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EP4042242
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EP About this file: EP4042242
| EP4042242 - RETICLE POD WITH WINDOW [Right-click to bookmark this link] | Status | Request for examination was made Status updated on 15.07.2022 Database last updated on 18.01.2025 | |
| Former | The international publication has been made Status updated on 17.04.2021 | Most recent event Tooltip | 22.10.2024 | New entry: Renewal fee paid | Applicant(s) | For all designated states Entegris, Inc. 129 Concord Road Billerica, MA 01821 / US | [N/P] |
| Former [2022/33] | For all designated states Entegris, Inc. 129 Concord Road Billerica, MA 01821 / US | Inventor(s) | 01 /
EGGUM, Shawn, D. 6823 Jackson Avenue Lonsdale, MN 55046 / US | 02 /
TIEBEN, Anthony, M. 941 Cobble Stone Lane Belle Plaine, MN 56011 / US | 03 /
WISEMAN, Brian 4545 86th Court Glencoe, MN 55336 / US | 04 /
RASCHKE, Russ, V. 7402 Frontier Trail Chanhassen, MN 55317 / US | 05 /
WANG, Huaping 17557 George Moran Drive Eden Prairie, MN 55347 / US | [2022/33] | Representative(s) | Greaves Brewster LLP Copa House Station Road Cheddar, Somerset BS27 3AH / GB | [2022/33] | Application number, filing date | 20875619.7 | 08.10.2020 | [2022/33] | WO2020US54853 | Priority number, date | US201962913518P | 10.10.2019 Original published format: US 201962913518 P | [2022/33] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2021072126 | Date: | 15.04.2021 | Language: | EN | [2021/15] | Type: | A1 Application with search report | No.: | EP4042242 | Date: | 17.08.2022 | Language: | EN | The application published by WIPO in one of the EPO official languages on 15.04.2021 takes the place of the publication of the European patent application. | [2022/33] | Search report(s) | International search report - published on: | KR | 15.04.2021 | (Supplementary) European search report - dispatched on: | EP | 09.10.2023 | Classification | IPC: | G03F1/66, H01L21/673 | [2023/45] | CPC: |
H01L21/67359 (EP,KR,US);
G03F1/66 (EP,CN,KR,US);
B65D85/48 (US);
H01L21/67253 (KR);
H01L21/67353 (EP);
H01L21/67376 (EP,KR,US);
H01L21/67386 (EP,KR,US)
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| Former IPC [2022/33] | G03F1/66, G03F1/22, H01L21/673 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2022/33] | Title | German: | MASKENHALTER MIT FENSTER | [2022/33] | English: | RETICLE POD WITH WINDOW | [2022/33] | French: | NACELLE DE RÉTICULE À FENÊTRE | [2022/33] | Entry into regional phase | 05.05.2022 | National basic fee paid | 05.05.2022 | Search fee paid | 05.05.2022 | Designation fee(s) paid | 05.05.2022 | Examination fee paid | Examination procedure | 05.05.2022 | Examination requested [2022/33] | 19.04.2024 | Amendment by applicant (claims and/or description) | 19.04.2024 | Date on which the examining division has become responsible | Fees paid | Renewal fee | 21.10.2022 | Renewal fee patent year 03 | 19.10.2023 | Renewal fee patent year 04 | 22.10.2024 | Renewal fee patent year 05 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]US6216873 (FOSNIGHT WILLIAM J [US], et al); | [A]EP1434094 (ASML NETHERLANDS BV [NL]); | [A]US2013126378 (KU CHEN-WEI [TW], et al) | International search | [A]US6948619 (SU WEI-YU [TW], et al); | [A]US2012175279 (KU CHEN-WEI [TW], et al); | [A]US2017294326 (RASCHKE RUSS V [US], et al); | [A]US2018210349 (HSUEH HSIN-MIN [TW], et al); | [A]WO2019018281 (ENTEGRIS INC [US]) | by applicant | US6216873 |