EP3618102 - METHOD FOR PRODUCING THIN WAFER [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 25.03.2022 Database last updated on 31.08.2024 | |
Former | The patent has been granted Status updated on 16.04.2021 | ||
Former | Grant of patent is intended Status updated on 13.01.2021 | ||
Former | Examination is in progress Status updated on 02.10.2020 | ||
Former | Request for examination was made Status updated on 28.08.2020 | ||
Former | The application has been published Status updated on 31.01.2020 | Most recent event Tooltip | 14.06.2024 | Lapse of the patent in a contracting state New state(s): TR | published on 17.07.2024 [2024/29] | Applicant(s) | For all designated states Shin-Etsu Chemical Co., Ltd. 6-1, Ohtemachi 2-chome Chiyoda-ku Tokyo / JP | [2020/10] | Inventor(s) | 01 /
YASUDA, Hiroyuki Shin-Etsu Chemical Co., Ltd. c/o Silicone-Electronics Materials Research Center 1-10, Hitomi, Matsuida-machi Annaka-shi, Gunma / JP | 02 /
SUGO, Michihiro Shin-Etsu Chemical Co., Ltd. c/o Silicone-Electronics Materials Research Center 1-10, Hitomi, Matsuida-machi Annaka-shi, Gunma / JP | [2021/20] |
Former [2020/10] | 01 /
YASUDA, Hiroyuki Shin-Etsu Chemical Co., Ltd. c/o Silicone-Electronics Materials Research Center 1-10, Hitomi, Matsuida-machi Annaka-shi, Gunma / JP | ||
02 /
SUGO, Michihiro Shin-Etsu Chemical Co., Ltd. c/o Silicone-Electronics Materials Research Center 1-10, Hitomi, Matsuida-machi Annaka-shi, Gunma / JP | Representative(s) | Ter Meer Steinmeister & Partner Patentanwälte mbB Nymphenburger Straße 4 80335 München / DE | [2020/10] | Application number, filing date | 19192280.6 | 19.08.2019 | [2020/10] | Priority number, date | JP20180164373 | 03.09.2018 Original published format: JP 2018164373 | [2020/10] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP3618102 | Date: | 04.03.2020 | Language: | EN | [2020/10] | Type: | A3 Search report | No.: | EP3618102 | Date: | 11.03.2020 | Language: | EN | [2020/11] | Type: | B1 Patent specification | No.: | EP3618102 | Date: | 19.05.2021 | Language: | EN | [2021/20] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 07.02.2020 | Classification | IPC: | H01L21/683 | [2020/10] | CPC: |
H01L21/6835 (EP);
H01L21/185 (KR);
H01L21/6836 (CN,US);
B32B43/006 (US);
C08G61/02 (KR);
C08G77/14 (KR);
C08G77/60 (KR);
C08L101/00 (KR);
C08L65/00 (KR);
C08L83/04 (KR);
C09J147/00 (US);
H01L21/324 (KR);
H01L21/7806 (KR);
B32B2457/14 (US);
B32B38/10 (US);
H01L2221/68304 (CN);
H01L2221/68327 (EP);
H01L2221/6834 (EP);
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2020/40] |
Former [2020/10] | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR | Title | German: | VERFAHREN ZUR HERSTELLUNG EINES DÜNNEN WAFERS | [2020/10] | English: | METHOD FOR PRODUCING THIN WAFER | [2020/10] | French: | PROCÉDÉ DE FABRICATION D'UNE TRANCHE MINCE | [2020/10] | Examination procedure | 20.08.2020 | Amendment by applicant (claims and/or description) | 20.08.2020 | Examination requested [2020/40] | 20.08.2020 | Date on which the examining division has become responsible | 05.10.2020 | Despatch of a communication from the examining division (Time limit: M02) | 04.12.2020 | Reply to a communication from the examining division | 14.01.2021 | Communication of intention to grant the patent | 09.04.2021 | Fee for grant paid | 09.04.2021 | Fee for publishing/printing paid | 09.04.2021 | Receipt of the translation of the claim(s) | Opposition(s) | 22.02.2022 | No opposition filed within time limit [2022/17] |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 19.08.2019 | AL | 19.05.2021 | AT | 19.05.2021 | CY | 19.05.2021 | CZ | 19.05.2021 | DK | 19.05.2021 | EE | 19.05.2021 | ES | 19.05.2021 | FI | 19.05.2021 | HR | 19.05.2021 | IT | 19.05.2021 | LT | 19.05.2021 | LV | 19.05.2021 | MC | 19.05.2021 | MK | 19.05.2021 | NL | 19.05.2021 | PL | 19.05.2021 | RO | 19.05.2021 | RS | 19.05.2021 | SE | 19.05.2021 | SI | 19.05.2021 | SK | 19.05.2021 | SM | 19.05.2021 | TR | 19.05.2021 | BG | 19.08.2021 | IE | 19.08.2021 | LU | 19.08.2021 | NO | 19.08.2021 | GR | 20.08.2021 | BE | 31.08.2021 | IS | 19.09.2021 | PT | 20.09.2021 | [2024/29] |
