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EP3915130
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EP About this file: EP3915130
| EP3915130 - METHOD FOR CALIBRATING VERTICALITY OF PARTICLE BEAM AND SYSTEM APPLIED TO SEMICONDUCTOR FABRICATION PROCESS [Right-click to bookmark this link] | Status | Examination is in progress Status updated on 20.07.2023 Database last updated on 06.07.2024 | |
| Former | Request for examination was made Status updated on 29.10.2021 | ||
| Former | The international publication has been made Status updated on 08.05.2021 | Most recent event Tooltip | 11.01.2024 | New entry: Date of oral proceedings | Applicant(s) | For all designated states Yangtze Memory Technologies Co., Ltd. No.88 Weilai 3rd Road East Lake High-tech Development Zone Wuhan, Hubei 430074 / CN | [2021/48] | Inventor(s) | 01 /
CHEN, Guangdian Room 7018, No. 18, Huaguang Road Guandong Science & Technology Industrial Park East Lake Development Zone Wuhan, Hubei 430074 / CN | 02 /
CHEN, Jinxing Room 7018, No. 18, Huaguang Road Guandong Science & Technology Industrial Park East Lake Development Zone Wuhan, Hubei 430074 / CN | 03 /
CAI, Zhengyi Room 7018, No. 18, Huaguang Road Guandong Science & Technology Industrial Park East Lake Development Zone Wuhan, Hubei 430074 / CN | [N/P] |
| Former [2021/48] | 01 /
CHEN, Guangdian Wuhan, Hubei 430074 / CN | ||
| 02 /
CHEN, Jinxing Wuhan, Hubei 430074 / CN | |||
| 03 /
CAI, Zhengyi Wuhan, Hubei 430074 / CN | Representative(s) | Lippert Stachow Patentanwälte Rechtsanwälte Partnerschaft mbB Frankenforster Strasse 135-137 51427 Bergisch Gladbach / DE | [2021/48] | Application number, filing date | 19950395.4 | 30.10.2019 | [2021/48] | WO2019CN114337 | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2021081804 | Date: | 06.05.2021 | Language: | EN | [2021/18] | Type: | A1 Application with search report | No.: | EP3915130 | Date: | 01.12.2021 | Language: | EN | The application published by WIPO in one of the EPO official languages on 06.05.2021 takes the place of the publication of the European patent application. | [2021/48] | Search report(s) | International search report - published on: | CN | 06.05.2021 | (Supplementary) European search report - dispatched on: | EP | 28.09.2022 | Classification | IPC: | H01J37/21 | [2021/48] | CPC: |
G01R31/2653 (EP,KR,US);
H01J37/244 (EP,KR);
H01L21/681 (CN);
G01R35/005 (EP,KR,US);
G01R31/305 (EP,KR);
H01L21/67288 (KR,US);
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2021/48] | Title | German: | VERFAHREN ZUR KALIBRIERUNG DER VERTIKALITÄT EINES TEILCHENSTRAHLS UND IN EINEM HALBLEITERFERTIGUNGSPROZESS ANGEWENDETES SYSTEM | [2021/48] | English: | METHOD FOR CALIBRATING VERTICALITY OF PARTICLE BEAM AND SYSTEM APPLIED TO SEMICONDUCTOR FABRICATION PROCESS | [2021/48] | French: | PROCÉDÉ D'ÉTALONNAGE DE LA VERTICALITÉ D'UN FAISCEAU DE PARTICULES ET SYSTÈME APPLIQUÉ À UN PROCÉDÉ DE FABRICATION DE SEMI-CONDUCTEUS | [2021/48] | Entry into regional phase | 26.08.2021 | National basic fee paid | 26.08.2021 | Search fee paid | 26.08.2021 | Designation fee(s) paid | 26.08.2021 | Examination fee paid | Examination procedure | 26.08.2021 | Examination requested [2021/48] | 18.04.2023 | Amendment by applicant (claims and/or description) | 19.07.2023 | Despatch of a communication from the examining division (Time limit: M04) | 08.11.2023 | Reply to a communication from the examining division | 23.07.2024 | Date of oral proceedings | Fees paid | Renewal fee | 26.08.2021 | Renewal fee patent year 03 | 25.10.2022 | Renewal fee patent year 04 | 25.10.2023 | Renewal fee patent year 05 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XI]US5583427 (TERUYA ALAN T [US], et al); | [XI]US2002179857 (HIGUCHI AKIRA [JP]); | [XI]US2008088295 (TERUYA ALAN T [US], et al); | [X]US2011073777 (PANDOLFI THOMAS A [US]) |