EP4116772 - ELECTROMAGNETIC MOTOR SYSTEM, POSTION CONTROL SYSTEM, STAGE APPARATUS, LITHOGRAPHIC APPARATUS, METHOD OF DETERMINING A MOTOR-DEPENDENT COMMUTATION MODEL FOR AN ELECTROMAGNETIC MOTOR [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 17.11.2023 Database last updated on 02.09.2024 | |
Former | The application has been published Status updated on 09.12.2022 | Most recent event Tooltip | 17.11.2023 | Application deemed to be withdrawn | published on 20.12.2023 [2023/51] | Applicant(s) | For all designated states ASML Netherlands B.V. P.O. Box 324 5500 AH Veldhoven / NL | [2023/02] | Inventor(s) | 01 /
BUTLER, Hans 5500 AH Veldhoven / NL | [2023/02] | Representative(s) | ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | [2023/02] | Application number, filing date | 21184807.2 | 09.07.2021 | [2023/02] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP4116772 | Date: | 11.01.2023 | Language: | EN | [2023/02] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 04.01.2022 | Classification | IPC: | G03F7/20 | [2023/02] | CPC: |
G03F7/70516 (EP);
G03F7/70758 (EP);
G03F7/70775 (EP)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2023/02] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | KH | Not yet paid | MA | Not yet paid | MD | Not yet paid | TN | Not yet paid | Title | German: | ELEKTROMAGNETISCHES MOTORSYSTEM, POSITIONSSTEUERUNGSSYSTEM, BÜHNENVORRICHTUNG, LITHOGRAPHISCHE VORRICHTUNG, VERFAHREN ZUR BESTIMMUNG EINES MOTORABHÄNGIGEN KOMMUTIERUNGSMODELLS FÜR EINEN ELEKTROMAGNETISCHEN MOTOR | [2023/02] | English: | ELECTROMAGNETIC MOTOR SYSTEM, POSTION CONTROL SYSTEM, STAGE APPARATUS, LITHOGRAPHIC APPARATUS, METHOD OF DETERMINING A MOTOR-DEPENDENT COMMUTATION MODEL FOR AN ELECTROMAGNETIC MOTOR | [2023/02] | French: | SYSTÈME DE MOTEUR ÉLECTROMAGNÉTIQUE, SYSTÈME DE RÉGLAGE DE POSITION, APPAREIL À PLATINE, APPAREIL LITHOGRAPHIQUE, PROCÉDÉ DE DÉTERMINATION D'UN MODÈLE DE COMMUTATION DÉPENDANT DU MOTEUR POUR UN MOTEUR ÉLECTROMAGNÉTIQUE | [2023/02] | Examination procedure | 12.07.2023 | Application deemed to be withdrawn, date of legal effect [2023/51] | 01.08.2023 | Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time [2023/51] | Fees paid | Penalty fee | Additional fee for renewal fee | 31.07.2023 | 03   M06   Not yet paid |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [YA]US2007164697 (COX HENRIKUS H M [NL], et al) [Y] 5 * paragraph [0075] * [A] 1,8,13; | [A]US2008275661 (YANG PAI-HSUEH [US], et al) [A] 1,8,13 * the whole document *; | [XY]WO2011145743 (NIKON CORP [JP], et al) [X] 1-4,6-15 * paragraph [0053] - paragraph [0227] * * figures 1-4,14,15 * [Y] 5; | [A]WO2016005568 (ASML NETHERLANDS BV [NL]) [A] 1,8,13* the whole document * | by applicant | US6020964 | US6952253 | US2007058173 |