EP4036647 - MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD [Right-click to bookmark this link] | Status | The patent has been granted Status updated on 06.10.2023 Database last updated on 31.08.2024 | |
Former | Grant of patent is intended Status updated on 18.05.2023 | ||
Former | Request for examination was made Status updated on 10.02.2023 | ||
Former | The application has been published Status updated on 01.07.2022 | Most recent event Tooltip | 02.08.2024 | Lapse of the patent in a contracting state New state(s): SK | published on 04.09.2024 [2024/36] | Applicant(s) | For all designated states CANON KABUSHIKI KAISHA 30-2 SHIMOMARUKO 3-CHOME OHTA-KU Tokyo 146-8501 / JP | [2022/31] | Inventor(s) | 01 /
YAMAGUCHI, Wataru Ohta-ku, Tokyo, 146-8501 / JP | [2022/31] | Representative(s) | TBK Bavariaring 4-6 80336 München / DE | [2022/31] | Application number, filing date | 22150145.5 | 04.01.2022 | [2022/31] | Priority number, date | JP20210013597 | 29.01.2021 Original published format: JP 2021013597 | [2022/31] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP4036647 | Date: | 03.08.2022 | Language: | EN | [2022/31] | Type: | B1 Patent specification | No.: | EP4036647 | Date: | 08.11.2023 | Language: | EN | [2023/45] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 04.07.2022 | Classification | IPC: | G03F7/20, G03F9/00 | [2022/31] | CPC: |
G03F7/70616 (EP);
G01B11/03 (KR);
G03F9/7003 (CN);
G03F9/7088 (EP,CN,KR,US);
G01B11/026 (KR);
G01B11/25 (KR);
G03F7/70633 (EP,US);
G03F7/70683 (US);
G03F9/7046 (EP,US);
G03F9/7049 (CN);
G03F9/7076 (US);
G03F9/7092 (EP,US);
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2023/11] |
Former [2022/31] | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR | Title | German: | MESSGERÄT, LITHOGRAPHIEGERÄT UND VERFAHREN ZUR HERSTELLUNG EINES ARTIKELS | [2022/31] | English: | MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD | [2022/31] | French: | APPAREIL DE MESURE, APPAREIL DE LITHOGRAPHIE ET PROCÉDÉ DE FABRICATION D'ARTICLE | [2022/31] | Examination procedure | 15.12.2022 | Amendment by applicant (claims and/or description) | 03.02.2023 | Examination requested [2023/11] | 03.02.2023 | Date on which the examining division has become responsible | 19.05.2023 | Communication of intention to grant the patent | 28.09.2023 | Fee for grant paid | 28.09.2023 | Fee for publishing/printing paid | 28.09.2023 | Receipt of the translation of the claim(s) | Divisional application(s) | EP23196503.9 / EP4283400 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | AT | 08.11.2023 | CZ | 08.11.2023 | DK | 08.11.2023 | EE | 08.11.2023 | ES | 08.11.2023 | HR | 08.11.2023 | LT | 08.11.2023 | LV | 08.11.2023 | NL | 08.11.2023 | PL | 08.11.2023 | RO | 08.11.2023 | RS | 08.11.2023 | SE | 08.11.2023 | SK | 08.11.2023 | SM | 08.11.2023 | BG | 08.02.2024 | NO | 08.02.2024 | GR | 09.02.2024 | IS | 08.03.2024 | PT | 08.03.2024 | [2024/36] |
Former [2024/35] | AT | 08.11.2023 | |
CZ | 08.11.2023 | ||
DK | 08.11.2023 | ||
EE | 08.11.2023 | ||
ES | 08.11.2023 | ||
HR | 08.11.2023 | ||
LT | 08.11.2023 | ||
LV | 08.11.2023 | ||
NL | 08.11.2023 | ||
PL | 08.11.2023 | ||
RO | 08.11.2023 | ||
RS | 08.11.2023 | ||
SE | 08.11.2023 | ||
SM | 08.11.2023 | ||
BG | 08.02.2024 | ||
NO | 08.02.2024 | ||
GR | 09.02.2024 | ||
IS | 08.03.2024 | ||
PT | 08.03.2024 | ||
Former [2024/33] | AT | 08.11.2023 | |
DK | 08.11.2023 | ||
ES | 08.11.2023 | ||
HR | 08.11.2023 | ||
LT | 08.11.2023 | ||
LV | 08.11.2023 | ||
NL | 08.11.2023 | ||
PL | 08.11.2023 | ||
RS | 08.11.2023 | ||
SE | 08.11.2023 | ||
SM | 08.11.2023 | ||
BG | 08.02.2024 | ||
NO | 08.02.2024 | ||
GR | 09.02.2024 | ||
IS | 08.03.2024 | ||
PT | 08.03.2024 | ||
Former [2024/27] | AT | 08.11.2023 | |
ES | 08.11.2023 | ||
HR | 08.11.2023 | ||
LT | 08.11.2023 | ||
LV | 08.11.2023 | ||
NL | 08.11.2023 | ||
PL | 08.11.2023 | ||
RS | 08.11.2023 | ||
SE | 08.11.2023 | ||
BG | 08.02.2024 | ||
NO | 08.02.2024 | ||
GR | 09.02.2024 | ||
IS | 08.03.2024 | ||
PT | 08.03.2024 | ||
Former [2024/23] | AT | 08.11.2023 | |
ES | 08.11.2023 | ||
LT | 08.11.2023 | ||
NL | 08.11.2023 | ||
BG | 08.02.2024 | ||
GR | 09.02.2024 | ||
IS | 08.03.2024 | ||
PT | 08.03.2024 | ||
Former [2024/21] | LT | 08.11.2023 | |
NL | 08.11.2023 | ||
BG | 08.02.2024 | ||
GR | 09.02.2024 | ||
IS | 08.03.2024 | ||
Former [2024/20] | GR | 09.02.2024 | |
IS | 08.03.2024 | Documents cited: | Search | [A]US2003053059 (MISHIMA KAZUHIKO [JP], et al) [A] 1-15 * paragraphs [0108] - [0120]; figures 16a-d *; | [AD]US2010271609 (TSUJIKAWA TAKURO [JP]) [AD] 1-15 * paragraphs [0040] - [0051]; figures 8, 9 *; | [A]US2019267329 (TRAN CUNG D [US], et al) [A] 1-15* paragraphs [0004] , [0 28] - [0036]; figures 1-4 * | by applicant | JPS5550253B | JP5180419B |