blank Quick help
blank Maintenance news

Scheduled maintenance

Regular maintenance outages:
between 05.00 and 05.15 hrs CET (Monday to Sunday).

Other outages
Availability

2022.02.11

More...
blank News flashes

Italy joins the Federated Register

Click here for more information on the Federated Register.

2025-06-12

More...
blank Related links

Release notes
European Patent Register Assistant
European Patent Register User Manual
European Patent Register – pocket guide
FAQ - European Patent Register
Federated Register (Flyer)
Global Dossier (Flyer)
Register events
Deep link coverage
Federated Register content
The Patent Information Tour
Fair use charter

Extract from the Register of European Patents

EP About this file: EP3556511

EP3556511 - SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE HOLDING APPARATUS [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  29.04.2022
Database last updated on 28.03.2026
FormerThe patent has been granted
Status updated on  21.05.2021
FormerGrant of patent is intended
Status updated on  13.01.2021
FormerRequest for examination was made
Status updated on  18.09.2020
FormerThe application has been published
Status updated on  20.09.2019
Most recent event   Tooltip27.09.2024Lapse of the patent in a contracting state
New state(s): MT		published on 30.10.2024  [2024/44]
Applicant(s)For all designated states
Ebara Corporation
11-1 Haneda
Asahi-cho
Ohta-ku
Tokyo 144-8510 / JP
[N/P]
Former [2019/43]For all designated states
Ebara Corporation
11-1 Haneda Asahi-cho Ohta-ku
Tokyo 144-8510 / JP
Inventor(s)01 / KOBAYASHI, Kenichi
c/o Ebara Corporation
11-1, Haneda Asahi-cho, Ota-ku
Tokyo, 144-8510 / JP
02 / TOGAWA, Tetsuji
c/o Ebara Corporation
11-1, Haneda Asahi-cho, Ota-ku
Tokyo, 144-8510 / JP
 [2019/43]
Representative(s)Carstens, Dirk Wilhelm
Wagner & Geyer Partnerschaft mbB
Patent- und Rechtsanwälte
Gewürzmühlstraße 5
80538 München / DE
[2019/43]
Application number, filing date19168579.111.04.2019
[2019/43]
Priority number, dateJP2018007856316.04.2018         Original published format: JP 2018078563
[2019/43]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP3556511
Date:23.10.2019
Language:EN
[2019/43]
Type: A3 Search report 
No.:EP3556511
Date:11.03.2020
Language:EN
[2020/11]
Type: B1 Patent specification 
No.:EP3556511
Date:23.06.2021
Language:EN
[2021/25]
Search report(s)(Supplementary) European search report - dispatched on:EP07.02.2020
ClassificationIPC:B24B37/30, B24B41/06
[2020/11]
CPC:
B24B37/30 (EP,US); H10P72/0406 (KR); H10P72/0412 (CN);
B08B1/165 (US); B08B1/30 (EP); B08B1/36 (EP,US);
B24B41/067 (EP); H10P72/0414 (EP,CN); H10P72/0472 (EP);
H10P72/7606 (EP,US); H10P72/7612 (EP,KR,US); H10P72/7618 (KR);
H10P72/7626 (CN); H10P72/78 (EP,KR,US) (-)
Former IPC [2019/43]B24B37/30
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2020/43]
Former [2019/43]AL,  AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MK,  MT,  NL,  NO,  PL,  PT,  RO,  RS,  SE,  SI,  SK,  SM,  TR 
