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Extract from the Register of European Patents

EP About this file: EP3899662

EP3899662 - METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPARATUSES [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  07.04.2023
Database last updated on 07.10.2024
FormerThe patent has been granted
Status updated on  29.04.2022
FormerGrant of patent is intended
Status updated on  08.03.2022
FormerRequest for examination was made
Status updated on  24.09.2021
FormerThe international publication has been made
Status updated on  02.07.2020
Formerunknown
Status updated on  18.11.2019
Most recent event   Tooltip27.09.2024Lapse of the patent in a contracting state
New state(s): MT		published on 30.10.2024 [2024/44]
Applicant(s)For all designated states
ASML Netherlands B.V.
P.O. Box 324
5500 AH Veldhoven / NL
[2021/43]
Inventor(s)01 / BRANTJES, Nicolaas Petrus Marcus
P.O. Box 324
5500 AH Veldhoven / NL
02 / COX, Matthijs
P.O. Box 324
5500 AH Veldhoven / NL
03 / MENCHTCHIKOV, Boris
399 West Trimble Road
San Jose, CA 95131 / US
04 / TABERY, Cyrus, Emil
399 West Trimble Road
San Jose, CA 95131 / US
05 / ZHANG, Youping
399 West Trimble Road
San Jose, CA 95131 / US
06 / ZOU, Yi
399 West Trimble Road
San Jose, CA 95131 / US
07 / LIN, Chenxi
399 West Trimble Road
San Jose, CA 95131 / US
08 / CHENG, Yana
399 West Trimble Road
San Jose, CA 95131 / US
09 / HASTINGS, Simon, Philip, Spencer
399 West Trimble Road
San Jose, CA 95131 / US
10 / GENIN, Maxime, Philippe, Frederic
399 West Trimble Road
San Jose, CA 95131 / US
 [2021/43]
Representative(s)ASML Netherlands B.V.
Corporate Intellectual Property
P.O. Box 324
5500 AH Veldhoven / NL
[2021/43]
Application number, filing date19801044.914.11.2019
[2021/43]
WO2019EP81282
Priority number, dateEP2018021401319.12.2018         Original published format: EP 18214013
US201962802866P08.02.2019         Original published format: US 201962802866 P
[2021/43]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2020126242
Date:25.06.2020
Language:EN
[2020/26]
Type: A1 Application with search report 
No.:EP3899662
Date:27.10.2021
Language:EN
The application published by WIPO in one of the EPO official languages on 25.06.2020 takes the place of the publication of the European patent application.
[2021/43]
Type: B1 Patent specification 
No.:EP3899662
Date:01.06.2022
Language:EN
[2022/22]
Search report(s)International search report - published on:EP25.06.2020
ClassificationIPC:G03F7/20, G03F9/00
[2021/43]
CPC:
G03F7/70633 (EP,KR,US); G03F7/70491 (EP,KR,US); G03F7/706837 (KR);
G03F7/706839 (KR); G03F9/7046 (EP,KR,US)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2021/43]
Extension statesBANot yet paid
MENot yet paid
Validation statesKHNot yet paid
MANot yet paid
MDNot yet paid
TNNot yet paid
TitleGerman:VERFAHREN ZUR STEUERUNG EINES HERSTELLUNGSVERFAHRENS UND ZUGEHÖRIGE VORRICHTUNGEN[2021/43]
English:METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPARATUSES[2021/43]
French:PROCÉDÉ DE COMMANDE D'UN PROCESSUS DE FABRICATION ET APPAREILS ASSOCIÉS[2022/12]
Former [2021/43]PROCÉDÉ DE CONTRÔLE D'UN PROCESSUS DE FABRICATION ET APPAREILS ASSOCIÉS
Entry into regional phase19.05.2021National basic fee paid 
19.05.2021Designation fee(s) paid 
19.05.2021Examination fee paid 
