Extract from the Register of European Patents

EP Citations: EP3751239

Cited inSearch
Type:Patent literature
Publication No.:US5446437  [XA]
 (BANTIEN FRANK et al.)
Type:Patent literature
Publication No.:US2010242592  [XA]
 (HANEEF IBRAHEEM et al.) [X] 1-3,5,10,11,16 * column 4, lines 22-26 * * column 4, line 50 - column 5, line 12; figures 2-c * * column 5, lines 13-55; figure 3 *[A] 4,6-9,12-15,17
Type:Patent literature
Publication No.:US4733559  [XA]
 (AINE HARRY E et al.) [X] 1,2,4,6-8,10,11,15-17 * figure 1 * * figure 12 * * paragraphs [0081] - [0082]; figure 16 * * claim 18 * * paragraph [0036] - paragraph [0037] *[A] 3,9,12-14
Type:Patent literature
Publication No.:US2001000298  [XA]
 (WIENAND KARLHEINZ et al.) [X] 1,9,16 * column 9, lines 7-38; figures 11, 13 *[A] 2-8,10-15,17
Type:Patent literature
Publication No.:GB2308447  [XA]
 (ULTRA HYDRAULICS LTD et al.) [X] 1 * paragraphs [0022] - [0026]; figure 1 *[A] 2-17
Cited inby applicant
Type:Non-patent literature
Publication information:  M. ELWENSPOEK: "Thermal flow micro sensors", PROC. SEMICONDUCTOR CONFERENCE, 1999, pages 423 - 435, XP010364774, DOI: doi:10.1109/SMICND.1999.810580
DOI: http://dx.doi.org/10.1109/SMICND.1999.810580