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Extract from the Register of European Patents

EP About this file: EP4116772

EP4116772 - ELECTROMAGNETIC MOTOR SYSTEM, POSTION CONTROL SYSTEM, STAGE APPARATUS, LITHOGRAPHIC APPARATUS, METHOD OF DETERMINING A MOTOR-DEPENDENT COMMUTATION MODEL FOR AN ELECTROMAGNETIC MOTOR [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  17.11.2023
Database last updated on 02.09.2024
FormerThe application has been published
Status updated on  09.12.2022
Most recent event   Tooltip17.11.2023Application deemed to be withdrawnpublished on 20.12.2023  [2023/51]
Applicant(s)For all designated states
ASML Netherlands B.V.
P.O. Box 324
5500 AH Veldhoven / NL
[2023/02]
Inventor(s)01 / BUTLER, Hans
5500 AH Veldhoven / NL
 [2023/02]
Representative(s)ASML Netherlands B.V.
Corporate Intellectual Property
P.O. Box 324
5500 AH Veldhoven / NL
[2023/02]
Application number, filing date21184807.209.07.2021
[2023/02]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP4116772
Date:11.01.2023
Language:EN
[2023/02]
Search report(s)(Supplementary) European search report - dispatched on:EP04.01.2022
ClassificationIPC:G03F7/20
[2023/02]
CPC:
G03F7/70516 (EP); G03F7/70758 (EP); G03F7/70775 (EP)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2023/02]
Extension statesBANot yet paid
MENot yet paid
Validation statesKHNot yet paid
MANot yet paid
MDNot yet paid
TNNot yet paid
TitleGerman:ELEKTROMAGNETISCHES MOTORSYSTEM, POSITIONSSTEUERUNGSSYSTEM, BÜHNENVORRICHTUNG, LITHOGRAPHISCHE VORRICHTUNG, VERFAHREN ZUR BESTIMMUNG EINES MOTORABHÄNGIGEN KOMMUTIERUNGSMODELLS FÜR EINEN ELEKTROMAGNETISCHEN MOTOR[2023/02]
English:ELECTROMAGNETIC MOTOR SYSTEM, POSTION CONTROL SYSTEM, STAGE APPARATUS, LITHOGRAPHIC APPARATUS, METHOD OF DETERMINING A MOTOR-DEPENDENT COMMUTATION MODEL FOR AN ELECTROMAGNETIC MOTOR[2023/02]
French:SYSTÈME DE MOTEUR ÉLECTROMAGNÉTIQUE, SYSTÈME DE RÉGLAGE DE POSITION, APPAREIL À PLATINE, APPAREIL LITHOGRAPHIQUE, PROCÉDÉ DE DÉTERMINATION D'UN MODÈLE DE COMMUTATION DÉPENDANT DU MOTEUR POUR UN MOTEUR ÉLECTROMAGNÉTIQUE[2023/02]
Examination procedure12.07.2023Application deemed to be withdrawn, date of legal effect  [2023/51]
01.08.2023Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time  [2023/51]
Fees paidPenalty fee
Additional fee for renewal fee
31.07.202303   M06   Not yet paid
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Documents cited:Search[YA]US2007164697  (COX HENRIKUS H M [NL], et al) [Y] 5 * paragraph [0075] * [A] 1,8,13;
 [A]US2008275661  (YANG PAI-HSUEH [US], et al) [A] 1,8,13 * the whole document *;
 [XY]WO2011145743  (NIKON CORP [JP], et al) [X] 1-4,6-15 * paragraph [0053] - paragraph [0227] * * figures 1-4,14,15 * [Y] 5;
 [A]WO2016005568  (ASML NETHERLANDS BV [NL]) [A] 1,8,13* the whole document *
by applicantUS6020964
 US6952253
 US2007058173
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.