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EP3994002
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EP About this file: EP3994002
| EP3994002 - MULTI-ZONE SILICON NITRIDE WAFER HEATER ASSEMBLY HAVING CORROSION PROTECTIVE LAYER, AND METHODS OF MAKING AND USING THE SAME [Right-click to bookmark this link] | Status | Request for examination was made Status updated on 08.04.2022 Database last updated on 24.08.2024 | |
| Former | The international publication has been made Status updated on 15.01.2021 | Most recent event Tooltip | 12.06.2024 | New entry: Renewal fee paid | Applicant(s) | For all designated states Coorstek Inc. 14143 Denver West Parkway Suite 400 Golden, CO 80401 / US | [2022/19] | Inventor(s) | 01 /
DIVAKAR, Ramesh 17457 W. 78th Drive Arvada, Colorado 80007 / US | 02 /
SIMPSON, Matthew 26247 Bolton Lane Evergreen, Colorado 80439 / US | 03 /
FILER, Alan 2123 Pineywoods St. Mead, Colorado 80542 / US | [2022/19] | Representative(s) | Potter Clarkson Chapel Quarter Mount Street Nottingham NG1 6HQ / GB | [N/P] |
| Former [2022/19] | Potter Clarkson The Belgrave Centre Talbot Street Nottingham NG1 5GG / GB | Application number, filing date | 20834616.3 | 01.07.2020 | [2022/19] | WO2020US40532 | Priority number, date | US201962869388P | 01.07.2019 Original published format: US 201962869388 P | US201962908441P | 30.09.2019 Original published format: US 201962908441 P | [2022/19] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2021003292 | Date: | 07.01.2021 | Language: | EN | [2021/01] | Type: | A1 Application with search report | No.: | EP3994002 | Date: | 11.05.2022 | Language: | EN | The application published by WIPO in one of the EPO official languages on 07.01.2021 takes the place of the publication of the European patent application. | [2022/19] | Search report(s) | International search report - published on: | US | 07.01.2021 | (Supplementary) European search report - dispatched on: | EP | 28.06.2023 | Classification | IPC: | B32B18/00, H05B3/74 | [2022/19] | CPC: |
F27D5/0037 (EP,US);
H05B3/143 (EP,KR);
H01L21/67103 (EP,KR,US);
B32B18/00 (EP);
C04B35/584 (US);
C04B35/6261 (EP,KR);
C04B35/6264 (EP,KR);
C04B35/6303 (US);
C04B35/634 (US);
C04B37/001 (EP,KR);
C04B41/009 (US);
C04B41/4539 (US);
C04B41/5024 (US);
C04B41/87 (US);
H01L21/68757 (EP);
H05B3/12 (US);
H05B3/283 (EP,KR,US);
C04B2235/3224 (EP,KR,US);
C04B2235/3225 (EP,KR);
C04B2235/3418 (EP,KR,US);
C04B2235/3427 (EP,KR);
C04B2235/3847 (EP,KR);
C04B2235/3873 (KR,US);
C04B2235/3891 (EP,KR,US);
C04B2235/6025 (EP,KR,US);
C04B2235/604 (EP,KR);
C04B2235/656 (US);
C04B2235/658 (US);
C04B2235/661 (US);
C04B2235/76 (EP,KR);
C04B2237/341 (EP,KR);
C04B2237/368 (EP);
C04B2237/704 (EP,KR);
H05B2203/037 (KR,US)
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| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2022/19] | Title | German: | MEHRZONEN-SILIZIUMNITRID-WAFERHEIZUNGSANORDNUNG MIT KORROSIONSSCHUTZSCHICHT UND VERFAHREN ZU IHRER HERSTELLUNG UND VERWENDUNG DAVON | [2022/19] | English: | MULTI-ZONE SILICON NITRIDE WAFER HEATER ASSEMBLY HAVING CORROSION PROTECTIVE LAYER, AND METHODS OF MAKING AND USING THE SAME | [2022/19] | French: | ENSEMBLE DE CHAUFFAGE DE TRANCHE AU NITRURE DE SILICIUM MULTIZONE AYANT UNE COUCHE DE PROTECTION CONTRE LA CORROSION, ET PROCÉDÉS DE FABRICATION ET D'UTILISATION DE CELUI-CI | [2022/19] | Entry into regional phase | 30.12.2021 | National basic fee paid | 30.12.2021 | Search fee paid | 30.12.2021 | Designation fee(s) paid | 30.12.2021 | Examination fee paid | Examination procedure | 30.12.2021 | Examination requested [2022/19] | 12.01.2024 | Amendment by applicant (claims and/or description) | 12.01.2024 | Date on which the examining division has become responsible | Fees paid | Renewal fee | 15.06.2022 | Renewal fee patent year 03 | 14.06.2023 | Renewal fee patent year 04 | 12.06.2024 | Renewal fee patent year 05 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XI]EP0929205 (NGK INSULATORS LTD [JP]) [X] 8 * paragraphs [0055] , [0054]; figures 1-5 * [I] 9-15; | [A]US2003138641 (FUKUDOME TAKERO [JP], et al) [A] 1-15 * the whole document *; | [Y]US2016024962 (LUTHRA KRISHAN LAL [US]) [Y] 1-7 * paragraphs [0007] , [0014] , [0061]; figures 1-15 *; | [Y]US2017140902 (SIMPSON MATTHEW [US], et al) [Y] 1-7 * paragraphs [0008] - [0010] - [0130]; figures 1-4 *; | [A]WO2018093414 (COORSTEK INC [US]) [A] 1-15* the whole document * | International search | [XY]US2001006172 (KATSUDA YUJI [JP], et al) [X] 25-30, 37 * entire document * [Y] 31-36, 38, 39; | [Y]US2002098391 (TANAKA KOICHI [JP], et al) [Y] 1-6, 8-23, 31-36, 38, 39 * entire document *; | [Y]US2002125239 (CHEN STEVEN AIHUA [US], et al) [Y] 1-6, 8-23 * entire document *; | [A]US2016108510 (KIRBY GLEN HAROLD [US], et al) [A] 1-39* entire document *; | [Y] - SMEACETTO et al., "Protective coatings for carbon bonded carbon fibre composites", Ceramics International, (20080000), vol. 34, doi:10.1016/j.ceramint.2007.03.012, pages 1297 - 1301, XP022666997 [Y] 3,9 DOI: http://dx.doi.org/10.1016/j.ceramint.2007.03.012 |