Examination procedure19.05.2021Amendment by applicant (claims and/or description)
19.05.2021Examination requested  [2021/43]
19.05.2021Date on which the examining division has become responsible
09.03.2022Communication of intention to grant the patent
25.04.2022Fee for grant paid
25.04.2022Fee for publishing/printing paid
25.04.2022Receipt of the translation of the claim(s)
Opposition(s)02.03.2023No opposition filed within time limit [2023/19]
Fees paidRenewal fee
25.11.2021Renewal fee patent year 03
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU14.11.2019
AL01.06.2022
AT01.06.2022
CY01.06.2022
CZ01.06.2022
DK01.06.2022
EE01.06.2022
ES01.06.2022
FI01.06.2022
HR01.06.2022
IT01.06.2022
LT01.06.2022
LV01.06.2022
MC01.06.2022
MK01.06.2022
MT01.06.2022
NL01.06.2022
PL01.06.2022
RO01.06.2022
RS01.06.2022
SE01.06.2022
SK01.06.2022
SM01.06.2022
BG01.09.2022
NO01.09.2022
GR02.09.2022
IS01.10.2022
PT03.10.2022
IE14.11.2022
LU14.11.2022
BE30.11.2022
CH30.11.2022
LI30.11.2022
[2024/44]
Former [2024/27]HU14.11.2019
AL01.06.2022
AT01.06.2022
CY01.06.2022
CZ01.06.2022
DK01.06.2022
EE01.06.2022
ES01.06.2022
FI01.06.2022
HR01.06.2022
IT01.06.2022
LT01.06.2022
LV01.06.2022
MC01.06.2022
MK01.06.2022
NL01.06.2022
PL01.06.2022
RO01.06.2022
RS01.06.2022
SE01.06.2022
SK01.06.2022
SM01.06.2022
BG01.09.2022
NO01.09.2022
GR02.09.2022
IS01.10.2022
PT03.10.2022
IE14.11.2022
LU14.11.2022
BE30.11.2022
CH30.11.2022
LI30.11.2022
Former [2024/25]HU14.11.2019
AL01.06.2022
AT01.06.2022
CY01.06.2022
CZ01.06.2022
DK01.06.2022
EE01.06.2022
ES01.06.2022
FI01.06.2022
HR01.06.2022
IT01.06.2022
LT01.06.2022
LV01.06.2022
MC01.06.2022
NL01.06.2022
PL01.06.2022
RO01.06.2022
RS01.06.2022
SE01.06.2022
SK01.06.2022
SM01.06.2022
BG01.09.2022
NO01.09.2022
GR02.09.2022
IS01.10.2022
PT03.10.2022
IE14.11.2022
LU14.11.2022
BE30.11.2022
CH30.11.2022
LI30.11.2022
Former [2024/21]AL01.06.2022
AT01.06.2022
CY01.06.2022
CZ01.06.2022
DK01.06.2022
EE01.06.2022
ES01.06.2022
FI01.06.2022
HR01.06.2022
IT01.06.2022
LT01.06.2022
LV01.06.2022
MC01.06.2022
NL01.06.2022
PL01.06.2022
RO01.06.2022
RS01.06.2022
SE01.06.2022
SK01.06.2022
SM01.06.2022
BG01.09.2022
NO01.09.2022
GR02.09.2022
IS01.10.2022
PT03.10.2022
IE14.11.2022
LU14.11.2022
BE30.11.2022
CH30.11.2022
LI30.11.2022
Former [2024/11]AL01.06.2022
AT01.06.2022
CZ01.06.2022
DK01.06.2022
EE01.06.2022
ES01.06.2022
FI01.06.2022
HR01.06.2022
IT01.06.2022
LT01.06.2022
LV01.06.2022
MC01.06.2022
NL01.06.2022
PL01.06.2022
RO01.06.2022
RS01.06.2022
SE01.06.2022
SK01.06.2022
SM01.06.2022
BG01.09.2022
NO01.09.2022
GR02.09.2022
IS01.10.2022
PT03.10.2022
IE14.11.2022
LU14.11.2022
BE30.11.2022
CH30.11.2022
LI30.11.2022
Former [2023/49]AL01.06.2022
AT01.06.2022
CZ01.06.2022
DK01.06.2022
EE01.06.2022
ES01.06.2022
FI01.06.2022
HR01.06.2022
LT01.06.2022
LV01.06.2022
MC01.06.2022
NL01.06.2022
PL01.06.2022
RO01.06.2022
RS01.06.2022
SE01.06.2022
SK01.06.2022
SM01.06.2022
BG01.09.2022
NO01.09.2022
GR02.09.2022
IS01.10.2022
PT03.10.2022
IE14.11.2022
LU14.11.2022
BE30.11.2022
CH30.11.2022
LI30.11.2022
Former [2023/48]AL01.06.2022
AT01.06.2022
CZ01.06.2022
DK01.06.2022
EE01.06.2022
ES01.06.2022
FI01.06.2022
HR01.06.2022
LT01.06.2022
LV01.06.2022
MC01.06.2022
NL01.06.2022
PL01.06.2022
RO01.06.2022
RS01.06.2022
SE01.06.2022
SK01.06.2022
SM01.06.2022
BG01.09.2022
NO01.09.2022
