13.07.2022
PL13.07.2022
RO13.07.2022
RS13.07.2022
SE13.07.2022
SI13.07.2022
SK13.07.2022
SM13.07.2022
NO13.10.2022
GR14.10.2022
LU29.10.2022
BE31.10.2022
CH31.10.2022
LI31.10.2022
IS13.11.2022
PT14.11.2022
Former [2023/37]AL13.07.2022
CZ13.07.2022
DK13.07.2022
EE13.07.2022
ES13.07.2022
FI13.07.2022
HR13.07.2022
LT13.07.2022
LV13.07.2022
MC13.07.2022
NL13.07.2022
PL13.07.2022
RO13.07.2022
RS13.07.2022
SE13.07.2022
SI13.07.2022
SK13.07.2022
SM13.07.2022
NO13.10.2022
GR14.10.2022
LU29.10.2022
CH31.10.2022
LI31.10.2022
IS13.11.2022
PT14.11.2022
Former [2023/35]AL13.07.2022
CZ13.07.2022
DK13.07.2022
EE13.07.2022
ES13.07.2022
FI13.07.2022
HR13.07.2022
LT13.07.2022
LV13.07.2022
MC13.07.2022
NL13.07.2022
PL13.07.2022
RO13.07.2022
RS13.07.2022
SE13.07.2022
SK13.07.2022
SM13.07.2022
NO13.10.2022
GR14.10.2022
LU29.10.2022
CH31.10.2022
LI31.10.2022
IS13.11.2022
PT14.11.2022
Former [2023/30]AL13.07.2022
CZ13.07.2022
DK13.07.2022
EE13.07.2022
ES13.07.2022
FI13.07.2022
HR13.07.2022
LT13.07.2022
LV13.07.2022
MC13.07.2022
NL13.07.2022
PL13.07.2022
RO13.07.2022
RS13.07.2022
SE13.07.2022
SK13.07.2022
SM13.07.2022
NO13.10.2022
GR14.10.2022
LU29.10.2022
IS13.11.2022
PT14.11.2022
Former [2023/29]AL13.07.2022
CZ13.07.2022
DK13.07.2022
EE13.07.2022
ES13.07.2022
FI13.07.2022
HR13.07.2022
LT13.07.2022
LV13.07.2022
MC13.07.2022
NL13.07.2022
PL13.07.2022
RO13.07.2022
RS13.07.2022
SE13.07.2022
SK13.07.2022
SM13.07.2022
NO13.10.2022
GR14.10.2022
IS13.11.2022
PT14.11.2022
Former [2023/25]CZ13.07.2022
DK13.07.2022
EE13.07.2022
ES13.07.2022
FI13.07.2022
HR13.07.2022
LT13.07.2022
LV13.07.2022
MC13.07.2022
NL13.07.2022
PL13.07.2022
RO13.07.2022
RS13.07.2022
SE13.07.2022
SK13.07.2022
SM13.07.2022
NO13.10.2022
GR14.10.2022
IS13.11.2022
PT14.11.2022
Former [2023/23]CZ13.07.2022
DK13.07.2022
EE13.07.2022
ES13.07.2022
FI13.07.2022
HR13.07.2022
LT13.07.2022
LV13.07.2022
NL13.07.2022
PL13.07.2022
RO13.07.2022
RS13.07.2022
SE13.07.2022
SK13.07.2022
SM13.07.2022
NO13.10.2022
GR14.10.2022
IS13.11.2022
PT14.11.2022
Former [2023/22]CZ13.07.2022
DK13.07.2022
ES13.07.2022
FI13.07.2022
HR13.07.2022
LT13.07.2022
LV13.07.2022
NL13.07.2022
PL13.07.2022
RO13.07.2022
RS13.07.2022
SE13.07.2022
SM13.07.2022
NO13.10.2022
GR14.10.2022
IS13.11.2022
PT14.11.2022
Former [2023/21]DK13.07.2022
ES13.07.2022
FI13.07.2022
HR13.07.2022
LT13.07.2022
LV13.07.2022
NL13.07.2022
PL13.07.2022
RS13.07.2022
SE13.07.2022
SM13.07.2022
NO13.10.2022
GR14.10.2022
IS13.11.2022
PT14.11.2022
Former [2023/20]ES13.07.2022
FI13.07.2022
HR13.07.2022
LT13.07.2022
LV13.07.2022
NL13.07.2022
PL13.07.2022
RS13.07.2022
SE13.07.2022
SM13.07.2022
NO13.10.2022
GR14.10.2022
IS13.11.2022
PT14.11.2022
Former [2023/12]ES13.07.2022
FI13.07.2022
HR13.07.2022
LT13.07.2022
LV13.07.2022
NL13.07.2022
PL13.07.2022
RS13.07.2022
SE13.07.2022
NO13.10.2022
GR14.10.2022
IS13.11.2022
PT14.11.2022
Former [2023/11]ES13.07.2022
FI13.07.2022
HR13.07.2022
LT13.07.2022
LV13.07.2022
NL13.07.2022
PL13.07.2022
RS13.07.2022
SE13.07.2022
NO13.10.2022
GR14.10.2022
PT14.11.2022
Former [2023/10]ES13.07.2022
FI13.07.2022
HR13.07.2022
LT13.07.2022
LV13.07.2022
NL13.07.2022
RS13.07.2022
SE13.07.2022
NO13.10.2022
GR14.10.2022
PT14.11.2022
Former [2023/09]ES13.07.2022
FI13.07.2022
LT13.07.2022
LV13.07.2022
NL13.07.2022
RS13.07.2022
SE13.07.2022
NO13.10.2022
PT14.11.2022
Former [2023/08]ES13.07.2022
FI13.07.2022
LT13.07.2022
NL13.07.2022
RS13.07.2022
SE13.07.2022
NO13.10.2022
Former [2023/06]NL13.07.2022
Cited inInternational search[A]US2013092191  (SAIO TAKASHI [JP], et al) [A] 1-15 * paragraphs [0014] - [0016] - [0019] - [0023] - [0048] , [0049] , [0055] - [0058] - [0060] , [0065] - [0072]; examples 1-6; claims 1,5 *;
 [A]US2013255534  (RYOKAWA ATSUSHI [JP], et al) [A] 1-15 * experimental part; paragraphs [0014] - [0016] - [0023] , [0024] , [0036] - [0045] - [0063]; claims 1,2,5-7 *;
 [A]JP2013257379  (AZ ELECTRONIC MATERIALS MFG CO LTD) [A] 1-15 * paragraphs [0001] , [0003] , [0004] , [0010] - [0015] - [0024] , [0033] , [0034]; example 1; claims 1,2-4; table 2 *;
 [A]US2015318183  (IDO YASUYUKI [JP], et al) [A] 1-15 * paragraphs [0003] - [0005] - [0054] , [0055]; claims 1-15 *;
 [A]US2015325458  (PRINTZ WALLACE [US]) [A] 1-15* paragraphs [0002] - [0004] - [0012] - [0020] - [0038] - [0048] - [0051] , [0056] - [0058]; figures 4A-4B, 5A-5B,6A; claim 1 *;
 [A]WO2017002497  (FUJIFILM CORP [JP]) [A] 1-15 * experimental part; paragraphs [0002] , [0005] - [0007] - [0017] , [0 48] - [0054] - [0060] , [0061] *
by applicantUS2008299487
 WO2012027667
 WO2014091363
    - NAMATSU et al., Appl. Phys. Lett., (19950000), vol. 66, no. 20
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.