| EP3751239 - THERMORESISTIVE MICRO SENSOR DEVICE [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 06.01.2023 Database last updated on 18.03.2026 | |
| Former | The patent has been granted Status updated on 28.01.2022 | ||
| Former | Grant of patent is intended Status updated on 14.09.2021 | ||
| Former | Examination is in progress Status updated on 14.05.2021 | ||
| Former | Request for examination was made Status updated on 13.11.2020 | Most recent event Tooltip | 27.09.2024 | Lapse of the patent in a contracting state New state(s): MT | published on 30.10.2024 [2024/44] | Applicant(s) | For all designated states Infineon Technologies AG Am Campeon 1-15 85579 Neubiberg / DE | [2021/29] |
| Former [2021/08] | For all designated states Infineon Technologies AG Am Campeon 1-15 85579 Neubiberg / DE | ||
| For all designated states Technische Universität München Arcisstr. 21 80333 München / DE | |||
| Former [2020/51] | For all designated states Infineon Technologies AG Am Campeon 1-15 85579 Neubiberg / DE | Inventor(s) | 01 /
SEIDL, Martin Am Mühlbachbogen 41d 85368 Moosburg a. d. Isar / DE | 02 /
BRETTHAUER, Christian Kirchenstrasse 89a 81675 München / DE | 03 /
KLEIN, Wolfgang Am Wall 15 85604 Zorneding / DE | 04 /
KRUMBEIN, Ulrich Kaltwiesstrasse 35 83026 Rosenheim / DE | 05 /
TUMPOLD, David Heimstettener Moosweg 1 85551 Kirchheim b. München / DE | [2020/51] | Representative(s) | Stöckeler, Ferdinand, et al Schoppe, Zimmermann, Stöckeler Zinkler, Schenk & Partner mbB Patentanwälte Radlkoferstrasse 2 81373 München / DE | [2020/51] | Application number, filing date | 19180341.0 | 14.06.2019 | [2020/51] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP3751239 | Date: | 16.12.2020 | Language: | EN | [2020/51] | Type: | B1 Patent specification | No.: | EP3751239 | Date: | 02.03.2022 | Language: | EN | [2022/09] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 27.11.2019 | Classification | IPC: | G01F1/692, G01L9/00, G01F1/684, G01K7/18 | [2021/35] | CPC: |
G01F1/692 (EP);
G01F1/6888 (US);
G01F1/6845 (EP);
G01F1/86 (US);
G01K7/186 (EP);
G01L9/0051 (EP)
|
| Former IPC [2020/51] | G01F1/692, G01L9/00, G01F1/684, G01K7/16 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2020/51] | Title | German: | THERMORESISTIVE MIKROSENSORVORRICHTUNG | [2020/51] | English: | THERMORESISTIVE MICRO SENSOR DEVICE | [2020/51] | French: | DISPOSITIF DE MICROCAPTEUR THERMORÉSISTIF | [2020/51] | Examination procedure | 18.06.2020 | Amendment by applicant (claims and/or description) | 18.06.2020 | Examination requested [2020/51] | 18.06.2020 | Date on which the examining division has become responsible | 14.05.2021 | Despatch of a communication from the examining division (Time limit: M01) | 08.06.2021 | Reply to a communication from the examining division | 21.09.2021 | Communication of intention to grant the patent | 20.01.2022 | Fee for grant paid | 20.01.2022 | Fee for publishing/printing paid | 20.01.2022 | Receipt of the translation of the claim(s) | Opposition(s) | 05.12.2022 | No opposition filed within time limit [2023/06] | Fees paid | Renewal fee | 25.06.2021 | Renewal fee patent year 03 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 14.06.2019 | AL | 02.03.2022 | AT | 02.03.2022 | CY | 02.03.2022 | CZ | 02.03.2022 | DK | 02.03.2022 | EE | 02.03.2022 | ES | 02.03.2022 | FI | 02.03.2022 | HR | 02.03.2022 | IT | 02.03.2022 | LT | 02.03.2022 | LV | 02.03.2022 | MC | 02.03.2022 | MK | 02.03.2022 | MT | 02.03.2022 | NL | 02.03.2022 | PL | 02.03.2022 | RO | 02.03.2022 | RS | 02.03.2022 | SE | 02.03.2022 | SI | 02.03.2022 | SK | 02.03.2022 | SM | 02.03.2022 | TR | 02.03.2022 | BG | 02.06.2022 | NO | 02.06.2022 | GR | 03.06.2022 | IE | 14.06.2022 | LU | 14.06.2022 | BE | 30.06.2022 | CH | 30.06.2022 | FR | 30.06.2022 | LI | 30.06.2022 | IS | 02.07.2022 | PT | 04.07.2022 | [2024/44] |