Former [2024/23] | HU | 19.08.2019 | |
AL | 19.05.2021 | ||
AT | 19.05.2021 | ||
CY | 19.05.2021 | ||
CZ | 19.05.2021 | ||
DK | 19.05.2021 | ||
EE | 19.05.2021 | ||
ES | 19.05.2021 | ||
FI | 19.05.2021 | ||
HR | 19.05.2021 | ||
IT | 19.05.2021 | ||
LT | 19.05.2021 | ||
LV | 19.05.2021 | ||
MC | 19.05.2021 | ||
MK | 19.05.2021 | ||
NL | 19.05.2021 | ||
PL | 19.05.2021 | ||
RO | 19.05.2021 | ||
RS | 19.05.2021 | ||
SE | 19.05.2021 | ||
SI | 19.05.2021 | ||
SK | 19.05.2021 | ||
SM | 19.05.2021 | ||
BG | 19.08.2021 | ||
IE | 19.08.2021 | ||
LU | 19.08.2021 | ||
NO | 19.08.2021 | ||
GR | 20.08.2021 | ||
BE | 31.08.2021 | ||
IS | 19.09.2021 | ||
PT | 20.09.2021 | ||
Former [2023/33] | HU | 19.08.2019 | |
AL | 19.05.2021 | ||
AT | 19.05.2021 | ||
CY | 19.05.2021 | ||
CZ | 19.05.2021 | ||
DK | 19.05.2021 | ||
EE | 19.05.2021 | ||
ES | 19.05.2021 | ||
FI | 19.05.2021 | ||
HR | 19.05.2021 | ||
IT | 19.05.2021 | ||
LT | 19.05.2021 | ||
LV | 19.05.2021 | ||
MC | 19.05.2021 | ||
NL | 19.05.2021 | ||
PL | 19.05.2021 | ||
RO | 19.05.2021 | ||
RS | 19.05.2021 | ||
SE | 19.05.2021 | ||
SI | 19.05.2021 | ||
SK | 19.05.2021 | ||
SM | 19.05.2021 | ||
BG | 19.08.2021 | ||
IE | 19.08.2021 | ||
LU | 19.08.2021 | ||
NO | 19.08.2021 | ||
GR | 20.08.2021 | ||
BE | 31.08.2021 | ||
IS | 19.09.2021 | ||
PT | 20.09.2021 | ||
Former [2023/30] | AL | 19.05.2021 | |
AT | 19.05.2021 | ||
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CZ | 19.05.2021 | ||
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EE | 19.05.2021 | ||
ES | 19.05.2021 | ||
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HR | 19.05.2021 | ||
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MC | 19.05.2021 | ||
NL | 19.05.2021 | ||
PL | 19.05.2021 | ||
RO | 19.05.2021 | ||
RS | 19.05.2021 | ||
SE | 19.05.2021 | ||
SI | 19.05.2021 | ||
SK | 19.05.2021 | ||
SM | 19.05.2021 | ||
BG | 19.08.2021 | ||
IE | 19.08.2021 | ||
LU | 19.08.2021 | ||
NO | 19.08.2021 | ||
GR | 20.08.2021 | ||
BE | 31.08.2021 | ||
IS | 19.09.2021 | ||
PT | 20.09.2021 | ||
Former [2022/36] | AL | 19.05.2021 | |
AT | 19.05.2021 | ||
CZ | 19.05.2021 | ||
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FI | 19.05.2021 | ||
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MC | 19.05.2021 | ||
NL | 19.05.2021 | ||
PL | 19.05.2021 | ||
RO | 19.05.2021 | ||
RS | 19.05.2021 | ||
SE | 19.05.2021 | ||
SI | 19.05.2021 | ||
SK | 19.05.2021 | ||
SM | 19.05.2021 | ||
BG | 19.08.2021 | ||
IE | 19.08.2021 | ||
LU | 19.08.2021 | ||
NO | 19.08.2021 | ||
GR | 20.08.2021 | ||
BE | 31.08.2021 | ||
IS | 19.09.2021 | ||
PT | 20.09.2021 | ||
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AT | 19.05.2021 | ||
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FI | 19.05.2021 | ||
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PL | 19.05.2021 | ||
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RS | 19.05.2021 | ||
SE | 19.05.2021 | ||
SI | 19.05.2021 | ||
SK | 19.05.2021 | ||
SM | 19.05.2021 | ||
BG | 19.08.2021 | ||
IE | 19.08.2021 | ||
LU | 19.08.2021 | ||
NO | 19.08.2021 | ||
GR | 20.08.2021 | ||
BE | 31.08.2021 | ||
IS | 19.09.2021 | ||
PT | 20.09.2021 | ||
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SI | 19.05.2021 | ||
SK | 19.05.2021 | ||
SM | 19.05.2021 | ||
BG | 19.08.2021 | ||
LU | 19.08.2021 | ||
NO | 19.08.2021 | ||
GR | 20.08.2021 | ||
BE | 31.08.2021 | ||
IS | 19.09.2021 | ||
PT | 20.09.2021 | ||
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AT | 19.05.2021 | ||
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FI | 19.05.2021 | ||
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LV | 19.05.2021 | ||
