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EP3809202
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EP About this file: EP3809202
| EP3809202 - PELLICLE SUPPORT FRAME, PELLICLE, METHOD FOR MANUFACTURING PELLICLE SUPPORT FRAME, AND EXPOSURE ORIGINAL PLATE AND EXPOSURE DEVICE EMPLOYING PELLICLE [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 05.05.2023 Database last updated on 19.07.2024 | |
| Former | Grant of patent is intended Status updated on 10.08.2022 | ||
| Former | Request for examination was made Status updated on 19.03.2021 | ||
| Former | The international publication has been made Status updated on 21.12.2019 | Most recent event Tooltip | 05.05.2023 | Application deemed to be withdrawn | published on 07.06.2023 [2023/23] | Applicant(s) | For all designated states Mitsui Chemicals, Inc. 2-1, Yaesu 2-chome Chuo-ku Tokyo 104-0028 / JP | [2023/18] |
| Former [2021/16] | For all designated states Mitsui Chemicals, Inc. 5-2, Higashi-Shimbashi 1-chome Minato-ku Tokyo 105-7122 / JP | Inventor(s) | 01 /
ISHIKAWA Akira c/o Mitsui Chemicals, Inc., 580-32, Nagaura Sodegaura-shi, Chiba 299-0265 / JP | 02 /
OKUBO Atsushi c/o Mitsui Chemicals, Inc., 580-32, Nagaura Sodegaura-shi, Chiba 299-0265 / JP | 03 /
ONO Yosuke c/o NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY, 1-1, Higashi 1-chome Tsukuba-shi, Ibaraki 305-8565 / JP | 04 /
KOHMURA Kazuo c/o Mitsui Chemicals, Inc., 580-32, Nagaura Sodegaura-shi, Chiba 299-0265 / JP | [2021/16] | Representative(s) | Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastraße 30 81925 München / DE | [2021/16] | Application number, filing date | 19819860.8 | 12.06.2019 | [2021/16] | WO2019JP23267 | Priority number, date | JP20180111648 | 12.06.2018 Original published format: JP 2018111648 | [2021/16] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2019240166 | Date: | 19.12.2019 | Language: | JA | [2019/51] | Type: | A1 Application with search report | No.: | EP3809202 | Date: | 21.04.2021 | Language: | EN | [2021/16] | Search report(s) | International search report - published on: | JP | 19.12.2019 | (Supplementary) European search report - dispatched on: | EP | 14.02.2022 | Classification | IPC: | G03F1/64, H01L21/673 | [2021/16] | CPC: |
G03F1/64 (EP,KR,US);
G03F1/22 (KR);
G03F7/70983 (US)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2021/16] | Title | German: | STÜTZRAHMEN FÜR PELLIKEL, PELLIKEL, VERFAHREN ZUR HERSTELLUNG EINES PELLIKELSTÜTZRAHMENS UND BELICHTUNGSVORLAGEPLATTE UND BELICHTUNGSVORRICHTUNG MIT DEM PELLIKEL | [2022/30] | English: | PELLICLE SUPPORT FRAME, PELLICLE, METHOD FOR MANUFACTURING PELLICLE SUPPORT FRAME, AND EXPOSURE ORIGINAL PLATE AND EXPOSURE DEVICE EMPLOYING PELLICLE | [2021/16] | French: | CADRE DE SUPPORT DE PELLICULE, PELLICULE, PROCÉDÉ DE FABRICATION DE CADRE DE SUPPORT DE PELLICULE, ET PLAQUE ORIGINALE D'EXPOSITION ET DISPOSITIF D'EXPOSITION UTILISANT UNE PELLICULE | [2021/16] |
| Former [2021/16] | STÜTZRAHMEN FÜR ABZIEHEMULSIONSSCHICHT, ABZIEHEMULSIONSSCHICHT, VERFAHREN ZUR HERSTELLUNG EINES ABZIEHEMULSIONSSCHICHTSTÜTZRAHMENS UND BELICHTUNGSVORLAGEPLATTE UND BELICHTUNGSVORRICHTUNG MIT DER ABZIEHEMULSIONSSCHICHT | Entry into regional phase | 12.11.2020 | Translation filed | 12.11.2020 | National basic fee paid | 12.11.2020 | Search fee paid | 12.11.2020 | Designation fee(s) paid | 12.11.2020 | Examination fee paid | Examination procedure | 12.11.2020 | Amendment by applicant (claims and/or description) | 12.11.2020 | Examination requested [2021/16] | 11.08.2022 | Communication of intention to grant the patent | 22.12.2022 | Application deemed to be withdrawn, date of legal effect [2023/23] | 19.01.2023 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [2023/23] | Fees paid | Renewal fee | 14.06.2021 | Renewal fee patent year 03 | 31.03.2022 | Renewal fee patent year 04 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]US2008213679 (MIYAKAWA TOMOKI [JP], et al) [A] 1-17 * paragraph [0074]; figure 8 *; | [A]US2013065160 (LAO KEITH [US]) [A] 1-17 * figures 2-4 *; | [A]EP3196700 (MITSUI CHEMICALS INC [JP]) [A] 1-17 * figures 1-27 *; | [A]WO2018008594 (MITSUI CHEMICALS INC [JP], et al) [A] 1-17* figure 2 * | International search | [A]JPH1062966 (SHINETSU CHEMICAL CO) [A] 1-17 * (Family: none) *; | [A]JP2017083791 (MITSUI CHEMICALS INC) [A] 1-17* (Family: none) *; | [A]WO2018008594 (MITSUI CHEMICALS INC [JP], et al) [A] 1-17 | by applicant | JP2017116697 |