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Extract from the Register of European Patents

EP About this file: EP3718962

EP3718962 - A METHOD FOR FORMING A VERTICAL NANOWIRE OR NANOSHEET FIELD-EFFECT TRANSISTOR [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  15.09.2023
Database last updated on 29.06.2024
FormerThe patent has been granted
Status updated on  07.10.2022
FormerGrant of patent is intended
Status updated on  26.05.2022
FormerRequest for examination was made
Status updated on  09.04.2021
FormerThe application has been published
Status updated on  04.09.2020
Most recent event   Tooltip24.05.2024Lapse of the patent in a contracting state
New state(s): IT		published on 26.06.2024  [2024/26]
Applicant(s)For all designated states
IMEC vzw
Kapeldreef 75
3001 Leuven / BE
[2020/41]
Inventor(s)01 / VELOSO, Anabela
IMEC VZW
c/o IMEC VZW Patent Department
Kapeldreef 75
3001 Leuven / BE
02 / HUYNH BAO, Trong
IMEC VZW
c/o IMEC VZW Patent Department
Kapeldreef 75
3001 Leuven / BE
03 / APPELTANS, Raf
IMEC VZW
c/o IMEC VZW Patent department
Kapeldreef 75
3001 Leuven / BE
 [2022/45]
Former [2020/41]01 / VELOSO, Anabela
IMEC VZW
c/o IMEC VZW Patent Department Kapeldreef 75
3001 Leuven / BE
02 / HUYNH BAO, Trong
IMEC VZW
c/o IMEC VZW Patent Department Kapeldreef 75
3001 Leuven / BE
03 / APPELTANS, Raf
IMEC VZW
c/o IMEC VZW Patent department Kapeldreef 75
3001 Leuven / BE
Representative(s)AWA Sweden AB
Box 5117
200 71 Malmö / SE
[2022/45]
Former [2020/41]AWA Sweden AB
P.O. Box 5117
200 71 Malmö / SE
Application number, filing date19166609.801.04.2019
[2020/41]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP3718962
Date:07.10.2020
Language:EN
[2020/41]
Type: B1 Patent specification 
No.:EP3718962
Date:09.11.2022
Language:EN
[2022/45]
Search report(s)(Supplementary) European search report - dispatched on:EP22.10.2019
ClassificationIPC:B82Y10/00, H01L27/092, H01L27/06, H01L21/8234, H01L29/775, H01L29/66, H01L29/417, H01L29/10, H01L29/06, H01L27/105
[2022/23]
CPC:
H01L29/0676 (EP); H01L21/823487 (EP,CN,US); H01L21/823475 (US);
B82Y10/00 (EP); H01L21/31111 (US); H01L21/823418 (US);
H01L21/823425 (EP); H01L21/823437 (US); H01L27/088 (CN);
H01L27/092 (EP); H01L27/105 (EP); H01L29/1079 (EP);
H01L29/41741 (EP); H01L29/66439 (EP); H01L29/66666 (CN);
H01L29/775 (EP); H01L29/7827 (CN) (-)
Former IPC [2020/41]B82Y10/00, H01L29/06, H01L29/10, H01L29/417, H01L29/66, H01L29/775, H01L21/8234, H01L27/06, H01L27/092
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2021/19]
Former [2020/41]AL,  AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MK,  MT,  NL,  NO,  PL,  PT,  RO,  RS,  SE,  SI,  SK,  SM,  TR 
TitleGerman:VERFAHREN ZUR FORMUNG EINES VERTIKALEN NANODRAHT- ODER NANOFOLIEN- FELDEFFEKTTRANSISTORS[2020/41]
English:A METHOD FOR FORMING A VERTICAL NANOWIRE OR NANOSHEET FIELD-EFFECT TRANSISTOR[2020/41]
French:PROCÉDÉ DE FORMATION D'UN TRANSISTOR VERTICAL À EFFET DE CHAMP À NANOFILS OU NANOFEUILLES[2022/24]
