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Extract from the Register of European Patents

EP About this file: EP3782190

EP3782190 - MULTI STACK OPTICAL ELEMENTS USING TEMPORARY AND PERMANENT BONDING [Right-click to bookmark this link]
StatusExamination is in progress
Status updated on  01.03.2024
Database last updated on 19.10.2024
FormerRequest for examination was made
Status updated on  22.01.2021
FormerThe international publication has been made
Status updated on  25.10.2019
Most recent event   Tooltip17.06.2024New entry: Reply to examination report 
Applicant(s)For all designated states
Applied Materials, Inc.
3050 Bowers Avenue
Santa Clara, California 95054 / US
[2021/08]
Inventor(s)01 / GODET, Ludovic
299 W Washington Avenue
Sunnyvale, California 94086 / US
02 / MCMILLAN, Wayne
1141 Mountain Quail Circle
San Jose, California 95120 / US
03 / MEYER TIMMERMAN THIJSSEN, Rutger
1042 Michelangelo Drive
Sunnyvale, California 94087 / US
04 / ARGAMAN, Naamah
1648 Fairwood Avenue
San Jose, California 95125 / US
05 / ROY, Tapashree
A1203 Spectra Palmwoods Nallurhalli Road
Bangalore 560066 / IN
06 / DOSHAY, Sage
15555 Bohlman Road
Saratoga, California 95070 / US
 [2021/08]
Representative(s)Zimmermann & Partner Patentanwälte mbB
Postfach 330 920
80069 München / DE
[2021/08]
Application number, filing date19787886.121.02.2019
[2021/08]
WO2019US18885
Priority number, dateUS201862658553P16.04.2018         Original published format: US 201862658553 P
US201862780536P17.12.2018         Original published format: US 201862780536 P
[2021/08]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2019203926
Date:24.10.2019
Language:EN
[2019/43]
Type: A1 Application with search report 
No.:EP3782190
Date:24.02.2021
Language:EN
The application published by WIPO in one of the EPO official languages on 24.10.2019 takes the place of the publication of the European patent application.
[2021/08]
Search report(s)International search report - published on:KR24.10.2019
(Supplementary) European search report - dispatched on:EP31.03.2022
ClassificationIPC:H01L21/768, H01L21/027, H01L21/52, H01L33/00, H01L27/146, G03F7/00, G02B5/18, // G02B3/00, H01L33/58
[2022/02]
CPC:
G02B5/1847 (EP); H01L25/167 (KR,US); H01L21/76816 (US);
H01L21/311 (US); H01L21/32134 (US); H01L25/043 (US);
H01L27/14643 (KR); H01L33/58 (EP,KR); H01S5/183 (KR);
H10K50/10 (KR); G02B3/0012 (EP); G02B5/1857 (EP);
H01L2933/0058 (EP,KR) (-)
Former IPC [2021/08]H01L21/768, H01L21/027, H01L21/52, H01L33/00, H01L27/146, G03F7/00
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2021/08]
TitleGerman:OPTISCHE MEHRSTAPELELEMENTE MIT VERWENDUNG TEMPORÄRER UND PERMANENTER BINDUNG[2021/08]
English:MULTI STACK OPTICAL ELEMENTS USING TEMPORARY AND PERMANENT BONDING[2021/08]
French:ÉLÉMENTS OPTIQUES À EMPILEMENTS MULTIPLES UTILISANT UNE LIAISON TEMPORAIRE ET PERMANENTE[2021/08]
Entry into regional phase19.10.2020National basic fee paid 
19.10.2020Search fee paid 
19.10.2020Designation fee(s) paid 
19.10.2020Examination fee paid 
Examination procedure19.10.2020Examination requested  [2021/08]
24.10.2022Amendment by applicant (claims and/or description)
01.03.2024Despatch of a communication from the examining division (Time limit: M04)
17.06.2024Reply to a communication from the examining division
Fees paidRenewal fee
19.02.2021Renewal fee patent year 03
17.02.2022Renewal fee patent year 04
22.02.2023Renewal fee patent year 05
20.02.2024Renewal fee patent year 06
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[XI]US6411765  (ONO HIDEKI [JP]) [X] 1 * column 7, line 59 - column 8, line 6 * * column 8, lines 29-51 * * column 12, lines 46-56 * [I] 4;
 [XI]US2005275944  (WANG JIAN J [US], et al) [X] 1-3 * figures 2,6 * * paragraphs [0004] , [0 65] , [0 66] , [0 74] , [ 101] * [I] 5;
 [X]WO2008154473  (MICRON TECHNOLOGY INC [US], et al) [X] 12,14,15 * figures 4A-F * * claims 11, 12 ** paragraphs [0056] , [0 57] *;
 [X]DE102016116748  (OSRAM OPTO SEMICONDUCTORS GMBH [DE]) [X] 12-15 * paragraphs [0014] , [0 16] , [0 17] , [0 25] , [0 26] , [0 32] * * figures 1-4 *;
 [XI]  - SHIN JU-HYEON ET AL, "Fabrication of functional nanosized patterns with UV-curable polysilsesquioxane on photovoltaic protective glass substrates using hybrid nano-imprint lithography", JOURNAL OF MATERIALS CHEMISTRY C, GB, (20140423), vol. 2, no. 29, doi:10.1039/C4TC00101J, ISSN 2050-7526, pages 5864 - 5869, XP055903340 [X] 6-8,11 * figure 3 * * section: Introduction section: Preparation of PV protective glass section: Fabricating Ni and PDMS molds and replicating anti reflection patterns on the PV protective glass * [I] 9,10

