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EP4154291
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EP About this file: EP4154291
| EP4154291 - CHARGED PARTICLE BEAM DEVICE AND METHOD FOR INSPECTING AND/OR IMAGING A SAMPLE [Right-click to bookmark this link] | Status | Examination is in progress Status updated on 05.04.2024 Database last updated on 18.11.2024 | |
| Former | Request for examination was made Status updated on 24.02.2023 | ||
| Former | The international publication has been made Status updated on 26.11.2021 | ||
| Former | unknown Status updated on 23.03.2021 | Most recent event Tooltip | 30.08.2024 | New entry: Reply to examination report | Applicant(s) | For all designated states ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Ammerthalstrasse 20 85551 Heimstetten / DE | [2023/13] | Inventor(s) | 01 /
WINKLER, Dieter 81737 München / DE | 02 /
WÖLLERT, Bernd 85570 Markt Schwaben / DE | 03 /
SCHABINGER, Birgit 85586 Poing / DE | [2023/13] | Representative(s) | Zimmermann & Partner Patentanwälte mbB Postfach 330 920 80069 München / DE | [2023/13] | Application number, filing date | 21711516.1 | 09.03.2021 | [2023/13] | WO2021EP55856 | Priority number, date | US202016878271 | 19.05.2020 Original published format: US202016878271 | [2023/13] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2021233584 | Date: | 25.11.2021 | Language: | EN | [2021/47] | Type: | A1 Application with search report | No.: | EP4154291 | Date: | 29.03.2023 | Language: | EN | The application published by WIPO in one of the EPO official languages on 25.11.2021 takes the place of the publication of the European patent application. | [2023/13] | Search report(s) | International search report - published on: | EP | 25.11.2021 | (Supplementary) European search report - dispatched on: | EP | 08.04.2024 | Classification | IPC: | H01J37/04, H01J37/244 | [2023/13] | CPC: |
H01J37/244 (EP,KR,US);
H01J37/04 (EP,KR);
H01J37/145 (KR,US);
H01J37/28 (KR,US);
H01J37/32568 (US);
H01J2237/04756 (EP,KR);
H01J2237/0492 (US);
H01J2237/24465 (EP,KR);
H01J2237/24475 (EP,KR);
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2023/13] | Title | German: | LADUNGSTEILCHENSTRAHLVORRICHTUNG UND VERFAHREN ZUR UNTERSUCHUNG UND/ODER ABBILDUNG EINER PROBE | [2023/13] | English: | CHARGED PARTICLE BEAM DEVICE AND METHOD FOR INSPECTING AND/OR IMAGING A SAMPLE | [2023/13] | French: | DISPOSITIF À FAISCEAU DE PARTICULES CHARGÉES ET PROCÉDÉ D'INSPECTION ET/OU D'IMAGERIE D'UN ÉCHANTILLON | [2023/13] | Entry into regional phase | 22.11.2022 | National basic fee paid | 22.11.2022 | Designation fee(s) paid | 22.11.2022 | Examination fee paid | Examination procedure | 22.11.2022 | Examination requested [2023/13] | 22.11.2022 | Date on which the examining division has become responsible | 18.04.2023 | Amendment by applicant (claims and/or description) | 08.04.2024 | Despatch of a communication from the examining division to which search results under Rule 164(2) EPC are annexed (Time limit: M05) [2024/19] | 08.04.2024 | Despatch of a communication from the examining division (Time limit: M05) | 29.08.2024 | Reply to a communication from the examining division | Fees paid | Renewal fee | 22.03.2023 | Renewal fee patent year 03 | 20.03.2024 | Renewal fee patent year 04 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [A]US6407387 (FROSIEN JURGEN [DE], et al); | [Y]US2008283747 (KAWAMATA SHIGERU [JP], et al); | [XY]US2017047192 (FROSIEN JÜRGEN [DE]) |