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Extract from the Register of European Patents

EP About this file: EP4158682

EP4158682 - TOOL FOR HANDLING SUBSTRATES WITH OVERHEAD SCREEN AND RELEVANT HANDLING METHODS AND EPITAXIAL REACTOR [Right-click to bookmark this link]
StatusRequest for examination was made
Status updated on  03.03.2023
Database last updated on 11.09.2024
FormerThe international publication has been made
Status updated on  03.12.2021
Formerunknown
Status updated on  11.06.2021
Most recent event   Tooltip18.06.2024Change - representative 
Applicant(s)For all designated states
LPE S.p.A.
Via Falzarego, 8
20021 Baranzate (MI) / IT
[2023/14]
Inventor(s)01 / PRETI, Silvio
20021 Baranzate (MI) / IT
02 / POLLI, Stefano
20021 Baranzate (MI) / IT
 [2023/14]
Representative(s)De Gregori, Antonella, et al
BIRD & BIRD SOCIETA TRA AVVOCATI S.R.L.
Via Porlezza, 12
20123 Milano / IT
[N/P]
Former [2023/14]De Ros, Alberto, et al
Studio Legale Bird & Bird
Via Porlezza, 12
20123 Milano / IT
Application number, filing date21729646.627.05.2021
[2023/14]
WO2021IB54627
Priority number, dateIT2020001280529.05.2020         Original published format: IT202000012805
[2023/14]
Filing languageIT
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2021240418
Date:02.12.2021
Language:EN
[2021/48]
Type: A1 Application with search report 
No.:EP4158682
Date:05.04.2023
Language:EN
The application published by WIPO in one of the EPO official languages on 02.12.2021 takes the place of the publication of the European patent application.
[2023/14]
Search report(s)International search report - published on:EP02.12.2021
ClassificationIPC:H01L21/67, H01L21/677, H01L21/687, H01L21/673
[2023/14]
CPC:
H01L21/68707 (EP,KR,US); H01L21/67742 (EP,KR); H01L21/67103 (EP,KR);
H01L21/67109 (EP,KR); H01L21/67343 (KR); H01L21/67346 (EP)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2023/14]
TitleGerman:WERKZEUG ZUR HANDHABUNG VON SUBSTRATEN MIT OVERHEAD-SCHIRM UND RELEVANTE HANDHABUNGSVERFAHREN UND EPITAXIEREAKTOR[2023/14]
English:TOOL FOR HANDLING SUBSTRATES WITH OVERHEAD SCREEN AND RELEVANT HANDLING METHODS AND EPITAXIAL REACTOR[2023/14]
French:OUTIL POUR MANIPULER DES SUBSTRATS COMPRENANT UN ÉCRAN EN HAUTEUR ET PROCÉDÉS DE MANIPULATION ASSOCIÉ ET RÉACTEUR ÉPITAXIAL[2023/14]
Entry into regional phase16.11.2022National basic fee paid 
16.11.2022Designation fee(s) paid 
16.11.2022Examination fee paid 
Examination procedure16.11.2022Examination requested  [2023/14]
16.11.2022Date on which the examining division has become responsible
10.07.2023Amendment by applicant (claims and/or description)
Fees paidRenewal fee
23.05.2023Renewal fee patent year 03
28.05.2024Renewal fee patent year 04
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Cited inInternational search[YA]US6217663  (INOKUCHI YASUHIRO [JP], et al) [Y] 14,15 * column 6, line 66 - column 7, line 60; figures 4A,4B,5A,5B,6 *[A] 1;
 [XYI]US2017125272  (VAN GOGH JAMES STEPHEN [US], et al) [X] 1-5,7,8,10-13 * paragraphs [0115] , [ 174] - [0182]; figures 6-10,62-65 * [Y] 14,15 [I] 6,9
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.