Former [2020/41]PROCÉDÉ DE FORMATION D'UN TRANSISTOR VERTICALE À EFFET DE CHAMP À NANOFILS OU NANOFEUILLES
Examination procedure07.04.2021Amendment by applicant (claims and/or description)
07.04.2021Examination requested  [2021/19]
07.04.2021Date on which the examining division has become responsible
27.05.2022Communication of intention to grant the patent
29.09.2022Fee for grant paid
29.09.2022Fee for publishing/printing paid
29.09.2022Receipt of the translation of the claim(s)
Opposition(s)10.08.2023No opposition filed within time limit [2023/42]
Fees paidRenewal fee
21.04.2021Renewal fee patent year 03
20.04.2022Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAL09.11.2022
AT09.11.2022
CZ09.11.2022
DK09.11.2022
EE09.11.2022
ES09.11.2022
FI09.11.2022
HR09.11.2022
IT09.11.2022
LT09.11.2022
LV09.11.2022
MC09.11.2022
NL09.11.2022
PL09.11.2022
RO09.11.2022
RS09.11.2022
SE09.11.2022
SI09.11.2022
SK09.11.2022
SM09.11.2022
NO09.02.2023
GR10.02.2023
IS09.03.2023
PT09.03.2023
GB01.04.2023
IE01.04.2023
LU01.04.2023
BE30.04.2023
CH30.04.2023
FR30.04.2023
LI30.04.2023
[2024/26]
Former [2024/21]AL09.11.2022
AT09.11.2022
CZ09.11.2022
DK09.11.2022
EE09.11.2022
ES09.11.2022
FI09.11.2022
HR09.11.2022
LT09.11.2022
LV09.11.2022
MC09.11.2022
NL09.11.2022
PL09.11.2022
RO09.11.2022
RS09.11.2022
SE09.11.2022
SI09.11.2022
SK09.11.2022
SM09.11.2022
NO09.02.2023
GR10.02.2023
IS09.03.2023
PT09.03.2023
GB01.04.2023
IE01.04.2023
LU01.04.2023
BE30.04.2023
CH30.04.2023
FR30.04.2023
LI30.04.2023
Former [2024/11]AL09.11.2022
AT09.11.2022
CZ09.11.2022
DK09.11.2022
EE09.11.2022
ES09.11.2022
FI09.11.2022
HR09.11.2022
LT09.11.2022
LV09.11.2022
MC09.11.2022
NL09.11.2022
PL09.11.2022
RO09.11.2022
RS09.11.2022
SE09.11.2022
SI09.11.2022
SK09.11.2022
SM09.11.2022
NO09.02.2023
GR10.02.2023
IS09.03.2023
PT09.03.2023
GB01.04.2023
LU01.04.2023
BE30.04.2023
CH30.04.2023
FR30.04.2023
LI30.04.2023
Former [2024/09]AL09.11.2022
AT09.11.2022
CZ09.11.2022
DK09.11.2022
EE09.11.2022
ES09.11.2022
FI09.11.2022
HR09.11.2022
LT09.11.2022
LV09.11.2022
MC09.11.2022
NL09.11.2022
PL09.11.2022
RO09.11.2022
RS09.11.2022
SE09.11.2022
SI09.11.2022
SK09.11.2022
SM09.11.2022
NO09.02.2023
GR10.02.2023
IS09.03.2023
PT09.03.2023
GB01.04.2023
LU01.04.2023
CH30.04.2023
LI30.04.2023
Former [2024/08]AL09.11.2022
AT09.11.2022
CZ09.11.2022
DK09.11.2022
EE09.11.2022
ES09.11.2022
FI09.11.2022
HR09.11.2022
LT09.11.2022
LV09.11.2022
MC09.11.2022
NL09.11.2022
PL09.11.2022
RO09.11.2022
RS09.11.2022
SE09.11.2022
SI09.11.2022
SK09.11.2022
SM09.11.2022
NO09.02.2023
GR10.02.2023
IS09.03.2023
PT09.03.2023
GB01.04.2023
LU01.04.2023
Former [2024/04]AL09.11.2022
AT09.11.2022
CZ09.11.2022
DK09.11.2022
EE09.11.2022
ES09.11.2022
FI09.11.2022
HR09.11.2022
LT09.11.2022
LV09.11.2022
NL09.11.2022
PL09.11.2022
RO09.11.2022
RS09.11.2022
SE09.11.2022
SI09.11.2022
SK09.11.2022
SM09.11.2022
NO09.02.2023
GR10.02.2023
IS09.03.2023
