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Extract from the Register of European Patents

EP About this file: EP4036647

EP4036647 - MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD [Right-click to bookmark this link]
StatusThe patent has been granted
Status updated on  06.10.2023
Database last updated on 31.08.2024
FormerGrant of patent is intended
Status updated on  18.05.2023
FormerRequest for examination was made
Status updated on  10.02.2023
FormerThe application has been published
Status updated on  01.07.2022
Most recent event   Tooltip02.08.2024Lapse of the patent in a contracting state
New state(s): SK		published on 04.09.2024 [2024/36]
Applicant(s)For all designated states
CANON KABUSHIKI KAISHA
30-2 SHIMOMARUKO 3-CHOME
OHTA-KU
Tokyo 146-8501 / JP
[2022/31]
Inventor(s)01 / YAMAGUCHI, Wataru
Ohta-ku, Tokyo, 146-8501 / JP
 [2022/31]
Representative(s)TBK
Bavariaring 4-6
80336 München / DE
[2022/31]
Application number, filing date22150145.504.01.2022
[2022/31]
Priority number, dateJP2021001359729.01.2021         Original published format: JP 2021013597
[2022/31]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP4036647
Date:03.08.2022
Language:EN
[2022/31]
Type: B1 Patent specification 
No.:EP4036647
Date:08.11.2023
Language:EN
[2023/45]
Search report(s)(Supplementary) European search report - dispatched on:EP04.07.2022
ClassificationIPC:G03F7/20, G03F9/00
[2022/31]
CPC:
G03F7/70616 (EP); G01B11/03 (KR); G03F9/7003 (CN);
G03F9/7088 (EP,CN,KR,US); G01B11/026 (KR); G01B11/25 (KR);
G03F7/70633 (EP,US); G03F7/70683 (US); G03F9/7046 (EP,US);
G03F9/7049 (CN); G03F9/7076 (US); G03F9/7092 (EP,US);
G06T7/0004 (US); G06T2207/30148 (US) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2023/11]
Former [2022/31]AL,  AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MK,  MT,  NL,  NO,  PL,  PT,  RO,  RS,  SE,  SI,  SK,  SM,  TR 
TitleGerman:MESSGERÄT, LITHOGRAPHIEGERÄT UND VERFAHREN ZUR HERSTELLUNG EINES ARTIKELS[2022/31]
English:MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD[2022/31]
French:APPAREIL DE MESURE, APPAREIL DE LITHOGRAPHIE ET PROCÉDÉ DE FABRICATION D'ARTICLE[2022/31]
Examination procedure15.12.2022Amendment by applicant (claims and/or description)
03.02.2023Examination requested  [2023/11]
03.02.2023Date on which the examining division has become responsible
19.05.2023Communication of intention to grant the patent
28.09.2023Fee for grant paid
28.09.2023Fee for publishing/printing paid
28.09.2023Receipt of the translation of the claim(s)
Divisional application(s)EP23196503.9  / EP4283400
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT08.11.2023
CZ08.11.2023
DK08.11.2023
EE08.11.2023
ES08.11.2023
HR08.11.2023
LT08.11.2023
LV08.11.2023
NL08.11.2023
PL08.11.2023
RO08.11.2023
RS08.11.2023
SE08.11.2023
SK08.11.2023
SM08.11.2023
BG08.02.2024
NO08.02.2024
GR09.02.2024
IS08.03.2024
PT08.03.2024
[2024/36]
Former [2024/35]AT08.11.2023
CZ08.11.2023
DK08.11.2023
EE08.11.2023
ES08.11.2023
HR08.11.2023
LT08.11.2023
LV08.11.2023
NL08.11.2023
PL08.11.2023
RO08.11.2023
RS08.11.2023
SE08.11.2023
SM08.11.2023
BG08.02.2024
NO08.02.2024
GR09.02.2024
IS08.03.2024
PT08.03.2024
Former [2024/33]AT08.11.2023
DK08.11.2023
ES08.11.2023
HR08.11.2023
LT08.11.2023
LV08.11.2023
NL08.11.2023
PL08.11.2023
RS08.11.2023
SE08.11.2023
SM08.11.2023
BG08.02.2024
NO08.02.2024
GR09.02.2024
IS08.03.2024
PT08.03.2024
Former [2024/27]AT08.11.2023
ES08.11.2023
HR08.11.2023
LT08.11.2023
LV08.11.2023
NL08.11.2023
PL08.11.2023
RS08.11.2023
SE08.11.2023
BG08.02.2024
NO08.02.2024
GR09.02.2024
IS08.03.2024
PT08.03.2024
Former [2024/23]AT08.11.2023
ES08.11.2023
LT08.11.2023
NL08.11.2023
BG08.02.2024
GR09.02.2024
IS08.03.2024
PT08.03.2024
Former [2024/21]LT08.11.2023
NL08.11.2023
BG08.02.2024
GR09.02.2024
IS08.03.2024
Former [2024/20]GR09.02.2024
IS08.03.2024
Documents cited:Search[A]US2003053059  (MISHIMA KAZUHIKO [JP], et al) [A] 1-15 * paragraphs [0108] - [0120]; figures 16a-d *;
 [AD]US2010271609  (TSUJIKAWA TAKURO [JP]) [AD] 1-15 * paragraphs [0040] - [0051]; figures 8, 9 *;
 [A]US2019267329  (TRAN CUNG D [US], et al) [A] 1-15* paragraphs [0004] , [0 28] - [0036]; figures 1-4 *
by applicantJPS5550253B
 JP5180419B
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.