TitleGerman:SUBSTRATVERARBEITUNGSVORRICHTUNG UND SUBSTRATHALTEVORRICHTUNG[2019/43]
English:SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE HOLDING APPARATUS[2019/43]
French:APPAREIL DE TRAITEMENT DE SUBSTRATS ET APPAREIL DE SUPPORT DE SUBSTRATS[2019/43]
Examination procedure11.09.2020Amendment by applicant (claims and/or description)
11.09.2020Examination requested  [2020/43]
11.09.2020Date on which the examining division has become responsible
14.01.2021Communication of intention to grant the patent
12.05.2021Fee for grant paid
12.05.2021Fee for publishing/printing paid
12.05.2021Receipt of the translation of the claim(s)
Opposition(s)24.03.2022No opposition filed within time limit [2022/22]
Fees paidRenewal fee
29.04.2021Renewal fee patent year 03
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU11.04.2019
AL23.06.2021
AT23.06.2021
CY23.06.2021
CZ23.06.2021
DK23.06.2021
EE23.06.2021
ES23.06.2021
FI23.06.2021
HR23.06.2021
IT23.06.2021
LT23.06.2021
LV23.06.2021
MC23.06.2021
MK23.06.2021
MT23.06.2021
NL23.06.2021
PL23.06.2021
RO23.06.2021
RS23.06.2021
SE23.06.2021
SI23.06.2021
SK23.06.2021
SM23.06.2021
TR23.06.2021
BG23.09.2021
NO23.09.2021
GR24.09.2021
IS23.10.2021
PT25.10.2021
[2024/44]
Former [2024/29]HU11.04.2019
AL23.06.2021
AT23.06.2021
CY23.06.2021
CZ23.06.2021
DK23.06.2021
EE23.06.2021
ES23.06.2021
FI23.06.2021
HR23.06.2021
IT23.06.2021
LT23.06.2021
LV23.06.2021
MC23.06.2021
MK23.06.2021
NL23.06.2021
PL23.06.2021
RO23.06.2021
RS23.06.2021
SE23.06.2021
SI23.06.2021
SK23.06.2021
SM23.06.2021
TR23.06.2021
BG23.09.2021
NO23.09.2021
GR24.09.2021
IS23.10.2021
PT25.10.2021
Former [2024/23]HU11.04.2019
AL23.06.2021
AT23.06.2021
CY23.06.2021
CZ23.06.2021
DK23.06.2021
EE23.06.2021
ES23.06.2021
FI23.06.2021
HR23.06.2021
IT23.06.2021
LT23.06.2021
LV23.06.2021
MC23.06.2021
MK23.06.2021
NL23.06.2021
PL23.06.2021
RO23.06.2021
RS23.06.2021
SE23.06.2021
SI23.06.2021
SK23.06.2021
SM23.06.2021
BG23.09.2021
NO23.09.2021
GR24.09.2021
IS23.10.2021
PT25.10.2021
Former [2024/20]HU11.04.2019
AL23.06.2021
AT23.06.2021
CY23.06.2021
CZ23.06.2021
DK23.06.2021
EE23.06.2021
ES23.06.2021
FI23.06.2021
HR23.06.2021
IT23.06.2021
LT23.06.2021
LV23.06.2021
MC23.06.2021
NL23.06.2021
PL23.06.2021
RO23.06.2021
RS23.06.2021
SE23.06.2021
SI23.06.2021
SK23.06.2021
SM23.06.2021
BG23.09.2021
NO23.09.2021
GR24.09.2021
IS23.10.2021
PT25.10.2021
Former [2024/18]HU11.04.2019
AL23.06.2021
AT23.06.2021
CZ23.06.2021
DK23.06.2021
EE23.06.2021
ES23.06.2021
FI23.06.2021
HR23.06.2021
IT23.06.2021
LT23.06.2021
LV23.06.2021
MC23.06.2021
NL23.06.2021
PL23.06.2021
RO23.06.2021
RS23.06.2021
SE23.06.2021
SI23.06.2021
SK23.06.2021
SM23.06.2021
BG23.09.2021
NO23.09.2021
GR24.09.2021
IS23.10.2021
PT25.10.2021
Former [2023/06]AL23.06.2021
AT23.06.2021
CZ23.06.2021
DK23.06.2021
EE23.06.2021
ES23.06.2021
FI23.06.2021
HR23.06.2021
IT23.06.2021
LT23.06.2021
LV23.06.2021
MC23.06.2021
NL23.06.2021
PL23.06.2021