| Former [2024/29] | HU | 14.06.2019 | |
| AL | 02.03.2022 | ||
| AT | 02.03.2022 | ||
| CY | 02.03.2022 | ||
| CZ | 02.03.2022 | ||
| DK | 02.03.2022 | ||
| EE | 02.03.2022 | ||
| ES | 02.03.2022 | ||
| FI | 02.03.2022 | ||
| HR | 02.03.2022 | ||
| IT | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| MC | 02.03.2022 | ||
| MK | 02.03.2022 | ||
| NL | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RO | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| SI | 02.03.2022 | ||
| SK | 02.03.2022 | ||
| SM | 02.03.2022 | ||
| TR | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| IE | 14.06.2022 | ||
| LU | 14.06.2022 | ||
| BE | 30.06.2022 | ||
| CH | 30.06.2022 | ||
| FR | 30.06.2022 | ||
| LI | 30.06.2022 | ||
| IS | 02.07.2022 | ||
| PT | 04.07.2022 | ||
| Former [2024/25] | HU | 14.06.2019 | |
| AL | 02.03.2022 | ||
| AT | 02.03.2022 | ||
| CY | 02.03.2022 | ||
| CZ | 02.03.2022 | ||
| DK | 02.03.2022 | ||
| EE | 02.03.2022 | ||
| ES | 02.03.2022 | ||
| FI | 02.03.2022 | ||
| HR | 02.03.2022 | ||
| IT | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| MC | 02.03.2022 | ||
| MK | 02.03.2022 | ||
| NL | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RO | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| SI | 02.03.2022 | ||
| SK | 02.03.2022 | ||
| SM | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| IE | 14.06.2022 | ||
| LU | 14.06.2022 | ||
| BE | 30.06.2022 | ||
| CH | 30.06.2022 | ||
| FR | 30.06.2022 | ||
| LI | 30.06.2022 | ||
| IS | 02.07.2022 | ||
| PT | 04.07.2022 | ||
| Former [2024/23] | AL | 02.03.2022 | |
| AT | 02.03.2022 | ||
| CY | 02.03.2022 | ||
| CZ | 02.03.2022 | ||
| DK | 02.03.2022 | ||
| EE | 02.03.2022 | ||
| ES | 02.03.2022 | ||
| FI | 02.03.2022 | ||
| HR | 02.03.2022 | ||
| IT | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| MC | 02.03.2022 | ||
| MK | 02.03.2022 | ||
| NL | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RO | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| SI | 02.03.2022 | ||
| SK | 02.03.2022 | ||
| SM | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| IE | 14.06.2022 | ||
| LU | 14.06.2022 | ||
| BE | 30.06.2022 | ||
| CH | 30.06.2022 | ||
| FR | 30.06.2022 | ||
| LI | 30.06.2022 | ||
| IS | 02.07.2022 | ||
| PT | 04.07.2022 | ||
| Former [2024/20] | AL | 02.03.2022 | |
| AT | 02.03.2022 | ||
| CY | 02.03.2022 | ||
| CZ | 02.03.2022 | ||
| DK | 02.03.2022 | ||
| EE | 02.03.2022 | ||
| ES | 02.03.2022 | ||
| FI | 02.03.2022 | ||
| HR | 02.03.2022 | ||
| IT | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| MC | 02.03.2022 | ||
| NL | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RO | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| SI | 02.03.2022 | ||
| SK | 02.03.2022 | ||
| SM | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| IE | 14.06.2022 | ||
| LU | 14.06.2022 | ||
| BE | 30.06.2022 | ||
| CH | 30.06.2022 | ||
| FR | 30.06.2022 | ||
| LI | 30.06.2022 | ||
| IS | 02.07.2022 | ||
| PT | 04.07.2022 | ||
| Former [2023/35] | AL | 02.03.2022 | |
| AT | 02.03.2022 | ||
| CZ | 02.03.2022 | ||
| DK | 02.03.2022 | ||
| EE | 02.03.2022 | ||
| ES | 02.03.2022 | ||
| FI | 02.03.2022 | ||
| HR | 02.03.2022 | ||
| IT | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| MC | 02.03.2022 | ||
| NL | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RO | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| SI | 02.03.2022 | ||
| SK | 02.03.2022 | ||
| SM | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| IE | 14.06.2022 | ||
| LU | 14.06.2022 | ||
| BE | 30.06.2022 | ||
| CH | 30.06.2022 | ||
| FR | 30.06.2022 | ||
| LI | 30.06.2022 | ||
| IS | 02.07.2022 | ||
| PT | 04.07.2022 | ||
| Former [2023/26] | AL | 02.03.2022 | |
| AT | 02.03.2022 | ||
| CZ | 02.03.2022 | ||
| DK | 02.03.2022 | ||
| EE | 02.03.2022 | ||
