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EP4111263
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EP About this file: EP4111263
| EP4111263 - METHODS AND APPARATUS OF PROCESSING TRANSPARENT SUBSTRATES [Right-click to bookmark this link] | Status | Request for examination was made Status updated on 02.12.2022 Database last updated on 27.07.2024 | |
| Former | The international publication has been made Status updated on 03.09.2021 | Most recent event Tooltip | 06.06.2024 | Supplementary search report | published on 03.07.2024 [2024/27] | Applicant(s) | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, California 95054 / US | [2023/01] | Inventor(s) | 01 /
XU, Yongan c/o Applied Materials, Inc., Law Dept., M/S 1269 3050 Bowers Avenue Santa Clara, California 95054 / US | 02 /
CHEN, Chien-An c/o Applied Materials, Inc., Law Dept., M/S 1269 3050 Bowers Avenue Santa Clara, California 95054 / US | 03 /
GODET, Ludovic c/o Applied Materials, Inc., Law Dept., M/S 1269 3050 Bowers Avenue Santa Clara, California 95054 / US | [2023/01] | Representative(s) | Zimmermann & Partner Patentanwälte mbB Postfach 330 920 80069 München / DE | [2023/01] | Application number, filing date | 21759756.6 | 22.01.2021 | [2023/01] | WO2021US14589 | Priority number, date | US202016803956 | 27.02.2020 Original published format: US202016803956 | [2023/01] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2021173271 | Date: | 02.09.2021 | Language: | EN | [2021/35] | Type: | A1 Application with search report | No.: | EP4111263 | Date: | 04.01.2023 | Language: | EN | The application published by WIPO in one of the EPO official languages on 02.09.2021 takes the place of the publication of the European patent application. | [2023/01] | Search report(s) | International search report - published on: | KR | 02.09.2021 | (Supplementary) European search report - dispatched on: | EP | 05.06.2024 | Classification | IPC: | G03F7/20, G03F7/09, H01L21/027, H01L21/033, H01L21/308, C03C17/23, C03C17/34 | [2024/27] | CPC: |
C03C17/3411 (EP,KR);
C03C17/23 (EP,KR);
C03C17/3639 (KR,US);
C03C17/3417 (EP,KR);
C03C17/3435 (EP,KR);
C03C17/3626 (US);
C03C17/3636 (KR,US);
C03C17/3655 (KR,US);
C03C17/3665 (KR);
C03C17/38 (KR,US);
G03F7/0005 (KR);
C03C2217/213 (KR,US);
|
| Former IPC [2023/01] | G03F7/20, G03F7/09, H01L21/027, H01L21/033, H01L21/308 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2023/01] | Title | German: | VERFAHREN UND VORRICHTUNG ZUR BEHANDLUNG VON TRANSPARENTEN SUBSTRATEN | [2023/01] | English: | METHODS AND APPARATUS OF PROCESSING TRANSPARENT SUBSTRATES | [2023/01] | French: | PROCÉDÉS ET APPAREIL DE TRAITEMENT DE SUBSTRATS TRANSPARENTS | [2023/01] | Entry into regional phase | 05.08.2022 | National basic fee paid | 05.08.2022 | Search fee paid | 05.08.2022 | Designation fee(s) paid | 05.08.2022 | Examination fee paid | Examination procedure | 05.08.2022 | Examination requested [2023/01] | 21.03.2023 | Amendment by applicant (claims and/or description) | Fees paid | Renewal fee | 19.01.2023 | Renewal fee patent year 03 | 23.01.2024 | Renewal fee patent year 04 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [IA]US2005238922 (KINOSHITA TAKERU [JP], et al); | [XI]US7807248 (GERMAN JOHN R [US], et al); | [A]WO2017090485 (HOYA CORP [JP]) | International search | [A]KR20120101258 (AMKOR TECHNOLOGY INC [KR]); | [A]US2014033974 (HONG JAE-MIN [KR], et al); | [Y]US2017023856 (OKUBO YASUSHI [JP], et al); | [A]KR20190044246 (LG DISPLAY CO LTD [KR]); | [A]US2020058901 (CHOI YOUNGSEO [KR], et al) |