EP3657281 - CONTROL STRATEGY EVALUATION TOOL FOR A SEMICONDUCTOR MANUFACTURING PROCESS AND ITS USER INTERFACE [Right-click to bookmark this link] | |||
Former [2020/22] | METHOD FOR DETERMINING ROOT CAUSES OF EVENTS OF A SEMICONDUCTOR MANUFACTURING PROCESS AND FOR MONITORING A SEMICONDUCTOR MANUFACTURING PROCESS | ||
[2022/29] | Status | No opposition filed within time limit Status updated on 06.10.2023 Database last updated on 31.08.2024 | |
Former | The patent has been granted Status updated on 28.10.2022 | ||
Former | Grant of patent is intended Status updated on 30.08.2022 | ||
Former | Examination is in progress Status updated on 05.11.2021 | ||
Former | Request for examination was made Status updated on 13.11.2020 | ||
Former | The application has been published Status updated on 24.04.2020 | Most recent event Tooltip | 07.06.2024 | Lapse of the patent in a contracting state New state(s): MC | published on 10.07.2024 [2024/28] | Applicant(s) | For all designated states ASML Netherlands B.V. P.O. Box 324 5500 AH Veldhoven / NL | [2020/22] | Inventor(s) | 01 /
CHEN, Chang-Wei P.O. Box 324 5500 AH Veldhoven / NL | 02 /
ZENG, Si-Han P.O. Box 324 5500 AH Veldhoven / NL | [2020/22] | Representative(s) | ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | [2022/48] |
Former [2020/22] | Peters, John Antoine ASML Netherlands BV Corporate Intellectual Property De Run 6501 P.O. Box 324 5500 AH Veldhoven / NL | Application number, filing date | 19204347.9 | 21.10.2019 | [2020/22] | Priority number, date | EP20180208386 | 26.11.2018 Original published format: EP 18208386 | EP20190160513 | 04.03.2019 Original published format: EP 19160513 | [2020/22] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP3657281 | Date: | 27.05.2020 | Language: | EN | [2020/22] | Type: | B1 Patent specification | No.: | EP3657281 | Date: | 30.11.2022 | Language: | EN | [2022/48] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 23.01.2020 | Classification | IPC: | G05B19/409, G05B19/418 | [2020/22] | CPC: |
G05B19/41885 (EP,KR);
G05B19/0426 (US);
G05B2219/23291 (US);
G05B2219/2602 (US);
G05B2219/32128 (EP,KR);
G05B2219/32162 (EP,KR);
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2020/51] |
Former [2020/22] | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR | Title | German: | AUSWERTUNGSTOOL FÜR STEUERUNGSSTRATEGIE EINES HALBLEITERHERSTELLUNGSPROZESSES UND DESSEN BENUTZEROBERFLÄCHE | [2022/29] | English: | CONTROL STRATEGY EVALUATION TOOL FOR A SEMICONDUCTOR MANUFACTURING PROCESS AND ITS USER INTERFACE | [2022/29] | French: | OUTIL D'EVALUATION DE STRATEGIE DE COMMANDE POUR UN PROCESSUS DE FABRICATION DE SEMICONDUCTEURS ET SON INTERFACE UTILISATEUR | [2022/29] |
Former [2020/22] | VERFAHREN ZUR BESTIMMUNG DER GRUNDURSACHEN VON EREIGNISSEN EINES HALBLEITERHERSTELLUNGSPROZESSES UND ZUR ÜBERWACHUNG EINES HALBLEITERHERSTELLUNGSPROZESSES | ||
