EP4303337 - SEMICONDUCTOR PROCESSING APPARATUS FOR PROCESSING A PLURALITY OF SUBSTRATES WITH CROSS FLOW [Right-click to bookmark this link] | Status | Request for examination was made Status updated on 27.06.2024 Database last updated on 19.10.2024 | |
Former | The application has been published Status updated on 08.12.2023 | Most recent event Tooltip | 27.06.2024 | The date on which the examining division becomes responsible, has been established | 27.06.2024 | Request for examination filed | published on 31.07.2024 [2024/31] | 27.06.2024 | Change - designated states | published on 31.07.2024 [2024/31] | Applicant(s) | For all designated states ASM IP Holding B.V. Versterkerstraat 8 1322 AP Almere / NL | [2024/02] | Inventor(s) | 01 /
RAAIJMAKERS, Ivo 1322 AP Almere / NL | 02 /
OOSTERLAKEN, Theodorus G.M. 1322 AP Almere / NL | [2024/02] | Representative(s) | V.O. P.O. Box 87930 2508 DH Den Haag / NL | [2024/02] | Application number, filing date | 23182842.7 | 30.06.2023 | [2024/02] | Priority number, date | US202263358207P | 04.07.2022 Original published format: US 202263358207 P | [2024/02] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP4303337 | Date: | 10.01.2024 | Language: | EN | [2024/02] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 01.12.2023 | Classification | IPC: | C23C16/44, C23C16/455, H01J37/32 | [2024/02] | CPC: |
C23C16/4412 (EP,KR,US);
C23C16/45546 (KR);
C23C16/44 (CN);
C23C16/45553 (US);
C23C16/4407 (KR);
C23C16/455 (EP);
C23C16/45514 (EP);
C23C16/45525 (CN);
C23C16/45536 (KR);
C23C16/45544 (EP,US);
C23C16/45559 (KR);
C23C16/45561 (KR);
C23C16/45563 (EP);
C23C16/45591 (EP,KR,US);
C23C16/458 (KR);
C23C16/4581 (CN);
C23C16/50 (KR);
H01J37/32449 (EP,CN);
H01J37/32715 (EP);
H01J37/32779 (EP);
H01J37/32834 (EP,CN);
H01L21/02274 (KR);
H01L21/0228 (KR);
H01L21/67017 (CN,US);
H01L21/67303 (KR)
(-)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, ME, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2024/31] |
Former [2024/02] | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, ME, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR | Extension states | BA | Not yet paid | Validation states | KH | Not yet paid | MA | Not yet paid | MD | Not yet paid | TN | Not yet paid | Title | German: | HALBLEITERVERARBEITUNGSVORRICHTUNG ZUR VERARBEITUNG MEHRERER SUBSTRATE MIT QUERFLUSS | [2024/02] | English: | SEMICONDUCTOR PROCESSING APPARATUS FOR PROCESSING A PLURALITY OF SUBSTRATES WITH CROSS FLOW | [2024/02] | French: | APPAREIL DE TRAITEMENT DE SEMI-CONDUCTEURS POUR TRAITER UNE PLURALITÉ DE SUBSTRATS AVEC ÉCOULEMENT TRANSVERSAL | [2024/02] | Examination procedure | 24.06.2024 | Amendment by applicant (claims and/or description) | 24.06.2024 | Examination requested [2024/31] | 24.06.2024 | Date on which the examining division has become responsible |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XI]US6402849 (KWAG GYU-HWAN [KR], et al); | [XI]US2018355481 (KANG SUNG HO [KR], et al) |