DOI:   http://dx.doi.org/10.1039/C4TC00101J
 [X]  - JU KANG HO ET AL, "Improving light-emitting diode performance through sapphire substrate double-side patterning", OPTICAL ENGINEERING, SOC. OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, BELLINGHAM, vol. 52, no. 2, doi:10.1117/1.OE.52.2.023002, ISSN 0091-3286, (20130212), page 23002, (20130212), XP060025687 [X] 12 * figure 7 * * table 2 * * section 3 Nanoimprint Lithography *

DOI:   http://dx.doi.org/10.1117/1.OE.52.2.023002
 [X]  - ROSSI MARKUS ET AL, "Optical module fabrication using nanoimprint technology", PROCEEDINGS OF SPIE, 1000 20th St. Bellingham WA 98225-6705 USA, (20060121), vol. 6110, doi:10.1117/12.646520, ISSN 0277-786X, ISBN 978-1-5106-4548-6, page 61100L, XP055903374 [X] 12,15 * page 2, lines 4-6, 30-32 * * figure 2 * * section 2 NIL process *

DOI:   http://dx.doi.org/10.1117/12.646520
International search[A]US2011284975  (BRAEUER JOERG [DE], et al) [A] 1-15 * See paragraph [0093] and figures 5-6. *;
 [A]US2013143414  (THOMAS JAYAN [US], et al) [A] 1-15 * See paragraphs [0072]-[0085] and figures 1-2. *;
 [A]KR20140073622  (KOREA MACH & MATERIALS INST [KR]) [A] 1-15* See paragraphs [0035]-[0072] and figures 1-5. *;
 [A]US2015069523  (OR-BACH ZVI [US], et al) [A] 1-15 * See claim 1 and figures 1-5. *;
 [A]US9537098  (LEE YEON KEUN [KR], et al) [A] 1-15 * See column 7, line 41 - column 8, line 34 and figure 5. *
by applicantUS6411765
 US2005275944
 WO2008154473
 DE102016116748
    - SHIN JU-HYEON et al., "Fabrication of Functional Nanosized Patterns With UV-Curable Polysilsesquioxane On Photovoltaic Protective Glass Substrates Using Hybrid NanoImprint Lithography", Journal of Materials Chemistry C
    - ROSSI MARKUS et al., "Optical Module Fabrication Using Nanoimprint Technology", Proceedings Of SPIE
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.