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Extract from the Register of European Patents

EP About this file: EP3673506

EP3673506 - SEMICONDUCTOR SUBSTRATE SUPPORT WITH MULTIPLE ELECTRODES AND METHOD FOR MAKING SAME [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  19.09.2024
Database last updated on 28.03.2026
FormerThe patent has been granted
Status updated on  13.10.2023
FormerGrant of patent is intended
Status updated on  26.06.2023
FormerRequest for examination was made
Status updated on  26.05.2023
FormerGrant of patent is intended
Status updated on  16.04.2023
FormerRequest for examination was made
Status updated on  28.03.2023
FormerGrant of patent is intended
Status updated on  22.12.2022
FormerRequest for examination was made
Status updated on  29.05.2020
FormerThe international publication has been made
Status updated on  02.03.2019
Most recent event   Tooltip13.03.2026Lapse of the patent in a contracting state
New state(s): HU		published on 15.04.2026 [2026/16]
Applicant(s)For all designated states
Watlow Electric Manufacturing Company
12001 Lackland Road
St. Louis, MO 63146 / US
[2023/35]
Former [2021/27]For all designated states
Watlow Electric Manufacturing Company
12001 Lackland Road
St. Louis, MO 63146 / US
For all designated states
Parker, Michael
572 Norris Street
Brentwood, CA 94513 / US
Former [2020/27]For all designated states
Component Re-Engineering Company Inc.
3508 Bassett Street
Santa Clara, CA 95054 / US
For all designated states
Parker, Michael
572 Norris Street
Brentwood, CA 94513 / US
Inventor(s)01 / PARKER, Michael
572 Norris Street
Brentwood, CA 94513 / US
 [2023/46]
Former [2020/27]01 / PARKER, Michael
572 Norris Street
Brentwood CA 94513 / US
Representative(s)Boult Wade Tennant LLP
Salisbury Square House
8 Salisbury Square
London EC4Y 8AP / GB
[2020/27]
Application number, filing date18848860.523.08.2018
[2020/27]
WO2018US47823
Priority number, dateUS201762550559P25.08.2017         Original published format: US 201762550559 P
[2020/27]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2019040794
Date:28.02.2019
Language:EN
[2019/09]
Type: A1 Application with search report 
No.:EP3673506
Date:01.07.2020
Language:EN
The application published by WIPO in one of the EPO official languages on 28.02.2019 takes the place of the publication of the European patent application.
[2020/27]
Type: B1 Patent specification 
No.:EP3673506
Date:15.11.2023
Language:EN
[2023/46]
Search report(s)International search report - published on:US28.02.2019
(Supplementary) European search report - dispatched on:EP17.02.2021
ClassificationIPC:H01L21/67, H01L21/673, H01L21/68, H01L21/683, H01L21/687
[2020/27]
CPC:
H10P72/722 (EP,KR); B23Q3/15 (KR); H02N13/00 (KR);
H10P72/72 (EP); H10P72/7616 (EP,KR)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2020/27]  
Extension statesBANot yet paid
MENot yet paid
Validation statesKHNot yet paid
MANot yet paid
MDNot yet paid
TNNot yet paid
TitleGerman:TRÄGER FÜR HALBLEITERSUBSTRAT MIT MEHREREN ELEKTRODEN UND VERFAHREN ZU SEINER HERSTELLUNG[2020/27]
English:SEMICONDUCTOR SUBSTRATE SUPPORT WITH MULTIPLE ELECTRODES AND METHOD FOR MAKING SAME[2020/27]
French:SUPPORT DE SUBSTRAT SEMI-CONDUCTEUR AYANT DE MULTIPLES ÉLECTRODES ET SON PROCÉDÉ DE FABRICATION[2020/27]
