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Extract from the Register of European Patents

EP About this file: EP3657281

EP3657281 - CONTROL STRATEGY EVALUATION TOOL FOR A SEMICONDUCTOR MANUFACTURING PROCESS AND ITS USER INTERFACE [Right-click to bookmark this link]
Former [2020/22]METHOD FOR DETERMINING ROOT CAUSES OF EVENTS OF A SEMICONDUCTOR MANUFACTURING PROCESS AND FOR MONITORING A SEMICONDUCTOR MANUFACTURING PROCESS
[2022/29]
StatusNo opposition filed within time limit
Status updated on  06.10.2023
Database last updated on 31.08.2024
FormerThe patent has been granted
Status updated on  28.10.2022
FormerGrant of patent is intended
Status updated on  30.08.2022
FormerExamination is in progress
Status updated on  05.11.2021
FormerRequest for examination was made
Status updated on  13.11.2020
FormerThe application has been published
Status updated on  24.04.2020
Most recent event   Tooltip07.06.2024Lapse of the patent in a contracting state
New state(s): MC		published on 10.07.2024  [2024/28]
Applicant(s)For all designated states
ASML Netherlands B.V.
P.O. Box 324
5500 AH Veldhoven / NL
[2020/22]
Inventor(s)01 / CHEN, Chang-Wei
P.O. Box 324
5500 AH Veldhoven / NL
02 / ZENG, Si-Han
P.O. Box 324
5500 AH Veldhoven / NL
 [2020/22]
Representative(s)ASML Netherlands B.V.
Corporate Intellectual Property
P.O. Box 324
5500 AH Veldhoven / NL
[2022/48]
Former [2020/22]Peters, John Antoine
ASML Netherlands BV
Corporate Intellectual Property
De Run 6501
P.O. Box 324
5500 AH Veldhoven / NL
Application number, filing date19204347.921.10.2019
[2020/22]
Priority number, dateEP2018020838626.11.2018         Original published format: EP 18208386
EP2019016051304.03.2019         Original published format: EP 19160513
[2020/22]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP3657281
Date:27.05.2020
Language:EN
[2020/22]
Type: B1 Patent specification 
No.:EP3657281
Date:30.11.2022
Language:EN
[2022/48]
Search report(s)(Supplementary) European search report - dispatched on:EP23.01.2020
ClassificationIPC:G05B19/409, G05B19/418
[2020/22]
CPC:
G05B19/41885 (EP,KR); G05B19/0426 (US); G05B2219/23291 (US);
G05B2219/2602 (US); G05B2219/32128 (EP,KR); G05B2219/32162 (EP,KR);
G05B2219/36025 (EP,KR); G05B2219/45031 (EP,KR); Y02P90/02 (EP,KR) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2020/51]
Former [2020/22]AL,  AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MK,  MT,  NL,  NO,  PL,  PT,  RO,  RS,  SE,  SI,  SK,  SM,  TR 
TitleGerman:AUSWERTUNGSTOOL FÜR STEUERUNGSSTRATEGIE EINES HALBLEITERHERSTELLUNGSPROZESSES UND DESSEN BENUTZEROBERFLÄCHE[2022/29]
English:CONTROL STRATEGY EVALUATION TOOL FOR A SEMICONDUCTOR MANUFACTURING PROCESS AND ITS USER INTERFACE[2022/29]
French:OUTIL D'EVALUATION DE STRATEGIE DE COMMANDE POUR UN PROCESSUS DE FABRICATION DE SEMICONDUCTEURS ET SON INTERFACE UTILISATEUR[2022/29]
Former [2020/22]VERFAHREN ZUR BESTIMMUNG DER GRUNDURSACHEN VON EREIGNISSEN EINES HALBLEITERHERSTELLUNGSPROZESSES UND ZUR ÜBERWACHUNG EINES HALBLEITERHERSTELLUNGSPROZESSES
Former [2020/22]METHOD FOR DETERMINING ROOT CAUSES OF EVENTS OF A SEMICONDUCTOR MANUFACTURING PROCESS AND FOR MONITORING A SEMICONDUCTOR MANUFACTURING PROCESS
Former [2020/22]PROCÉDÉ POUR DÉTERMINER LES CAUSES PROFONDES D'ÉVÉNEMENTS D'UN PROCESSUS DE FABRICATION DE SEMICONDUCTEURS ET POUR SURVEILLER UN PROCESSUS DE FABRICATION DE SEMICONDUCTEURS
Examination procedure24.07.2020Amendment by applicant (claims and/or description)
09.11.2020Examination requested  [2020/51]
09.11.2020Date on which the examining division has become responsible
08.11.2021Despatch of a communication from the examining division (Time limit: M04)
