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Extract from the Register of European Patents

EP About this file: EP4214350

EP4214350 - EVAPORATION APPARATUS, VAPOR DEPOSITION APPARATUS, AND EVAPORATION METHOD [Right-click to bookmark this link]
StatusRequest for examination was made
Status updated on  23.06.2023
Database last updated on 02.11.2024
FormerThe international publication has been made
Status updated on  26.03.2022
Most recent event   Tooltip19.09.2024New entry: Renewal fee paid 
Applicant(s)For all designated states
Applied Materials, Inc.
3050 Bowers Avenue
Santa Clara, California 95054 / US
[2023/30]
Inventor(s)01 / BUSCHBECK, Wolfgang
63454 Hanau / DE
02 / BANGERT, Stefan
36396 Steinau / DE
 [2023/30]
Representative(s)Zimmermann & Partner Patentanwälte mbB
Postfach 330 920
80069 München / DE
[2023/30]
Application number, filing date21869978.301.09.2021
[2023/30]
WO2021US48677
Priority number, dateUS20201702488218.09.2020         Original published format: US202017024882
[2023/30]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2022060570
Date:24.03.2022
Language:EN
[2022/12]
Type: A1 Application with search report 
No.:EP4214350
Date:26.07.2023
Language:EN
The application published by WIPO in one of the EPO official languages on 24.03.2022 takes the place of the publication of the European patent application.
[2023/30]
Search report(s)International search report - published on:KR24.03.2022
ClassificationIPC:C23C14/24, C23C14/22, C23C14/56, C23C14/14, H01M4/04
[2023/30]
CPC:
C23C14/243 (EP,KR,US); C23C14/24 (US); C23C14/14 (EP,KR,US);
C23C14/228 (KR); C23C14/246 (EP,KR,US); C23C14/562 (EP,KR,US);
Y02E60/10 (EP) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2023/30]
TitleGerman:VERDAMPFUNGSVORRICHTUNG, DAMPFABSCHEIDUNGSVORRICHTUNG UND VERDAMPFUNGSVERFAHREN[2023/30]
English:EVAPORATION APPARATUS, VAPOR DEPOSITION APPARATUS, AND EVAPORATION METHOD[2023/30]
French:APPAREIL D'ÉVAPORATION, APPAREIL DE DÉPÔT EN PHASE VAPEUR ET PROCÉDÉ D'ÉVAPORATION[2023/30]
Entry into regional phase03.03.2023National basic fee paid 
03.03.2023Search fee paid 
03.03.2023Designation fee(s) paid 
03.03.2023Examination fee paid 
Examination procedure03.03.2023Examination requested  [2023/30]
23.10.2023Amendment by applicant (claims and/or description)
Fees paidRenewal fee
20.09.2023Renewal fee patent year 03
19.09.2024Renewal fee patent year 04
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Cited inInternational search[A]JP2002150552  (SONY CORP) [A] 1-20* figures 1, 5 *;
 [Y]WO2005116290  (SIDRABE INC [LV], et al) [Y] 13 * page 4, lines 10-13 and figure 1 *;
 [A]US2010196623  (HONDA KAZUYOSHI [JP], et al) [A] 1-20 * claim 1 and figure 4 *;
 [A]WO2012095489  (ARCELORMITTAL INVESTIGACION Y DESARROLLO [ES], et al) [A] 1-20 * abstract and figure 1 *;
 [XY]KR101713112B  (SNU PRECISION CO LTD [KR]) [X] 1-12,14-20 * paragraphs [0028], [0032], [0034], claim 1 and figures 1-3, 5 * [Y] 13
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.