PT09.03.2023
LU01.04.2023
Former [2023/51]AL09.11.2022
AT09.11.2022
CZ09.11.2022
DK09.11.2022
EE09.11.2022
ES09.11.2022
FI09.11.2022
HR09.11.2022
LT09.11.2022
LV09.11.2022
NL09.11.2022
PL09.11.2022
RO09.11.2022
RS09.11.2022
SE09.11.2022
SI09.11.2022
SK09.11.2022
SM09.11.2022
NO09.02.2023
GR10.02.2023
IS09.03.2023
PT09.03.2023
Former [2023/38]AL09.11.2022
AT09.11.2022
CZ09.11.2022
DK09.11.2022
EE09.11.2022
ES09.11.2022
FI09.11.2022
HR09.11.2022
LT09.11.2022
LV09.11.2022
NL09.11.2022
PL09.11.2022
RO09.11.2022
RS09.11.2022
SE09.11.2022
SK09.11.2022
SM09.11.2022
NO09.02.2023
GR10.02.2023
IS09.03.2023
PT09.03.2023
Former [2023/37]AL09.11.2022
AT09.11.2022
CZ09.11.2022
DK09.11.2022
EE09.11.2022
ES09.11.2022
FI09.11.2022
HR09.11.2022
LT09.11.2022
LV09.11.2022
NL09.11.2022
PL09.11.2022
RO09.11.2022
RS09.11.2022
SE09.11.2022
SM09.11.2022
NO09.02.2023
GR10.02.2023
IS09.03.2023
PT09.03.2023
Former [2023/35]AT09.11.2022
CZ09.11.2022
DK09.11.2022
EE09.11.2022
ES09.11.2022
FI09.11.2022
HR09.11.2022
LT09.11.2022
LV09.11.2022
NL09.11.2022
PL09.11.2022
RO09.11.2022
RS09.11.2022
SE09.11.2022
SM09.11.2022
NO09.02.2023
GR10.02.2023
IS09.03.2023
PT09.03.2023
Former [2023/34]AT09.11.2022
DK09.11.2022
EE09.11.2022
ES09.11.2022
FI09.11.2022
HR09.11.2022
LT09.11.2022
LV09.11.2022
NL09.11.2022
PL09.11.2022
RS09.11.2022
SE09.11.2022
SM09.11.2022
NO09.02.2023
GR10.02.2023
IS09.03.2023
PT09.03.2023
Former [2023/33]AT09.11.2022
DK09.11.2022
ES09.11.2022
FI09.11.2022
HR09.11.2022
LT09.11.2022
LV09.11.2022
NL09.11.2022
PL09.11.2022
RS09.11.2022
SE09.11.2022
SM09.11.2022
NO09.02.2023
GR10.02.2023
IS09.03.2023
PT09.03.2023
Former [2023/29]AT09.11.2022
ES09.11.2022
FI09.11.2022
HR09.11.2022
LT09.11.2022
LV09.11.2022
NL09.11.2022
PL09.11.2022
RS09.11.2022
SE09.11.2022
NO09.02.2023
GR10.02.2023
IS09.03.2023
PT09.03.2023
Former [2023/25]AT09.11.2022
ES09.11.2022
FI09.11.2022
HR09.11.2022
LT09.11.2022
LV09.11.2022
PL09.11.2022
RS09.11.2022
SE09.11.2022
NO09.02.2023
GR10.02.2023
IS09.03.2023
PT09.03.2023
Former [2023/23]AT09.11.2022
ES09.11.2022
FI09.11.2022
LT09.11.2022
LV09.11.2022
SE09.11.2022
NO09.02.2023
GR10.02.2023
PT09.03.2023
Former [2023/22]AT09.11.2022
ES09.11.2022
FI09.11.2022
LT09.11.2022
SE09.11.2022
NO09.02.2023
PT09.03.2023
Former [2023/20]LT09.11.2022
NO09.02.2023
Documents cited:Search[A]US2011127605  (KIM SU-YOUNG [KR]) [A] 1-15 * Figs. 1, 4, 5, 7 and corresponding text. *;
 [XI]US2014061778  (MYUNG JU-HYUN [KR], et al) [X] 1,2,7,9 * Figs. 4-6 and corresponding text. * [I] 10,11;
 [A]US2016093611  (CHENG KANGGUO [US], et al) [A] 1-15 * Figs. 2-5 and corresponding text. *;
 [A]US9773913  (BALAKRISHNAN KARTHIK [US], et al) [A] 1-15 * Figs. 9-26 and corresponding text. *;
 [A]US2018082953  (BI ZHENXING [US], et al) [A] 1-15* Figs. 4-7 and corresponding text. *;
 [A]WO2018118097  (INTEL CORP [US]) [A] 1-15 * Figs. 3-5 and corresponding text. *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.