-
EP3878804
European procedure
- EP About this file
- EP Legal status
- EP Federated register
- EP Event history
- EP Citations
- EP Patent family
- EP All documents
Extract from the Register of European Patents
EP Citations: EP3878804
| Cited in | Search | Type: | Patent literature | Publication No.: | US2012018244
[A] (ROBERT PHILIPPE [FR]) [A] 1-15 * figures 2A-2C, 6 * * paragraph [0076] - paragraph [0157] *; | Type: | Patent literature | Publication No.: | WO03056691
[A] (ABB RESEARCH LTD [CH], et al) [A] 1-15 * figures 1-4 * * page 5, line 9 - page 6, line 30 *; | Type: | Patent literature | Publication No.: | DE102012223605
[A] (BOSCH GMBH ROBERT [DE]) [A] 1-15 * figures 1a, 1b,3a, 3b * * paragraphs [0025] , [0 26] , [0 30] *; | Type: | Patent literature | Publication No.: | US2007190680
[A] (FUKUDA HIROSHI [GB], et al) [A] 1 * figure 1A * * paragraphs [0031] , [0 32] *; | Type: | Patent literature | Publication No.: | WO2011158708
[A] (MURATA MANUFACTURING CO [JP], et al) [A] 1 * figures Fig. 3A-3C * | Cited in | by applicant | Type: | Patent literature | Publication No.: | US7803281
| Type: | Patent literature | Publication No.: | EP2264058
| Type: | Non-patent literature | Publication information: | - "Bi-directional Electrostatic Microspeaker with Two Large-Deflection Flexible Membranes Actuated by Single/Dual Electrodes", ROBERTS, ROBERT C. et al., Sensors, IEEE, (20050000), vol. 2005, pages 284 - 287 | Type: | Non-patent literature | Publication information: | - REHDER, J.ROMBACH, P.HANSEN, O., "Magnetic flux generator for balanced membrane loudspeaker", Sensors and Actuators A: Physical, (20020000), vol. 97, no. 8, doi:10.1016/S0924-4247(01)00828-7, pages 61 - 67, XP004361583 | DOI: | http://dx.doi.org/10.1016/S0924-4247(01)00828-7 | Type: | Non-patent literature | Publication information: | - "A novel micromachined loudspeaker topology", NERI, F.DI FAZIO, F.CRESCENZI, R.BALUCANI, M., 61 st Conf. on Electronic Components and Technology, IEEE, (20110000), vol. 2011, pages 1221 - 1227 | Type: | Non-patent literature | Publication information: | - "CMOS-MEMS Acoustic Devices", NEUMANN, J. J.GABRIEL, K. J. et al., Advanced Micro and Nanosystems, Wiley-VCH Verlag, (20050000), vol. 2 | Type: | Non-patent literature | Publication information: | - SCHENK, H. et al., "A resonantly excited 2D-micro-scanning-mirror with large deflection", Sensors and Actuators A, (20010000), vol. 89, doi:10.1016/S0924-4247(00)00529-X, pages 104 - 111, XP004317252 | DOI: | http://dx.doi.org/10.1016/S0924-4247(00)00529-X | Type: | Non-patent literature | Publication information: | - ROSA, M. A. et al., "A novel external electrode configuration for the electrostatic actuation of MEMS based devices", J. Micromech. Microeng., (20040000), doi:10.1088/0960-1317/14/4/003, pages 446 - 451, XP020069645 | DOI: | http://dx.doi.org/10.1088/0960-1317/14/4/003 | Type: | Non-patent literature | Publication information: | - KUMAR, V.SHARMA, N. N., "Design and Validation of Silicon-on-Insulator Based U Shaped thermal Microactuator", Int. J. Materials, Mechanics and Manufacturing, (20140000), vol. 2, no. 1, pages 86 - 91 | Type: | Non-patent literature | Publication information: | - CHENG, MING-CHENG et al., "A lilicon microspeaker for hearing instruments", J. Micromech. Microeng., (20040000), vol. 14, doi:10.1088/0960-1317/14/7/004, pages 859 - 866, XP020069702 | DOI: | http://dx.doi.org/10.1088/0960-1317/14/7/004 |