| Designated contracting states | AL | | AT | | BE | | BG | | CH | | CY | | CZ | | DE | | DK | | EE | | ES | | FI | | FR | | GB | | GR | | HR | | HU | | IE | | IS | | IT | | LI | | LT | | LU | | LV | | MC | | MK | | MT | | NL | | NO | | PL | | PT | | RO | | RS | | SE | | SI | | SK | | SM | | TR | | Examination procedure | 15.03.2024 | Reply to a communication from the examining division | Entry into regional phase | 31.03.2021 | National basic fee paid | | 31.03.2021 | Search fee paid | | 31.03.2021 | Designation fee(s) paid | | 31.03.2021 | Examination fee paid | | Fees paid | Renewal fee | 29.09.2021 | Renewal fee patent year 03 | 15.09.2022 | Renewal fee patent year 04 | 13.09.2023 | Renewal fee patent year 05 | 12.09.2024 | Renewal fee patent year 06 | INPADOC data Tooltip | The EPO does not accept any responsibility for the accuracy of legal status data relating to the post-grant phase, including but not limited to their completeness and fitness for specific purposes, nor can it guarantee that such data are up to date. For authoritative information, please refer to the relevant national patent authority. | Event date: | 11.04.2020 | | Event description: | INFORMATION ON THE STATUS OF AN EP PATENT APPLICATION OR GRANTED EP PATENT | Free Format Text: | STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE | | Event date: | 04.06.2021 | | Event description: | INFORMATION ON THE STATUS OF AN EP PATENT APPLICATION OR GRANTED EP PATENT | Free Format Text: | STATUS: REQUEST FOR EXAMINATION WAS MADE | | Event date: | 12.06.2021 | | Event description: | PUBLIC REFERENCE MADE UNDER ARTICLE 153(3) EPC TO A PUBLISHED INTERNATIONAL APPLICATION THAT HAS ENTERED THE EUROPEAN PHASE | Free Format Text: | ORIGINAL CODE: 0009012 | | Event date: | 07.07.2021 | | Event description: | REQUEST FOR EXAMINATION FILED | Effective DATE: | 20210331 | | Event date: | 07.07.2021 | | Event description: | DESIGNATED CONTRACTING STATES | Kind Code of Ref Document: | A1 | Designated State(s): | AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR | | Event date: | 12.01.2022 | | Event description: | REQUEST FOR EXTENSION OF THE EUROPEAN PATENT (DELETED) | | Event date: | 12.01.2022 | | Event description: | REQUEST FOR VALIDATION OF THE EUROPEAN PATENT (DELETED) | | Event date: | 01.06.2022 | | Event description: | INFORMATION PROVIDED ON IPC CODE ASSIGNED BEFORE GRANT | IPC CLASSIFICATION: | H01L 21/02 20060101AFI20220428BHEP | | Event date: | 01.06.2022 | | Event description: | INFORMATION PROVIDED ON IPC CODE ASSIGNED BEFORE GRANT | IPC CLASSIFICATION: | C23C 16/455 20060101ALI20220428BHEP | | Event date: | 01.06.2022 | | Event description: | INFORMATION PROVIDED ON IPC CODE ASSIGNED BEFORE GRANT | IPC CLASSIFICATION: | C23C 16/34 20060101ALI20220428BHEP | | Event date: | 01.06.2022 | | Event description: | INFORMATION PROVIDED ON IPC CODE ASSIGNED BEFORE GRANT | IPC CLASSIFICATION: | C23C 16/56 20060101ALI20220428BHEP | | Event date: | 01.06.2022 | | Event description: | INFORMATION PROVIDED ON IPC CODE ASSIGNED BEFORE GRANT | IPC CLASSIFICATION: | C23C 16/36 20060101ALI20220428BHEP | | Event date: | 01.06.2022 | | Event description: | INFORMATION PROVIDED ON IPC CODE ASSIGNED BEFORE GRANT | IPC CLASSIFICATION: | C23C 16/505 20060101ALI20220428BHEP | | Event date: | 01.06.2022 | | Event description: | INFORMATION PROVIDED ON IPC CODE ASSIGNED BEFORE GRANT | IPC CLASSIFICATION: | C07F 7/12 20060101ALI20220428BHEP | | Event date: | 01.06.2022 | | Event description: | SUPPLEMENTARY SEARCH REPORT DRAWN UP AND DESPATCHED | Effective DATE: | 20220504 | | Event date: | 28.04.2022 | | Event description: | REFERENCE TO A NATIONAL CODE | Event code: | REG DE R079 | Code Expl.: | AMENDMENT OF IPC MAIN CLASS | Free Format Text: | PREVIOUS MAIN CLASS: C23C0016455000 | IPC CLASSIFICATION: | H01L0021020000 | | Event date: | 12.07.2023 | | Event description: | OPT-OUT OF THE COMPETENCE OF THE UNIFIED PATENT COURT (UPC) REGISTERED | Effective DATE: | 20230602 | | Event date: | 17.11.2023 | | Event description: | INFORMATION ON THE STATUS OF AN EP PATENT APPLICATION OR GRANTED EP PATENT | Free Format Text: | STATUS: EXAMINATION IS IN PROGRESS | | Event date: | 20.12.2023 | | Event description: | FIRST EXAMINATION REPORT DESPATCHED | Effective DATE: | 20231117 | |
