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EP4143873
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Extract from the Register of European Patents
EP About this file: EP4143873
| EP4143873 - RETICLE POD SEALING [Right-click to bookmark this link] | Status | Request for examination was made Status updated on 03.02.2023 Database last updated on 14.11.2024 | |
| Former | The international publication has been made Status updated on 05.11.2021 | Most recent event Tooltip | 08.05.2024 | Supplementary search report | published on 05.06.2024 [2024/23] | Applicant(s) | For all designated states Entegris, Inc. 129 Concord Road Billerica, MA 01821 / US | [2023/10] | Inventor(s) | 01 /
RASCHKE, Russ V. Chanhassen, Minnesota 55317 / US | 02 /
WANG, Huaping Eden Prairie, Minnesota 55347 / US | [2023/10] | Representative(s) | Greaves Brewster LLP Copa House Station Road Cheddar, Somerset BS27 3AH / GB | [2023/10] | Application number, filing date | 21795843.8 | 29.04.2021 | [2023/10] | WO2021US29943 | Priority number, date | US202063017825P | 30.04.2020 Original published format: US 202063017825 P | [2023/10] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2021222603 | Date: | 04.11.2021 | Language: | EN | [2021/44] | Type: | A1 Application with search report | No.: | EP4143873 | Date: | 08.03.2023 | Language: | EN | The application published by WIPO in one of the EPO official languages on 04.11.2021 takes the place of the publication of the European patent application. | [2023/10] | Search report(s) | International search report - published on: | KR | 04.11.2021 | (Supplementary) European search report - dispatched on: | EP | 07.05.2024 | Classification | IPC: | H01L21/673, G03F1/66 | [2023/10] | CPC: |
H01L21/67353 (EP,KR);
G03F1/66 (EP,KR,US);
H01L21/67376 (EP,KR,US);
B65D85/48 (US);
H01L21/67346 (EP);
H01L21/67359 (EP,KR,US);
H01L21/67366 (EP)
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| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2023/10] | Title | German: | RETIKEL-POD-ABDICHTUNG | [2023/10] | English: | RETICLE POD SEALING | [2023/10] | French: | ÉTANCHÉIFICATION DE CELLULE À RÉTICULE | [2023/10] | Entry into regional phase | 25.11.2022 | National basic fee paid | 25.11.2022 | Search fee paid | 25.11.2022 | Designation fee(s) paid | 25.11.2022 | Examination fee paid | Examination procedure | 25.11.2022 | Examination requested [2023/10] | 24.02.2023 | Amendment by applicant (claims and/or description) | Fees paid | Renewal fee | 20.04.2023 | Renewal fee patent year 03 | 18.04.2024 | Renewal fee patent year 04 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]US5725100 (YAMADA NAOKI [JP]); | [YA]US2005274645 (HASEGAWA AKIHIRO [JP], et al); | [YA]US2009206001 (SASAKI SHIGENOBU [JP], et al); | [YA]US2012037522 (CHIU MING-CHIEN [TW], et al); | [YA]US2014116920 (LEE TSUNG-YEN [TW], et al); | [YA]US2020083077 (OGAWA OSAMU [JP]) | International search | [Y]US2001010292 (SHIRASAKI TORU [JP]); | [A]KR20060058021 (MIRAIAL CO LTD [JP]); | [Y]US2010017346 (EXTRAND CHARLES W [US], et al); | [A]US2012037522 (CHIU MING-CHIEN [TW], et al); | [Y]US2018210349 (HSUEH HSIN-MIN [TW], et al) |