| ES | 02.03.2022 | ||
| FI | 02.03.2022 | ||
| HR | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| MC | 02.03.2022 | ||
| NL | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RO | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| SI | 02.03.2022 | ||
| SK | 02.03.2022 | ||
| SM | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| IE | 14.06.2022 | ||
| LU | 14.06.2022 | ||
| BE | 30.06.2022 | ||
| CH | 30.06.2022 | ||
| FR | 30.06.2022 | ||
| LI | 30.06.2022 | ||
| IS | 02.07.2022 | ||
| PT | 04.07.2022 | ||
| Former [2023/22] | AL | 02.03.2022 | |
| AT | 02.03.2022 | ||
| CZ | 02.03.2022 | ||
| DK | 02.03.2022 | ||
| EE | 02.03.2022 | ||
| ES | 02.03.2022 | ||
| FI | 02.03.2022 | ||
| HR | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| MC | 02.03.2022 | ||
| NL | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RO | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| SI | 02.03.2022 | ||
| SK | 02.03.2022 | ||
| SM | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| IE | 14.06.2022 | ||
| LU | 14.06.2022 | ||
| CH | 30.06.2022 | ||
| FR | 30.06.2022 | ||
| LI | 30.06.2022 | ||
| IS | 02.07.2022 | ||
| PT | 04.07.2022 | ||
| Former [2023/21] | AL | 02.03.2022 | |
| AT | 02.03.2022 | ||
| CZ | 02.03.2022 | ||
| DK | 02.03.2022 | ||
| EE | 02.03.2022 | ||
| ES | 02.03.2022 | ||
| FI | 02.03.2022 | ||
| HR | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| MC | 02.03.2022 | ||
| NL | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RO | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| SI | 02.03.2022 | ||
| SK | 02.03.2022 | ||
| SM | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| IE | 14.06.2022 | ||
| LU | 14.06.2022 | ||
| CH | 30.06.2022 | ||
| LI | 30.06.2022 | ||
| IS | 02.07.2022 | ||
| PT | 04.07.2022 | ||
| Former [2023/20] | AL | 02.03.2022 | |
| AT | 02.03.2022 | ||
| CZ | 02.03.2022 | ||
| DK | 02.03.2022 | ||
| EE | 02.03.2022 | ||
| ES | 02.03.2022 | ||
| FI | 02.03.2022 | ||
| HR | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| MC | 02.03.2022 | ||
| NL | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RO | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| SI | 02.03.2022 | ||
| SK | 02.03.2022 | ||
| SM | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| IE | 14.06.2022 | ||
| IS | 02.07.2022 | ||
| PT | 04.07.2022 | ||
| Former [2023/10] | AL | 02.03.2022 | |
| AT | 02.03.2022 | ||
| CZ | 02.03.2022 | ||
| DK | 02.03.2022 | ||
| EE | 02.03.2022 | ||
| ES | 02.03.2022 | ||
| FI | 02.03.2022 | ||
| HR | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| MC | 02.03.2022 | ||
| NL | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RO | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| SI | 02.03.2022 | ||
| SK | 02.03.2022 | ||
| SM | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| IS | 02.07.2022 | ||
| PT | 04.07.2022 | ||
| Former [2023/08] | AL | 02.03.2022 | |
| AT | 02.03.2022 | ||
| CZ | 02.03.2022 | ||
| DK | 02.03.2022 | ||
| EE | 02.03.2022 | ||
| ES | 02.03.2022 | ||
| FI | 02.03.2022 | ||
| HR | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| MC | 02.03.2022 | ||
| NL | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RO | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| SK | 02.03.2022 | ||
| SM | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| IS | 02.07.2022 | ||
| PT | 04.07.2022 | ||
| Former [2023/07] | AL | 02.03.2022 | |
| AT | 02.03.2022 | ||
| CZ | 02.03.2022 | ||
| DK | 02.03.2022 | ||
| EE | 02.03.2022 | ||
| ES | 02.03.2022 | ||
| FI | 02.03.2022 | ||
| HR | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| NL | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RO | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| SK | 02.03.2022 | ||
| SM | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| IS | 02.07.2022 | ||
