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Extract from the Register of European Patents

EP About this file: EP3588542

EP3588542 - DEVICES FOR AT LEAST ONE OF SUBSTRATE HANDLING, SUBSTRATE STORAGE, SUBSTRATE TREATMENT AND SUBSTRATE PROCESSING [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  29.12.2023
Database last updated on 15.11.2024
FormerThe patent has been granted
Status updated on  20.01.2023
FormerGrant of patent is intended
Status updated on  26.10.2022
FormerExamination is in progress
Status updated on  17.03.2022
FormerRequest for examination was made
Status updated on  03.04.2020
FormerThe application has been published
Status updated on  05.12.2019
Most recent event   Tooltip15.11.2024Lapse of the patent in a contracting state
New state(s): BG		published on 18.12.2024 [2024/51]
Applicant(s)For all designated states
Murata Machinery, Ltd.
3 Minami Ochiai-cho, Kisshoin
Minami-ku
Kyoto-shi
Kyoto 601-8326 / JP
[2020/01]
Inventor(s)01 / SCHOBER, Thomas
c/o Murata Machinery, Ltd.
136, Takeda Mukaishiro-cho, Fushimi-ku
Kyoto-shi, Kyoto, 612-8686 / JP
02 / RAHRBACH, Bernd
c/o Murata Machinery, Ltd.
136, Takeda Mukaishiro-cho, Fushimi-ku
Kyoto-shi, Kyoto, 612-8686 / JP
03 / WOHANKA, Christian
c/o Murata Machinery, Ltd.
136, Takeda Mukaishiro-cho, Fushimi-ku
Kyoto-shi, Kyoto, 612-8686 / JP
04 / FENNER, Yves
c/o Murata Machinery, Ltd.
136, Takeda Mukaishiro-cho, Fushimi-ku
Kyoto-shi, Kyoto, 612-8686 / JP
05 / DOVIDS, Gerhard
c/o Murata Machinery, Ltd.
136, Takeda Mukaishiro-cho, Fushimi-ku
Kyoto-shi, Kyoto, 612-8686 / JP
06 / FIDDES, John
c/o Murata Machinery, Ltd.
136, Takeda Mukaishiro-cho, Fushimi-ku
Kyoto-shi, Kyoto, 612-8686 / JP
 [2020/01]
Representative(s)Weickmann & Weickmann PartmbB
Postfach 860 820
81635 München / DE
[N/P]
Former [2020/01]Weickmann & Weickmann PartmbB
Postfach 860 820
81635 München / DE
Application number, filing date19180429.317.06.2019
[2020/01]
Priority number, dateDE201820103663U27.06.2018         Original published format: DE 202018103663 U
US20181618554609.11.2018         Original published format: US201816185546
[2020/01]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP3588542
Date:01.01.2020
Language:EN
[2020/01]
Type: B1 Patent specification 
No.:EP3588542
Date:22.02.2023
Language:EN
[2023/08]
Search report(s)(Supplementary) European search report - dispatched on:EP15.11.2019
ClassificationIPC:H01L21/673
[2020/01]
CPC:
H01L21/67346 (EP,IL,KR); H01L21/00 (IL); H01L21/67376 (IL,KR);
H01L21/67383 (EP,IL); H01L21/67389 (IL,KR)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2020/19]
Former [2020/01]AL,  AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MK,  MT,  NL,  NO,  PL,  PT,  RO,  RS,  SE,  SI,  SK,  SM,  TR 
