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Extract from the Register of European Patents

EP About this file: EP4168832

EP4168832 - PROTECTION OF OPTICAL MATERIALS OF OPTICAL COMPONENTS FROM RADIATION DEGRADATION [Right-click to bookmark this link]
StatusRequest for examination was made
Status updated on  24.03.2023
Database last updated on 03.01.2025
FormerThe international publication has been made
Status updated on  05.03.2022
Most recent event   Tooltip28.08.2024New entry: Renewal fee paid 
Applicant(s)For all designated states
KLA Corporation
Legal Department
One Technology Drive
Milpitas, California 95035 / US
For all designated states
Carl Zeiss SMT GmbH
Rudolf-Eber-Strasse 2
73447 Oberkochen / DE
[2023/17]
Inventor(s)01 / BUTAEVA, Evgeniia
San Jose, California 95134 / US
02 / DELGADO, Gildardo
Livermore, California 94550 / US
03 / CHEN, Grace, H.
Los Gatos, California 95030 / US
04 / SAVEE, John
San Francisco, California 94131 / US
05 / DERSTINE, Matthew
Los Gatos, California 95033 / US
06 / ZHUANG, Guorong, Vera
Ann Arbor, Michigan 48105 / US
07 / LOPEZ LOPEZ, Gary, V.
Sunnyvale, California 94086 / US
08 / LANGE, Felix
89537 Giengen an der Brenz / DE
09 / WALTER, Larissa
73434 Aalen / DE
 [2023/17]
Representative(s)FRKelly
Waterways House
Grand Canal Quay
Dublin D02 PD39 / IE
[N/P]
Former [2023/17]FRKelly
27 Clyde Road
Dublin D04 F838 / IE
Application number, filing date21862609.124.08.2021
[2023/17]
WO2021US47423
Priority number, dateUS202063070842P27.08.2020         Original published format: US 202063070842 P
US20211739396804.08.2021         Original published format: US202117393968
[2023/17]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2022046823
Date:03.03.2022
Language:EN
[2022/09]
Type: A1 Application with search report 
No.:EP4168832
Date:26.04.2023
Language:EN
The application published by WIPO in one of the EPO official languages on 03.03.2022 takes the place of the publication of the European patent application.
[2023/17]
Search report(s)International search report - published on:KR03.03.2022
(Supplementary) European search report - dispatched on:EP08.07.2024
ClassificationIPC:G02B1/02, G02B1/10, G02B1/14, G02B5/08
[2024/32]
CPC:
G02B1/14 (EP,KR,US); C01F5/28 (US); C03C17/06 (KR);
C08J7/06 (KR); G02B5/0891 (EP)
Former IPC [2023/17]G02B1/02, G02B1/10
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2023/17]
TitleGerman:SCHUTZ VON OPTISCHEN MATERIALIEN VON OPTISCHEN KOMPONENTEN VOR STRAHLUNGSABBAU[2023/17]
English:PROTECTION OF OPTICAL MATERIALS OF OPTICAL COMPONENTS FROM RADIATION DEGRADATION[2023/17]
French:PROTECTION DE MATÉRIAUX OPTIQUES DE COMPOSANTS OPTIQUES CONTRE LA DÉGRADATION PAR RAYONNEMENT[2023/17]
Entry into regional phase19.01.2023National basic fee paid 
19.01.2023Search fee paid 
19.01.2023Designation fee(s) paid 
19.01.2023Examination fee paid 
Examination procedure19.01.2023Examination requested  [2023/17]
09.08.2023Amendment by applicant (claims and/or description)
Fees paidRenewal fee
28.08.2023Renewal fee patent year 03
27.08.2024Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[X]JP2003014921  (NIKON CORP);
 [X]US2003219056  (YAGER THOMAS A [US], et al);
 [X]US2006046099  (MAIER ROBERT L [US], et al);
 [X]US8169705  (CANGEMI MICHAEL J [US], et al);
International search[A]US2004121243  (CHANDHOK MANISH [US], et al);
 [A]KR20070084558  (BOC GROUP PLC [GB]);
 [Y]US2012250144  (EHM DIRK HEINRICH [DE], et al);
 [Y]US2014158914  (KLEBANOFF LEONARD E [US], et al);
 [A]US2016187543  (BEKMAN HERMANUS HENDRICUS PETRUS THEODORUS [NL], et al)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.