07.02.2022Reply to a communication from the examining division
31.08.2022Communication of intention to grant the patent
13.10.2022Fee for grant paid
13.10.2022Fee for publishing/printing paid
13.10.2022Receipt of the translation of the claim(s)
Opposition(s)31.08.2023No opposition filed within time limit [2023/45]
Fees paidRenewal fee
26.10.2021Renewal fee patent year 03
25.10.2022Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAL30.11.2022
AT30.11.2022
CZ30.11.2022
DK30.11.2022
EE30.11.2022
ES30.11.2022
FI30.11.2022
HR30.11.2022
IT30.11.2022
LT30.11.2022
LV30.11.2022
MC30.11.2022
NL30.11.2022
PL30.11.2022
RO30.11.2022
RS30.11.2022
SE30.11.2022
SI30.11.2022
SK30.11.2022
SM30.11.2022
NO28.02.2023
GR01.03.2023
IS30.03.2023
PT31.03.2023
[2024/28]
Former [2024/26]AL30.11.2022
AT30.11.2022
CZ30.11.2022
DK30.11.2022
EE30.11.2022
ES30.11.2022
FI30.11.2022
HR30.11.2022
IT30.11.2022
LT30.11.2022
LV30.11.2022
NL30.11.2022
PL30.11.2022
RO30.11.2022
RS30.11.2022
SE30.11.2022
SI30.11.2022
SK30.11.2022
SM30.11.2022
NO28.02.2023
GR01.03.2023
IS30.03.2023
PT31.03.2023
Former [2023/51]AL30.11.2022
AT30.11.2022
CZ30.11.2022
DK30.11.2022
EE30.11.2022
ES30.11.2022
FI30.11.2022
HR30.11.2022
LT30.11.2022
LV30.11.2022
NL30.11.2022
PL30.11.2022
RO30.11.2022
RS30.11.2022
SE30.11.2022
SI30.11.2022
SK30.11.2022
SM30.11.2022
NO28.02.2023
GR01.03.2023
IS30.03.2023
PT31.03.2023
Former [2023/38]AL30.11.2022
AT30.11.2022
CZ30.11.2022
DK30.11.2022
EE30.11.2022
ES30.11.2022
FI30.11.2022
HR30.11.2022
LT30.11.2022
LV30.11.2022
NL30.11.2022
PL30.11.2022
RO30.11.2022
RS30.11.2022
SE30.11.2022
SK30.11.2022
SM30.11.2022
NO28.02.2023
GR01.03.2023
IS30.03.2023
PT31.03.2023
Former [2023/37]AL30.11.2022
AT30.11.2022
CZ30.11.2022
DK30.11.2022
EE30.11.2022
ES30.11.2022
FI30.11.2022
HR30.11.2022
LT30.11.2022
LV30.11.2022
NL30.11.2022
PL30.11.2022
RO30.11.2022
RS30.11.2022
SE30.11.2022
SM30.11.2022
NO28.02.2023
GR01.03.2023
IS30.03.2023
PT31.03.2023
Former [2023/35]AT30.11.2022
CZ30.11.2022
DK30.11.2022
EE30.11.2022
ES30.11.2022
FI30.11.2022
HR30.11.2022
LT30.11.2022
LV30.11.2022
NL30.11.2022
PL30.11.2022
RO30.11.2022
RS30.11.2022
SE30.11.2022
SM30.11.2022
NO28.02.2023
GR01.03.2023
IS30.03.2023
PT31.03.2023
Former [2023/34]DK30.11.2022
EE30.11.2022
ES30.11.2022
FI30.11.2022
HR30.11.2022
LT30.11.2022
LV30.11.2022
NL30.11.2022
PL30.11.2022
RS30.11.2022
SE30.11.2022
SM30.11.2022
NO28.02.2023
GR01.03.2023
IS30.03.2023
PT31.03.2023
Former [2023/33]DK30.11.2022
ES30.11.2022
FI30.11.2022
HR30.11.2022
LT30.11.2022
LV30.11.2022
NL30.11.2022
PL30.11.2022
RS30.11.2022
SE30.11.2022
SM30.11.2022
NO28.02.2023
GR01.03.2023
IS30.03.2023
PT31.03.2023
Former [2023/29]ES30.11.2022
FI30.11.2022
HR30.11.2022
LT30.11.2022
LV30.11.2022
NL30.11.2022
PL30.11.2022
RS30.11.2022
SE30.11.2022
NO28.02.2023
GR01.03.2023
IS30.03.2023
PT31.03.2023
Former [2023/25]ES30.11.2022
FI30.11.2022
HR30.11.2022
LT30.11.2022
LV30.11.2022
PL30.11.2022
RS30.11.2022
SE30.11.2022
NO28.02.2023
GR01.03.2023
IS30.03.2023
PT31.03.2023
Former [2023/23]ES30.11.2022
FI30.11.2022
LT30.11.2022
LV30.11.2022
SE30.11.2022
NO28.02.2023
GR01.03.2023
PT31.03.2023
Former [2023/22]ES30.11.2022
FI30.11.2022
LT30.11.2022
SE30.11.2022
NO28.02.2023
PT31.03.2023
Former [2023/20]LT30.11.2022
NO28.02.2023
Documents cited:Search[A]US5576946  (BENDER MARTIN P [US], et al) [A] 1-15 * column 4, lines 20-55 * * column 6, lines 18-64 * * column 8, lines 22-30 * * figures 2,3,5 *;
 [A]US2005047645  (FUNK MERRITT [US], et al) [A] 1-15* paragraphs [0069] , [0071] , [0074] , [0079] , [0135] - [0137]; figure 16B *;
 [A]US2008163096  (PANNESE PATRICK D [US], et al) [A] 1-15 * the whole document *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.