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EP0008348
European procedure
Extract from the Register of European Patents
EP About this file: EP0008348
| EP0008348 - A method of etching a surface [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 14.09.2016 Database last updated on 01.01.2025 | Most recent event Tooltip | 14.09.2016 | No opposition filed within time limit | Applicant(s) | For all designated states International Business Machines Corporation New Orchard Road Armonk, NY 10504 / US | [N/P] |
| Former [1980/05] | For all designated states International Business Machines Corporation Old Orchard Road Armonk, N.Y. 10504 / US | Inventor(s) | 01 /
Winters, Harold F. 632 Lanfair Drive San Jose, California 95136 / US | 02 /
Chapman, Brian N. Wood Street Dixon Lake, New York 10541 / US | [1980/05] | Representative(s) | Chaudhry, Mohammad Saeed IBM United Kingdom Patent Operations Hursley Park Winchester Hants, S021 2JN / GB | [N/P] |
| Former [1980/05] | Chaudhry, Mohammad Saeed IBM United Kingdom Patent Operations Hursley Park Winchester Hants, S021 2JN / GB | Application number, filing date | 79102336.9 | 09.07.1979 | [1980/05] | Priority number, date | US19780934734 | 21.08.1978 Original published format: US 934734 | [1980/05] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP0008348 | Date: | 05.03.1980 | Language: | EN | [1980/05] | Type: | B1 Patent specification | No.: | EP0008348 | Date: | 09.02.1983 | Language: | EN | [1983/06] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 17.12.1979 | Classification | IPC: | H01L21/306, H01L21/31, C09K13/00, C23F1/00 | [1980/05] | CPC: |
C09K13/00 (EP,US);
C01B23/0005 (EP,US);
H01L21/0475 (EP,US);
H01L21/31116 (EP,US)
| Designated contracting states | DE, FR, GB, IT [1980/05] | Title | German: | Verfahren zum Ätzen einer Oberfläche | [1980/05] | English: | A method of etching a surface | [1980/05] | French: | Procédé d'attaque d'une surface | [1980/05] | File destroyed: | 15.01.2000 | Examination procedure | 27.03.1980 | Examination requested [1980/13] | 08.12.1980 | Despatch of a communication from the examining division (Time limit: M04) | 21.03.1981 | Reply to a communication from the examining division | 05.04.1982 | Despatch of communication of intention to grant (Approval: ) | 13.07.1982 | Communication of intention to grant the patent | 30.07.1982 | Fee for grant paid | 30.07.1982 | Fee for publishing/printing paid | Opposition(s) | 09.11.1983 | No opposition filed within time limit [ N /P ] | Fees paid | Renewal fee | 21.07.1981 | Renewal fee patent year 03 | 23.07.1982 | Renewal fee patent year 04 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | IT | 09.02.1983 | [1999/42] | Documents cited: | Search | [A]JP49041295 ; | [A]JP52090436 ; | [A]FR2240526 (MITSUBISHI ELECTRIC CORP [JP]); | [A]US3122463 (LIGENZA JOSEPH R, et al) | [A] - CHEMICAL ABSTRACTS, Vol. 81, No. 16, 21 October 1974, page 122 Abstract 93556w Columbus, Ohio, USA & JP-A-49 041 295 (NIPPON KASEI CO. LTD) (18-04-1974), & JP49041295 A 19741021 | [A] - CHEMICAL ABSTRACTS, Vol. 88, No. 2, 01-09-1978, page 528, Abstract 15019d, Columbus, Ohio, USA & JP-A-52 090 436 (MITSUBISHI ELECTRIC CORP.) (29-07-1977)., & JP52090436 A 00000000 | [ ] - NACHRICHTEN AUS CHEMIE UND TECHNIK Vol. 86, No. 10, 1974 Weinheim (DE) K. SEPPELT: "Edelgasverbindungen: die Chemie an einer Greuze", pages 195-196. | [ ] - IBM TECHNICAL DISCLOSURE BULLETIN, Vol. 8, No. 2, July 1965, New York USA E. EBERT: "Method of etching silicon carbide", page 258. | [ ] - INORGANIC CHEMISTRY, Vol. 6, No. 7 July 1967 Easton USA K.E. PULLEN et al.: "The systems xenon hexafluoride-germanium: tetrafluoride and xenon hexafluoride-silicon tetrafluoride" pages 1300-1352. * Page 1300, column 1, paragraph 1 - column 2, paragraph 3 * |