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EP4009107
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Extract from the Register of European Patents
EP About this file: EP4009107
| EP4009107 - METHOD AND APPARATUS FOR IMAGING NONSTATIONARY OBJECT [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 21.04.2023 Database last updated on 09.09.2024 | |
| Former | The application has been published Status updated on 06.05.2022 | ||
| Former | unknown Status updated on 05.02.2021 | Most recent event Tooltip | 21.04.2023 | Application deemed to be withdrawn | published on 24.05.2023 [2023/21] | Applicant(s) | For all designated states ASML Netherlands B.V. P.O. Box 324 5500 AH Veldhoven / NL | [2022/23] | Inventor(s) | 01 /
VERSCHUREN, Coen, Adrianus 5500 AH Veldhoven / NL | 02 /
ZIJP, Ferry 5500 AH Veldhoven / NL | 03 /
PANDEY, Nitesh 5500 AH Veldhoven / NL | 04 /
KONIJNENBERG, Alexander, Prasetya 5500 AH Veldhoven / NL | [2022/23] | Representative(s) | ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | [2022/23] | Application number, filing date | 20210884.1 | 01.12.2020 | [2022/23] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP4009107 | Date: | 08.06.2022 | Language: | EN | [2022/23] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 25.05.2021 | Classification | IPC: | G03F7/20, G03F9/00, G01N21/956, G02B27/64, G03F1/84 | [2022/23] | CPC: |
G03F7/70633 (EP,IL,KR,US);
G03F7/706851 (KR,US);
G01B11/272 (US);
G01N21/956 (EP,IL,KR,US);
G02B21/26 (EP,IL,KR);
G02B27/646 (EP,IL,KR,US);
G03F1/84 (EP,IL,KR);
G03F7/70625 (EP,IL,KR);
G03F7/7065 (EP,IL,KR,US);
G03F7/706845 (KR);
G03F7/706849 (KR);
G03F9/7088 (EP,IL,KR);
G01N2201/063 (US)
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| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2022/23] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | KH | Not yet paid | MA | Not yet paid | MD | Not yet paid | TN | Not yet paid | Title | German: | VERFAHREN UND VORRICHTUNG ZUR ABBILDUNG EINES NICHTSTATIONÄREN OBJEKTS | [2022/23] | English: | METHOD AND APPARATUS FOR IMAGING NONSTATIONARY OBJECT | [2022/23] | French: | PROCEDE ET APPAREIL D'IMAGERIE D'UN OBJET NON STATIONNAIRE | [2022/23] | Examination procedure | deleted | Deletion: Application deemed to be withdrawn, date of legal effect [2022/23] | 09.12.2022 | Application deemed to be withdrawn, date of legal effect [2023/21] | 05.01.2023 | Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time [2023/21] | Request for further processing for: | 19.03.2021 | Request for further processing filed | 19.03.2021 | Full payment received (date of receipt of payment) Request granted | 30.03.2021 | Decision despatched | Fees paid | Penalty fee | Additional fee for renewal fee | 31.12.2022 | 03 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XA]JP2008241662 (TOPCON CORP); | [YA]US2009141352 (JANNARD JAMES H [US], et al); | [YA]US2016291479 (FEIJEN KIM GERARD [BE], et al) | by applicant | US6952253 | US6961116 | EP1628164 | US7265364 | US7646471 | US2010233600 | US2010328655 | US2011026032 | WO2011012624 | US2011102753 | US2011249244 | US2012044470 | US9134503 | US2015261097 | US2016161863 | WO2016102127 | US2016370717 | US20080451599 | US20080256780 | US20090920968 | US20090922587 | US20090486449 | US20100708678 |