Extract from the Register of European Patents

EP About this file: EP4503098

EP4503098 - HEAT TRANSFER MEMBER, METHOD FOR MANUFACTURING HEAT TRANSFER MEMBER, AND PLASMA TREATMENT DEVICE [Right-click to bookmark this link]
StatusRequest for examination was made
Status updated on  03.01.2025
Database last updated on 14.03.2026
FormerThe international publication has been made
Status updated on  07.10.2023
Most recent event   Tooltip10.02.2026New entry: Renewal fee paid 
Applicant(s)For all designated states
Mitsubishi Materials Corporation
2-3, Marunouchi 3-chome
Chiyoda-ku
Tokyo 100-8117 / JP
[2025/06]
Inventor(s)01 / SHOJI, Miho
Amagasaki-shi, Hyogo 660-0856 / JP
02 / ZUSHI, Toshihiro
Amagasaki-shi, Hyogo 660-0856 / JP
03 / HIRANO, Kosei
Amagasaki-shi, Hyogo 660-0856 / JP
04 / YAMAMOTO, Tetsuya
Amagasaki-shi, Hyogo 660-0856 / JP
 [2025/06]
Representative(s)Hoffmann Eitle
Patent- und Rechtsanwälte PartmbB
Arabellastraße 30
81925 München / DE
[2025/06]
Application number, filing date23779094.424.02.2023
[2025/06]
WO2023JP06657
Priority number, dateJP2022005729730.03.2022         Original published format: JP 2022057297
[2025/06]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2023189064
Date:05.10.2023
Language:JA
[2023/40]
Type: A1 Application with search report 
No.:EP4503098
Date:05.02.2025
Language:EN
[2025/06]
Search report(s)International search report - published on:JP05.10.2023
ClassificationIPC:H01L21/3065, H05H1/46
[2025/06]
CPC:
H01J37/32 (EP); H01J37/3255 (US); H01J37/32642 (EP,US);
H01J37/32724 (EP,US); H10P72/7616 (EP); H01J2237/334 (US)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   ME,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2025/06]
TitleGerman:WÄRMEÜBERTRAGUNGSELEMENT, VERFAHREN ZUR HERSTELLUNG EINES WÄRMEÜBERTRAGUNGSELEMENTS UND PLASMABEHANDLUNGSVORRICHTUNG[2025/06]
English:HEAT TRANSFER MEMBER, METHOD FOR MANUFACTURING HEAT TRANSFER MEMBER, AND PLASMA TREATMENT DEVICE[2025/06]
French:ÉLÉMENT DE TRANSFERT DE CHALEUR, PROCÉDÉ DE FABRICATION D'ÉLÉMENT DE TRANSFERT DE CHALEUR ET DISPOSITIF DE TRAITEMENT AU PLASMA[2025/06]
Entry into regional phase19.09.2024Translation filed 
19.09.2024National basic fee paid 
19.09.2024Search fee paid 
19.09.2024Designation fee(s) paid 
19.09.2024Examination fee paid 
Examination procedure19.09.2024Examination requested  [2025/06]
Fees paidRenewal fee
20.02.2025Renewal fee patent year 03
09.02.2026Renewal fee patent year 04
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Documents cited:Search[XIY] JP2019102654  (MITSUBISHI CABLE IND LTD et al.) [X] 1-7 * paragraph [0005] - paragraph [0037] *[I] 8 [Y] 9-12
 [Y] JP2021141314  (MITSUBISHI MATERIALS CORP et al.) [Y] 9-12 * paragraph [0052] - paragraph [0064]; figure 6 *
International search[A] JP2015084383  (TOKYO ELECTRON LTD et al.) [A] 1-12
 [A] JP2022047104  (MITSUBISHI MATERIALS CORP et al.) [A] 1-12
 [A] JP2020027914  (NGK SPARK PLUG CO et al.) [A] 1-12
 [A] JP2021141314  (MITSUBISHI MATERIALS CORP et al.) [A] 1-12
by applicantJP2022057297
 JP5619486
 JP2021141314
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