GR02.09.2022
IS01.10.2022
PT03.10.2022
IE14.11.2022
LU14.11.2022
CH30.11.2022
LI30.11.2022
Former [2023/37]AL01.06.2022
AT01.06.2022
CZ01.06.2022
DK01.06.2022
EE01.06.2022
ES01.06.2022
FI01.06.2022
HR01.06.2022
LT01.06.2022
LV01.06.2022
MC01.06.2022
NL01.06.2022
PL01.06.2022
RO01.06.2022
RS01.06.2022
SE01.06.2022
SK01.06.2022
SM01.06.2022
BG01.09.2022
NO01.09.2022
GR02.09.2022
IS01.10.2022
PT03.10.2022
LU14.11.2022
CH30.11.2022
LI30.11.2022
Former [2023/35]AL01.06.2022
AT01.06.2022
CZ01.06.2022
DK01.06.2022
EE01.06.2022
ES01.06.2022
FI01.06.2022
HR01.06.2022
LT01.06.2022
LV01.06.2022
MC01.06.2022
NL01.06.2022
PL01.06.2022
RO01.06.2022
RS01.06.2022
SE01.06.2022
SK01.06.2022
SM01.06.2022
BG01.09.2022
NO01.09.2022
GR02.09.2022
IS01.10.2022
PT03.10.2022
CH30.11.2022
LI30.11.2022
Former [2023/31]AL01.06.2022
AT01.06.2022
CZ01.06.2022
DK01.06.2022
EE01.06.2022
ES01.06.2022
FI01.06.2022
HR01.06.2022
LT01.06.2022
LV01.06.2022
MC01.06.2022
NL01.06.2022
PL01.06.2022
RO01.06.2022
RS01.06.2022
SE01.06.2022
SK01.06.2022
SM01.06.2022
BG01.09.2022
NO01.09.2022
GR02.09.2022
IS01.10.2022
PT03.10.2022
Former [2023/21]AL01.06.2022
AT01.06.2022
CZ01.06.2022
DK01.06.2022
EE01.06.2022
ES01.06.2022
FI01.06.2022
HR01.06.2022
LT01.06.2022
LV01.06.2022
NL01.06.2022
PL01.06.2022
RO01.06.2022
RS01.06.2022
SE01.06.2022
SK01.06.2022
SM01.06.2022
BG01.09.2022
NO01.09.2022
GR02.09.2022
IS01.10.2022
PT03.10.2022
Former [2023/17]AL01.06.2022
AT01.06.2022
CZ01.06.2022
EE01.06.2022
ES01.06.2022
FI01.06.2022
HR01.06.2022
LT01.06.2022
LV01.06.2022
NL01.06.2022
PL01.06.2022
RO01.06.2022
RS01.06.2022
SE01.06.2022
SK01.06.2022
SM01.06.2022
BG01.09.2022
NO01.09.2022
GR02.09.2022
IS01.10.2022
PT03.10.2022
Former [2023/12]AT01.06.2022
CZ01.06.2022
EE01.06.2022
ES01.06.2022
FI01.06.2022
HR01.06.2022
LT01.06.2022
LV01.06.2022
NL01.06.2022
PL01.06.2022
RO01.06.2022
RS01.06.2022
SE01.06.2022
SK01.06.2022
SM01.06.2022
BG01.09.2022
NO01.09.2022
GR02.09.2022
IS01.10.2022
PT03.10.2022
Former [2023/09]AT01.06.2022
CZ01.06.2022
EE01.06.2022
ES01.06.2022
FI01.06.2022
HR01.06.2022
LT01.06.2022
LV01.06.2022
NL01.06.2022
PL01.06.2022
RO01.06.2022
RS01.06.2022
SE01.06.2022
SK01.06.2022
SM01.06.2022
BG01.09.2022
NO01.09.2022
GR02.09.2022
PT03.10.2022
Former [2023/08]AT01.06.2022
ES01.06.2022
FI01.06.2022
HR01.06.2022
LT01.06.2022
LV01.06.2022
NL01.06.2022
PL01.06.2022
RS01.06.2022
SE01.06.2022
BG01.09.2022
NO01.09.2022
GR02.09.2022
Former [2023/07]AT01.06.2022
FI01.06.2022
HR01.06.2022
LT01.06.2022
LV01.06.2022
NL01.06.2022
PL01.06.2022
RS01.06.2022
SE01.06.2022
BG01.09.2022
NO01.09.2022
GR02.09.2022
Former [2023/02]FI01.06.2022
HR01.06.2022
LT01.06.2022
LV01.06.2022
NL01.06.2022
PL01.06.2022
RS01.06.2022
SE01.06.2022
BG01.09.2022
NO01.09.2022
GR02.09.2022
Former [2022/50]FI01.06.2022
HR01.06.2022
LT01.06.2022
LV01.06.2022
PL01.06.2022
RS01.06.2022
SE01.06.2022
BG01.09.2022
NO01.09.2022
GR02.09.2022
Former [2022/49]FI01.06.2022
HR01.06.2022
LT01.06.2022
LV01.06.2022
SE01.06.2022
BG01.09.2022
NO01.09.2022
GR02.09.2022
Former [2022/47]FI01.06.2022
LT01.06.2022
SE01.06.2022
NO01.09.2022
Cited inInternational search[A]US2013035888  (KANDEL DANIEL [IL], et al);
 [A]WO2018072980  (ASML NETHERLANDS BV [NL]);
by applicantUS6952253
 WO2017060080
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.