MC | 19.05.2021 | ||
NL | 19.05.2021 | ||
PL | 19.05.2021 | ||
RO | 19.05.2021 | ||
RS | 19.05.2021 | ||
SE | 19.05.2021 | ||
SI | 19.05.2021 | ||
SK | 19.05.2021 | ||
SM | 19.05.2021 | ||
BG | 19.08.2021 | ||
LU | 19.08.2021 | ||
NO | 19.08.2021 | ||
GR | 20.08.2021 | ||
IS | 19.09.2021 | ||
PT | 20.09.2021 | ||
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AT | 19.05.2021 | ||
CZ | 19.05.2021 | ||
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EE | 19.05.2021 | ||
ES | 19.05.2021 | ||
FI | 19.05.2021 | ||
HR | 19.05.2021 | ||
LT | 19.05.2021 | ||
LV | 19.05.2021 | ||
MC | 19.05.2021 | ||
NL | 19.05.2021 | ||
PL | 19.05.2021 | ||
RO | 19.05.2021 | ||
RS | 19.05.2021 | ||
SE | 19.05.2021 | ||
SK | 19.05.2021 | ||
SM | 19.05.2021 | ||
BG | 19.08.2021 | ||
LU | 19.08.2021 | ||
NO | 19.08.2021 | ||
GR | 20.08.2021 | ||
IS | 19.09.2021 | ||
PT | 20.09.2021 | ||
Former [2022/23] | AT | 19.05.2021 | |
CZ | 19.05.2021 | ||
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FI | 19.05.2021 | ||
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MC | 19.05.2021 | ||
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BG | 19.08.2021 | ||
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GR | 20.08.2021 | ||
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MC | 19.05.2021 | ||
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RO | 19.05.2021 | ||
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SE | 19.05.2021 | ||
SK | 19.05.2021 | ||
SM | 19.05.2021 | ||
BG | 19.08.2021 | ||
NO | 19.08.2021 | ||
GR | 20.08.2021 | ||
PT | 20.09.2021 | ||
IS | 22.12.2021 | ||
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HR | 19.05.2021 | ||
LT | 19.05.2021 | ||
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PL | 19.05.2021 | ||
RO | 19.05.2021 | ||
RS | 19.05.2021 | ||
SE | 19.05.2021 | ||
SK | 19.05.2021 | ||
SM | 19.05.2021 | ||
BG | 19.08.2021 | ||
NO | 19.08.2021 | ||
GR | 20.08.2021 | ||
PT | 20.09.2021 | ||
IS | 22.12.2021 | ||
Former [2022/09] | AT | 19.05.2021 | |
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DK | 19.05.2021 | ||
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FI | 19.05.2021 | ||
HR | 19.05.2021 | ||
LT | 19.05.2021 | ||
LV | 19.05.2021 | ||
NL | 19.05.2021 | ||
PL | 19.05.2021 | ||
RO | 19.05.2021 | ||
RS | 19.05.2021 | ||
SE | 19.05.2021 | ||
SK | 19.05.2021 | ||
SM | 19.05.2021 | ||
BG | 19.08.2021 | ||
NO | 19.08.2021 | ||
GR | 20.08.2021 | ||
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PT | 20.09.2021 | ||
Former [2022/08] | AT | 19.05.2021 | |
CZ | 19.05.2021 | ||
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FI | 19.05.2021 | ||
HR | 19.05.2021 | ||
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SM | 19.05.2021 | ||
BG | 19.08.2021 | ||
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BG | 19.08.2021 | ||
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BG | 19.08.2021 | ||
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BG | 19.08.2021 | ||
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LT | 19.05.2021 | Documents cited: | Search | [A]US2016326414 (TAGAMI SHOHEI [JP], et al) [A] 2* paragraphs [0111] , [ 112] *; | [A]US2017110360 (TAGAMI SHOHEI [JP], et al) [A] 2 * paragraphs [0102] , [ 103] *; | [Y]US2017198176 (KAMOCHI YOSHITAKA [JP], et al) [Y] 1-8,10 * figure 1 * * paragraphs [0069] - [0070] - [ 213] - [0226] - [ 242] - [0243] *; | [XI]US2017352637 (YASUDA HIROYUKI [JP], et al) [X] 1,3-9 * figure 1 * * paragraphs [0035] - [0043] - [0 56] , [0 72] , [0 75] , [ 194] - [0198] - [ 236] - [0238] - [ 240] - [0275] * [I] 2; | [Y]US2018102334 (YASUDA HIROYUKI [JP], et al) [Y] 1-8,10 * figure 1 * * paragraphs [0044] - [0052] - [0 65] , [0 68] , [0 83] , [0 84] , [0 98] , [ 102] - [0103] - [0120] - [0122] - [0149] - [0152] * | by applicant | JP2003177528 | JP2013110391 | JP2013534721 | WO2015072418 | JP2018164373 |