| PT | 04.07.2022 | ||
| Former [2023/01] | AL | 02.03.2022 | |
| AT | 02.03.2022 | ||
| CZ | 02.03.2022 | ||
| EE | 02.03.2022 | ||
| ES | 02.03.2022 | ||
| FI | 02.03.2022 | ||
| HR | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| NL | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RO | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| SK | 02.03.2022 | ||
| SM | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| IS | 02.07.2022 | ||
| PT | 04.07.2022 | ||
| Former [2022/51] | AT | 02.03.2022 | |
| CZ | 02.03.2022 | ||
| EE | 02.03.2022 | ||
| ES | 02.03.2022 | ||
| FI | 02.03.2022 | ||
| HR | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| NL | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RO | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| SK | 02.03.2022 | ||
| SM | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| IS | 02.07.2022 | ||
| PT | 04.07.2022 | ||
| Former [2022/49] | AT | 02.03.2022 | |
| CZ | 02.03.2022 | ||
| EE | 02.03.2022 | ||
| ES | 02.03.2022 | ||
| FI | 02.03.2022 | ||
| HR | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| NL | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RO | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| SK | 02.03.2022 | ||
| SM | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| PT | 04.07.2022 | ||
| Former [2022/48] | AT | 02.03.2022 | |
| CZ | 02.03.2022 | ||
| EE | 02.03.2022 | ||
| ES | 02.03.2022 | ||
| FI | 02.03.2022 | ||
| HR | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| NL | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RO | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| SM | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| PT | 04.07.2022 | ||
| Former [2022/47] | AT | 02.03.2022 | |
| ES | 02.03.2022 | ||
| FI | 02.03.2022 | ||
| HR | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| NL | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RO | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| SM | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| PT | 04.07.2022 | ||
| Former [2022/44] | ES | 02.03.2022 | |
| FI | 02.03.2022 | ||
| HR | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| NL | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| Former [2022/39] | ES | 02.03.2022 | |
| FI | 02.03.2022 | ||
| HR | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| Former [2022/36] | ES | 02.03.2022 | |
| HR | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| LV | 02.03.2022 | ||
| PL | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| GR | 03.06.2022 | ||
| Former [2022/35] | ES | 02.03.2022 | |
| HR | 02.03.2022 | ||
| LT | 02.03.2022 | ||
| RS | 02.03.2022 | ||
| SE | 02.03.2022 | ||
| BG | 02.06.2022 | ||
| NO | 02.06.2022 | ||
| Former [2022/34] | ES | 02.03.2022 | |
| LT | 02.03.2022 | ||
| NO | 02.06.2022 | ||
| Former [2022/33] | LT | 02.03.2022 | |
| NO | 02.06.2022 | Documents cited: | Search | [XA] US5446437 (BANTIEN FRANK et al.) | [XA] US2010242592 (HANEEF IBRAHEEM et al.) [X] 1-3,5,10,11,16 * column 4, lines 22-26 * * column 4, line 50 - column 5, line 12; figures 2-c * * column 5, lines 13-55; figure 3 *[A] 4,6-9,12-15,17 | [XA] US4733559 (AINE HARRY E et al.) [X] 1,2,4,6-8,10,11,15-17 * figure 1 * * figure 12 * * paragraphs [0081] - [0082]; figure 16 * * claim 18 * * paragraph [0036] - paragraph [0037] *[A] 3,9,12-14 | [XA] US2001000298 (WIENAND KARLHEINZ et al.) [X] 1,9,16 * column 9, lines 7-38; figures 11, 13 *[A] 2-8,10-15,17 | [XA] GB2308447 (ULTRA HYDRAULICS LTD et al.) [X] 1 * paragraphs [0022] - [0026]; figure 1 *[A] 2-17 | by applicant | M. ELWENSPOEK: "Thermal flow micro sensors", PROC. SEMICONDUCTOR CONFERENCE, 1999, pages 423 - 435, XP010364774, DOI: doi:10.1109/SMICND.1999.810580 DOI: http://dx.doi.org/10.1109/SMICND.1999.810580 |