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EP3943639
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EP About this file: EP3943639
| EP3943639 - DEVICE FOR PLASMA-ASSISTED CHEMICAL VAPOUR DEPOSITION BY ALLOWING A DEPOSIT ON THE PLATE EDGES [Right-click to bookmark this link] | Status | Request for examination was made Status updated on 24.12.2021 Database last updated on 14.11.2024 | Most recent event Tooltip | 27.09.2024 | Change - applicant | published on 30.10.2024 [2024/44] | Applicant(s) | For all designated states Commissariat à l'Energie Atomique et aux Energies Alternatives 25 Rue Leblanc Bat Le Ponant 75015 Paris / FR | [2024/44] |
| Former [2022/04] | For all designated states Commissariat à l'énergie atomique et aux énergies alternatives Bâtiment le Ponant 25, rue Leblanc 75015 Paris / FR | Inventor(s) | 01 /
MONNA, Rémi 38054 GRENOBLE CEDEX 09 / FR | 02 /
DESRUES, Thibaut 38054 GRENOBLE CEDEX 09 / FR | 03 /
VACHEZ, Alexandre 38054 GRENOBLE CEDEX 09 / FR | [2022/04] | Representative(s) | Brevalex Tour Trinity 1 B Place de la Défense 92400 Courbevoie / FR | [N/P] |
| Former [2022/04] | Brevalex 95, rue d'Amsterdam 75378 Paris Cedex 8 / FR | Application number, filing date | 21187013.4 | 21.07.2021 | [2022/04] | Priority number, date | FR20200007697 | 22.07.2020 Original published format: FR 2007697 | [2022/04] | Filing language | FR | Procedural language | FR | Publication | Type: | A1 Application with search report | No.: | EP3943639 | Date: | 26.01.2022 | Language: | FR | [2022/04] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 05.11.2021 | Classification | IPC: | C23C16/458, C23C16/509, H01J37/32, H01L21/673, H01L21/677 | [2022/04] | CPC: |
C23C16/4584 (EP);
C23C16/509 (EP);
H01J37/32091 (EP);
H01J37/32366 (EP);
H01J37/32403 (EP);
H01J37/32568 (EP);
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2022/04] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | KH | Not yet paid | MA | Not yet paid | MD | Not yet paid | TN | Not yet paid | Title | German: | VORRICHTUNG ZUR PLASMAGESTÜTZTEN CHEMISCHEN AUFDAMPFUNG, DIE EINE BESCHICHTUNG DER PLATTENRÄNDER ERMÖGLICHT | [2022/04] | English: | DEVICE FOR PLASMA-ASSISTED CHEMICAL VAPOUR DEPOSITION BY ALLOWING A DEPOSIT ON THE PLATE EDGES | [2022/04] | French: | DISPOSITIF DE DEPOT CHIMIQUE EN PHASE VAPEUR ASSISTE PAR PLASMA PERMETTANT UN DEPOT SUR LES BORDS DE PLAQUE | [2022/04] | Examination procedure | 21.07.2021 | Examination requested [2022/04] | 26.07.2022 | Amendment by applicant (claims and/or description) | Fees paid | Renewal fee | 18.07.2023 | Renewal fee patent year 03 | 24.07.2024 | Renewal fee patent year 04 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [Y]WO9936587 (TORREX EQUIPMENT CORP [US]) [Y] 11* page 12, lines 8,9 *; | [IY]US2005211264 (KOSTENKO JOHN W [US], et al) [I] 1 * page 2, paragraph 23 - page 3, paragraph 25; figure 1B * [Y] 5,11; | [XYI]EP2730677 (KOBE STEEL LTD [JP]) [X] 12,14 * column 5, lines 3-15 - column 6, lines 10-20 * * column 7, lines 25-30 - column 8, lines 39-45; figures 1,3 * [Y] 5,11 [I] 1-4,6-10,13; | [Y]FR3089522 (SEMCO TECH SAS [FR]) [Y] 5 * page 5, paragraphs 28,29; figure 3 * |