TitleGerman:VORRICHTUNGEN FÜR MINDESTENS EINES AUS SUBSTRATHANDHABUNG, SUBSTRATSPEICHERUNG, SUBSTRATBEHANDLUNG UND SUBSTRATVERARBEITUNG[2020/01]
English:DEVICES FOR AT LEAST ONE OF SUBSTRATE HANDLING, SUBSTRATE STORAGE, SUBSTRATE TREATMENT AND SUBSTRATE PROCESSING[2020/01]
French:DISPOSITIFS POUR AU MOINS UNE MANIPULATION DE SUBSTRATS, UN STOCKAGE DE SUBSTRATS, UN TRAITEMENT DE SUBSTRATS ET UNE TRANSFORMATION DE SUBSTRATS[2020/01]
Examination procedure31.03.2020Amendment by applicant (claims and/or description)
31.03.2020Examination requested  [2020/19]
31.03.2020Date on which the examining division has become responsible
16.03.2022Despatch of a communication from the examining division (Time limit: M04)
10.05.2022Reply to a communication from the examining division
27.10.2022Communication of intention to grant the patent
10.01.2023Fee for grant paid
10.01.2023Fee for publishing/printing paid
10.01.2023Receipt of the translation of the claim(s)
Opposition(s)23.11.2023No opposition filed within time limit [2024/05]
Fees paidRenewal fee
22.06.2021Renewal fee patent year 03
27.06.2022Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT22.02.2023
BG22.02.2023
CZ22.02.2023
DK22.02.2023
EE22.02.2023
ES22.02.2023
FI22.02.2023
HR22.02.2023
IT22.02.2023
LT22.02.2023
LV22.02.2023
MC22.02.2023
NL22.02.2023
PL22.02.2023
RO22.02.2023
RS22.02.2023
SE22.02.2023
SI22.02.2023
SK22.02.2023
SM22.02.2023
NO22.05.2023
GR23.05.2023
GB17.06.2023
LU17.06.2023
IS22.06.2023
PT22.06.2023
BE30.06.2023
CH30.06.2023
FR30.06.2023
[2024/51]
Former [2024/26]AT22.02.2023
CZ22.02.2023
DK22.02.2023
EE22.02.2023
ES22.02.2023
FI22.02.2023
HR22.02.2023
IT22.02.2023
LT22.02.2023
LV22.02.2023
MC22.02.2023
NL22.02.2023
PL22.02.2023
RO22.02.2023
RS22.02.2023
SE22.02.2023
SI22.02.2023
SK22.02.2023
SM22.02.2023
NO22.05.2023
GR23.05.2023
GB17.06.2023
LU17.06.2023
IS22.06.2023
PT22.06.2023
BE30.06.2023
CH30.06.2023
FR30.06.2023
Former [2024/25]AT22.02.2023
CZ22.02.2023
DK22.02.2023
EE22.02.2023
ES22.02.2023
FI22.02.2023
HR22.02.2023
LT22.02.2023
LV22.02.2023
MC22.02.2023
NL22.02.2023
PL22.02.2023
RO22.02.2023
RS22.02.2023
SE22.02.2023
SI22.02.2023
SK22.02.2023
SM22.02.2023
NO22.05.2023
GR23.05.2023
GB17.06.2023
LU17.06.2023
IS22.06.2023
PT22.06.2023
BE30.06.2023
CH30.06.2023
FR30.06.2023
Former [2024/15]AT22.02.2023
CZ22.02.2023
DK22.02.2023
EE22.02.2023
ES22.02.2023
FI22.02.2023
HR22.02.2023
LT22.02.2023
LV22.02.2023
MC22.02.2023
NL22.02.2023
PL22.02.2023
RO22.02.2023
RS22.02.2023
SE22.02.2023
SI22.02.2023
SK22.02.2023
SM22.02.2023
NO22.05.2023
GR23.05.2023
LU17.06.2023
IS22.06.2023
PT22.06.2023
Former [2024/11]AT22.02.2023
CZ22.02.2023
DK22.02.2023
EE22.02.2023
ES22.02.2023