RO23.06.2021
RS23.06.2021
SE23.06.2021
SI23.06.2021
SK23.06.2021
SM23.06.2021
BG23.09.2021
NO23.09.2021
GR24.09.2021
IS23.10.2021
PT25.10.2021
Former [2022/36]AL23.06.2021
AT23.06.2021
CZ23.06.2021
DK23.06.2021
EE23.06.2021
ES23.06.2021
FI23.06.2021
HR23.06.2021
IT23.06.2021
LT23.06.2021
LV23.06.2021
NL23.06.2021
PL23.06.2021
RO23.06.2021
RS23.06.2021
SE23.06.2021
SI23.06.2021
SK23.06.2021
SM23.06.2021
BG23.09.2021
NO23.09.2021
GR24.09.2021
IS23.10.2021
PT25.10.2021
Former [2022/29]AL23.06.2021
AT23.06.2021
CZ23.06.2021
DK23.06.2021
EE23.06.2021
ES23.06.2021
FI23.06.2021
HR23.06.2021
LT23.06.2021
LV23.06.2021
NL23.06.2021
PL23.06.2021
RO23.06.2021
RS23.06.2021
SE23.06.2021
SI23.06.2021
SK23.06.2021
SM23.06.2021
BG23.09.2021
NO23.09.2021
GR24.09.2021
IS23.10.2021
PT25.10.2021
Former [2022/26]AL23.06.2021
AT23.06.2021
CZ23.06.2021
DK23.06.2021
EE23.06.2021
ES23.06.2021
FI23.06.2021
HR23.06.2021
LT23.06.2021
LV23.06.2021
NL23.06.2021
PL23.06.2021
RO23.06.2021
RS23.06.2021
SE23.06.2021
SK23.06.2021
SM23.06.2021
BG23.09.2021
NO23.09.2021
GR24.09.2021
IS23.10.2021
PT25.10.2021
Former [2022/21]AT23.06.2021
CZ23.06.2021
DK23.06.2021
EE23.06.2021
ES23.06.2021
FI23.06.2021
HR23.06.2021
LT23.06.2021
LV23.06.2021
NL23.06.2021
PL23.06.2021
RO23.06.2021
RS23.06.2021
SE23.06.2021
SK23.06.2021
SM23.06.2021
BG23.09.2021
NO23.09.2021
GR24.09.2021
IS23.10.2021
PT25.10.2021
Former [2022/11]AT23.06.2021
CZ23.06.2021
EE23.06.2021
ES23.06.2021
FI23.06.2021
HR23.06.2021
LT23.06.2021
LV23.06.2021
NL23.06.2021
PL23.06.2021
RO23.06.2021
RS23.06.2021
SE23.06.2021
SK23.06.2021
SM23.06.2021
BG23.09.2021
NO23.09.2021
GR24.09.2021
IS23.10.2021
PT25.10.2021
Former [2022/09]AT23.06.2021
CZ23.06.2021
ES23.06.2021
FI23.06.2021
HR23.06.2021
LT23.06.2021
LV23.06.2021
NL23.06.2021
RO23.06.2021
RS23.06.2021
SE23.06.2021
SK23.06.2021
SM23.06.2021
BG23.09.2021
NO23.09.2021
GR24.09.2021
PT25.10.2021
Former [2022/08]AT23.06.2021
CZ23.06.2021
ES23.06.2021
FI23.06.2021
HR23.06.2021
LT23.06.2021
LV23.06.2021
NL23.06.2021
RS23.06.2021
SE23.06.2021
SM23.06.2021
BG23.09.2021
NO23.09.2021
GR24.09.2021
Former [2022/07]AT23.06.2021
FI23.06.2021
HR23.06.2021
LT23.06.2021
LV23.06.2021
NL23.06.2021
RS23.06.2021
SE23.06.2021
SM23.06.2021
BG23.09.2021
NO23.09.2021
GR24.09.2021
Former [2021/51]FI23.06.2021
HR23.06.2021
LT23.06.2021
LV23.06.2021
RS23.06.2021
SE23.06.2021
BG23.09.2021
NO23.09.2021
GR24.09.2021
Former [2021/49]FI23.06.2021
HR23.06.2021
LT23.06.2021
LV23.06.2021
SE23.06.2021
BG23.09.2021
NO23.09.2021
GR24.09.2021
Former [2021/47]FI23.06.2021
LT23.06.2021
BG23.09.2021
Former [2021/46]FI23.06.2021
LT23.06.2021
Documents cited:Search[XAI] US2006094343  (SATO SATORU et al.)
 [XAI] EP2762274  (EBARA CORP et al.) [X] 1,5,7,8,12,14 * paragraph [0040]; figures 1,2,8,9 *[A] 2-4,9-11 [I] 6,13
 [AD] US2011048469  (OGATA NOBUHIRO et al.) [AD] 3,10 * the whole document *
by applicantJP2014150178
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.