Former [2020/22] | METHOD FOR DETERMINING ROOT CAUSES OF EVENTS OF A SEMICONDUCTOR MANUFACTURING PROCESS AND FOR MONITORING A SEMICONDUCTOR MANUFACTURING PROCESS | ||
Former [2020/22] | PROCÉDÉ POUR DÉTERMINER LES CAUSES PROFONDES D'ÉVÉNEMENTS D'UN PROCESSUS DE FABRICATION DE SEMICONDUCTEURS ET POUR SURVEILLER UN PROCESSUS DE FABRICATION DE SEMICONDUCTEURS | Examination procedure | 24.07.2020 | Amendment by applicant (claims and/or description) | 09.11.2020 | Examination requested [2020/51] | 09.11.2020 | Date on which the examining division has become responsible | 08.11.2021 | Despatch of a communication from the examining division (Time limit: M04) | 07.02.2022 | Reply to a communication from the examining division | 31.08.2022 | Communication of intention to grant the patent | 13.10.2022 | Fee for grant paid | 13.10.2022 | Fee for publishing/printing paid | 13.10.2022 | Receipt of the translation of the claim(s) | Opposition(s) | 31.08.2023 | No opposition filed within time limit [2023/45] | Fees paid | Renewal fee | 26.10.2021 | Renewal fee patent year 03 | 25.10.2022 | Renewal fee patent year 04 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | AL | 30.11.2022 | AT | 30.11.2022 | CZ | 30.11.2022 | DK | 30.11.2022 | EE | 30.11.2022 | ES | 30.11.2022 | FI | 30.11.2022 | HR | 30.11.2022 | IT | 30.11.2022 | LT | 30.11.2022 | LV | 30.11.2022 | MC | 30.11.2022 | NL | 30.11.2022 | PL | 30.11.2022 | RO | 30.11.2022 | RS | 30.11.2022 | SE | 30.11.2022 | SI | 30.11.2022 | SK | 30.11.2022 | SM | 30.11.2022 | NO | 28.02.2023 | GR | 01.03.2023 | IS | 30.03.2023 | PT | 31.03.2023 | [2024/28] |
Former [2024/26] | AL | 30.11.2022 | |
AT | 30.11.2022 | ||
CZ | 30.11.2022 | ||
DK | 30.11.2022 | ||
EE | 30.11.2022 | ||
ES | 30.11.2022 | ||
FI | 30.11.2022 | ||
HR | 30.11.2022 | ||
IT | 30.11.2022 | ||
LT | 30.11.2022 | ||
LV | 30.11.2022 | ||
NL | 30.11.2022 | ||
PL | 30.11.2022 | ||
RO | 30.11.2022 | ||
RS | 30.11.2022 | ||
SE | 30.11.2022 | ||
SI | 30.11.2022 | ||
SK | 30.11.2022 | ||
SM | 30.11.2022 | ||
NO | 28.02.2023 | ||
GR | 01.03.2023 | ||
IS | 30.03.2023 | ||
PT | 31.03.2023 | ||
Former [2023/51] | AL | 30.11.2022 | |
AT | 30.11.2022 | ||
CZ | 30.11.2022 | ||
DK | 30.11.2022 | ||
EE | 30.11.2022 | ||
ES | 30.11.2022 | ||
FI | 30.11.2022 | ||
HR | 30.11.2022 | ||
LT | 30.11.2022 | ||
LV | 30.11.2022 | ||
NL | 30.11.2022 | ||
PL | 30.11.2022 | ||
RO | 30.11.2022 | ||
RS | 30.11.2022 | ||
SE | 30.11.2022 | ||
SI | 30.11.2022 | ||
SK | 30.11.2022 | ||
SM | 30.11.2022 | ||
NO | 28.02.2023 | ||
GR | 01.03.2023 | ||
IS | 30.03.2023 | ||
PT | 31.03.2023 | ||
Former [2023/38] | AL | 30.11.2022 | |
AT | 30.11.2022 | ||
CZ | 30.11.2022 | ||
DK | 30.11.2022 | ||
EE | 30.11.2022 | ||
ES | 30.11.2022 | ||
FI | 30.11.2022 | ||
HR | 30.11.2022 | ||
LT | 30.11.2022 | ||
LV | 30.11.2022 | ||
NL | 30.11.2022 | ||
PL | 30.11.2022 | ||
RO | 30.11.2022 | ||
RS | 30.11.2022 | ||
SE | 30.11.2022 | ||
SK | 30.11.2022 | ||
SM | 30.11.2022 | ||
NO | 28.02.2023 | ||
GR | 01.03.2023 | ||
