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Extract from the Register of European Patents

EP About this file: EP4214553

EP4214553 - TECHNIQUES FOR MANUFACTURING VARIABLE ETCH DEPTH GRATINGS USING GRAY-TONE LITHOGRAPHY [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  14.06.2024
Database last updated on 11.09.2024
FormerRequest for examination was made
Status updated on  23.06.2023
FormerThe international publication has been made
Status updated on  26.03.2022
Formerunknown
Status updated on  09.09.2021
Most recent event   Tooltip14.06.2024Application deemed to be withdrawnpublished on 17.07.2024  [2024/29]
Applicant(s)For all designated states
META PLATFORMS TECHNOLOGIES, LLC
1601 Willow Road
Menlo Park, CA 94025 / US
[2023/30]
Inventor(s)01 / FRANKE, Elliott
Menlo Park, CA 94025 / US
02 / MOHANTY, Nihar Ranjan
Menlo Park, CA 94025 / US
03 / LANE, Austin
Menlo Park, CA 94025 / US
04 / COLBURN, Matthew E.
Menlo Park, CA 94025 / US
05 / VORA, Ankit
Menlo Park, CA 94025 / US
 [2023/30]
Representative(s)Murgitroyd & Company
165-169 Scotland Street
Glasgow G5 8PL / GB
[N/P]
Former [2023/30]Murgitroyd & Company
Murgitroyd House
165-169 Scotland Street
Glasgow G5 8PL / GB
Application number, filing date21762910.406.08.2021
[2023/30]
WO2021US45043
Priority number, dateUS20201702407217.09.2020         Original published format: US202017024072
[2023/30]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2022060485
Date:24.03.2022
Language:EN
[2022/12]
Type: A1 Application with search report 
No.:EP4214553
Date:26.07.2023
Language:EN
The application published by WIPO in one of the EPO official languages on 24.03.2022 takes the place of the publication of the European patent application.
[2023/30]
Search report(s)International search report - published on:EP24.03.2022
ClassificationIPC:G02B5/18, G02B27/01
[2023/30]
CPC:
G02B5/1857 (EP,KR,US); G02B27/0101 (EP,KR); G02B27/0172 (KR,US);
G03F7/2022 (KR,US); G03F7/70283 (KR,US); G02B2027/0178 (KR,US)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2023/30]
TitleGerman:VERFAHREN ZUR HERSTELLUNG VON GITTERN MIT VARIABLER ÄTZTIEFE UNTER VERWENDUNG VON GRAUTONLITHOGRAPHIE[2023/30]
English:TECHNIQUES FOR MANUFACTURING VARIABLE ETCH DEPTH GRATINGS USING GRAY-TONE LITHOGRAPHY[2023/30]
French:TECHNIQUES DE FABRICATION DE RÉSEAUX À PROFONDEUR DE GRAVURE VARIABLE FAISANT APPEL À LA LITHOGRAPHIE À TONS DE GRIS[2023/30]
Entry into regional phase21.02.2023National basic fee paid 
21.02.2023Designation fee(s) paid 
21.02.2023Examination fee paid 
Examination procedure21.02.2023Examination requested  [2023/30]
21.02.2023Date on which the examining division has become responsible
16.05.2023Amendment by applicant (claims and/or description)
01.03.2024Application deemed to be withdrawn, date of legal effect  [2024/29]
22.03.2024Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time  [2024/29]
Fees paidPenalty fee
Additional fee for renewal fee
31.08.202303   M06   Not yet paid
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Cited inInternational search[Y]US2002122255  (OGUSU MAKOTO [JP], et al) [Y] 4 * paragraphs [0088] - [0107] - [0127]; figures 2, 8 *;
 [Y]EP2386841  (SEIKO EPSON CORP [JP]) [Y] 9* paragraph [0065] - paragraph [0077]; figure 8 *;
 [A]WO2018220270  (DISPELIX OY [FI]) [A] 1 * pages 2,8 - page 10; figures 1A-1C, 2A-2C *;
 [XYI]US2020142120  (MEYER TIMMERMAN THIJSSEN RUTGER [US], et al) [X] 1,2,10 * paragraphs [0007] - [0010] - [0030] - paragraph [0041]; figures 2-4 * [Y] 4,9 [I] 3,5-8
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.