FI22.02.2023
HR22.02.2023
LT22.02.2023
LV22.02.2023
MC22.02.2023
NL22.02.2023
PL22.02.2023
RO22.02.2023
RS22.02.2023
SE22.02.2023
SI22.02.2023
SK22.02.2023
SM22.02.2023
NO22.05.2023
GR23.05.2023
IS22.06.2023
PT22.06.2023
Former [2024/09]AT22.02.2023
CZ22.02.2023
DK22.02.2023
EE22.02.2023
ES22.02.2023
FI22.02.2023
HR22.02.2023
LT22.02.2023
LV22.02.2023
MC22.02.2023
NL22.02.2023
PL22.02.2023
RO22.02.2023
RS22.02.2023
SE22.02.2023
SK22.02.2023
SM22.02.2023
NO22.05.2023
GR23.05.2023
IS22.06.2023
PT22.06.2023
Former [2023/50]AT22.02.2023
CZ22.02.2023
DK22.02.2023
EE22.02.2023
ES22.02.2023
FI22.02.2023
HR22.02.2023
LT22.02.2023
LV22.02.2023
NL22.02.2023
PL22.02.2023
RO22.02.2023
RS22.02.2023
SE22.02.2023
SK22.02.2023
SM22.02.2023
NO22.05.2023
GR23.05.2023
IS22.06.2023
PT22.06.2023
Former [2023/49]AT22.02.2023
CZ22.02.2023
DK22.02.2023
EE22.02.2023
ES22.02.2023
FI22.02.2023
HR22.02.2023
LT22.02.2023
LV22.02.2023
NL22.02.2023
PL22.02.2023
RO22.02.2023
RS22.02.2023
SE22.02.2023
SM22.02.2023
NO22.05.2023
GR23.05.2023
IS22.06.2023
PT22.06.2023
Former [2023/48]AT22.02.2023
DK22.02.2023
EE22.02.2023
ES22.02.2023
FI22.02.2023
HR22.02.2023
LT22.02.2023
LV22.02.2023
NL22.02.2023
PL22.02.2023
RS22.02.2023
SE22.02.2023
SM22.02.2023
NO22.05.2023
GR23.05.2023
IS22.06.2023
PT22.06.2023
Former [2023/46]AT22.02.2023
DK22.02.2023
ES22.02.2023
FI22.02.2023
HR22.02.2023
LT22.02.2023
LV22.02.2023
NL22.02.2023
PL22.02.2023
RS22.02.2023
SE22.02.2023
SM22.02.2023
NO22.05.2023
GR23.05.2023
IS22.06.2023
PT22.06.2023
Former [2023/39]AT22.02.2023
ES22.02.2023
FI22.02.2023
HR22.02.2023
LT22.02.2023
LV22.02.2023
NL22.02.2023
PL22.02.2023
RS22.02.2023
SE22.02.2023
NO22.05.2023
GR23.05.2023
IS22.06.2023
PT22.06.2023
Former [2023/38]AT22.02.2023
ES22.02.2023
FI22.02.2023
HR22.02.2023
LT22.02.2023
LV22.02.2023
NL22.02.2023
PL22.02.2023
RS22.02.2023
SE22.02.2023
NO22.05.2023
GR23.05.2023
PT22.06.2023
Former [2023/37]AT22.02.2023
ES22.02.2023
FI22.02.2023
HR22.02.2023
LT22.02.2023
LV22.02.2023
NL22.02.2023
RS22.02.2023
SE22.02.2023
NO22.05.2023
GR23.05.2023
PT22.06.2023
Former [2023/36]AT22.02.2023
ES22.02.2023
FI22.02.2023
HR22.02.2023
LT22.02.2023
LV22.02.2023
NL22.02.2023
RS22.02.2023
SE22.02.2023
NO22.05.2023
PT22.06.2023
Former [2023/35]AT22.02.2023
ES22.02.2023
HR22.02.2023
LT22.02.2023
NL22.02.2023
RS22.02.2023
NO22.05.2023
PT22.06.2023
Former [2023/34]ES22.02.2023
LT22.02.2023
RS22.02.2023
PT22.06.2023
Former [2023/33]ES22.02.2023
LT22.02.2023
Documents cited:Search[XA]WO2014107818  (TEC SEM AG [CH]);
 [XAI]US2017372930  (SCHOBER THOMAS [CH], et al)
by applicantWO2005006407
 US2006151404
 WO2007006166
 US2010179681
 WO2014107818
 US2017372930
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.