IS | 30.03.2023 | ||
PT | 31.03.2023 | ||
Former [2023/37] | AL | 30.11.2022 | |
AT | 30.11.2022 | ||
CZ | 30.11.2022 | ||
DK | 30.11.2022 | ||
EE | 30.11.2022 | ||
ES | 30.11.2022 | ||
FI | 30.11.2022 | ||
HR | 30.11.2022 | ||
LT | 30.11.2022 | ||
LV | 30.11.2022 | ||
NL | 30.11.2022 | ||
PL | 30.11.2022 | ||
RO | 30.11.2022 | ||
RS | 30.11.2022 | ||
SE | 30.11.2022 | ||
SM | 30.11.2022 | ||
NO | 28.02.2023 | ||
GR | 01.03.2023 | ||
IS | 30.03.2023 | ||
PT | 31.03.2023 | ||
Former [2023/35] | AT | 30.11.2022 | |
CZ | 30.11.2022 | ||
DK | 30.11.2022 | ||
EE | 30.11.2022 | ||
ES | 30.11.2022 | ||
FI | 30.11.2022 | ||
HR | 30.11.2022 | ||
LT | 30.11.2022 | ||
LV | 30.11.2022 | ||
NL | 30.11.2022 | ||
PL | 30.11.2022 | ||
RO | 30.11.2022 | ||
RS | 30.11.2022 | ||
SE | 30.11.2022 | ||
SM | 30.11.2022 | ||
NO | 28.02.2023 | ||
GR | 01.03.2023 | ||
IS | 30.03.2023 | ||
PT | 31.03.2023 | ||
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EE | 30.11.2022 | ||
ES | 30.11.2022 | ||
FI | 30.11.2022 | ||
HR | 30.11.2022 | ||
LT | 30.11.2022 | ||
LV | 30.11.2022 | ||
NL | 30.11.2022 | ||
PL | 30.11.2022 | ||
RS | 30.11.2022 | ||
SE | 30.11.2022 | ||
SM | 30.11.2022 | ||
NO | 28.02.2023 | ||
GR | 01.03.2023 | ||
IS | 30.03.2023 | ||
PT | 31.03.2023 | ||
Former [2023/33] | DK | 30.11.2022 | |
ES | 30.11.2022 | ||
FI | 30.11.2022 | ||
HR | 30.11.2022 | ||
LT | 30.11.2022 | ||
LV | 30.11.2022 | ||
NL | 30.11.2022 | ||
PL | 30.11.2022 | ||
RS | 30.11.2022 | ||
SE | 30.11.2022 | ||
SM | 30.11.2022 | ||
NO | 28.02.2023 | ||
GR | 01.03.2023 | ||
IS | 30.03.2023 | ||
PT | 31.03.2023 | ||
Former [2023/29] | ES | 30.11.2022 | |
FI | 30.11.2022 | ||
HR | 30.11.2022 | ||
LT | 30.11.2022 | ||
LV | 30.11.2022 | ||
NL | 30.11.2022 | ||
PL | 30.11.2022 | ||
RS | 30.11.2022 | ||
SE | 30.11.2022 | ||
NO | 28.02.2023 | ||
GR | 01.03.2023 | ||
IS | 30.03.2023 | ||
PT | 31.03.2023 | ||
Former [2023/25] | ES | 30.11.2022 | |
FI | 30.11.2022 | ||
HR | 30.11.2022 | ||
LT | 30.11.2022 | ||
LV | 30.11.2022 | ||
PL | 30.11.2022 | ||
RS | 30.11.2022 | ||
SE | 30.11.2022 | ||
NO | 28.02.2023 | ||
GR | 01.03.2023 | ||
IS | 30.03.2023 | ||
PT | 31.03.2023 | ||
Former [2023/23] | ES | 30.11.2022 | |
FI | 30.11.2022 | ||
LT | 30.11.2022 | ||
LV | 30.11.2022 | ||
SE | 30.11.2022 | ||
NO | 28.02.2023 | ||
GR | 01.03.2023 | ||
PT | 31.03.2023 | ||
Former [2023/22] | ES | 30.11.2022 | |
FI | 30.11.2022 | ||
LT | 30.11.2022 | ||
SE | 30.11.2022 | ||
NO | 28.02.2023 | ||
PT | 31.03.2023 | ||
Former [2023/20] | LT | 30.11.2022 | |
NO | 28.02.2023 | Documents cited: | Search | [A]US5576946 (BENDER MARTIN P [US], et al) [A] 1-15 * column 4, lines 20-55 * * column 6, lines 18-64 * * column 8, lines 22-30 * * figures 2,3,5 *; | [A]US2005047645 (FUNK MERRITT [US], et al) [A] 1-15* paragraphs [0069] , [0071] , [0074] , [0079] , [0135] - [0137]; figure 16B *; | [A]US2008163096 (PANNESE PATRICK D [US], et al) [A] 1-15 * the whole document * |