Entry into regional phase09.03.2020National basic fee paid 
09.03.2020Search fee paid 
09.03.2020Designation fee(s) paid 
09.03.2020Examination fee paid 
Examination procedure25.06.2019Request for preliminary examination filed
International Preliminary Examining Authority: US
09.03.2020Examination requested  [2020/27]
20.09.2021Amendment by applicant (claims and/or description)
23.12.2022Communication of intention to grant the patent
28.03.2023Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO
17.04.2023Communication of intention to grant the patent
24.05.2023Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO
27.06.2023Communication of intention to grant the patent
10.10.2023Fee for grant paid
10.10.2023Fee for publishing/printing paid
10.10.2023Receipt of the translation of the claim(s)
Opposition(s)19.08.2024No opposition filed within time limit [2024/43]
Fees paidRenewal fee
27.10.2020Renewal fee patent year 03
27.08.2021Renewal fee patent year 04
29.08.2022Renewal fee patent year 05
28.08.2023Renewal fee patent year 06
Penalty fee
Additional fee for renewal fee
31.08.202003   M06   Fee paid on   27.10.2020
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipCY23.08.2018
HU23.08.2018
CZ15.11.2023
ES15.11.2023
HR15.11.2023
MC15.11.2023
PL15.11.2023
RO15.11.2023
RS15.11.2023
SK15.11.2023
SM15.11.2023
NO15.02.2024
GR16.02.2024
IS15.03.2024
[2026/16]
Former [2026/10]CY23.08.2018
CZ15.11.2023
ES15.11.2023
HR15.11.2023
MC15.11.2023
PL15.11.2023
RO15.11.2023
RS15.11.2023
SK15.11.2023
SM15.11.2023
NO15.02.2024
GR16.02.2024
IS15.03.2024
Former [2025/22]CZ15.11.2023
ES15.11.2023
HR15.11.2023
MC15.11.2023
PL15.11.2023
RO15.11.2023
RS15.11.2023
SK15.11.2023
SM15.11.2023
NO15.02.2024
GR16.02.2024
IS15.03.2024
Former [2024/36]CZ15.11.2023
ES15.11.2023
HR15.11.2023
PL15.11.2023
RO15.11.2023
RS15.11.2023
SK15.11.2023
SM15.11.2023
NO15.02.2024
GR16.02.2024
IS15.03.2024
Former [2024/35]CZ15.11.2023
ES15.11.2023
HR15.11.2023
PL15.11.2023
RO15.11.2023
RS15.11.2023
SM15.11.2023
NO15.02.2024
GR16.02.2024
IS15.03.2024
Former [2024/33]ES15.11.2023
HR15.11.2023
PL15.11.2023
RS15.11.2023
SM15.11.2023
NO15.02.2024
GR16.02.2024
IS15.03.2024
Former [2024/25]ES15.11.2023
HR15.11.2023
PL15.11.2023
RS15.11.2023
NO15.02.2024
GR16.02.2024
IS15.03.2024
Former [2024/24]ES15.11.2023
HR15.11.2023
RS15.11.2023
NO15.02.2024
GR16.02.2024
IS15.03.2024
Former [2024/20]GR16.02.2024
IS15.03.2024
Documents cited:Search[XYI] US5600530  (SMITH PETER C et al.) [X] 1-3,7,8,14-16 * abstract * * claims 1-9 * * figures 1-5 *[Y] 4,5,17 [I] 6,9-13,18
 [YA] US2011288648  (JOSEPH FELLOWS et al.) [Y] 4,5,17 * abstract * * claims 1-41 * * paragraphs [0007] - [0009] * * figures 1-16 *[A] 1-3,6-16,18
 [A] CN104576490  (SHANGHAI COMPANION PREC CERAMICS CO LTD et al.) [A] 1-18 * abstract * * claims 1,9 * * figures 1,2 *
International search[XY] WO9524070  (SHERMAN ARTHUR et al.) [X] 1-3, 14-16 * ; abstract; page 1, lines 11-15; page 5, lines 15-29; page 6, lines 4-6, 17-19, 25-28; page 7, lines 14-17; page 9, lines 15-29; page 13, lines 9-11; figures 1, 3-4 *[Y] 4/1-3, 17/14-16
 [Y] US2017072516  (ELLIOT BRENT et al.) [Y] 4/1-3, 17/14-16 * ; abstract; paragraphs [0028], [0045], [0049] *
by applicantUS5600530
 US2011288648
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.